Patents by Inventor Hironori Satoh

Hironori Satoh has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11675268
    Abstract: A composition for forming an organic film contains a polymer having a partial structure shown by the following general formula (1A) or (1B), and an organic solvent, where Ar1 and Ar2 represent a benzene ring or naphthalene ring which optionally have a substituent; X represents a single bond or methylene group; a broken line represents a bonding arm; R represents a hydrogen atom or a monovalent organic group having 1 to 20 carbon atoms; and W1 represents a hydroxyl group, an alkyloxy group having 1 to 10 carbon atoms, or an organic group having at least one aromatic ring optionally having a substituent. A composition for forming an organic film, the composition containing a polymer with high carbon content and thermosetting property as to enable high etching resistance and excellent twisting resistance; a patterning process using the composition; and a polymer suitable for the composition for forming an organic film.
    Type: Grant
    Filed: May 14, 2020
    Date of Patent: June 13, 2023
    Assignee: SHIN-ETSU CHEMICAL CO., LTD.
    Inventors: Daisuke Kori, Takayoshi Nakahara, Takashi Sawamura, Hironori Satoh, Yasuyuki Yamamoto
  • Publication number: 20230168585
    Abstract: A resist underlayer film material contains (A) a resin having a compound shown in the following general formula (1A), and (B) an organic solvent. Mw/Mn of the compound shown in the general formula (1A) is 1.00?Mw/Mn?1.25. This provides: a resist underlayer film material having all of favorable dry etching resistance, heat resistance to 500° C. or higher, and high filling and planarizing properties; and methods for forming a resist underlayer film and patterning processes which use the material.
    Type: Application
    Filed: November 10, 2022
    Publication date: June 1, 2023
    Applicant: SHIN-ETSU CHEMICAL CO., LTD.
    Inventors: Naoki KOBAYASHI, Daisuke KORI, Yasuyuki YAMAMOTO, Hironori SATOH, Toshiharu YANO
  • Publication number: 20230152695
    Abstract: The present invention provides a resist underlayer film material used in a multilayer resist method, the material containing: (A) a resin having a structural unit shown by the following general formula (1); and (B) an organic solvent. The resin content is 20 mass % or more. This provides: a resist underlayer film material having excellent filling property and adhesiveness, and favorable planarizing property; and a patterning process and a method for forming a resist underlayer film which use the material.
    Type: Application
    Filed: October 20, 2022
    Publication date: May 18, 2023
    Applicant: SHIN-ETSU CHEMICAL CO., LTD.
    Inventors: Hironori SATOH, Daisuke KORI, Naoki KOBAYASHI, Toshiharu YANO
  • Patent number: 11614686
    Abstract: A resist composition is provided comprising (A) a metal compound having formula (A-1), a hydrolysate or hydrolytic condensate thereof, or the reaction product of the metal compound, hydrolysate or hydrolytic condensate thereof with a di- or trihydric alcohol having formula (A-2), and (B) a sensitizer containing a compound having formula (B-1). The resist composition is adapted to change a solubility in developer upon exposure to high-energy radiation, has high resolution and sensitivity, and forms a pattern of good profile with minimal edge roughness after exposure.
    Type: Grant
    Filed: February 13, 2019
    Date of Patent: March 28, 2023
    Assignee: Shin-Etsu Chemical Co., Ltd.
    Inventors: Hironori Satoh, Tsukasa Watanabe, Seiichiro Tachibana, Satoshi Watanabe, Tsutomu Ogihara
  • Publication number: 20220107566
    Abstract: The present invention is a material for forming an organic film, containing: (A) a compound for forming an organic film shown by the following general formula (1A); and (B) an organic solvent, where W1 represents a tetravalent organic group, n1 represents an integer of 0 or 1, n2 represents an integer of 1 to 3, and R1 represents any one or more of the following general formulae (1B). This provides an imide compound, where the compound is cured not only under air, but also under film formation conditions of inert gas, and can form an organic underlayer film having not only excellent heat resistance and properties of filling and planarizing a pattern formed on a substrate, but also favorable film formation and adhesion to a substrate, and a material for forming an organic film containing the compound.
    Type: Application
    Filed: September 28, 2021
    Publication date: April 7, 2022
    Applicant: SHIN-ETSU CHEMICAL CO., LTD.
    Inventors: Daisuke KORI, Takashi SAWAMURA, Hironori SATOH
  • Publication number: 20200363723
    Abstract: A composition for forming an organic film contains a polymer having a partial structure shown by the following general formula (1A) or (1B), and an organic solvent, where Ar1 and Ar2 represent a benzene ring or naphthalene ring which optionally have a substituent; X represents a single bond or methylene group; a broken line represents a bonding arm; R represents a hydrogen atom or a monovalent organic group having 1 to 20 carbon atoms; and W1 represents a hydroxyl group, an alkyloxy group having 1 to 10 carbon atoms, or an organic group having at least one aromatic ring optionally having a substituent. A composition for forming an organic film, the composition containing a polymer with high carbon content and thermosetting property as to enable high etching resistance and excellent twisting resistance; a patterning process using the composition; and a polymer suitable for the composition for forming an organic film.
    Type: Application
    Filed: May 14, 2020
    Publication date: November 19, 2020
    Applicant: SHIN-ETSU CHEMICAL CO., LTD.
    Inventors: Daisuke KORI, Takayoshi NAKAHARA, Takashi SAWAMURA, Hironori SATOH, Yasuyuki YAMAMOTO
  • Publication number: 20200356007
    Abstract: A composition for forming an organic film contains a polymer having a partial structure shown by the following general formula (1A), and an organic solvent. The polymer is crosslinked by dehydrogenative coupling reaction involving hydrogen atoms located at the trityl position on the fluorene ring in each partial structure.
    Type: Application
    Filed: April 7, 2020
    Publication date: November 12, 2020
    Applicant: SHIN-ETSU CHEMICAL CO., LTD.
    Inventors: Daisuke KORI, Takayoshi NAKAHARA, Yasuyuki YAMAMOTO, Hironori SATOH, Tsutomu OGIHARA
  • Patent number: 10416563
    Abstract: A resist underlayer film composition is excellent in resistance to a basic hydrogen peroxide aqueous solution in gap-filling and planarization characteristics having a dry etching characteristic; a patterning process and method for forming a resist underlayer film, wherein the resist underlayer film composition is used for a multilayer resist method, the composition comprising: (a1) one, or two or more, of a compound represented by following general formula (x); and (b) an organic solvent, wherein n01 represents an integer of 1 to 10; when n01 is 2, w represents a sulfinyl group, a sulfonyl group, an ether group, or a divalent organic group having 2 to 50 carbon atoms; when n01 is an integer other than 2, w represents an n01-valent organic group having 2 to 50 carbon atoms; and y represents a single bond or divalent connecting group having 1 to 10 carbon atoms and optionally having an oxygen atom.
    Type: Grant
    Filed: March 8, 2018
    Date of Patent: September 17, 2019
    Assignee: SHIN-ETSU CHEMICAL CO., LTD.
    Inventors: Hironori Satoh, Hiroko Nagai, Takeru Watanabe, Daisuke Kori, Tsutomu Ogihara
  • Publication number: 20190258160
    Abstract: A resist composition is provided comprising (A) a metal compound having formula (A-1), a hydrolysate or hydrolytic condensate thereof, or the reaction product of the metal compound, hydrolysate or hydrolytic condensate thereof with a di- or trihydric alcohol having formula (A-2), and (B) a sensitizer containing a compound having formula (B-1). The resist composition is adapted to change a solubility in developer upon exposure to high-energy radiation, has high resolution and sensitivity, and forms a pattern of good profile with minimal edge roughness after exposure.
    Type: Application
    Filed: February 13, 2019
    Publication date: August 22, 2019
    Applicant: Shin-Etsu Chemical Co., Ltd.
    Inventors: Hironori Satoh, Tsukasa Watanabe, Seiichiro Tachibana, Satoshi Watanabe, Tsutomu Ogihara
  • Publication number: 20180284614
    Abstract: A resist underlayer film composition is excellent in resistance to a basic hydrogen peroxide aqueous solution in gap-filling and planarization characteristics having a dry etching characteristic; a patterning process and method for forming a resist underlayer film, wherein the resist underlayer film composition is used for a multilayer resist method, the composition comprising: (a1) one, or two or more, of a compound represented by following general formula (x); and (b) an organic solvent, wherein n01 represents an integer of 1 to 10; when n01 is 2, w represents a sulfinyl group, a sulfonyl group, an ether group, or a divalent organic group having 2 to 50 carbon atoms; when n01 is an integer other than 2, w represents an n01-valent organic group having 2 to 50 carbon atoms; and y represents a single bond or divalent connecting group having 1 to 10 carbon atoms and optionally having an oxygen atom.
    Type: Application
    Filed: March 8, 2018
    Publication date: October 4, 2018
    Applicant: SHIN-ETSU CHEMICAL CO., LTD.
    Inventors: Hironori SATOH, Hiroko NAGAI, Takeru WATANABE, Daisuke KORI, Tsutomu OGIHARA
  • Patent number: 8889264
    Abstract: The present invention provides a hot dip plated high strength steel sheet comprising a cold rolled steel sheet and a hot dip plated layer formed on the surface thereof, characterized in that the cold rolled steel sheet contains, by mass %, C: 0.0005 to 0.0050%, Si: over 0.3 to 1.0%, Mn: 0.70 to 2.0%, P: 0.05% or less, Ti: 0.010 to 0.050%, Nb: 0.010 to 0.040%, B: 0.0005 to 0.0030%, S: 0.010% or less, Al: 0.01 to 0.30%, and N: 0.0010 to 0.01%, and a balance of Fe and unavoidable impurities, and the cold rolled steel sheet has a value of TB* defined by the equation TB*=(0.11?[Ti])/(ln ([B]×10000)) of 0.03 to 0.06, and P is present in an amount of [P]?10×[B]+0.03, where [Ti] is the Ti content in mass percent, [B] is the B content in mass percent, and [P] is the P content in mass percent.
    Type: Grant
    Filed: April 11, 2008
    Date of Patent: November 18, 2014
    Assignee: Nippon Steel & Sumitomo Metal Corporation
    Inventors: Hironori Satoh, Masayuki Abe, Yasuto Goto, Shinichi Yamaguchi
  • Publication number: 20100104890
    Abstract: The present invention provides hot dip plated high strength steel sheet for press forming use having a tensile strength of 380 MPa to less than 540 MPa, having a press formability able to be used for the automobile field, in particular fuel tank applications, and having superior secondary work embrittlement resistance and superior seam weld zone low temperature toughness and further superior plateability and a method of production of the same and provides hot dip plated high strength steel sheet for press forming use of the present invention having cold rolled steel sheet and a hot dip plated layer formed on the surface of said cold rolled steel sheet, characterized in that said cold rolled steel sheet contains, by mass %, C: 0.0005 to 0.0050%, Si: over 0.3 to 1.0%, Mn: 0.70 to 2.0%, P: 0.05% or less, Ti: 0.010 to 0.050%, Nb: 0.010 to 0.040%, B: 0.0005 to 0.0030%, S: 0.010% or less, Al: 0.01 to 0.30%, and N: 0.0010 to 0.
    Type: Application
    Filed: April 11, 2008
    Publication date: April 29, 2010
    Inventors: Hironori Satoh, Masayuki Abe, Yasuto Goto, Shinichi Yamaguchi
  • Patent number: 7510530
    Abstract: A pressing cuff presses a pressure sensor above an artery. The level of the pressure applied to the pressure sensor is changed while the pulse wave is measured based on information about the pressure from the pressure sensor. In order to adjust the level of the applied pressure using the pressure of gas in the pressing cuff, a three-port valve and a two-port valve are controlled so that the connection is changed to establish a state of holding the amount of the gas in the pressing cuff. Then, the state is changed to a state of isolating and discharging gas in which a part of the held gas is isolated from the remaining amount of the gas to be discharged. Then, the state is changed to the state of holding the remaining amount of gas in the pressing cuff.
    Type: Grant
    Filed: September 23, 2004
    Date of Patent: March 31, 2009
    Assignee: Omron Healthcare Co., Ltd.
    Inventors: Masao Hashimoto, Kazuhisa Tanabe, Hironori Satoh, Takashi Inagaki, Ryo Fukui
  • Patent number: 7291113
    Abstract: A pulse wave measuring apparatus obtains the N-th derivative of a measured pulse waveform. The pulse waveform is classified into waveforms ?-? in accordance with the presence/absence of a shoulder (inflection point) at a rising phase of a pulse waveform of one beat, and also in accordance with the presence/absence of a shoulder in a falling phase. In each classified waveform, each calculated characteristic point of the N-th derivative corresponds to a traveling wave or reflected wave. The pulse wave measuring apparatus can calculate an AI value or the like that is the characteristic value of a pulse wave using such characteristic points and calculation equation of each waveform.
    Type: Grant
    Filed: April 13, 2004
    Date of Patent: November 6, 2007
    Assignee: Omron Healthcare Co., Ltd.
    Inventors: Hironori Satoh, Tomoki Kitawaki
  • Patent number: 7229414
    Abstract: A pulse wave measuring apparatus extracts a direct current component from a pressure value obtained from a sensor pressure, and defines the pressurization force of the cuff as the optimum pressurization force when that direct current component is stable. Following determination of the optimum pressurization force, the pulse wave measuring apparatus monitors whether the direct current component obtained from the pressure sensor is optimum or not, and adjusts the pressure, when not. By determining the rising sharpness of the peak and waveform distortion in the sphygmographic waveform, determination is made whether the pressurization force of the cuff is appropriate or not to carry out further adjustment of pressure, as necessary.
    Type: Grant
    Filed: April 13, 2004
    Date of Patent: June 12, 2007
    Assignee: Omron Healthcare Co., Ltd.
    Inventors: Hironori Satoh, Tomoki Kitawaki, Yoshinori Miyawaki
  • Patent number: 7112174
    Abstract: A sensor array having a plurality of pressure sensors arranged on a measurement surface, a pressurization portion for pressing the sensor array laid across an artery of a living body, a sensor signal selection portion for selecting a pressure signal among pressure signals from the plurality of pressure sensors, a filter portion having a cutoff frequency variable corresponding to an instruction, and a filter control portion for providing an instruction to vary a value of the cutoff frequency are included. The filter control portion switches the cutoff frequency in a situation wherein a plurality of pressure signals respectively obtained from the plurality of pressure sensors are successively switched and output by the sensor signal selection portion to specify the pressure sensor for pulse wave detection, and in a situation wherein the pulse wave is detected from the specified pressure sensor.
    Type: Grant
    Filed: May 26, 2005
    Date of Patent: September 26, 2006
    Assignee: Omron Healthcare Co., Ltd.
    Inventors: Hironori Satoh, Takashi Inagaki, Ryo Fukui
  • Patent number: 7074193
    Abstract: A pressure sensor for detecting a pulse wave, a digital conversion unit for converting a pressure signal from the pressure sensor into a digital signal, and a fourth derivative filter having an adjustable frequency characteristic for obtaining a fourth derivative wave of an original waveform based on the digital signal generated by the conversion by the digital conversion unit are provided. Local extrema of the fourth derivative wave in a section of the pulse wave corresponding to one beat are calculated. Based on the calculated local extrema, an early systolic component and a late systolic component are calculated.
    Type: Grant
    Filed: June 10, 2005
    Date of Patent: July 11, 2006
    Assignee: Omron Healthcare Co., Ltd.
    Inventors: Hironori Satoh, Takashi Inagaki, Akira Oshiumi
  • Publication number: 20050283087
    Abstract: A sensor unit is brought into contact with a surface of a living body to detect a pulse wave of an artery directly below. A CPU extracts a characteristic point of the pulse wave detected and obtains a second systolic component in the pulse wave using the characteristic point extracted. Then, a variation with time in a systolic blood pressure of a central artery of the living body is estimated using the second systolic component obtained, and an estimated variation with time in the systolic blood pressure is displayed on a display portion. For estimation of the systolic blood pressure, arithmetic with a linear transformation is applied using the second systolic component obtained and a blood pressure of a peripheral artery which is measured beforehand with an electronic sphygmomanometer.
    Type: Application
    Filed: June 14, 2005
    Publication date: December 22, 2005
    Applicant: OMRON Healthcare Co., Ltd.
    Inventors: Kenji Takazawa, Hironori Satoh, Yoshinori Miyawaki, Tatsuya Kobayashi, Shogo Sawada
  • Publication number: 20050283086
    Abstract: A pressure sensor for detecting a pulse wave, a digital conversion unit for converting a pressure signal from the pressure sensor into a digital signal, and a fourth derivative filter having an adjustable frequency characteristic for obtaining a fourth derivative wave of an original waveform based on the digital signal generated by the conversion by the digital conversion unit are provided. Local extrema of the fourth derivative wave in a section of the pulse wave corresponding to one beat are calculated. Based on the calculated local extrema, an early systolic component and a late systolic component are calculated.
    Type: Application
    Filed: June 10, 2005
    Publication date: December 22, 2005
    Applicant: Omron Healthcare Co., Ltd.
    Inventors: Hironori Satoh, Takashi Inagaki, Akira Oshiumi
  • Publication number: 20050267375
    Abstract: A sensor array having a plurality of pressure sensors arranged on a measurement surface, a pressurization portion for pressing the sensor array laid across an artery of a living body, a sensor signal selection portion for selecting a pressure signal among pressure signals from the plurality of pressure sensors, a filter portion having a cutoff frequency variable corresponding to an instruction, and a filter control portion for providing an instruction to vary a value of the cutoff frequency are included. The filter control portion switches the cutoff frequency in a situation wherein a plurality of pressure signals respectively obtained from the plurality of pressure sensors are successively switched and output by the sensor signal selection portion to specify the pressure sensor for pulse wave detection, and in a situation wherein the pulse wave is detected from the specified pressure sensor.
    Type: Application
    Filed: May 26, 2005
    Publication date: December 1, 2005
    Applicant: Omron Healthcare Co., Ltd.
    Inventors: Hironori Satoh, Takashi Inagaki, Ryo Fukui