Abstract: A microvalve, which contains a valve member (7) dividing a valve chamber (13) into two chamber parts (14 and 15). A first chamber part (14) is delimited by a duct layer (3), which has an input flow opening (17) and at least one output flow opening (22 and 23). Fluid transfer between the input flow opening (17) and the output flow opening (22 and 23) may be controlled by the valve member (7). Furthermore pressure relieving means are provided which are effective in the open position of the valve member (7), such means comprising at least one expansion recess (38) provided on the valve member and with at least partial overlap opposite to the output flow opening (22 and 23), same permitting an expansion of the transferring fluid. It is connected through valve member (7) with the second chamber part (15) so that a counter pressure may build up here causing the relief of pressure.

Abstract: A microvalve array, which possesses a plurality of microvalves (5) produced by microfabrication. It is furthermore provided with an electronic control means (7), which comprises at least one function preset unit (23) for the programmed grouped functional linking of the microvalves (5). A fluid ducts system (6) is connected with the microvalves (5), the fluid ducts (12, 12′; 13, 13′; and 14, 14′) of such system being individually connected for customization, starting with a standardized arrangement in a fashion dependent on the functional valve linking, predetermined by the function preset unit (23) by opening and/or closing of passages.

Abstract: A micro-valve arrangement whose micro-valve has a housing containing two opposite housing layers, between which a valve chamber is delimited, wherein a valve member is located. A fluid duct extending in one housing layer opens into the valve chamber and is controlled by the valve member. By means of an electrically operated actuator it is possible for the position of the valve member to be predetermined. Furthermore a position detector is present, which on the basis of the measured capacitance of a capacitor renders it possible to find the position of the valve member. This capacitor comprises two capacitor faces which are provided opposite to each other in the direction of motion of the valve member and on one of the housing layers.