Patents by Inventor Han Chung Chang

Han Chung Chang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11153958
    Abstract: An extreme ultraviolet (EUV) lithography method includes causing a first metallic droplet to move along a shroud and through an aperture of the shroud at a first velocity, and adjusting an open area of the aperture of the shroud. After adjusting the open area of the aperture of the shroud, a second metallic droplet is caused to move along the shroud and through the aperture of the shroud at a second velocity, in which the second velocity is different from the first velocity.
    Type: Grant
    Filed: September 14, 2020
    Date of Patent: October 19, 2021
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Ming-Hsun Tsai, Han-Lung Chang, Yen-Hsun Chen, Shao-Hua Wang, Li-Jui Chen, Po-Chung Cheng
  • Patent number: 11134558
    Abstract: A droplet generator assembly includes a storage tank, a refill system, a droplet generator, and a temperature control system. The storage tank is configured to store a target material. The refill system is connected to the storage tank. The droplet generator includes a reservoir and a nozzle connected to the reservoir, in which the droplet generator is connected to the refill system, and the refill system is configured to deliver the target material to the reservoir. The temperature control system is adjacent to the refill system or the reservoir.
    Type: Grant
    Filed: July 11, 2019
    Date of Patent: September 28, 2021
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Shih-Yu Tu, Yu-Kuang Sun, Shao-Hua Wang, Han-Lung Chang, Hsiao-Lun Chang, Li-Jui Chen, Po-Chung Cheng, Cheng-Hao Lai, Hsin-Feng Chen, Wei-Shin Cheng, Ming-Hsun Tsai, Yen-Hsun Chen
  • Publication number: 20210298161
    Abstract: A method includes ejecting a metal droplet from a reservoir of a first droplet generator assembled to a vessel; emitting an excitation laser from a laser source to the metal droplet to generate extreme ultraviolet (EUV) radiation; turning off the first droplet generator; cooling down the first droplet generator to a temperature not lower than about 150° C.; dismantling the first droplet generator from the vessel at the temperature not lower than about 150° C.; and assembling a second droplet generator to the vessel.
    Type: Application
    Filed: June 3, 2021
    Publication date: September 23, 2021
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Shih-Yu TU, Han-Lung CHANG, Hsiao-Lun CHANG, Li-Jui CHEN, Po-Chung CHENG
  • Publication number: 20210286273
    Abstract: A droplet catcher system of an EUV lithography apparatus is provided. The droplet catcher system includes a catcher body, a heat transfer part, a heat exchanger, and a controller. The catcher body has an outer surface. The heat transfer part is directly attached to the outer surface of the catcher body. The heat exchanger is thermally coupled to the heat transfer part. The controller is electrically coupled to the heat exchanger.
    Type: Application
    Filed: June 1, 2021
    Publication date: September 16, 2021
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Shih-Yu Tu, Po-Chung Cheng, Hsiao-Lun Chang, Li-Jui Chen, Han-Lung Chang
  • Publication number: 20210274627
    Abstract: A target droplet source for an extreme ultraviolet (EUV) source includes a droplet generator configured to generate target droplets of a given material. The droplet generator includes a nozzle configured to supply the target droplets in a space enclosed by a chamber. The target droplet source further includes a sleeve disposed in the chamber distal to the nozzle. The sleeve is configured to provide a path for the target droplets in the chamber.
    Type: Application
    Filed: May 17, 2021
    Publication date: September 2, 2021
    Inventors: Wei-Chih LAI, Han-Lung CHANG, Chi YANG, Shang-Chieh CHIEN, Bo-Tsun LIU, Li-Jui CHEN, Po-Chung CHENG
  • Patent number: 9813764
    Abstract: A set-top box device capable of providing electrical power to an antenna includes an insulation housing, a printed circuit board, a metal portion, and a conductive locking member. The insulation housing has at least one lateral arranged thereon a through hole portion. The printed circuit board is arranged in the insulation housing and includes a power supply module. The metal portion is arranged on the printed circuit board and includes a locking hole corresponding the through hole portion. The conductive locking member passes through the locking hole, the through hole portion, a conductive end portion of the power supply line, and the metal portion. The power supply module feeds a current into the antenna through a connection of the metal portion, the conductive locking member, and the conductive end portion, and the current flows to a ground portion of the signal line thereby forming a power supply loop.
    Type: Grant
    Filed: April 9, 2015
    Date of Patent: November 7, 2017
    Assignee: TATUNG TECHNOLOGY INC.
    Inventors: Ming-Yih Lu, Jui-Shuan Wu, Wen-Pu Chou, Han-Chung Chang
  • Publication number: 20160073160
    Abstract: A set-top box device capable of providing electrical power to an antenna includes an insulation housing, a printed circuit board, a metal portion, and a conductive locking member. The insulation housing has at least one lateral arranged thereon a through hole portion. The printed circuit board is arranged in the insulation housing and includes a power supply module. The metal portion is arranged on the printed circuit board and includes a locking hole corresponding the through hole portion. The conductive locking member passes through the locking hole, the through hole portion, a conductive end portion of the power supply line, and the metal portion. The power supply module feeds a current into the antenna through a connection of the metal portion, the conductive locking member, and the conductive end portion, and the current flows to a ground portion of the signal line thereby forming a power supply loop.
    Type: Application
    Filed: April 9, 2015
    Publication date: March 10, 2016
    Inventors: Ming-Yih LU, Jui-Shuan WU, Wen-Pu CHOU, Han-Chung CHANG
  • Publication number: 20140041909
    Abstract: A method for reducing roughens of the metals on a ceramic substrate having metal filled via holes, comprising forming via holes, a seed layer, and through film coating, exposure and development process followed by multiple steps of DC electroplating to achieve copper circuit with desired surface roughness.
    Type: Application
    Filed: July 17, 2013
    Publication date: February 13, 2014
    Inventors: Hsiang-Wei TSENG, Kuan-Chou Chen, Han-Chung Chang, Cheng-Feng Chou, Chan-Li Lin, Yuan-Chen Hsu
  • Publication number: 20130067529
    Abstract: A digital TV set-top box includes a casing, a fixing frame, an adapter board, a hard disk drive, and a sliding frame. The casing is provided with an opening, and the fixing frame is arranged with the hard disk drive. Since the sliding frame is smaller than the opening of the casing, the sliding frame can pass through the opening and be slidably arranged between two chutes of the fixing frame, and a connecting head of the hard disk drive can be correspondingly plugged into the adapter board so as to establish an electrical connection. As such, the present invention provides a TV set-top box that the hard disk drive can be assembled therewith or disassembled therefrom easily, so that the hard disk drive of the digital TV set-top box can be maintained or upgraded without the need of removing the whole upper casing of the set-top box.
    Type: Application
    Filed: December 13, 2011
    Publication date: March 14, 2013
    Applicant: Tatung Technology Inc.
    Inventors: Han Chung CHANG, Chun Cheng CHEN
  • Publication number: 20070171386
    Abstract: A projector comprises a light-emitting device for generating light beams, a reflector for focusing the light beams to a predetermined region, a light integrator positioned at the predetermined region and a brightness-adjusting module for adjusting the brightness of the projector by changing the relative distance of the reflector and the light integrator. Preferably, the reflector is an elliptical reflector having two foci, the light-emitting device is positioned at one of the two foci and the other focus is laid in the predetermined region. The present method for adjusting the brightness of a projector is characterized in adjusting the distance between the light integrator and the reflector to adjust the brightness of the projector.
    Type: Application
    Filed: March 24, 2006
    Publication date: July 26, 2007
    Applicant: LUMENS DIGITAL OPTICS INC.
    Inventors: Wen Chin Cheng, Han Chung Chang
  • Publication number: 20030076683
    Abstract: A heat-dissipating structure for switching an air direction is provided. The heat-dissipating structure for switching an air direction is used for dissipating the heat generated from a bulb according to one of an upright state and an inverse state of an apparatus provided with the heat-dissipating structure and having a body placing thereon the bulb, including: a wind-supply device and an air direction switching device. The wind-supply device is mounted in the body for supplying a wind flow to a first side of the bulb for dissipating heat along a first wind direction while the apparatus is at the upright state. The air direction switching device is mounted in the body and includes a guiding region for guiding the wind flow to a second opposite side of the bulb along a second wind direction while the apparatus is at the inverse state.
    Type: Application
    Filed: October 18, 2001
    Publication date: April 24, 2003
    Inventor: Han-Chung Chang
  • Patent number: D598020
    Type: Grant
    Filed: May 1, 2009
    Date of Patent: August 11, 2009
    Assignee: Tatung Technology Inc.
    Inventors: Ming-Yih Lu, Han Chung Chang, Li Shu Chen, Chih Hsin Chen
  • Patent number: D723521
    Type: Grant
    Filed: September 30, 2014
    Date of Patent: March 3, 2015
    Assignee: Tatung Technology Inc.
    Inventors: Chun-Cheng Chen, Han-Chung Chang