Patents by Inventor Haruki Mori

Haruki Mori has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 5766494
    Abstract: According to the present invention, there is provided an etching method comprising the steps of forming a first thin film on a surface of a substrate to be processed, supporting the substrate to be processed, forming a second thin film serving to deactivate an active gas used for etching the first thin film, on a surface of a mask plate piece used as the first thin film mask, fixing the mask plate piece so that the first thin film and the second thin film oppose to each other with a predetermined distance therebetween, and etching the first thin film by supplying the active gas to the first thin film via the mask plate piece.
    Type: Grant
    Filed: August 28, 1995
    Date of Patent: June 16, 1998
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Haruki Mori, Yukimasa Yoshida, Koji Shimomura
  • Patent number: 5756402
    Abstract: A method for etching a silicon nitride film, includes the steps of supplying a fluorine radical, a compound of fluorine and hydrogen, and an oxygen radical close to a substrate having the silicon nitride film, and selectively etching the silicon nitride film from the substrate with the fluorine radical, the compound of fluorine and hydrogen, and the oxygen radical.
    Type: Grant
    Filed: April 24, 1995
    Date of Patent: May 26, 1998
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Sadayuki Jimbo, Tokuhisa Ohiwa, Haruki Mori, Akira Kobayashi, Tadashi Shinmura, Yasuyuki Taniguchi
  • Patent number: 5627193
    Abstract: The present invention relates to quinoline-4-carbonylguanidine derivative represented by formula (1) ##STR1## and pharmaceutically acceptable salt thereof, a process for producing the same, and a Na.sup.+ /H.sup.+ exchanger inhibitor containing the compound as an active ingredient. The compounds of the present invention are useful as an agent for treating or preventing various diseases by hyperfunction of the Na.sup.+ /H.sup.+ exchanger and as a diagnostic agent for these diseases.
    Type: Grant
    Filed: January 31, 1996
    Date of Patent: May 6, 1997
    Assignee: Mitsui Toatsu Chemicals, Inc.
    Inventors: Junya Fujiwara, Haruki Mori, Hiroyuki Yamashita, Takashi Kitamori, Junko Hosoya, Hitoshi Banno
  • Patent number: 5445710
    Abstract: A dry-etching method comprising the steps of forming carbon film on a substrate to be etched, forming a resist pattern on said carbon thin film, selectively etching said carbon film using said resist pattern as a mask by a plasma of a gas mixture of a gas containing fluorine atoms and a gas containing oxygen atoms which are mixed at an atomic ratio of fluorine to oxygen of 198:1 to 1:2 so as to form a carbon film pattern, and selectively etching said substrate to be etched using said carbon film pattern as a mask or said resist pattern and said carbon film pattern as masks.
    Type: Grant
    Filed: February 25, 1994
    Date of Patent: August 29, 1995
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Masaru Hori, Hiroyuki Yano, Keiji Horioka, Hisataka Hayashi, Sadayuki Jimbo, Haruo Okano, Kazuhiro Tomioka, Yasuhiro Ito, Haruki Mori
  • Patent number: 5383984
    Abstract: A substrate processing apparatus comprising a process tube for enclosing a plurality of semiconductor wafers, injectors for introducing process gas into the process tube, a vacuum pump for exhausting the process tube, RF electrodes arranged along the outer circumference of the process tube and serving to generate high frequency electric field, when power is supplied, in a process-gas-introduced region so as to make process gas into plasmas, a high frequency power source for supplying power to the RF electrodes, heaters arranged in the process tube to directly heat the plural wafers, a power supply for supplying power to the heaters, and a controller for controlling the amount of power supplied from the power supply to the heaters.
    Type: Grant
    Filed: June 17, 1993
    Date of Patent: January 24, 1995
    Assignees: Tokyo Electron Limited, Tokyo Electron Tohoku Limited, Kabushiki Kaisha Toshiba
    Inventors: Yutaka Shimada, Hitoshi Kato, Junichi Kakizaki, Kazutugu Aoki, Haruki Mori, Tatsuo Shiotsuki
  • Patent number: 5332739
    Abstract: Pyrimidinedione derivatives of the formula: ##STR1## wherein R.sup.1 and R.sup.2 is so linked with each other as to make an alkylene chain and thus form a heterocyclic structure, A, R.sup.3, R.sup.4, X.sup.1, X.sup.2 and X.sup.3 are substituents, respectively, and n is 2 or 3 have a basic backbone in which a phenyl group part and a pyrimidinedione part are linked by a structure comprising an alkyl chain and a heterocyclic ring having two nitrogen atoms. These compounds are useful for a medical treatment of cardiac arrhythmias.
    Type: Grant
    Filed: November 2, 1992
    Date of Patent: July 26, 1994
    Assignee: Mitsui Toatsu Chemicals, Incorporated
    Inventors: Tsutomu Katakami, Tatsuro Yokoyama, Michihiko Miyamoto, Haruki Mori, Nobuya Kawauchi, Tadahito Nobori, Joji Kamiya, Masaaki Ishii
  • Patent number: 5302240
    Abstract: A dry-etching method comprising the steps of forming carbon film on a substrate to be etched, forming a resist pattern on said carbon thin film, selectively etching said carbon film using said resist pattern as a mask by a plasma of a gas mixture of a gas containing fluorine atoms and a gas containing oxygen atoms which are mixed at an atomic ratio of fluorine to oxygen of 198:1 to 1:2 so as to form a carbon film pattern, and selectively etching said substrate to be etched using said carbon film pattern as a mask or said resist pattern and said carbon film pattern as masks.
    Type: Grant
    Filed: February 19, 1993
    Date of Patent: April 12, 1994
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Masaru Hori, Hiroyuki Yano, Keiji Horioka, Hisataka Hayashi, Sadayuki Jimbo, Haruo Okano, Kazuhiro Tomioka, Yasuhiro Ito, Haruki Mori
  • Patent number: 5114941
    Abstract: A pyrimidinedione derivative compound has a basic backbone in which a 4-oxobenzopyran ring group part and a pyrimidinedione part are linked by a structure comprising an alkyl chain containing at least two nitrogen atoms and one oxygen. The pyrimidinedione derivative is useful for a medical treatment of cardiac arrhythmias.
    Type: Grant
    Filed: November 27, 1990
    Date of Patent: May 19, 1992
    Assignee: Mitsui Toatsu Chemicals, Incorporated
    Inventors: Tsutomu Katakami, Tatsuro Yokoyama, Haruki Mori, Nobuya Kawauchi, Joji Kamiya, Masaaki Ishii
  • Patent number: 5008267
    Abstract: A pyrimidinedione derivative compound has a basic backbone in which a phenyl group part and a pyrimidinedione part are linked by a structure comprising an alkyl chain containing at least two nitrogen atoms. The pyrimidinedione derivative is useful for a medical treatment of cardiac arrhythmias.
    Type: Grant
    Filed: October 24, 1989
    Date of Patent: April 16, 1991
    Assignee: Mitsui Toatsu Chemicals, Incorporated
    Inventors: Tsutomu Katakami, Tatsuro Yokoyama, Michihiko Miyamoto, Haruki Mori, Nobuya Kawauchi, Tadahito Nobori, Kunio Sannohe, Joji Kamiya, Masaaki Ishii, Kanji Yoshihara
  • Patent number: 4868292
    Abstract: Monosialoganglioside is prepared by heating ganglioside at a temperature higher than 50.degree. C. in a liquid medium containing water.
    Type: Grant
    Filed: July 22, 1986
    Date of Patent: September 19, 1989
    Assignee: Mitsui Toatsu Chemicals, Incorporated
    Inventors: Tatsuro Yokoyama, Haruki Mori, Masanobu Arita, Atsushi Kojima
  • Patent number: 4376768
    Abstract: N-(6-chloro-2-pyridyl)-3,4-dihydro-2-methyl-4-oxo-2H-1,2-benzothiazine-3-ca rboxamide 1,1-dioxide that is a novel benzothiazine derivative. The compound is characterized by a low degree of toxicity and a low incidence of gastric disorders and useful as an anti-inflammatory agent.
    Type: Grant
    Filed: June 16, 1981
    Date of Patent: March 15, 1983
    Assignee: Mitsui Toatsu Chemicals, Inc.
    Inventors: Shoichiro Ozaki, Hideya Kobayashi, Haruki Mori, Takafumi Kitano, Hiroshi Kawazura, Yutaka Okazaki
  • Patent number: 4376119
    Abstract: N-(6-fluoro-2-pyridyl)-3,4-dihydro-2-methyl-4-oxo-2H-1,2-benzothiazine-3-ca rboxamide 1,1-dioxide that is a novel benzothiazine derivative. The compound is characterized by a low degree of toxicity and a low incidence of gastric disorders and useful as an anti-inflammatory agent.
    Type: Grant
    Filed: June 16, 1981
    Date of Patent: March 8, 1983
    Assignee: Mitsui Toatsu Chemicals, Inc.
    Inventors: Shoichiro Ozaki, Hideya Kobayashi, Haruki Mori, Hiroshi Kawazura, Yutaka Okazaki, Takafumi Kitano, Mikio Kumakura, Takuo Nakano
  • Patent number: 4267326
    Abstract: New uracil derivatives of the general formula: ##STR1## wherein R.sup.1 stands for a hydrogen atom or a grouping of the formula: ##STR2## R.sup.2 for a hydrogen atom, an alkyl group or a phenyl group and R.sup.3 for an alkyl group or a phenyl group, with the proviso that when both R.sup.1 and R.sup.2 stand for a hydrogen atom, R.sup.3 stands for a phenyl group or a straight chain alkyl group with 3.about.11 carbon atoms, that when R.sup.1 stands for a hydrogen atom and R.sup.2 for methyl group, R.sup.3 stands for an alkyl group with at least 2 carbon atoms or a phenyl group, and that when R.sup.1 stands for a hydrogen atom and R.sup.3 for methyl group, R.sup.2 stands for an alkyl group with at least 2 carbon atoms or a phenyl group. These uracil derivatives are prepared by reacting 5-fluorouracil with an .alpha.-haloalkyl carboxylate or with an aldehyde diacylate or by hydrolyzing a 1,3-bis(acyloxymethyl)-5-fluorouracil with an acid or alkali.
    Type: Grant
    Filed: February 26, 1979
    Date of Patent: May 12, 1981
    Assignee: Mitsui Toatsu Chemicals, Incorporated
    Inventors: Shoichiro Ozaki, Yoshimasa Ike, Katsutoshi Ishikawa, Haruki Mori
  • Patent number: 4078479
    Abstract: Disclosed is a cooking utensil capable of cooking food without burning, which is characterized by the fact that the inner side of the bottom plate thereof contains a circular concave at the center thereof, radial rows of concaves disposed outside the circumference of said central circular concave and as many radial rows interposed one each between the adjacent ones of said first radial rows and each consisting of a circular concave and two convexes disposed opposite each other across said circular concave and the bottom side of said bottom plate contains convexes and concaves respectively at positions exactly corresponding to those of concaves and convexes on the inner side.
    Type: Grant
    Filed: May 25, 1976
    Date of Patent: March 14, 1978
    Inventor: Haruki Mori
  • Patent number: 4071519
    Abstract: 1-Carbamoyl-5-fluorouracil derivatives represented by the formula ##STR1## wherein R represents alkyl containing 3-8 carbon atoms are effective oral anti-tumor agents with low toxicity.
    Type: Grant
    Filed: November 5, 1975
    Date of Patent: January 31, 1978
    Assignee: Mitsui Toatsu Chemicals, Incorporated
    Inventors: Shoichiro Ozaki, Haruki Mori
  • Patent number: 4032524
    Abstract: 1-Carbamoyl-5-fluorouracil derivatives represented by the formula ##STR1## wherein R.sub.1 represents methyl, ethyl, phenyl or cyclohexyl and R.sub.2 represents hydrogen or is the same as R.sub.1 are effective anti-metabolites useful in treating lymphatic leukemia L1210, sarcoma 180A and Ehrlich ascites carcinoma in mice.
    Type: Grant
    Filed: September 24, 1976
    Date of Patent: June 28, 1977
    Assignee: Mitsui Toatsu Chemicals, Incorporated
    Inventors: Shoichiro Ozaki, Haruki Mori