Abstract: The invention relates to a coupling for a fluid line, wherein an oscillating circuit (5, 9) is present for detecting a properly closed position of an inserted part (13). A tuning device (19) is further provided, by means of which the resonant frequency of the oscillating circuit (5, 9) can be influenced such that the resonant frequency corresponds to a characteristic closure frequency only in the closed position of the insertion part (13). The proper arrangement of the insertion part (13) in the closed position can thereby be detected without contact.

Abstract: A pump element includes a pump element housing defining a pump chamber having an inlet and an outlet, and at least a first movable element movable in the pump chamber between a first and a second position. During a movement of the first movable element in the direction from the first to the second position, a flow resistance of a flow path from the first movable element through the inlet is larger than a flow resistance of a flow path between the pump element housing and the first movable element. During a movement of the first movable element in the direction from the second position to the first position, a flow resistance of a flow path from the first movable element through the outlet is smaller than a flow resistance of the flow path between the pump element housing and the first movable element. Thus, during a reciprocating movement of the first movable element between the first and the second position, a net flow through the outlet takes place.

Abstract: A switching valve includes a fluid housing, at least one switching element within the fluid housing, and an actuator outside the fluid housing, wherein the actuator is configured to cause a pulse-like transmission of force on the switching element by means of an impact-like force effect on the fluid housing, so as to move the switching element from a first position to a second position, the switching element in the first position defining a first fluidic state of a fluid path through the fluid housing, and the switching element in the second position defining a second fluidic state of a fluid path through the fluid housing, which second fluidic state differs from the first fluidic state.

Abstract: The invention relates to a coupling for a fluid line, wherein an oscillating circuit (5, 9) is present for detecting a properly closed position of an inserted part (13). A tuning device (19) is further provided, by means of which the resonant frequency of the oscillating circuit (5, 9) can be influenced such that the resonant frequency corresponds to a characteristic closure frequency only in the closed position of the insertion part (13). The proper arrangement of the insertion part (13) in the closed position can thereby be detected without contact.

Abstract: A pump element includes a pump element housing defining a pump chamber having an inlet and an outlet, and at least a first movable element movable in the pump chamber between a first and a second position. During a movement of the first movable element in the direction from the first to the second position, a flow resistance of a flow path from the first movable element through the inlet is larger than a flow resistance of a flow path between the pump element housing and the first movable element. During a movement of the first movable element in the direction from the second position to the first position, a flow resistance of a flow path from the first movable element through the outlet is smaller than a flow resistance of the flow path between the pump element housing and the first movable element. Thus, during a reciprocating movement of the first movable element between the first and the second position, a net flow through the outlet takes place.

Abstract: A time base including a resonator (4) and an integrated electronic circuit (3) for driving the resonator into oscillation and for producing, in response to the oscillation, a signal having a determined frequency. The resonator is an integrated micromechanical ring resonator supported above a substrate (2) and adapted to oscillate around an axis of rotation (O) substantially perpendicular to the substrate. The ring resonator includes a free-standing oscillating structure having a plurality of thermally compensating members (65) which are adapted to alter a mass moment of inertia of the free-standing oscillating structure as a function of temperature so as to compensate for the effect of temperature on the resonant frequency of the ring resonator.

Abstract: A time base including a resonator (4) and an integrated electronic circuit (3) for driving the resonator into oscillation and for producing, in response to the oscillation, a signal having a determined frequency. The resonator is an integrated micromechanical ring resonator supported above a substrate (2) and adapted to oscillate in a first oscillation mode. The ring resonator includes a free-standing oscillating structure (6). Electrodes (100, 120; 130, 150) are positioned under the free-standing oscillating structure in such a way as to drive and sense a second oscillation mode in a plane substantially perpendicular to the substrate and having a resonant frequency which is different from the resonant frequency of the first oscillation mode, a frequency difference between the resonant frequencies of both oscillation modes being used for compensating for the effect of temperature on the frequency of the signal produced by the time base.

Abstract: There is described a time base comprising a resonator (4) and an integrated electronic circuit (3) for driving the resonator into oscillation and for producing, in response to this oscillation, a signal having a determined frequency. The resonator is an integrated micromechanical tuning fork resonator (4) supported above a substrate (2) and adapted to oscillate in a plane substantially parallel to the substrate. The tuning fork resonator comprises a base member (5) extending substantially perpendicularly from the substrate, a free-standing oscillating structure (6) connected to the base member and including at least a first pair of substantially parallel fork tines (7, 8) and an electrode structure (9) disposed adjacent to the fork tines and connected to the integrated electronic circuit.

Abstract: A piezoelectric valve whose housing defines a valve chamber wherein at least one piezoelectric flexural transducer is located. The piezoelectric flexural transducer possesses a contact face, which faces a first outer wall of the valve housing. This first outer wall is in the form of a wiring support which possesses a support body consisting of plastic material, which at the outer side opposite to the valve chamber bears a wiring arrangement. The wiring arrangement is in electrical contact by way of a via extending through a cutout in the support body with the piezoelectric flexural transducer, since the via consists of an electrically conductive elastic plug, against which the at least one contact face is thrust at the inner face of the support body.

Abstract: A time base having a resonator (4) and an integrated electronic circuit (3) for driving the resonator into oscillation and for producing, in response to this oscillation, a signal having a determined frequency. The resonator is an integrated micromechanical ring resonator (4) supported above a substrate (2) and adapted to oscillate around an axis of rotation (O) substantially perpendicular to the substrate. The ring resonator has a central post (5) extending from the substrate along the axis of rotation, and a free-standing oscillating structure (6) including an outer ring (60) coaxial with the axis of rotation, and a plurality of spring elements (62) disposed symmetrically around the central post and connecting the outer ring to the central post.

Abstract: An electromechanical component consists of a polymeric body comprising a mechanically active part with a spring and a frame, and of a metal layer which encompasses the spring substantially completely so as to mechanically stabilize the same. The electromechanical component can be an acceleration sensor, a rotary speed sensor, a microvalve, a micropump, a pressure sensor, or a force sensor. Production of said electromechanical component incurs drastically reduced costs compared to electromechanical components produced using silicon-based technology because simple injection-moulding and/or embossing processes, instead of the complicated silicon-based technology, can be used for producing said electromechanical component.

Abstract: A micromechanical component comprises a frame layer and an oscillating body which, with the aid of a suspension means, is supported in an opening penetrating the frame layer, in such a way that the oscillating body is adapted to be pivoted about an axis of oscillation vertically to the frame layer plane. At least one oscillating-body lateral surface, which extends substantially at right angles to the frame layer plane, is arranged in relation to at least one inner lateral surface of the opening in such a way that a capacitance formed therebetween is varied by an oscillation of the oscillating body in such a way that an oscillation of the oscillating body about the axis of oscillation can be generated by periodically varying a voltage applied between the frame layer and the oscillating body.

Abstract: An acceleration threshold sensor includes a supporting device, a seismic mass, and a connecting device with the aid of which the seismic mass is attached to the supporting device. The connecting device is provided with a predetermined breaking point interrupting the connection between the seismic mass and the supporting device when said seismic mass is subjected to an acceleration exceeding a predetermined acceleration. This sensor has a simple structural design, can be produced at a reasonable price and is always ready to carry out a measurement. Additionally, this sensor is able to store, without any auxiliary power, that it has been subjected to an acceleration exceeding a predetermined acceleration.

Abstract: A structure for the phase modulation of light (32) incident upon said structure comprises a mirror (40), a deformable and transparent dielectric (36) disposed on the mirror (40), at least two electrodes (41; 42; 41a, 41b, 42; 50, 50′) having one or several fixed potentials and being adapted to have one or more control voltages applied thereto for generating an electric field (58) in at least a partial region of said dielectric (36), thereby changing the optical path length of the light passing through said dielectric (36) with respect to a state of the dielectric (36) in which the electric field is not applied thereto. An arrangement of a plurality of such phase-modulating structures applied on a CMOS active matrix constitutes a very large scale integrated spatial light modulator.

Abstract: A miniturized coil arrangement made by planar technology for the detection f material having a magnetic permeability other than zero, provided with a magnetizable core in a first plane of a substrate, an electrically energizable coil wound around a first section of a core to generate flux therein and at least one other coil in a second plane of the substrate adjacent another section of the coil responsive to disturbance in the flux.

Abstract: The invention relates to an infrared radiation absorption device, which can be unrestrictedly produced from CMOS technology methods and materials. The absorber structure according to the invention comprises a lower layer (1) with a low transmission coefficient, a central layer (2) with a high absorption coefficient and an upper, absorbing component (3) with a low reflection coefficient for the radiation to be absorbed and which is applied from above. The upper component can e.g. comprise depressions in the central layer, whose walls are coated with metal. The absorber structure is used in the inexpensive manufacture of integrated, thermal infrared detectors.