Abstract: A processing liquid supply system includes: a processing liquid supply apparatus including a first carrier accommodation section that accommodates a carrier, a first bottle accommodation section that accommodates a processing liquid bottle taken out from the carrier, a liquid feeding section that feeds a processing liquid to a substrate processing apparatus from the processing liquid bottle, and a first transfer arm; and a control device configured to control the first transfer arm to take a processing liquid bottle out from the carrier and transfer the processing liquid bottle to the first bottle accommodation section, to transfer the processing liquid bottle from the first bottle accommodation section to the liquid feeding section, and to transfer the consumed processing liquid bottle from the liquid feeding arm and accommodate the consumed processing liquid bottle in the carrier.

Abstract: A substrate treatment apparatus for treating a substrate, the substrate treatment apparatus includes: an apparatus main body configured to perform a predetermined treatment on the substrate; a casing configured to house a predetermined component therein and to be attachable to and detachable from an upper part of the apparatus main body; a casing side connection part provided at the casing and connected to the predetermined component; a main body side connection part provided at the upper part of the apparatus main body and configured to be fitted into the casing side connection part; a guide part provided at the upper part of the apparatus main body and configured to move the casing in one direction; and a connection assisting mechanism configured to fit the casing side connection part into the main body side connection part while moving the casing in the one direction.

Abstract: A treatment liquid feeding system, provided with: a treatment liquid feeding device 10 having carrier-housing parts 12 for housing a carrier 70, bottle-housing parts 13 for housing a treatment liquid bottle 80 removed from a carrier 70, liquid feed parts 14 for delivering a treatment liquid to substrate treatment devices 90 from a treatment liquid bottle 80, and a transportation unit 15; and a control device configured to control the transportation unit 15 so as to remove a treatment liquid bottle 80 from the carrier 70 of a carrier-housing part 12 and transport the treatment liquid bottle 80 to a bottle-housing 13, control the transportation unit 15 so as to transport a treatment liquid bottle 80 to a liquid feed part 14, and control the transportation unit 15 so as to house a treatment liquid bottle 80 in the carrier 70 of a carrier-housing part 12.

Abstract: A substrate treatment apparatus for treating a substrate, the substrate treatment apparatus includes: an apparatus main body configured to perform a predetermined treatment on the substrate; a casing configured to house a predetermined component therein and to be attachable to and detachable from an upper part of the apparatus main body; a casing side connection part provided at the casing and connected to the predetermined component; a main body side connection part provided at the upper part of the apparatus main body and configured to be fitted into the casing side connection part; a guide part provided at the upper part of the apparatus main body and configured to move the casing in one direction; and a connection assisting mechanism configured to fit the casing side connection part into the main body side connection part while moving the casing in the one direction.

Abstract: A data acquisition method of a substrate processing apparatus for acquiring data on gas current directions in a plurality of measurement regions on a surface of a substrate, includes: loading a sensing substrate having a plurality of pairs of sensors on a loader, wherein each pair of sensors includes a first sensor and a second sensor configured to acquire vector data of the gas current on the surface of the sensing substrate; acquiring vector data of the gas current in a first linear direction by the first sensor; acquiring vector data of the gas current in a second linear direction slanted to the first linear direction by the second sensor; and combining the gas current vectors based on a starting point associated with the respective pair of sensors; and calculating a gas current direction from the starting point associated with the respective pair of sensors.

Abstract: According to an embodiment of the present invention, a data obtainment method for obtaining data on gas flow directions in a plurality of measurement regions in a surface of a substrate loaded onto a loading unit of a substrate processing apparatus is provided. The method includes loading a sensor substrate onto the loading unit in a first direction, and changing the first direction into a second direction. Further, it is obtained a vector data of a gas flow in a first straight direction and a vector data of a gas flow in a second straight direction from each first sensor of the sensor substrate loaded in the first and second directions. Also, the method includes calculating a gas flow direction at each starting point in the first and second measurement regions by combining the vector data.

Abstract: A method that acquires data on a processing module of a substrate processing apparatus using a sensor substrate efficiently and highly precisely is provided. The method includes: holding a sensor substrate by a first holding member, the sensor substrate having a sensor section for acquiring data on the processing modules and a first power supply section with a rechargeable electricity storage section for supplying electric power to the sensor section; advancing the first holding member to transfer the sensor substrate to a processing module; acquiring data on the processing module by the sensor section of the sensor substrate; and causing the first holding member to receive the sensor substrate, whose electric charge is consumed, from the processing module and retract, and with that state, charging the first power supply section of the sensor substrate in a non-contact manner by a second power supply section that moves together with the base.

Abstract: According to an embodiment of the present invention, a data obtainment method for obtaining data on gas flow directions in a plurality of measurement regions in a surface of a substrate loaded onto a loading unit of a substrate processing apparatus is provided. The method includes loading a sensor substrate onto the loading unit in a first direction, and changing the first direction into a second direction. Further, it is obtained a vector data of a gas flow in a first straight direction and a vector data of a gas flow in a second straight direction from each first sensor of the sensor substrate loaded in the first and second directions. Also, the method includes calculating a gas flow direction at each starting point in the first and second measurement regions by combining the vector data.

Abstract: A method that acquires data on a processing module of a substrate processing apparatus using a sensor substrate efficiently and highly precisely is provided. The method includes: holding a sensor substrate by a first holding member, the sensor substrate having a sensor section for acquiring data on the processing modules and a first power supply section with a rechargeable electricity storage section for supplying electric power to the sensor section; advancing the first holding member to transfer the sensor substrate to a processing module; acquiring data on the processing module by the sensor section of the sensor substrate; and causing the first holding member to receive the sensor substrate, whose electric charge is consumed, from the processing module and retract, and with that state, charging the first power supply section of the sensor substrate in a non-contact manner by a second power supply section that moves together with the base.

Abstract: A data acquisition method of a substrate processing apparatus for acquiring data on gas current directions in a plurality of measurement regions on a surface of a substrate, includes: loading a sensing substrate having a plurality of pairs of sensors on a loader, wherein each pair of sensors includes a first sensor and a second sensor configured to acquire vector data of the gas current on the surface of the sensing substrate; acquiring vector data of the gas current in a first linear direction by the first sensor; acquiring vector data of the gas current in a second linear direction slanted to the first linear direction by the second sensor; and combining the gas current vectors based on a starting point associated with the respective pair of sensors; and calculating a gas current direction from the starting point associated with the respective pair of sensors.

Abstract: The present invention holds a sensor substrate including a sensor part for collecting information about a module and a power receiving coil for supplying power to the sensor part, on a holding member; moves the holding member forward to deliver the sensor substrate to the module; supplies power to a power transmitting coil provided at a base of the holding member to form a magnetic field, and causes the power transmitting coil and the power receiving coil to resonate in the magnetic field to supply power from the power transmitting coil to the power receiving coil; and acquires data about the module by the sensor part.