Patents by Inventor Hideo Kashima
Hideo Kashima has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11769650Abstract: Provided are a multistage-connected multipole and a charged particle beam device that can be produced with precision in machining without requiring precision in brazing between a pole and an insulation material. This multi-stage connected multipole 100 comprises: a plurality of poles Q1-Q4 that are arranged along the optical-axis direction of a charged particle beam, and that have cutouts Non surfaces facing each other; and braces P1-P3 that are arranged between the plurality of poles Q1-Q4 and are made of an insulator. The poles Q1-Q4 and the braces P1-P3 are joined by fitting the braces P1-P3 into the cutouts N and applying brazing so as to be interposed by a bonding material.Type: GrantFiled: December 23, 2019Date of Patent: September 26, 2023Assignee: Hitachi High-Tech CorporationInventors: Hideto Dohi, Yoshinobu Ootaka, Masashi Inada, Hideyuki Kazumi, Hideo Kashima
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Publication number: 20220199356Abstract: A charged particle beam apparatus including a winding aberration corrector capable of correcting a chromatic aberration is provided. A multi-pole lens includes a magnetic core 150, a plurality of current lines 101 to 112, a plurality of wire-shaped electrodes 301 to 312, insulating electrode fixing portions 313 to 342 for fixing the plurality of electrodes to a structure in a vacuum container, and conductive shields 320, 321 set to a reference potential, which are provided between the electrode fixing portion and a central axis of the magnetic core, main line portions of the plurality of current lines are arranged axisymmetrically with respect to the central axis of the magnetic core along an inner wall of the magnetic core, and portions of the plurality of electrodes parallel to the central axis of the magnetic core are arranged axisymmetrically with respect to the central axis of the magnetic core.Type: ApplicationFiled: April 19, 2019Publication date: June 23, 2022Applicant: HITACHI HIGH-TECH CORPORATIONInventors: Tomonori NAKANO, Yu YAMAZAWA, Hideo KASHIMA
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Publication number: 20220037113Abstract: Provided are a multistage-connected multipole and a charged particle beam device that can be produced with precision in machining without requiring precision in brazing between a pole and an insulation material. This multi-stage connected multipole 100 comprises: a plurality of poles Q1-Q4 that are arranged along the optical-axis direction of a charged particle beam, and that have cutouts Non surfaces facing each other; and braces P1-P3 that are arranged between the plurality of poles Q1-Q4 and are made of an insulator. The poles Q1-Q4 and the braces P1-P3 are joined by fitting the braces P1-P3 into the cutouts N and applying brazing so as to be interposed by a bonding material.Type: ApplicationFiled: December 23, 2019Publication date: February 3, 2022Inventors: Hideto DOHI, Yoshinobu OOTAKA, Masashi INADA, Hideyuki KAZUMI, Hideo KASHIMA
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Patent number: 10945684Abstract: The ultrasonic CT device includes: a first water tank configured such that an object is inserted therein, the first water tank being filled with a medium through which an ultrasonic wave passes; a ring array that irradiates an ultrasonic wave to the object and detects an ultrasonic wave reflected by the object while moving on an outer surface of the first water tank; and a signal processing unit that generates a tomographic image of the object based on a signal obtained by the ring array. The ultrasonic CT device further includes: a second water tank that houses the first water tank and the ring array; and a lid having a hole or a notch which is provided on a side of the object in the second water tank and which drains the medium.Type: GrantFiled: February 11, 2019Date of Patent: March 16, 2021Assignee: HITACHI, LTD.Inventors: Yushi Tsubota, Masakazu Sugaya, Hideo Kashima, Takahide Terada, Kenichi Kawabata, Wenjing Wu, Kazuhiro Yamanaka, Ai Masuda
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Publication number: 20190290223Abstract: The ultrasonic CT device includes: a first water tank configured such that an object is inserted therein, the first water tank being filled with a medium through which an ultrasonic wave passes; a ring array that irradiates an ultrasonic wave to the object and detects an ultrasonic wave reflected by the object while moving on an outer surface of the first water tank; and a signal processing unit that generates a tomographic image of the object based on a signal obtained by the ring array. The ultrasonic CT device further includes: a second water tank that houses the first water tank and the ring array; and a lid having a hole or a notch which is provided on a side of the object in the second water tank and which drains the medium.Type: ApplicationFiled: February 11, 2019Publication date: September 26, 2019Inventors: Yushi TSUBOTA, Masakazu SUGAYA, Hideo KASHIMA, Takahide TERADA, Kenichi KAWABATA, Wenjing WU, Kazuhiro YAMANAKA, Ai MASUDA
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Patent number: 10048172Abstract: In order to save a space for an apparatus for inspecting a substance and reduce a cost thereof, a particle testing apparatus includes a plurality of collection ports for collecting substances to be inspected, centrifuges for concentrating particles collected in the collection ports, the centrifuges being connected to the respective collection ports in pairs, and a common analysis apparatus for acquiring the concentrated particles from the centrifuges and analyzing the particles, the analysis apparatus being connected to the centrifuges.Type: GrantFiled: March 24, 2014Date of Patent: August 14, 2018Assignee: Hitachi, Ltd.Inventors: Masakazu Sugaya, Hideo Kashima, Koichi Terada, Yasuaki Takada, Hisashi Nagano
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Patent number: 9850696Abstract: In a conventional fine particle detection device that vaporizes fine particles attached to the object of examination by heating, processing capability decreases as the processing time elapses due to the influence of deposition of fine particles other than the object of examination, dirt/dust, a residue of the fine particles as the object of examination, or residual matter.Type: GrantFiled: April 30, 2013Date of Patent: December 26, 2017Assignee: Hitachi, Ltd.Inventors: Masakazu Sugaya, Koichi Terada, Hideo Kashima, Yasuaki Takada, Hisashi Nagano
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Patent number: 9773640Abstract: An object of the present invention is to provide a sample holder that can carry out a series of observations in which a rotational series image at arbitrary angles, namely, from ?180° to +180° around the x-axis of an observation region and a rotational series image at arbitrary angles, namely, from ?180° to +180° around the y-axis are obtained without taking a sample out of a sample chamber. A sample holder includes a power unit, a power separator, a rotational movement transmission mechanism, and a linear movement transmission mechanism. The power separator separates one movement of the power unit to be distributed to the rotational movement transmission mechanism and the linear movement transmission mechanism. The rotational movement transmission mechanism provides a rotational movement around a second rotational axis. The linear movement transmission mechanism provides a linear movement around the second rotational axis.Type: GrantFiled: July 28, 2015Date of Patent: September 26, 2017Assignee: Hitachi, Ltd.Inventors: Tomokazu Shimakura, Yoshio Takahashi, Hideo Kashima
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Patent number: 9696288Abstract: Provided is a technique to identify a sample substance attached to an inspection target easily and precisely, while improving the rate of operation and reducing the number of persons required for inspection. A trace detecting system includes detection means to detect the size (vertical and horizontal dimensions) of an inspection target, and selects an air nozzle capable of spraying air jet at 15 m/s or more to the surface of the inspection target for air jet spraying.Type: GrantFiled: October 2, 2012Date of Patent: July 4, 2017Assignee: HITACHI, LTD.Inventors: Hideo Kashima, Masakazu Sugaya, Koichi Terada, Yasunori Doi, Yasutaka Suzuki, Hisashi Nagano, Yuichiro Hashimoto, Yasuaki Takada
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Publication number: 20170102296Abstract: In order to save a space for an apparatus for inspecting a substance and reduce a cost thereof, a particle testing apparatus includes a plurality of collection ports for collecting substances to be inspected, centrifuges for concentrating particles collected in the collection ports, the centrifuges being connected to the respective collection ports in pairs, and a common analysis apparatus for acquiring the concentrated particles from the centrifuges and analyzing the particles, the analysis apparatus being connected to the centrifuges.Type: ApplicationFiled: March 24, 2014Publication date: April 13, 2017Applicant: Hitachi, Ltd.Inventors: Masakazu SUGAYA, Hideo KASHIMA, Koichi TERADA, Yasuaki TAKADA, Hisashi NAGANO
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Patent number: 9423388Abstract: An explosive detection apparatus capable of maintaining high availability even in an environment containing a large amount of foreign substances is achieved. The explosive detection apparatus includes means for sequentially replacing a plurality of collection thermal vaporization filters 2 for collecting, heating, vaporizing particles, which have been prepared in advance. The explosive detection apparatus also includes a preheating unit 52 for preheating an unused filter, and sealing is performed by a seal portion between the plurality of filters.Type: GrantFiled: October 28, 2013Date of Patent: August 23, 2016Assignee: Hitachi, Ltd.Inventors: Koichi Terada, Masakazu Sugaya, Hideo Kashima, Hisashi Nagano, Yasuaki Takada, Hiromi Satou
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Patent number: 9417163Abstract: Provided is an analyzer for a substance, including: a first particle holding unit having a tubular shape; a first intake pipe for sucking a gas from an upper side of the first particle holding unit to cause a cyclonic phenomenon inside the first particle holding unit; a first supply pipe for supplying a sample containing particles, the first supply pipe being connected to a side surface of the first particle holding unit; a first flow control unit for controlling a flow rate of a gas flowing into the first particle holding unit to hold the rotationally moving particles inside the first particle holding unit for a predetermined time period and then cause the particles to settle, the first flow control unit being connected to a lower part of the first particle holding unit; a first collection heating unit for collecting and heating the settled particles; and an analysis unit for analyzing a substance vaporized from the particles through the heating by the first collection heating unit, the analysis unit being cType: GrantFiled: February 27, 2014Date of Patent: August 16, 2016Assignee: HITACHI, LTD.Inventors: Hisashi Nagano, Yasuaki Takada, Yuichiro Hashimoto, Masakazu Sugaya, Hideo Kashima, Koichi Terada, Yasutaka Suzuki
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Patent number: 9287084Abstract: Provided are an aberration corrector that reduces irregularity of a magnetic field of a multipole to obtain an image of high resolution and a charged particle beam apparatus using the same. The aberration corrector includes a plurality of magnetic field type poles, a ring that magnetically connects the plurality of poles with one another and an adjustment member disposed between the pole and the ring to adjust a spacing between the pole and the ring per pole.Type: GrantFiled: January 28, 2015Date of Patent: March 15, 2016Assignee: Hitachi High-Technologies CorporationInventors: Zhaohui Cheng, Hideo Kashima, Hiroaki Baba, Takeyoshi Ohashi, Tomonori Nakano, Kotoko Urano, Naomasa Suzuki
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Patent number: 9261437Abstract: Sample fine particles attached to an inspection object are identified simply and with high accuracy, and an increase in operation rate and a decrease in device size are achieved. The inspection object is transported into a sampling chamber defined by a pair of side walls and an upper wall enclosing a part of a transport route of a transport unit. The inspection object is sprayed with compressed gas from an air nozzle, the peeled sample fine particles are aspirated into a collector, and the sample fine particles are separated from the aspirated gas for analysis. The air nozzle is disposed on one of the side walls defining the sampling chamber. The collector is disposed under the other side wall as a container independent from the sampling chamber.Type: GrantFiled: June 12, 2013Date of Patent: February 16, 2016Assignee: Hitachi, Ltd.Inventors: Hideo Kashima, Masakazu Sugaya, Koichi Terada, Yasutaka Suzuki, Hisashi Nagano, Yasuaki Takada, Yuichiro Hashimoto
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Publication number: 20160035535Abstract: An object of the present invention is to provide a sample holder that can carry out a series of observations in which a rotational series image at arbitrary angles, namely, from ?180° to +180° around the x-axis of an observation region and a rotational series image at arbitrary angles, namely, from ?180° to +180° around the y-axis are obtained without taking a sample out of a sample chamber. A sample holder includes a power unit, a power separator, a rotational movement transmission mechanism, and a linear movement transmission mechanism. The power separator separates one movement of the power unit to be distributed to the rotational movement transmission mechanism and the linear movement transmission mechanism. The rotational movement transmission mechanism provides a rotational movement around a second rotational axis. The linear movement transmission mechanism provides a linear movement around the second rotational axis.Type: ApplicationFiled: July 28, 2015Publication date: February 4, 2016Inventors: Tomokazu SHIMAKURA, Yoshio TAKAHASHI, Hideo KASHIMA
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Publication number: 20150377851Abstract: An explosive detection apparatus capable of maintaining high availability even in an environment containing a large amount of foreign substances is achieved. The explosive detection apparatus includes means for sequentially replacing a plurality of collection thermal vaporization filters 2 for collecting, heating, vaporizing particles, which have been prepared in advance. The explosive detection apparatus also includes a preheating unit 52 for preheating an unused filter, and sealing is performed by a seal portion between the plurality of filters.Type: ApplicationFiled: October 28, 2013Publication date: December 31, 2015Applicant: Hitachi, Ltd.Inventors: Koichi TERADA, Masakazu SUGAYA, Hideo KASHIMA, Hisashi NAGANO, Yasuaki TAKADA, Hiromi SATOU
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Patent number: 9214324Abstract: Provided is a technique of analyzing particles in real time while collecting and condensing the particles continuously. Gas and/or particles as a detection target substance that are attached to an authentication target 2 are removed by air flow from a blowing region 5. The removed sample is sucked and is condensed and sampled at a sampling region 10, and ions of the sample are generated at an ion source 21 and are then subjected to mass analysis at a mass analysis region 23. Determination of the obtained mass spectrum is made as to the presence or not of a mass spectrum derived from the detection target substance, and a monitor 27 displays a result thereof. Thereby, the detection target substance attached to the authentication target 2 can be detected continuously in real time, promptly and with a less error rate.Type: GrantFiled: May 5, 2015Date of Patent: December 15, 2015Assignee: HITACHI, LTD.Inventors: Hisashi Nagano, Yasutaka Iida, Hideo Kashima, Yuichiro Hashimoto, Masuyuki Sugiyama, Masakazu Sugaya, Yasunori Doi, Koichi Terada
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Publication number: 20150248944Abstract: Provided are an aberration corrector that reduces irregularity of a magnetic field of a multipole to obtain an image of high resolution and a charged particle beam apparatus using the same. The aberration corrector includes a plurality of magnetic field type poles, a ring that magnetically connects the plurality of poles with one another and an adjustment member disposed between the pole and the ring to adjust a spacing between the pole and the ring per pole.Type: ApplicationFiled: January 28, 2015Publication date: September 3, 2015Inventors: Zhaohui Cheng, Hideo Kashima, Hiroaki Baba, Takeyoshi Ohashi, Tomonori Nakano, Kotoko Urano, Naomasa Suzuki
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Publication number: 20150233796Abstract: Sample fine particles attached to an inspection object are identified simply and with high accuracy, and an increase in operation rate and a decrease in device size are achieved. The inspection object is transported into a sampling chamber defined by a pair of side walls and an upper wall enclosing a part of a transport route of a transport unit. The inspection object is sprayed with compressed gas from an air nozzle, the peeled sample fine particles are aspirated into a collector, and the sample fine particles are separated from the aspirated gas for analysis. The air nozzle is disposed on one of the side walls defining the sampling chamber. The collector is disposed under the other side wall as a container independent from the sampling chamber.Type: ApplicationFiled: June 12, 2013Publication date: August 20, 2015Inventors: Hideo Kashima, Masakazu Sugaya, Koichi Terada, Yasutaka Suzuki, Hisashi Nagano, Yasuaki Takada, Yuichiro Hashimoto
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Publication number: 20150235831Abstract: Provided is a technique of analyzing particles in real time while collecting and condensing the particles continuously. Gas and/or particles as a detection target substance that are attached to an authentication target 2 are removed by air flow from a blowing region 5. The removed sample is sucked and is condensed and sampled at a sampling region 10, and ions of the sample are generated at an ion source 21 and are then subjected to mass analysis at a mass analysis region 23. Determination of the obtained mass spectrum is made as to the presence or not of a mass spectrum derived from the detection target substance, and a monitor 27 displays a result thereof. Thereby, the detection target substance attached to the authentication target 2 can be detected continuously in real time, promptly and with a less error rate.Type: ApplicationFiled: May 5, 2015Publication date: August 20, 2015Applicant: HITACHI, LTD.Inventors: Hisashi Nagano, Yasutaka Suzuki, Hideo Kashima, Yuichiro Hashimoto, Masuyuki Sugiyama, Masakazu Sugaya, Yasunori Doi, Koichi Terada