Abstract: This invention provides a wafer processing method comprising a process of irradiating a wafer to be processed placed on the upper surface of a sample table arranged in a processing chamber with light or electromagnetic waves to heat and remove a compound layer of a film layer that is preliminarily formed on the upper surface of the film layer of the upper surface of the wafer, wherein in the process, by receiving the light or electromagnetic waves reflected by the upper surface of the wafer, a signal indicating a temporal change in intensity using the wavelength of the light or electromagnetic waves as a parameter is corrected using information of the intensity of the light or electromagnetic waves detected by receiving the light or electromagnetic waves at a position on the circumferential side of the upper surface of the sample table.

Abstract: A power supply control device includes: a power generator that converts energy into power; an environmental sensor that detects a state of an ambient environment; and a controller that controls an operation timing of a functional circuit that operates upon receipt of power supplied from the power generator based on the state of the ambient environment detected by the environmental sensor.

Abstract: A power supply apparatus includes, a power generating circuit that converts energy to power and output a voltage of the power, a first switch installed on either or both of a pair of power lines, a first switch control circuit that controls the first switch based on the level of the voltage, a second switch installed on a branched line coupled to the pair of power lines, a second switch control circuit that controls the second switch based on the level of the voltage, and controls the second switch so that the second switch is repeatedly turned on and off when a power storage circuit is charged with power generated by the power generating circuit, and the power storage circuit installed on the branched line and coupled to the power generating circuit when the first switch and the second switch are set to ON states.

Abstract: A power supply control device includes: a power generator that converts energy into power; an environmental sensor that detects a state of an ambient environment; and a controller that controls an operation timing of a functional circuit that operates upon receipt of power supplied from the power generator based on the state of the ambient environment detected by the environmental sensor.

Abstract: A power supply control device includes: a power generator that converts energy into power; an environmental sensor that detects a state of an ambient environment; and a controller that controls an operation timing of a functional circuit that operates upon receipt of power supplied from the power generator based on the state of the ambient environment detected by the environmental sensor.

Abstract: A charging circuit includes a first energy harvesting element that performs energy harvesting and supplies a current to a power storage element, a second energy harvesting element that performs energy harvesting, the second energy harvesting element is made in materials same as the first energy harvesting element, and a first switch that is disposed in a current path between the first energy harvesting element and the power storage element and that is put into an off-state, in a case where a first output voltage of the second energy harvesting element is smaller than a first value, thereby cutting off the current path.

Abstract: A remaining battery power measuring device includes a memory and a processor coupled to the memory and configured to detect an operation time period of an object that is to be measured and intermittently operates by power supplied from a battery, adjust time when a battery voltage of the battery is measured, based on the operation time period detected by the processor and measure the battery voltage at the time adjusted by the processor.

Abstract: A power supply controller controlling a connection between a power source and a capacitor coupled between a first node and a second node and a load circuit operating with electric charge of the capacitor, includes a first controller configured to output a first control signal in accordance with an electric potential difference between the first node and the second node, a first switch configured to couple or uncouple the capacitor to or from the load circuit in response to the first control signal, a first resistor coupled between the first node and the first controller, a second resistor coupled between a node being located between the first resistor and the first controller and a third node for outputting the first control signal, and a second switch coupled in parallel to the first resistor and putting into on or off state in response to the first control signal.

Abstract: A power supply control device includes: a power generator that converts energy into power; an environmental sensor that detects a state of an ambient environment; and a controller that controls an operation timing of a functional circuit that operates upon receipt of power supplied from the power generator based on the state of the ambient environment detected by the environmental sensor.

Abstract: There is provided an overvoltage protection circuit including: a comparator configured to compare a DC voltage supplied to a first load by a power generator with a first value set based on an upper limit of an operating voltage of the first load; a storage element configured to be charged with a portion of a current generated by the power generator; and a switch configured to change a flow of the current so that: when the DC voltage is higher than the first value, the portion of the current is supplied to the storage element and a second load coupled to the storage element in parallel, and when the DC voltage is less than or equal to the first value, the storage element supplies the second load with power.

Abstract: A power supply control circuit includes: a power supply control switch provided between a load and a capacitor which stores power from an energy harvester in which a plurality of power generation cells are coupled in series and supplies stored power to the load and configured to select whether or not to supply the stored power in the capacitor to the load; and a controller configured to control the power supply control switch based on a first potential extracted from a first coupling node of the plurality of power generation cells and a second potential extracted from a second coupling node different from the first coupling node.

Abstract: A power supply apparatus includes, a power generating circuit that converts energy to power and output a voltage of the power, a first switch installed on either or both of a pair of power lines, a first switch control circuit that controls the first switch based on the level of the voltage, a second switch installed on a branched line coupled to the pair of power lines, a second switch control circuit that controls the second switch based on the level of the voltage, and controls the second switch so that the second switch is repeatedly turned on and off when a power storage circuit is charged with power generated by the power generating circuit, and the power storage circuit installed on the branched line and coupled to the power generating circuit when the first switch and the second switch are set to ON states.

Abstract: A power supply control circuit includes: a power supply control switch provided between a load and a capacitor which stores power from an energy harvester in which a plurality of power generation cells are coupled in series and supplies stored power to the load and configured to select whether or not to supply the stored power in the capacitor to the load; and a controller configured to control the power supply control switch based on a first potential extracted from a first coupling node of the plurality of power generation cells and a second potential extracted from a second coupling node different from the first coupling node.

Abstract: A power supply controller controlling a connection between a power source and a capacitor coupled between a first node and a second node and a load circuit operating with electric charge of the capacitor, includes a first controller configured to output a first control signal in accordance with an electric potential difference between the first node and the second node, a first switch configured to couple or uncouple the capacitor to or from the load circuit in response to the first control signal, a first resistor coupled between the first node and the first controller, a second resistor coupled between a node being located between the first resistor and the first controller and a third node for outputting the first control signal, and a second switch coupled in parallel to the first resistor and putting into on or off state in response to the first control signal.

Abstract: A circuit includes a PMOS transistor having a source coupled to an input node and a drain coupled to an output node, a control circuit operating with a voltage of an internal line to control a gate voltage of the PMOS transistor, a comparator operating with the voltage of the internal line to cause a comparator output to change from a first state to a second state in response to a drop of voltage of the input node, a switch circuit configured to connect the input node to the internal line when the comparator output is in the first state, and to connect the output node to the internal line when the comparator output is in the second state, and a block circuit configured to block a path from the output node to the input node through the PMOS transistor when the comparator output is in the second state.

Abstract: A charging circuit includes a first energy harvesting element that performs energy harvesting and supplies a current to a power storage element, a second energy harvesting element that performs energy harvesting, the second energy harvesting element is made in materials same as the first energy harvesting element, and a first switch that is disposed in a current path between the first energy harvesting element and the power storage element and that is put into an off-state, in a case where a first output voltage of the second energy harvesting element is smaller than a first value, thereby cutting off the current path.

Abstract: There is provided an overvoltage protection circuit including: a comparator configured to compare a DC voltage supplied to a first load by a power generator with a first value set based on an upper limit of an operating voltage of the first load; a storage element configured to be charged with a portion of a current generated by the power generator; and a switch configured to change a flow of the current so that: when the DC voltage is higher than the first value, the portion of the current is supplied to the storage element and a second load coupled to the storage element in parallel, and when the DC voltage is less than or equal to the first value, the storage element supplies the second load with power.

Abstract: A power control circuit includes: a differential voltage monitor configured to monitor a differential voltage between a first voltage and a second voltage, and control a switching element to be turned on and off, wherein the differential voltage monitor controls the switching element in such a manner that in a case where the differential voltage is increased, when the differential voltage is lower than a first reference voltage, the switching element is turned off, and when the differential voltage is equal to or higher than the first reference voltage, the switching element is turned on, and in a case where the differential voltage is decreased, when the differential voltage is higher than a second reference voltage, the switching element is turned on, and when the differential voltage is equal to or lower than the second reference voltage, the switching element is turned off.

Abstract: A hysteresis comparator circuit includes: a first switch that is coupled between a power supply line and an output terminal, is turned off when a supplied voltage on the power supply line is below a first value and is turned on when the supplied voltage is equal to or above the first value; a second switch coupled between the output terminal and a reference power line at a reference potential; and a control circuit that includes a third switch coupled between the power supply line and the reference power line. The third switch is turned off when the supplied voltage is below a second value that is smaller than the first value, and is turned on when the supplied voltage is equal to or above the second value. The control circuit turns the second switch on when the third switch is off, and turns the second switch off when the third switch is on.

Abstract: A power supply apparatus including: a boost converter configured to generate a power supply voltage to drive to a load circuit from a voltage received from a voltage generation unit; an oscillator configured to receive the minute voltage, and to generate an alternating current signal; and a signal conversion circuit which further includes a half-wave generation circuit configured to receive the alternating current signal, and to generate a half-wave signal of a high potential side or a low potential side, and at least one inverter configured to receive the generated half-wave signal, and to generate a pulse signal; wherein the boost converter is driven by the pulse signal output from the signal conversion circuit in order to generate the power supply voltage.