Abstract: Provided is a confocal sensor having a wider measuring range. A confocal sensor 1 comprises: a light source 10 that emits light at a plurality of wavelengths; a diffractive lens 130 that causes a chromatic aberration with respect to the light along an optical axis and focuses the light onto an object 200 without another intervening lens; a pinhole 120 through which reflected light passes, the reflected light being a portion of the light that was focused onto and reflected from the object 200 and focused by the diffractive lens 130; and a measuring unit 40 that measures the distance from the diffractive lens 130 to the object 200 on the basis of a wavelength of the reflected light. A distance L2 from the pinhole 120 to the diffractive lens 130 is variable.

Abstract: A white light confocal optical measurement device capable of detecting abnormalities in a received light waveform; the optical measurement device includes: a light source; an optical system; a light receiving unit; and a processor configured to compute the distance from the optical system to the measurement object on the basis of a received light intensity of the wavelength components received in the light receiving unit. The processor compares a received light intensity of a wavelength component to a reference value for the wavelength component for a plurality of wavelength components in a waveform representing the light received, and detects an abnormality in the received light waveform when the amount of change in the received light intensity compared to the reference value therefor is greater than or equal to a predetermined threshold for any wavelength component in the plurality of wavelength components.

Abstract: A white light confocal optical measurement device capable of detecting abnormalities in a received light waveform; the optical measurement device includes: a light source; an optical system; a light receiving unit; and a processor configured to compute the distance from the optical system to the measurement object on the basis of a received light intensity of the wavelength components received in the light receiving unit. The processor compares a received light intensity of a wavelength component to a reference value for the wavelength component for a plurality of wavelength components in a waveform representing the light received, and detects an abnormality in the received light waveform when the amount of change in the received light intensity compared to the reference value therefor is greater than or equal to a predetermined threshold for any wavelength component in the plurality of wavelength components.

Abstract: A white light confocal optical measurement device capable of detecting abnormalities in a received light waveform; the optical measurement device includes: a light source; an optical system; a light receiving unit; and a processor configured to compute the distance from the optical system to the measurement object on the basis of a received light intensity of the wavelength components received in the light receiving unit. The processor compares a received light intensity of a wavelength component to a reference value for the wavelength component for a plurality of wavelength components in a waveform representing the light received, and detects an abnormality in the received light waveform when the amount of change in the received light intensity compared to the reference value therefor is greater than or equal to a predetermined threshold for any wavelength component in the plurality of wavelength components.

Abstract: A wavelength-swept light source projects a light beam. An interferometer includes a splitting unit that splits the light beam projected from the wavelength-swept light source into light beams radiated toward a plurality of spots on a measurement target. Each of the interference beam is generated by interference between a measurement beam radiated toward the measurement target and reflected at the measurement beam, and a reference beam passing through an optical path that is at least partially different from an optical path of the measurement beam. A light-receiving unit receives the interference beams from the interferometer. A processor calculates distance to the measurement target by associating a detected peak of the interference beams with one of the spots. The optical path length difference between the measurement target and the reference beam is made different among the light beams split in correspondence with the plurality of spots.

Abstract: The optical measuring device includes a light source that outputs light of a plurality of wavelengths; a sensor head including a conversion lens that converts light incident via a light guide part, which includes a plurality of cores, into parallel light, and an objective lens that irradiates the light in which chromatic aberration is generated to a measurement object; and a spectroscope that acquires reflected light reflected by the measurement object and condensed by the sensor head via the light guide part and measures a spectrum of the reflected light. In the sensor head, a shield that shields light is arranged between the conversion lens and the objective lens to inhibit light emitted from one core among the plurality of cores included in the light guide part from entering cores other than the one core as the reflected light.

Abstract: Provided is a confocal sensor having a wider measuring range. A confocal sensor 1 comprises: a light source 10 that emits light at a plurality of wavelengths; a diffractive lens 130 that causes a chromatic aberration with respect to the light along an optical axis and focuses the light onto an object 200 without another intervening lens; a pinhole 120 through which reflected light passes, the reflected light being a portion of the light that was focused onto and reflected from the object 200 and focused by the diffractive lens 130; and a measuring unit 40 that measures the distance from the diffractive lens 130 to the object 200 on the basis of a wavelength of the reflected light. A distance L2 from the pinhole 120 to the diffractive lens 130 is variable.

Abstract: In one or more embodiments of an optical interference measurement apparatus, first return light received by a first measurement head is guided to a detector via a first optical path and a fiber coupler. Second return light received by a second measurement head is guided to the detector via a second optical path and the fiber coupler. Optical path lengths D1 and D2 from the fiber coupler to a leading end of the first measurement head and a leading end of the second measurement head respectively, a maximum optical path length R1max of the measurement range of the first measurement head, optical path lengths S1 and S2 of the first reference light that interferes with the first return light and of the second reference light that interferes with the second return light respectively are set such that the relation D1+R1max?S1<D2?S2 is satisfied.

Abstract: A white light confocal optical measurement device capable of detecting abnormalities in a received light waveform; the optical measurement device includes: a light source; an optical system; a light receiving unit; and a processor configured to compute the distance from the optical system to the measurement object on the basis of a received light intensity of the wavelength components received in the light receiving unit. The processor compares a received light intensity of a wavelength component to a reference value for the wavelength component for a plurality of wavelength components in a waveform representing the light received, and detects an abnormality in the received light waveform when the amount of change in the received light intensity compared to the reference value therefor is greater than or equal to a predetermined threshold for any wavelength component in the plurality of wavelength components.

Abstract: A confocal measurement device includes a light source that outputs white light, an optical coupler, a sensor head that applies light with a chromatic aberration caused therein to a measurement object, and a spectroscope that acquires reflected light which is reflected by the measurement object and measures a spectrum of the reflected light. The optical coupler is a filter type coupler or a spatial optical system type coupler that brings a first transmission waveform when light is transmitted from a first optical fiber cable to a second optical fiber cable and a second transmission waveform when light is transmitted from the second optical fiber cable to a third optical fiber cable close to each other.

Abstract: A white light confocal optical measurement device capable of detecting abnormalities in a received light waveform; the optical measurement device includes: a light source; an optical system; a light receiving unit; and a processor configured to compute the distance from the optical system to the measurement object on the basis of a received light intensity of the wavelength components received in the light receiving unit. The processor compares a received light intensity of a wavelength component to a reference value for the wavelength component for a plurality of wavelength components in a waveform representing the light received, and detects an abnormality in the received light waveform when the amount of change in the received light intensity compared to the reference value therefor is greater than or equal to a predetermined threshold for any wavelength component in the plurality of wavelength components.

Abstract: The optical measuring device includes a light source that outputs light of a plurality of wavelengths; a sensor head including a conversion lens that converts light incident via a light guide part, which includes a plurality of cores, into parallel light, and an objective lens that irradiates the light in which chromatic aberration is generated to a measurement object; and a spectroscope that acquires reflected light reflected by the measurement object and condensed by the sensor head via the light guide part and measures a spectrum of the reflected light. In the sensor head, a shield that shields light is arranged between the conversion lens and the objective lens to inhibit light emitted from one core among the plurality of cores included in the light guide part from entering cores other than the one core as the reflected light.

Abstract: A confocal measurement device includes a light source that outputs white light, an optical coupler, a sensor head that applies light with a chromatic aberration caused therein to a measurement object, and a spectroscope that acquires reflected light which is reflected by the measurement object and measures a spectrum of the reflected light. The optical coupler is a filter type coupler or a spatial optical system type coupler that brings a first transmission waveform when light is transmitted from a first optical fiber cable to a second optical fiber cable and a second transmission waveform when light is transmitted from the second optical fiber cable to a third optical fiber cable close to each other.

Abstract: A confocal measuring device capable of enlarging a measurement range using a compact device configuration is provided. A confocal measuring device (1A) is configured to include: a diffractive lens (11) that causes chromatic aberration in light emitted from a white LED light source (21); a diffractive lens (13b) that increases chromatic aberration of light passing through the diffractive lens (11); and an objective lens (12) that condenses light into a measurement target range such that the condensed light has chromatic aberration along an optical axis.

Abstract: A confocal measuring device capable of enlarging a measurement range using a compact device configuration is provided. A confocal measuring device (1A) is configured to include: a diffractive lens (11) that causes chromatic aberration in light emitted from a white LED light source (21); a diffractive lens (13b) that increases chromatic aberration of light passing through the diffractive lens (11); and an objective lens (12) that condenses light into a measurement target range such that the condensed light has chromatic aberration along an optical axis.

Abstract: To improve light use efficiency and thereby achieve even higher sampling rates. An optical measurement device includes: a light source configured to emit illumination light including a plurality of wavelength components; an optical system configured to introduce an axial chromatic aberration into the illumination light from the light source and to receive reflection light reflecting from a measurement object where at least a portion of the measurement object lies along a line extending from the optical axis of the optical system; a spectrometer for separating the reflection light received at the optical system into wavelength components, and a detector including a plurality of light receiving elements arranged one-dimensionally to correspond to the dispersion direction of the spectrometer.

Abstract: A white light confocal optical measurement device capable of detecting abnormalities in a received light waveform; the optical measurement device includes: a light source; an optical system; a light receiving unit; and a processor configured to compute the distance from the optical system to the measurement object on the basis of a received light intensity of the wavelength components received in the light receiving unit. The processor compares a received light intensity of a wavelength component to a reference value for the wavelength component for a plurality of wavelength components in a waveform representing the light received, and detects an abnormality in the received light waveform when the amount of change in the received light intensity compared to the reference value therefor is greater than or equal to a predetermined threshold for any wavelength component in the plurality of wavelength components.

Abstract: To improve light use efficiency and thereby achieve even higher sampling rates. An optical measurement device includes: a light source configured to emit illumination light including a plurality of wavelength components; an optical system configured to introduce an axial chromatic aberration into the illumination light from the light source and to receive reflection light reflecting from a measurement object where at least a portion of the measurement object lies along a line extending from the optical axis of the optical system; a spectrometer for separating the reflection light received at the optical system into wavelength components, and a detector including a plurality of light receiving elements arranged one-dimensionally to correspond to the dispersion direction of the spectrometer.