Patents by Inventor Hari Venkatesh RAJENDRAN

Hari Venkatesh RAJENDRAN has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20250027195
    Abstract: A method includes performing an atomic layer deposition (ALD) process with respect to a plurality of target elements to coat interiors of the plurality of target elements with a protective coating. Performing the ALD process includes alternating delivery of a first precursor inside the plurality of target elements for a first duration to form an adsorption layer on the interiors of the plurality of target elements, alternating purging of the first precursor from the plurality of target elements for a second duration, and alternating delivery of a second precursor inside the plurality of target elements for a third duration to cause the second precursor to react with the adsorption layer and form a target layer on the interiors of the plurality of target elements.
    Type: Application
    Filed: July 18, 2023
    Publication date: January 23, 2025
    Inventors: Yogesh Tomar, Nikshep Patil, Kirubanandan Shanmugam Naina, Hanish Kumar Panavalappil Kumarankutty, Gayatri Natu, Mahesh Chelvaraj Arcot, Senthil Kumar Nattamai Subramanian, Hari Venkatesh Rajendran, Michael Rice, Christopher Laurent Beaudry
  • Publication number: 20240117491
    Abstract: Embodiments of an apparatus for coating a plurality of gas lines are provided herein. In some embodiments, an apparatus for coating a plurality of gas lines via an ALD process includes: an oven having an enclosure that defines an interior volume configured to house the plurality of gas lines, the enclosure having a door configured for transferring the plurality of gas lines into and out of the interior volume; a plurality of inlet ports disposed through a first wall of the enclosure; a plurality of exhaust ports disposed through a second wall of the enclosure; a fluid panel disposed outside of the oven and coupled to the plurality of inlet ports via corresponding ones of a plurality of fluid distribution assemblies; and a foreline disposed outside of the oven and coupled to the plurality of exhaust ports.
    Type: Application
    Filed: October 7, 2022
    Publication date: April 11, 2024
    Inventors: Hanish Kumar PANAVALAPPIL KUMARANKUTTY, Yogesh TOMAR, Nikshep M. PATIL, Hari Venkatesh RAJENDRAN, Kirubanandan Naina SHANMUGAM, Gayatri NATU, Mahesh ARCOT, Senthil Kumar NATTAMAI SUBRAMANIAN, Steven D. MARCUS, Michael R. RICE