Abstract: A housing includes: a box-shaped main body portion accommodating an electronic circuit substrate and including an opening portion; a lid portion covering the opening portion so as to be able to open or close the opening portion; a jumper detachably attached to the electronic circuit substrate; a window portion different from the opening portion, the window portion being opposed to the jumper and being open at the main body portion; and a cover portion covering the window portion so as to be able to open or close the window portion.

Abstract: A control device configured to control operation of an electric motor of which a rotational shaft is rotatable by an external force which servo-controls the electric motor by an inverter circuit when a voltage value between power-supply input terminals of the inverter circuit is detected to be at or above a given voltage value required for the servo-control of the electric motor, and applies dynamic braking to the electric motor by forming a short circuit in the inverter circuit when the voltage value between the power-supply input terminals of the inverter circuit is detected to be below the given voltage value.

Abstract: A control device of robot includes: image data acquirer configured to acquire image data taken by camera, image data including a teaching substrate and a substrate placing portion of a hand, the teaching substrate arranged as a teaching target at substrate target position; a virtual substrate information generator configured to generate information of a virtual substrate virtually arranged at the substrate placing portion of the hand in image data of the camera; distance information calculator configured to calculate distance information from substrate placing portion to the teaching substrate based on image data of the camera; operation control unit configured to control operation of robot arm based on distance information from the substrate placing portion to the teaching substrate such that the virtual substrate coincides with the teaching substrate; and storage unit configured to store, as teaching data, position of the hand when the virtual substrate coincides with the teaching substrate.

Abstract: A robot system includes: a robot; a portable operation terminal having a teaching function; and a robot controller having operation modes including a teaching mode and another operation mode different from the teaching mode, the teaching mode being an operation mode for teaching a motion to the robot through the portable operation terminal. The robot controller is configured to: detect electrical connection and electrical disconnection between the robot controller and the portable operation terminal; change an operation mode in which to operate the robot to the teaching mode when detecting the connection between the robot controller and the portable operation terminal; and change the operation mode in which to operate the robot to the other operation mode different from the teaching mode when detecting the disconnection between the robot controller and the portable operation terminal.

Abstract: A control device of a robot includes: an image data acquirer acquiring image data taken by a camera, the image data including a hand teaching substrate and substrate placing portion, the teaching substrate arranged as a teaching target at a substrate target position; a virtual substrate information generator generating information of a virtual substrate virtually arranged at the hand substrate placing portion in the image data; an operating unit receiving an input and generate operation information corresponding to the input; a screen display unit displaying an image of the teaching substrate and an image of the virtual substrate on a screen; a robot operation control unit controlling an operation of the robot arm in accordance with the operation information; and a teaching data record unit storing, as teaching data, a position of the hand when the virtual substrate has coincided with the teaching substrate.

Abstract: There is provided a method of producing a casing configured such that adjacent surfaces of the casing are maintained to be perpendicular to each other.

Abstract: A short-circuiting device according includes a short circuit that is electrically connected to a robot, the robot including a robotic arm and at least one motor, the robotic arm including at least one joint shaft that is provided with the respective at least one motor, the short circuit being provided separately from a robot controller configured to control the robot, the short circuit being configured to apply a dynamic brake to each motor.

Abstract: A housing includes: a box-shaped main body portion accommodating an electronic circuit substrate and including an opening portion; a lid portion covering the opening portion so as to be able to open or close the opening portion; a jumper detachably attached to the electronic circuit substrate; a window portion different from the opening portion, the window portion being opposed to the jumper and being open at the main body portion; and a cover portion covering the window portion so as to be able to open or close the window portion.

Abstract: A control device of a robot includes: an image data acquirer acquiring image data taken by a camera, the image data including a hand teaching substrate and substrate placing portion, the teaching substrate arranged as a teaching target at a substrate target position; a virtual substrate information generator generating information of a virtual substrate virtually arranged at the hand substrate placing portion in the image data; an operating unit receiving an input and generate operation information corresponding to the input; a screen display unit displaying an image of the teaching substrate and an image of the virtual substrate on a screen; a robot operation control unit controlling an operation of the robot arm in accordance with the operation information; and a teaching data record unit storing, as teaching data, a position of the hand when the virtual substrate has coincided with the teaching substrate.

Abstract: A diagnostic system of a substrate transfer hand including a base part coupled to a hand tip portion of a robot arm and a substrate holding part coupled to the base part to hold a substrate, includes a camera which is secured to the base part and takes an image of the substrate holding part; and a diagnostic device which obtains image information of the image taken by the camera and diagnoses normality of the substrate holding part based on the image information.

Abstract: A control device of robot includes: image data acquirer configured to acquire image data taken by camera, image data including a teaching substrate and a substrate placing portion of a hand, the teaching substrate arranged as a teaching target at substrate target position; a virtual substrate information generator configured to generate information of a virtual substrate virtually arranged at the substrate placing portion of the hand in image data of the camera; distance information calculator configured to calculate distance information from substrate placing portion to the teaching substrate based on image data of the camera; operation control unit configured to control operation of robot arm based on distance information from the substrate placing portion to the teaching substrate such that the virtual substrate coincides with the teaching substrate; and storage unit configured to store, as teaching data, position of the hand when the virtual substrate coincides with the teaching substrate.