Abstract: A dust-removing device includes: a cover plate that covers a sensor detection unit; and a blowing unit that includes a buffer tank, a Coanda channel, and a blow outlet and that blows a fluid onto the cover plate. The buffer tank stores the fluid temporarily. The Coanda channel connects the buffer tank and the blow outlet, has a curved Coanda surface, and guides the fluid flowing from the buffer tank into the Coanda channel to the blow outlet, pulling the fluid toward the Coanda surface by the Coanda effect. The blow outlet blows out the fluid in a direction along a surface of the cover plate.

Abstract: A transport device transports an individualized sheet-shaped workpiece. The transport device includes: an annular transport belt having a first surface and a second surface opposite to the first surface and having a plurality of suction holes extending between the first surface and the second surface; first and second decompression chambers arranged along a moving direction of the transport belt; and a vacuum degree adjusting mechanism provided in the first decompression chamber and adjusting a vacuum degree in the first decompression chamber. The first and second decompression chambers each abut against the second surface, and each suction the workpiece through at least one of the plurality of suction holes toward the first surface such that the transport belt is capable of transporting the workpiece in the moving direction in a suspended state from the first surface.

Abstract: A transport device transports an individualized sheet-shaped workpiece. The transport device includes: an annular transport belt having a first surface and a second surface opposite to the first surface and having a plurality of suction holes extending between the first surface and the second surface; first and second decompression chambers arranged along a moving direction of the transport belt; and a vacuum degree adjusting mechanism provided in the first decompression chamber and adjusting a vacuum degree in the first decompression chamber. The first and second decompression chambers each abut against the second surface, and each suction the workpiece through at least one of the plurality of suction holes toward the first surface such that the transport belt is capable of transporting the workpiece in the moving direction in a suspended state from the first surface.