Abstract: A tuneable high-frequency capacitor includes first and second fixed electrodes (102a, 102b), the first fixed electrode (102a) comprising a high-frequency input connection (114), and the second fixed electrode (102b) comprising a high-frequency output connection (118). A movable electrode (104) is arranged facing and spaced apart from the fixed electrodes (102a, 102b) and is supported by means of a suspension (106, 108) which causes a displacement of the movable electrode (104) in relation to the fixed electrodes (102a, 102b) depending on a control signal that is applied.

Abstract: The invention relates to a micro reactor arrangement, particularly for a micro relay. It comprises a substrate (1) with two thermomechanical micro actuators (3, 4). In response to thermal stimulation, the first micro actuator (3) performs a movement in parallel with the substrate surface (2), while the second micro actuator moves in a direction orthogonal on the substrate surface (2). Both thermomechanical micro actuators are so disposed relative to each other that the first micro actuator (3), in the extended state, reaches under the second micro actuator (4).

Abstract: A bistable electrostatic actuator with pneumatic or liquid coupling. The actuator has enclosed metallic electrodes. It can be used for a microvalve or micropump. The actuator has buckled membrane sections in pairs and curved substrate electrodes, locally associated with said membrane sections.

Abstract: The invention relates to a method of anodic bonding and a method for producing glass coatings for purposes of anodic bonding and colloidal solutions suitable for this purpose. The method is particularly suitable for anodic bonding with glass coatings with a thickness of greater than 100 nm up to 10 .mu.m, which are used for connecting two semiconductor layers. In order to produce the required glass coating, an SiO.sub.2 -sol is dissolved in at least one or in a mixture of n-alkanols (n=1 to 5). Then tetraethyl orthosilicate (TEOS), methyl triethoxysilane (MTEOS) and water are added to this organosol. Furthermore, a small quantity of acid is added to the desired quantity of alkali salts, and the colloidal solution is at least partly polymerized. The colloidal solution thus obtained is suitable for coating conductive materials by cost-effective methods such as immersion, spin-on deposition or spraying and subsequent tempering. After one coating there results a glass coating with a thickness of up to 2 .mu.m.

Abstract: The present invention relates to a microvalve usable primarily as a pilot lve in pneumatic controls. The prior art solenoid valves used in this field can be miniaturized only at considerably high cost. The microvalve of the invention consists of a first part (1), on the pressure side, with a diaphragm structure (3) as the movable closing component and a second part (2) with an outlet aperture (7) and a seat (5). The diaphragm structure has heating elements and is coated on one side with a material with differing coefficients of heat expansion, in such a way that heating causes the diaphragm to bend against the pressure applied on it. At least one of the two parts has a recess (6) of defined depth arranged in such a way that with the valve closed hollows are formed which are heated by the heating elements. The microvalve described can economically produced with semiconductor technology means and has improved switching properties on account of its combined thermo-mechanical/thermo-pneumatic method of operation.