Abstract: A vibration energy harvester includes: a first electrode; and a second electrode that can be displaced relative to the first electrode along a predetermined vibrating direction. At least either of a surface of the first electrode and a surface of the second electrode facing opposite each other is electrically charged. Power is generated as the second electrode becomes displaced causing a change in electrostatic capacitance between the first electrode and the second electrode. A range having included therein at least a vibrational center of the second electrode, over which the electrostatic capacitance remains unchanged even as the second electrode is displaced, is set.

Abstract: An electret element includes: an Si layer, an SiO2 layer formed at a surface of the Si layer; and an electret formed at the SiO2 layer near an interface of the SiO2 layer and the Si layer.

Abstract: A vibration-driven energy harvester includes: a fixed electrode; a movable electrode that is disposed so as to face opposite the fixed electrode and is allowed to move relative to the fixed electrode; and an ionic liquid disposed between the fixed electrode and the movable electrode which face opposite each other, wherein: power is generated as an external vibration moves the movable electrode, causing a change in at least one of an area of an electrical double layer formed on two sides of an interface of the fixed electrode and the ionic liquid and an area of an electrical double layer formed on two sides of an interface of the movable electrode and the ionic liquid.

Abstract: An actuator includes: an electrostatic actuation mechanism including a stationary electrode and a movable electrode; a first movable part driven by the electrostatic actuation mechanism; a first elastic support part that elastically supports the first movable part; an electret formed in at least one of the stationary electrode and the movable electrode; and a drive control unit that controls application of voltage to the electrostatic actuation mechanism. In the actuator a plurality of stable states are set in which the first movable part is positioned at a stable position at which an electrostatic force generated by the electret matches with an elastic force exerted by the first elastic support part or at a stable position near such stable position. By applying a voltage to the electrostatic actuation mechanism, the first movable part may be displaced from any stable position to another stable position.

Abstract: A vibration energy harvester includes: a pair of electrodes provided so as to face opposite each other, with at least one of the pair of electrodes allowed to move; and an ion gel provided between the pair of electrodes, which is formed by using an ionic liquid, wherein: as an external vibration causes the electrode to move along a direction in which a distance between the pair of electrodes changes, power is generated through a change in an area of an electric double layer formed on two sides of an interface of each electrode and the ion gel.

Abstract: A vibration energy harvester includes: a first electrode; and a second electrode that can be displaced relative to the first electrode along a predetermined vibrating direction. At least either of a surface of the first electrode and a surface of the second electrode facing opposite each other is electrically charged. Power is generated as the second electrode becomes displaced causing a change in electrostatic capacitance between the first electrode and the second electrode. A range having included therein at least a vibrational center of the second electrode, over which the electrostatic capacitance remains unchanged even as the second electrode is displaced, is set.

Abstract: A pressure sensor includes: a fixed part; a ring-like oscillator that is supported on the fixed part by a plurality of support beams; a plurality of electrodes that are provided on the fixed part and arranged in an oscillating direction of the ring-like oscillator with a gap; electret films that are formed on either one of opposite surfaces of the ring-like oscillator and the electrodes.

Abstract: An electret element includes: an Si layer, an SiO2 layer formed at a surface of the Si layer; and an electret formed at the SiO2 layer near an interface of the SiO2 layer and the Si layer.

Abstract: A vibration energy harvester includes: a pair of electrodes provided so as to face opposite each other, with at least one of the pair of electrodes allowed to move; and an ion gel provided between the pair of electrodes, which is formed by using an ionic liquid, wherein: as an external vibration causes the electrode to move along a direction in which a distance between the pair of electrodes changes, power is generated through a change in an area of an electric double layer formed on two sides of an interface of each electrode and the ion gel.

Abstract: A device member including a cavity, includes a base member, an interlayer, an upper layer, an opening portion, and a gas-permeable sealing layer. The base member includes a first semiconductor. The interlayer is formed on the base member and is non-conductive. The upper layer is formed on the interlayer and includes a second semiconductor. The opening portion is formed at the upper layer. The gas-permeable sealing layer is formed to seal the opening portion formed at the upper layer. The cavity is formed by removing the interlayer with an etching gas that penetrates through the sealing layer.

Abstract: A vibration-driven energy harvester includes: a fixed electrode; a movable electrode that is disposed so as to face opposite the fixed electrode and is allowed to move relative to the fixed electrode; and an ionic liquid disposed between the fixed electrode and the movable electrode which face opposite each other, wherein: power is generated as an external vibration moves the movable electrode, causing a change in at least one of an area of an electrical double layer formed on two sides of an interface of the fixed electrode and the ionic liquid and an area of an electrical double layer formed on two sides of an interface of the movable electrode and the ionic liquid.

Abstract: A pressure sensor includes: a fixed part; a ring-like oscillator that is supported on the fixed part by a plurality of support beams; a plurality of electrodes that are provided on the fixed part and arranged in an oscillating direction of the ring-like oscillator with a gap; electret films that are formed on either one of opposite surfaces of the ring-like oscillator and the electrodes.

Abstract: An actuator includes: an electrostatic actuation mechanism including a stationary electrode and a movable electrode; a first movable part driven by the electrostatic actuation mechanism; a first elastic support part that elastically supports the first movable part; an electret formed in at least one of the stationary electrode and the movable electrode; and a drive control unit that controls application of voltage to the electrostatic actuation mechanism. In the actuator a plurality of stable states are set in which the first movable part is positioned at a stable position at which an electrostatic force generated by the electret matches with an elastic force exerted by the first elastic support part or at a stable position near such stable position. By applying a voltage to the electrostatic actuation mechanism, the first movable part may be displaced from any stable position to another stable position.

Abstract: [Problem] The enclosing layer is not invaded in the gap, and the gap might not be buried, and the cavity which has the predetermined shape to be aimed can be formed by an easy step. [Resolution Approach] In the invention, comprising; the base member including the semiconductor 12, the interlayer 14, which is formed on the base member 12 and has the nonconductivity, the upper layer 16, which is formed on the interlayer 14 and includes the semiconductor, the opening portion 18 formed to the upper layer 16, the gas-permeable sealing layer 20, which is formed to seal the opening portion 18, wherein the cavity 22 is a cavity which is formed by removing the interlayer 14 with an etching gas that is penetrated through the sealing layer 20.

Abstract: A mechanical - hydraulic transmission for a crawler-type vehicle is provided having a reduced dimension in a widthwise direction perpendicular to input/output shafts and capable of ready installation on an existent crawler steering device. The transmission is arranged such that a power input shaft (1), directly connected to a prime mover, an intermediate shaft (9) and an output shaft (19), are concentrically related and arranged in a longitudinal column. Normal- and reverse-rotation planetary gear devices (5, 6), having respective clutches (7, 8) thereof, are mounted on a periphery of the power input shaft (1), and the power input shaft (1) is connected to a variable displacement hydraulic pump (2).