Patents by Inventor Hiroaki Saeki

Hiroaki Saeki has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20040112053
    Abstract: A position control method by motor drive has the steps of rotating a rotor of the motor according to the given target opening, and detecting the opening of a movable vane by an encoder, the motor opening and shutting a passage of an intake air pipe to a turbo charger of the automobile by the movable vane, and controlling the movable vane in the passage of the intake air pipe so that it may reach the target opening, the rotational position of the motor is controlled to the stop position in the direction where the movable vane is closed and the stop position in the direction where the movable vane is opened, and the motor is controlled so that the passage of the intake air pipe may become the target opening by setting the stop position as an operation reference position of the motor, and setting between the stop positions as driving dynamic range of the motor.
    Type: Application
    Filed: December 4, 2003
    Publication date: June 17, 2004
    Applicants: Hitachi, Ltd., Hitachi Car Engineering Co., Ltd.
    Inventors: Shigeki Yamada, Shoji Sasaki, Hiroaki Saeki, Masayuki Suganami
  • Publication number: 20040062632
    Abstract: There is provided a transfer apparatus capable of increasing the length of a transfer arm when it is extended, without increasing the size of the transfer arm when it is contracted. The transfer apparatus 4 comprising a transfer arm 17 which comprises: two rotating shafts 5 and 6 arranged coaxially or in parallel; a pair of first arms 7 and 8, one end portions of which are fixed to the rotating shafts 5 and 6, respectively; a pair of second arms 10 and 11, one end portions of which are connected to the other end portions of the pair of first arms 7 and 8 by means of pins, respectively; and a holding portion 14 for holding an object w to be processed, the holding portion 14 being connected to each of the other end portions of the pair of second arms 10 and 11 by means of pins, wherein the second arms 10 and 11 cross each other.
    Type: Application
    Filed: March 14, 2003
    Publication date: April 1, 2004
    Inventors: Hiroaki Saeki, Teruo Asakawa
  • Publication number: 20040045533
    Abstract: On supplying fuel in an internal combustion engine, a control signal for changing a degree of vaporization of the fuel passing the air intake valve in accordance with the opening degree of the air intake valve or a load of the internal combustion engine so that the fuel of liquid state is restrained from existing in the combustion chamber is generated, and subsequently a vaporizing speed of the supplied fuel is changed in accordance with the control signal to adjust the degree of vaporization of the fuel.
    Type: Application
    Filed: February 26, 2003
    Publication date: March 11, 2004
    Applicant: Hitachi, Ltd.
    Inventors: Yoshihiro Sukegawa, Toshiharu Nogi, Takanobu Ichihara, Hiroaki Saeki
  • Patent number: 6699003
    Abstract: In most cases, a hot, corrosive atmosphere is created in, for example, a semiconductor wafer processing chamber. When an arm including belts, such as steel belts, is moved into such a semiconductor wafer processing chamber, the belts are exposed to the hot, corrosive atmosphere. Belts, such as steel belts, have limited heat resistance and corrosion resistance and the hot, corrosive atmosphere in the processing chamber shortens the life of the belts. A carrying device of the present invention has a frog leg type arm (3) and a wafer holder (4) connected to the frog leg type arm (3). The wafer holder (4) is pivotally connected to front end parts of a first front arm (8A) and a second front arm (8B) by coaxial joints (10). The wafer holder (4) is linked to the first front arm (8A) and the second front arm (8B) by a posture maintaining linkage (5) including two antiparallel linkages capable of controlling the turning of the wafer holder (4) relative to the first and the second front arms (8A, 8B).
    Type: Grant
    Filed: August 15, 2002
    Date of Patent: March 2, 2004
    Assignee: Tokyo Electron Limited
    Inventors: Hiroaki Saeki, Keisuke Kondoh
  • Publication number: 20040016416
    Abstract: To improve startability and reduce the amount of HC emission at start-up with the aid of a construction where vaporized fuel is supplied to the bypass passage that bypasses the main passage.
    Type: Application
    Filed: July 18, 2003
    Publication date: January 29, 2004
    Applicants: HITACHI, LTD., HITACHI CAR ENGINEERING CO., LTD.
    Inventors: Takanobu Ichihara, Masami Nagano, Kozo Katogi, Hiroaki Saeki
  • Publication number: 20040018745
    Abstract: A positioning substrate is used for performing a teaching operation on a transfer mechanism for transferring a target substrate in a semiconductor processing system. The positioning substrate includes a substrate body made of a material selected from the group consisting of the same material as the target substrate, semiconductor, compound semiconductor, and ceramic. The substrate body has an outer contour sized to be handled by the transfer mechanism as an alternative to the target substrate. The positioning substrate also includes a positioning assistant having a combination of a positioning hole and a positioning reference line formed in the substrate body. The positioning hole is formed to penetrate the substrate body in a thickness direction. The positioning reference line is formed on a surface of the substrate body to extend across an opening of the positioning hole and have a predetermined width.
    Type: Application
    Filed: March 20, 2003
    Publication date: January 29, 2004
    Inventors: Makoto Tashiro, Keisuke Kondoh, Hiroaki Saeki
  • Patent number: 6676356
    Abstract: A table for a transfer container is provided with an opening portion formed therein. A clamp is swingably supported on the lower side of the table. The clamp has a second engaging portion hook to project upward from the table through the opening portion, and to engage with the first engaging portion of the transfer container. A first actuator is disposed to apply a swing-driving force to the clamp. The first actuator has a reciprocation rod pivotally connected to the clamp, and is swingably supported on the lower side of the table.
    Type: Grant
    Filed: September 13, 2001
    Date of Patent: January 13, 2004
    Assignees: Tokyo Electron Limited, Shinko Electric Co., Ltd.
    Inventors: Hiroaki Saeki, Yoshiaki Sasaki, Yasushi Taniyama
  • Publication number: 20030226551
    Abstract: A slit-shaped heater holder 54 outside the heat-exchanger tube 55 can eliminate the use of adhesive in the heater assembly. A flat electrode 53 which is pressed on and in surface contact with the PTC heater 53 can improve the wear resistance of the heater contact, prevent the PTC heater breaking, and even assure the electrical connecting to the broken PTC heater.
    Type: Application
    Filed: June 4, 2003
    Publication date: December 11, 2003
    Applicants: HITACHI, LTD., HITACHI CAR ENGINEERING CO., LTD.
    Inventors: Kenji Watanabe, Hiroaki Saeki, Kiyoshi Amou
  • Publication number: 20030217739
    Abstract: The present invention is to present a fuel-heating type fuel injection apparatus, at the startup of the engine, able to prevent fuel-attaching on the wall of the intake passage and eliminate hydro carbons in the exhaust.
    Type: Application
    Filed: May 21, 2003
    Publication date: November 27, 2003
    Applicants: Hitachi, Ltd., Hitachi Car Engineering Co., Ltd.
    Inventors: Hiroaki Saeki, Takanobu Ichihara, Kenji Watanabe
  • Publication number: 20030188726
    Abstract: A combustion stabilizing system including a fuel injection valve (13), and a first heater (50) and a second heater (38a, 38b) for heating a fuel sprayed from the fuel injection valve (13), the second heater using a heat source different from the heat source for the first heater (50). The first heater (50) is a PTC heater, and the second heater uses as the heat source a coolant for the internal combustion engine. The first heater vaporizes the fuel in starting the internal combustion engine, and the second heater vaporizes the fuel after warming up the internal combustion engine.
    Type: Application
    Filed: April 4, 2003
    Publication date: October 9, 2003
    Applicants: HITACHI, LTD., HITACHI CAR ENGINEERING CO., LTD.
    Inventors: Kenji Watanabe, Hiroaki Saeki
  • Publication number: 20030190224
    Abstract: A conveying arm 100 of the invention includes a first pivotable shaft 104; a first arm 102 having a one-side end portion connected to the first pivotable shaft; a third arm 110 having an intermediate pivotable portion 118a and a one-side end portion pivotably connected to an other-side end portion of the first arm; and a fifth arm 120 having a one-side end portion pivotably connected to an other-side end portion of the third arm. The conveying arm 100 also includes a second pivotable shaft 108; a second arm 106 having a one-side end portion connected to the second pivotable shaft; a fourth arm 114 having an intermediate pivotable portion 118b pivotably connected to the intermediate pivotable portion of the third arm and a one-side end portion pivotably connected to an other-side end portion of the second arm; and a sixth arm 124 having a one-side end portion pivotably connected to an other-side end portion of the fourth arm.
    Type: Application
    Filed: April 18, 2003
    Publication date: October 9, 2003
    Inventor: Hiroaki Saeki
  • Publication number: 20030185672
    Abstract: An electronically controlled actuator for controlling a turbocharger is provided. A motor (130), a speed change mechanism (140) and a position sensor (150) are contained in a case consisting of a body (110) and a cover (120). The driving force of the motor (130) is transmitted through the speed change mechanism (140) to an output shaft (145) to drive the movable vanes of a turbocharger for turning. A first bearing (146A) supporting the output shaft for rotation is held on the cover (120), and a second bearing supporting the output shaft for rotation is held on the body (110). The position sensor (150) is mounted on the output shaft of the motor (130). The reliability of the actuator is improved.
    Type: Application
    Filed: January 31, 2003
    Publication date: October 2, 2003
    Applicants: Hitachi, Ltd., Hitachi Car Engineering Co., Ltd.
    Inventors: Masayuki Suganami, Hiroaki Saeki, Shigeki Yamada
  • Publication number: 20030155666
    Abstract: The present invention promotes atomization and vaporization of spray at the time of cold startup and reduces the amount of fuel depositing on the inner wall of the intake manifold, thereby ensuring improved startability of an internal combustion engine of a car, reduced fuel costs and improved purification of exhaust gas. A very fine groove 201 is formed on a heat transfer surface 76 in a fuel vaporization promoting apparatus 100, wherein this groove 201 is shaped in such a way that fuel 24 is dispersed by the surface tension of a heat transfer surface 76 and fuel 24.
    Type: Application
    Filed: December 24, 2002
    Publication date: August 21, 2003
    Inventors: Kiyoshi Amou, Yuzo Kadomukai, Hiroaki Saeki, Kenji Watanabe, Takanobu Ichihara, Masami Nagano
  • Publication number: 20030136515
    Abstract: Two load lock chambers 130 and 132 are arranged between a first transfer chamber 122 and a second transfer chamber 133. Each of the load lock chambers is capable of accommodating a single wafer W. The first transfer chamber 122 is provided with a first transfer unit 124 having two substrate holders 124a, 124b each capable of holding a single object to be processed, in order to transport the wafer W among a load port site 120, the first load lock chamber 130, the second load lock chamber 132 and a positioning unit 150. The second transfer chamber 133 is provided with a second transfer unit 156 having two substrate holders 156a, 156b each capable of holding the single object to be processed, in order to transport the wafer between the first load lock chamber 130, the second load lock chamber 132 and respective vacuum processing chambers 158 to 164. Since the volume of each load lock chamber can be minimized, it is possible to perform the prompt control of atmospheres in the load lock chambers.
    Type: Application
    Filed: March 5, 2003
    Publication date: July 24, 2003
    Inventors: Hiroaki Saeki, Keiichi Matsushima, Teruo Asakawa, Masaki Narushima
  • Publication number: 20030135314
    Abstract: A sensor and a control circuit are provided externally of a gear cover. This enhances reliability of a shift controller operated by an electric actuator and a motor driven control module similar thereto, and constitute them compact. Further, this provides a rotating position detection sensor suitably used for a switching device as described. A circuit and a sensor are not contaminated with oil or metal powder of a gear mechanism portion.
    Type: Application
    Filed: December 23, 2002
    Publication date: July 17, 2003
    Applicant: Hitachi, Ltd.
    Inventors: Masashi Saito, Youichi Nakano, Hayato Sugawara, Hiroaki Saeki
  • Patent number: 6575691
    Abstract: A conveying arm of the invention includes a first pivotable shaft connected to a first arm which is also pivotably connected to a third arm having an intermediate pivotable portion. The third arm is also pivotably connected to a fifth arm which is also pivotably connected to a seventh arm which has a holding portion for an object to be conveyed. The conveying arm also includes a second pivotable shaft connected to a second arm which is also pivotably connected to a fourth arm having an intermediate pivotable portion. The fourth arm is also pivotably connected to a sixth arm which is also pivotably connected to the seventh arm. With respect to both the third and fourth arms, a line linking one-side end portion to an intermediate pivotable portion is substantially perpendicular to a line linking the other-side end portion to the intermediate pivotable portion.
    Type: Grant
    Filed: January 19, 2001
    Date of Patent: June 10, 2003
    Assignee: Tokyo Electron Limited
    Inventor: Hiroaki Saeki
  • Patent number: 6571766
    Abstract: The present invention provides an idle speed controller comprising a guide plate having a spigot portion fixedly attached to a cylindrical projected portion of a solenoid coil assembly for guiding a shaft to and away from a plunger wherein a symmetrical central axis is maintained between the shaft and the plunger during the guiding of the shaft.
    Type: Grant
    Filed: June 11, 2001
    Date of Patent: June 3, 2003
    Assignees: Hitachi, Ltd., Hitachi Car Engineering Co., Ltd.
    Inventors: Hiroaki Saeki, Kenji Watanabe
  • Patent number: 6543412
    Abstract: A main passage mounting a throttle valve and an air bypass flow passage for reducing HC emission by promoting atomization of the fuel spray injected from the assembly pipe fuel injector are integrated in a body of an intake air control device arranged upstream of an assembly pipe in a one-piece structure to form a unit. Thereby, the intake air control device can be easily manufactured and easily mounted on and dismounted from the intake air system. The amount of HC emitted during warming-up operation of an internal combustion engine is reduced by efficiently supplying fuel spray injected from an assembly pipe fuel injector at the time of starting and warming-up operations for the internal combustion engine.
    Type: Grant
    Filed: March 29, 2001
    Date of Patent: April 8, 2003
    Assignees: Hitachi, Ltd., Hitachi Car Engineering Co., Ltd.
    Inventors: Kiyoshi Amou, Yoshio Okamoto, Yuzo Kadomukai, Takehiko Kowatari, Ayumu Miyajima, Masami Nagano, Takanobu Ichihara, Hiroaki Saeki, Tadashi Someno
  • Patent number: 6540869
    Abstract: A semiconductor processing system comprises a first vacuum processing unit and a second vacuum processing unit connected thereto. The first and second vacuum processing units respectively comprise I/O transfer chambers. Casings of the transfer chambers are connected to each other, and a common transfer robot is arranged in the casings. The transfer robot is moved along horizontal guide rails and formed by connecting rails of the transfer chambers. A rail adjusting mechanism is provided to obtain linearity of the horizontal rails.
    Type: Grant
    Filed: June 1, 2001
    Date of Patent: April 1, 2003
    Assignees: Tokyo Electron Limited, Shinko Electric Co., Ltd.
    Inventors: Hiroaki Saeki, Yasushi Taniyama
  • Patent number: 6522942
    Abstract: A semiconductor processing system includes a transfer apparatus for transferring a wafer. The transfer apparatus has a pick arm member with wings. The reference distances between the wafer located at the normal position and the wings are stored in a memory of a CPU. Detection ranges of line sensors are set in a standby position in front of a process chamber in order to detect the distances between the wafer and the wings. In the CPU, the amount of positional shift of the wafer is detected based on the reference distances and the detected distances.
    Type: Grant
    Filed: May 21, 2001
    Date of Patent: February 18, 2003
    Assignee: Tokyo Electron Limited
    Inventors: Masaki Kondo, Hiroaki Saeki