Patents by Inventor Hiroki Shikagawa

Hiroki Shikagawa has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Testing system
    Patent number: 11454664
    Abstract: A testing system includes: an inspection module including a plurality of levels of inspection chambers in each of which a tester part having a tester configured to perform an electrical inspection of an inspection object and a probe card is accommodated; an aligner module configured to align the inspection object with the tester part; an alignment area in which the aligner module is accommodated; and a loader part configured to load the inspection object into the alignment area and unload the inspection object out of the aligner module, wherein the inspection module is located adjacent to the alignment area.
    Type: Grant
    Filed: April 16, 2018
    Date of Patent: September 27, 2022
    Assignee: TOKYO ELECTRON LIMITED
    Inventors: Kentaro Konishi, Jun Fujihara, Hiroki Shikagawa, Hiroshi Yamada, Yukinori Murata, Katsuaki Sugiyama, Shin Uchida, Tetsuya Kagami, Hiroaki Hayashi, Rika Ozawa, Takanori Hyakudomi, Xingjun Jiang, Kenichi Narikawa, Tomoya Endo
  • TESTING SYSTEM
    Publication number: 20210333319
    Abstract: A testing system includes: an inspection module including a plurality of levels of inspection chambers in each of which a tester part having a tester configured to perform an electrical inspection of an inspection object and a probe card is accommodated; an aligner module configured to align the inspection object with the tester part; an alignment area in which the aligner module is accommodated; and a loader part configured to load the inspection object into the alignment area and unload the inspection object out of the aligner module, wherein the inspection module is located adjacent to the alignment area.
    Type: Application
    Filed: April 16, 2018
    Publication date: October 28, 2021
    Inventors: Kentaro KONISHI, Jun FUJIHARA, Hiroki SHIKAGAWA, Hiroshi YAMADA, Yukinori MURATA, Katsuaki SUGIYAMA, Shin UCHIDA, Tetsuya KAGAMI, Hiroaki HAYASHI, Rika OZAWA, Takanori HYAKUDOMI, Xingjun JIANG, Kenichi NARIKAWA, Tomoya ENDO
  • Inspection system
    Patent number: 11067624
    Abstract: An inspection system includes: an inspection section provided with an inspection part having a plurality of inspection units each including a tester that performs an electrical inspection of an inspection target, and a probe card provided between the tester and the inspection target; and a loader section including an arrangement part in which a storage container for the inspection target is disposed, and a loader that delivers the inspection target between the storage container and the inspection section. The inspection part includes a plurality of inspection unit rows that are formed by arranging the plurality of inspection units in one horizontal direction and arranged in a plurality of tiers in a vertical direction. The arrangement part is provided on an end part side in one direction of the inspection part.
    Type: Grant
    Filed: May 11, 2018
    Date of Patent: July 20, 2021
    Assignee: TOKYO ELECTRON LIMITED
    Inventors: Kentaro Konishi, Hiroki Shikagawa, Jun Fujihara
  • INSPECTION SYSTEM
    Publication number: 20200158775
    Abstract: An inspection system includes: an inspection section provided with an inspection part having a plurality of inspection units each including a tester that performs an electrical inspection of an inspection target, and a probe card provided between the tester and the inspection target; and a loader section including an arrangement part in which a storage container for the inspection target is disposed, and a loader that delivers the inspection target between the storage container and the inspection section. The inspection part includes a plurality of inspection unit rows that are formed by arranging the plurality of inspection units in one horizontal direction and arranged in a plurality of tiers in a vertical direction. The arrangement part is provided on an end part side in one direction of the inspection part.
    Type: Application
    Filed: May 11, 2018
    Publication date: May 21, 2020
    Inventors: Kentaro Konishi, Hiroki Shikagawa, Jun Fujihara