Abstract: An apparatus and method for qualifying a filter used to filter fluid used in a coating operation associated with photolithography or other semiconductor manufacturing processes, provides a semiconductor manufacturing tool that includes a filter and an acoustic wave generator. The filter may be housed inside a filter housing and the acoustic wave generator may produce ultrasonic, megasonic or other acoustic energy. The acoustic wave generator contacts or is in close proximity with the filter housing and provides acoustic wave energy to the filter through the housing. The acoustic wave energy causes any bubbles in the filter to become disengaged.

Abstract: An apparatus and method for qualifying a filter used to filter fluid used in a coating operation associated with photolithography or other semiconductor manufacturing processes, provides a semiconductor manufacturing tool that includes a filter and an acoustic wave generator. The filter may be housed inside a filter housing and the acoustic wave generator may produce ultrasonic, megasonic or other acoustic energy. The acoustic wave generator contacts or is in close proximity with the filter housing and provides acoustic wave energy to the filter through the housing. The acoustic wave energy causes any bubbles in the filter to become disengaged.

Abstract: A system and method for mediating anomaly notifications in health data to health alerts using data structures and logic to organize, contain, and disposition identified health anomalies. Multiple generators of anomaly notifications operating asynchronously and independently can be processed. The case manager organizes anomaly notifications and supports collaborative decision making among users with diverse areas of expertise.

Abstract: A system and method for mediating anomaly notifications in health data to health alerts using data structures and logic to organize, contain, and disposition identified health anomalies. Multiple generators of anomaly notifications operating asynchronously and independently can be processed. The case manager organizes anomaly notifications and supports collaborative decision making among users with diverse areas of expertise.

Abstract: An apparatus and method for qualifying a filter used to filter fluid used in a coating operation associated with photolithography or other semiconductor manufacturing processes, provides a semiconductor manufacturing tool that includes a filter and an acoustic wave generator. The filter may be housed inside a filter housing and the acoustic wave generator may produce ultrasonic, megasonic or other acoustic energy. The acoustic wave generator contacts or is in close proximity with the filter housing and provides acoustic wave energy to the filter through the housing. The acoustic wave energy causes any bubbles in the filter to become disengaged.

Abstract: Disclosed herein is a multi-domain anomaly pattern definition and detection module. The module receives raw data from different kinds of anomalies from a variety of detection algorithms and generates scores associated with the data. If any scores exceed a threshold, the algorithm gathers further information such as counts or listings of detailed data for a geographic region. The detailed data can include emergency department and lab department data related to a particular health concern such as a respiratory syndrome. Summaries can identify anomalies and numbers of events according to geographic region and utilizing probability algorithms. Other databases such as animal data collected under the Department of Agriculture may also be utilized. The data is presented in a familiar form such as a map or a table such that a subject matter expert may determine whether to further investigate an anomaly as a potential risk, for example, a health risk.

Abstract: A rotary turbine cleaning device for cleaning semiconductor fabrication equipment works in conjunction with a clean room vacuum or other vacuum or other air pump. The fluid flow created by the vacuum action causes the rotors of the turbine assembly to rotate, thereby rotating the cleaning head. Attached to the cleaning head are bristles or other cleaning media which may dislodge particles from surfaces. The dislodged particles are drawn into the tube through an opening at the end of the tube and the vacuum action.

Abstract: Disclosed herein is a multi-domain anomaly pattern definition and detection module. The module receives raw data from different kinds of anomalies from a variety of detection algorithms and generates scores associated with the data. If one or more scores exceed a threshold, then the algorithm gathers further information which may include counts or listings of detailed data for a geographic region which may include such information as emergency department and lab department data related to a particular health concern such as a respiratory syndrome. Summaries are provided which may identify anomalies and numbers of events according to geographic region and utilizing probability algorithms. Other databases such as animal data collected under the Department of Agriculture may also be utilized. The data is presented in a familiar form such as a map or a table such that a subject matter expert may determine whether to further investigate an anomaly as a potential risk, for example, a health risk.

Abstract: A system for cleaning semiconductor lithography tools provides for cycling a polished-side down semiconductor wafer through the lithography tool using conventional automated robotics for loading and unloading the wafer from a vacuum chuck of the lithography tool. The vacuum chuck may provide a continuous clamping vacuum feature and may include a vacuum ring that surround the periphery of the vacuum chuck. The chuck and vacuum ring may advantageously be formed of a high accuracy ceramic or plastic such as ZeroDur ceramic. The polished side of the semiconductor wafer includes grooves in a polished surface and which extend inwardly from a peripheral edge of the wafer, the grooves provide gaps between the wafer and chuck allowing the wafer to be released by a slow loss of vacuum-pressure through the gaps. The pristine clean polished surface of the wafer getters contaminating particles from the chuck.

Abstract: A system for cleaning semiconductor lithography tools provides for cycling a polished-side down semiconductor wafer through the lithography tool using conventional automated robotics for loading and unloading the wafer from a vacuum chuck of the lithography tool. The vacuum chuck may provide a continuous clamping vacuum feature and may include a vacuum ring that surround the periphery of the vacuum chuck. The chuck and vacuum ring may advantageously be formed of a high accuracy ceramic or plastic such as ZeroDur ceramic. The polished side of the semiconductor wafer includes grooves in a polished surface and which extend inwardly from a peripheral edge of the wafer, the grooves provide gaps between the wafer and chuck allowing the wafer to be released by a slow loss of vacuum-pressure through the gaps. The pristine clean polished surface of the wafer getters contaminating particles from the chuck.

Abstract: A method more efficiently indexes dynamic documents. The method adjusts the frequency with which dynamic documents are retrieved taking into account the extent to which the document varies between its most recent retrievals. Furthermore, the method selects portions of the document to be indexed based on the substance of the differences between recently retrieved copies.

Abstract: A method more efficiently indexes dynamic documents. The method adjusts the frequency with which dynamic documents are retrieved taking into account the extent to which the document varies between its most recent retrievals. Furthermore, the method selects portions of the document to be indexed based on the substance of the differences between recently retrieved copies.

Abstract: A method more efficiently indexes dynamic documents. The method adjusts the frequency with which dynamic documents are retrieved taking into account the extent to which the document varies between its most recent retrievals. Furthermore, the method selects portions of the document to be indexed based on the substance of the differences between recently retrieved copies.

Abstract: A method of presenting clusters of documents in response to a search query where the documents within a cluster are determined to be related to one another. This relationship is assessed by comparing documents which match one or more terms in the query to determine the extent to which the documents have commonality with respect to terms appearing infrequently in the collection of documents. As a consequence, the cluster of documents represents a response or query result that is split across multiple documents. In a further variation the cluster can be constituted by a structured document and an unstructured document.

Abstract: A method provides a more informative result to a user in connection with the search for documents in a database. In particular, the method provides augmented addresses, in the Internet environment augmented universal resource locators, which include an indication of a document attribute which may be of interest to the user. Such attributes may include an indication of the language of the document (e.g., English or Japanese) or the popularity of the document.

Abstract: A method of presenting clusters of documents in response to a search query where the documents within a cluster are determined to be related to one another. This relationship is assessed by comparing documents which match one or more terms in the query to determine the extent to which the documents have commonality with respect to terms appearing infrequently in the collection of documents. As a consequence, the cluster of documents represents a response or query result that is split across multiple documents. In a further variation the cluster can be constituted by a structured document and an unstructured document.

Abstract: A method improves a search in a hierarchical structure by focusing the search to selected regions within the structure. The method defines one or more region-sets and uses the region-set(s) as either a filter for the results of a key-word search or an integrated part of a search engine to increase the efficiency of the search engine. The method also provides for dynamic creation of new region-sets from existing region-sets using a prescribed set of operators.

Abstract: A method enhances the presentation of search results from a structured database. In accordance with the method, a search query including two or more attribute/value pairs is presented to a system. The system then identifies a plurality of records which each minimally match the search query. Each document or record in the plurality of identified records is assigned a weight based on at least two factors: the extent to which the record matches the entire search query; and the relative frequency with which the attribute/value pair that matches the given record matches the records of the remainder of the structured database. The plurality of records that minimally match the search query are then identified to the requester in ranked order based on the assigned weights.

Abstract: A method provides a more informative result to a user in connection with the search for documents in a database. In particular, the method provides augmented addresses, in the Internet environment augmented universal resource locators, which include an indication of a document attribute which may be of interest to the user. Such attributes may include an indication of the language of the document (e.g., English or Japanese) or the popularity of the document.

Abstract: A method improves a search in a hierarchical structure by focusing the search to selected regions within the structure. The method defines one or more region-sets and uses the region-set(s) as either a filter for the results of a key-word search or an integrated part of a search engine to increase the efficiency of the search engine. The method also provides for dynamic creation of new region-sets from existing region-sets using a prescribed set of operators.