Abstract: A control device controls a substrate transfer robot including a hand, a joint, and a joint motor. The control device modifies a target position of the hand when it places substrate at transfer destination, based on positional misalignment information indicating misalignment of substrate. To change a position at which the hand places the substrate to target position after modification, the control device performs first velocity control and second velocity control. In first velocity control, velocity of hand that is approaching target position before modification with the velocity decreasing is made constant by correcting. In second velocity control, velocity of hand decreases by slope equal to the slope of velocity of the hand immediately before first velocity control and hand is stopped at target position after modification. Time during which the first velocity control is performed increases as a magnitude of change in the target position due to the modification increases.

Abstract: A controller controls a substrate transfer robot whose joint axis is oriented in a vertical direction. The joint motor that drives the joint is switchable in a direction of rotation. The controller corrects a position of a hand in at least one of the cases of picking a substrate and placing a substrate based on positional misalignment information. The controller controls the hand to pass through a relay position before the hand reaches a corrected position that is the position of the hand after correction. The controller controls the hand to reach the relay position by driving the joint in one direction by the joint motor, and the hand to reach the corrected position from the relay position by driving the joint in the same one direction only by the joint motor.

Abstract: A quantity to be displayed is obtained, and the quantity thus obtained is associated with coordinate points (11a, 12a, 13a). These coordinate points and predetermined coordinate points (18, 19) are connected to one another to create a closed curved surface 30 in a virtual space. The closed curved surface is subjected to rendering processing to visually display the desired quantity.