Abstract: Embodiments of methods are provided for thermal dry etching of a ruthenium (Ru) metal layer. In the disclosed embodiments, a substrate containing a Ru metal layer formed thereon is exposed to a gas pulse sequence, while the substrate is held at a relatively high substrate temperature (e.g., a temperature greater than or equal to about 160° C.), to provide thermal etching of the Ru metal layer. As described further herein, the gas pulse sequence may generally include a plurality of gas pulses, which are supplied to the substrate sequentially with substantially no overlap between gas pulses. The gas pulses supplied to the substrate form: (i) volatile reaction products that are vaporized from the Ru surface, and (ii) non-volatile oxide surface layers that are removed from the Ru surface by the next gas pulse, resulting in atomic layer etching (ALE) of the Ru metal layer.

Abstract: A method for filling recessed features with a low-resistivity metal includes providing a patterned substrate containing a recessed feature formed in a first layer and a second layer that is exposed in the recessed feature, pre-treating the substrate with a surface modifier that increases metal deposition selectivity on the second layer relative to on the first layer, and depositing a metal layer on the substrate by vapor phase deposition, where the metal layer is preferentially deposited on the second layer in the recessed feature. The method further includes removing metal nuclei deposited on the first layer, including on a field area and on sidewalls of the first layer in the recessed feature, to selectively form the metal layer on the second layer in the recessed feature, where the removing includes exposing the patterned substrate to an etching gas containing ozone.

Abstract: A method of manufacturing a semiconductor device having a metal oxide film with workpiece accommodated in a chamber, includes: supplying a precursor gas containing a metal complex into the chamber to form a precursor layer on the workpiece from the precursor gas; supplying an oxidizing gas into the chamber to oxidize the precursor layer so that a metal oxide layer is formed, the oxidizing gas being a gas containing H2O or a gas having a functional group containing hydrogen atoms in the metal complex and containing an oxidant to generate H2O by reaction with the functional group; supplying an H2O removal gas containing alcohols or amines into the chamber to remove H2O adsorbed onto the metal oxide layer; and executing a plurality of cycles each including the supplying a precursor gas and the supplying an oxidizing gas. At least some of the cycles includes the supplying an H2O removal gas.

Abstract: A method of manufacturing a semiconductor device having a metal oxide film with workpiece accommodated in a chamber, includes: supplying a precursor gas containing a metal complex into the chamber to form a precursor layer on the workpiece from the precursor gas; supplying an oxidizing gas into the chamber to oxidize the precursor layer so that a metal oxide layer is formed, the oxidizing gas being a gas containing H2O or a gas having a functional group containing hydrogen atoms in the metal complex and containing an oxidant to generate H2O by reaction with the functional group; supplying an H2O removal gas containing alcohols or amines into the chamber to remove H2O adsorbed onto the metal oxide layer; and executing a plurality of cycles each including the supplying a precursor gas and the supplying an oxidizing gas. At least some of the cycles includes the supplying an H2O removal gas.

Abstract: There is provided a method for planarizing irregularities in a surface of a grapheme layer formed on a substrate, including: planarizing the grapheme layer by removing graphene constituting a convex portion in the surface of the grapheme layer by anisotropically etching the grapheme layer using a plasma etching in an in-plane direction from an edge portion of the graphene.

Abstract: An aspect of the present invention relates to an eyeglass lens, which comprises an outermost layer in the form of a water-repellent vapor deposition film formed by vapor depositing a vapor deposition material in the form of a perfluoropolyether-modified silane compound denoted by general formula (I): wherein, in general formula (I), R1 denotes an alkyl group with 1 or 2 carbon atoms, x denotes 1 or 0, R2 denotes an alkoxy group with 1 or 2 carbon atoms, R3 denotes a hydrogen atom or a phenyl group, and n denotes an integer ranging from 10 to 40.

Abstract: An aspect of the present invention relates to an eyeglass lens, which comprises an outermost layer in the form of a water-repellent vapor deposition film formed by vapor depositing a vapor deposition material in the form of a perfluoropolyether-modified silane compound denoted by general formula (I): wherein, in general formula (I), R1 denotes an alkyl group with 1 or 2 carbon atoms, x denotes 1 or 0, R2 denotes an alkoxy group with 1 or 2 carbon atoms, R3 denotes a hydrogen atom or a phenyl group, and n denotes an integer ranging from 10 to 40.

Abstract: A multi-layer photoelectric conversion device and technology is disclosed. A first photoelectric converter is separated from a second photoelectric converter by an insulative layer. The photoelectric converters may be of a variety of types, and the insulative layer provides protection to reduce pinhole faults in the multi-layer photoelectric conversion device.

Abstract: An electric wire with terminal connector including an electric wire having a core wire including a plurality of wires and a female terminal connector including a wire barrel that is crimped onto the core wire exposed from the electric wire, the following steps are executed. The steps include a step of removing wire insulation covering an outer peripheral surface of the core wire to expose the core wire, a step of holding the exposed core wire with jigs provided in a pair and applying ultrasonic vibration to the core wire via the jigs, and a step of crimping the wire barrel so as to surround a part of the core wire to which the ultrasonic vibration is applied.

Abstract: A multi-layer photoelectric conversion device and technology is disclosed. A first photoelectric converter is separated from a second photoelectric converter by an insulative layer. The photoelectric converters may be of a variety of types, and the insulative layer provides protection to reduce pinhole faults in the multi-layer photoelectric conversion device.

Abstract: This invention provides a photoelectric transducer comprising a light transparent substrate, a light transparent conductive layer provided on the light transparent substrate and a porous semiconductor layer provided on the light transparent conductive layer. The porous semiconductor layer can absorb coloring matter and contains an electrolyte. The photoelectric transducer further comprises a porous spacer layer containing an electrolyte provided on the porous semiconductor layer and a counter electrode layer provided on the porous spacer layer. According to the above constitution, the thickness of the electrolyte layer is determined by the thickness of the spacer layer containing the electrolyte unlike the prior art technique in which the thickness of the electrolyte layer is determined by spacing between two substrates. Accordingly, the electrolyte layer can be formed thinly and evenly and can enhance the photoelectric conversion efficiency and the reliability.

Abstract: A photoelectric conversion device 1 comprises a laminated body comprising a conducting substrate 2, and an opposing electrode layer 3, a porous spacer layer 5 containing an electrolyte 4, a porous semiconductor layer 7 that adsorbs a dye 6 and contains the electrolyte 4 and a light-transmitting conductive layer 8 respectively laminated in this order on the conducting substrate 2. Consequently, the thickness of the electrolyte layer determined previously by a gap between two substrates is allowed to be determined according to the thickness of a spacer layer containing an electrolyte 4, and thus the electrolyte layer can be made both thin and uniform, and the conversion efficiency and reliability can be improved.

Abstract: Slide compound saws (1, 100, 150) may include a table (3b) defining a table surface. A saw unit (20) may be pivotable relative to the table surface. A first slide bar (31, 51, 251, 351) may be slidably coupled to the table and may be disposed substantially in parallel with the table surface. The first slide bar may define a first sliding distance (S1) of the saw unit in a direction substantially parallel to the table surface. A sliding device (24, 33, 52, 61, 62, 252, 352) may slidably couple the first slide bar to the saw unit. The sliding device may define a second sliding distance (S2) of the saw unit in the direction substantially parallel to the table surface. Preferably, the saw unit can slide up to a distance S1 plus S2 in the direction substantially parallel to the table surface.

Abstract: A table saw includes a table for placing a workpiece thereon. A saw unit may be vertically movably supported on the table and may have a saw blade mounted thereon. A battery-driven motor may be mounted on the saw unit for rotatably driving the saw blade. A battery mounting device may be provided for mounting a battery on the table saw.

Abstract: Slide compound saws (1, 100, 150) may include a table (3b) defining a table surface. A saw unit (20) may be pivotable relative to the table surface. A first slide bar (31, 51, 251, 351) may be slidably coupled to the table and may be disposed substantially in parallel with the table surface. The first slide bar may define a first sliding distance (S1) of the saw unit in a direction substantially parallel to the table surface. A sliding device (24, 33, 52, 61, 62, 252, 352) may slidably couple the first slide bar to the saw unit. The sliding device may define a second sliding distance (S2) of the saw unit in the direction substantially parallel to the table surface. Preferably, the saw unit can slide up to a distance S1 plus S2 in the direction substantially parallel to the table surface.

Abstract: A table saw includes a table for placing a workpiece thereon. A saw unit may be vertically movably supported on the table and may have a saw blade mounted thereon. A battery-driven motor may be mounted on the saw unit for rotatably driving the saw blade. A battery mounting device may be provided for mounting a battery on the table saw.

Abstract: Slide compound saws (1, 100, 150) may include a table (3b) defining a table surface. A saw unit (20) may be pivotable relative to the table surface. A first slide bar (31, 51, 251, 351) may be slidably coupled to the table and may be disposed substantially in parallel with the table surface. The first slide bar may define a first sliding distance (S1) of the saw unit in a direction substantially parallel to the table surface. A sliding device (24, 33, 52, 61, 62, 252, 352) may slidably couple the first slide bar to the saw unit. The sliding device may define a second sliding distance (S2) of the saw unit in the direction substantially parallel to the table surface. Preferably, the saw unit can slide up to a distance S1 plus S2 in the direction substantially parallel to the table surface.

Abstract: The material for an electrical resistivity element contains at least 20 mass % and at most 60 mass % of nickel, less than 5 mass % of iron and the remaining part including unavoidable impurities and cobalt. The material for the electrical resistivity element is manufactured by preparing a composition that contains at least 20 mass % and at most 60 mass % of nickel, less than 5 mass % of iron and the remaining part including cobalt, melting and casting the composition to obtain an ingot, removing the surface of the ingot by hot working, and performing cold-working and heat treatment on the hot-worked body.

Abstract: The invention provides a glow plug with an electric resistor made of a material comprising 20 to 60% by weight nickel and less than 5% by weight iron and the balance of cobalt and unavoidable impurities. The glow plug pf the invention attains an excellent quick heating ability, a self-temperature control function, high oxidation resistance, long durability and good workability.

Abstract: The invention provides a glow plug with an electric resistor made of a material comprising 20 to 60% by weight nickel and less than 5% by weight iron and the balance of cobalt and unavoidable impurities. The glow plug of the invention attains an excellent quick heating ability, a self-temperature control function, high oxidation resistance, long durability and good workability.