Abstract: Disclosed herein is a multi-channel device for detecting plasma at an ultra-fast speed, including: a first antenna module connected to a first output terminal in contact with a substrate on a chuck of a process chamber and extending to ground, and receiving a first leakage current leaking through the substrate to increase reception sensitivity of the leakage current; a first current detection module detecting the first leakage current; a current measurement module receiving the first leakage current output from the first current detection module, and extracting the received first leakage current for each predetermined period to generate a first leakage current measurement information; and a control module comparing the first leakage current measurement information with a reference value to generate first arcing occurrence information.

Abstract: An apparatus, system, and method for controlling data transfer to an output port of a serial data link interface in a semiconductor memory is disclosed. In one example, a flash memory device may have multiple serial data links, multiple memory banks and control input ports that enable the memory device to transfer the serial data to a serial data output port of the memory device. In another example, a flash memory device may have a single serial data link, a single memory bank, a serial data input port, a control input port for receiving output enable signals. The flash memory devices may be cascaded in a daisy-chain configuration using echo signal lines to serially communicate between memory devices.

Abstract: Determining a semiconductor device manufacturing parameter may include determining an EPM (electrical measurement parameters) group that has a correlation in a baseline EPM dataset including EPMs of a device manufactured under a baseline condition, deriving principal components (PCs) corresponding to main correlation axes between EPMs in the EPM group, deriving a PC-based dataset including a baseline PC dataset and a conditional split PC dataset by converting the baseline EPM dataset and a conditional split EPM dataset measured from devices manufactured under conditional splits into a PC domain, determining, using the PC-based dataset, respective PCs which are effectively changed by the conditional splits, obtaining split variation information of the conditional splits, extracting an optimal point capable of optimizing a figure of merit of a semiconductor device within a range of the PC-based dataset, and deriving information for process feedback for realizing the optimal point using the split variation infor

Abstract: The steel wire for the steel cord of the present invention includes a plating layer of Cu-M-Zn (M is one or two elements of Co, Ni, Cr, Mo, Al, In, or Sn) and has a concentration gradient in which the M content ratio in a region from the surface to ¼ of the plating layer is 40% or more compared with the M content ratio in the entire region of the plating layer, and the steel cord for rubber reinforcement is obtained by a manufacturing method comprising: performing sequential plating on a surface of a steel wire in the order of Cu?M?Zn; performing a primary diffusion, for concentration gradient of M, by subjecting the sequentially plated steel wire to high-frequency induction heating using 1-500 MHz; and performing a secondary diffusion, following the primary diffusion, by medium-frequency induction heating using 10-500 KHz.

Abstract: The present invention provides a target RNA detection method based on a dCas9/gRNA complex. A target RNA detection method according to the present invention can detect target RNA with the naked eye and without separate gene isolation and amplification steps, and, in particular, can rapidly and accurately detect target RNA through excellent target specificity and rapidity, and thus can exhibit excellent effects on the detection of various pathogens and/or viruses.

Abstract: An image sensor includes a semiconductor layer, a plurality of light sensing regions, a first pixel isolation layer, a light shielding layer, and a wiring layer. The semiconductor layer has a first surface and a second surface opposite to the first surface. The plurality of light sensing regions is formed in the semiconductor layer. The first pixel isolation layer is disposed between adjacent light sensing regions from among the plurality of light sensing regions. The first pixel isolation layer is buried in an isolation trench formed between the first surface and the second surface. The light shielding layer is formed on the second surface of the semiconductor layer and on some of the adjacent light sensing regions. The wiring layer is formed on the first surface of the semiconductor layer.

Abstract: Disclosed is an electric water pump including: a main body; a motor module including a rotor and a stator to generate a rotational force with power supplied from an outside; a pump module coupled to a first side of the main body, and including an impeller spinning by the rotational force of the motor module, an inlet to introduce a fluid as the impeller spins, and an outlet; a controller housing coupled to a second side of the main body and coupling with a controller for controlling the motor module; and a rotary shaft transmitting the rotational force from the motor module to the impeller, wherein the rotor is formed by performing insert injection-molding after stacking a rotor core and coupling with a magnet, and the rotary shaft is pressed into the rotor so that the rotor and the rotary shaft can be formed as a single body.

Abstract: A blood flow measurement device according to various embodiments may be configured to irradiate light to a first position of a subject and a second position of the subject located in a first direction with respect to the first position, acquire intensities of the reflected light at the first position and the second position, determine a first value which is a difference between the intensities of the reflected light at the first position and the second position, irradiate light to a third position of the subject located in a second direction with respect to the second position, acquire an intensity of the reflected light at the third position, determine a second value which is a difference between the intensities of the reflected light at the second position and the third position, and determine a blood flow direction based on the first value and the second value.

Abstract: A biological tissue inspection apparatus is disclosed. The biological tissue inspection apparatus comprises a stage and a probe. The probe comprises an optical imaging device, an optical interference detector, and a light guide. The probe acquires data regarding optical images and optical interference, through the optical imaging device and the optical interference detector. The stage or the probe moves such that a selected area of the inspection object is positioned in the FOV of the optical imaging device and of the optical interference detector. The light guide is configured such that illumination light from the optical imaging device and measurement light from the optical interference detector are coaxially emitted to the inspection object.

Abstract: An image sensor includes a substrate having a photoelectric conversion element therein, a first insulating layer on the substrate, a contact penetrating through the first insulating layer, a color filter on at least one side of the contact, and a moisture absorption prevention layer in contact with a sidewall of the contact and extending on an upper surface of the color filter.

Abstract: The present invention relates to a steel cord for rubber reinforcement wherein a steel wire for steel cord has a plating layer of a ternary or quaternary alloy. The steel wire for the steel cord of the present invention comprises a plating layer of Cu-M-Zn (M is one or two elements of Co, Ni, Cr, Mo, Al, In, or Sn) and has a concentration gradient in which the M content ratio in a region from the surface to ¼ of the plating layer is 40% or more compared with the M content ratio in the entire region of the plating layer, and the steel cord for rubber reinforcement is obtained by a manufacturing method comprising: performing sequential plating on a surface of a steel wire in the order of Cu?M?Zn; performing a primary diffusion, for concentration gradient of M, by subjecting the sequentially plated steel wire to high-frequency induction heating using 1-500 MHz; and performing a secondary diffusion, following the primary diffusion, by medium-frequency induction heating using 10-500 KHz.

Abstract: An image sensor and a method of fabricating the same are provided. The image sensor includes a substrate including photoelectric elements, a first color filter disposed on the substrate, a second color filter disposed on the substrate to be adjacent to the first color filter, a covering film disposed between sidewalls of the first and second color filters, and an air gap formed in the covering film.

Abstract: An image sensor includes a substrate having a photoelectric conversion element therein, a first insulating layer on the substrate, a contact penetrating through the first insulating layer, a color filter on at least one side of the contact, and a moisture absorption prevention layer in contact with a sidewall of the contact and extending on an upper surface of the color filter.

Abstract: A biological tissue inspection apparatus is disclosed. The biological tissue inspection apparatus comprises a stage and a probe. The probe comprises an optical imaging device, an optical interference detector, and a light guide. The probe acquires data regarding optical images and optical interference, through the optical imaging device and the optical interference detector. The stage or the probe moves such that a selected area of the inspection object is positioned in the FOV of the optical imaging device and of the optical interference detector. The light guide is configured such that illumination light from the optical imaging device and measurement light from the optical interference detector are coaxially emitted to the inspection object.

Abstract: A biological tissue inspection apparatus is disclosed. The biological tissue inspection apparatus comprises a stage and a probe. The probe comprises an optical imaging device, an optical interference detector, and a light guide. The probe acquires data regarding optical images and optical interference, through the optical imaging device and the optical interference detector. The stage or the probe moves such that a selected area of the inspection object is positioned in the FOV of the optical imaging device and of the optical interference detector. The light guide is configured such that illumination light from the optical imaging device and measurement light from the optical interference detector are coaxially emitted to the inspection object.

Abstract: A humid air forming device, which cools an object to be measured to a predetermined temperature, and which sprays humid air having a predetermined temperature to the cooled object to be measured, thereby forming moisture particles on the surface of the object to be measured, and a measurement system including the same. The humid air forming device includes a cooling unit that cools the object to be measured to a first temperature or lower; and a humid air supply unit that forms humid air having a second temperature, which is higher than the first temperature, and spraying the humid air toward the surface of the cooled object to be measured, thereby forming moisture particles on the surface of the cooled object to be measured.

Abstract: An image sensor includes a semiconductor layer, a plurality of light sensing regions, a first pixel isolation layer, a light shielding layer, and a wiring layer. The semiconductor layer has a first surface and a second surface opposite to the first surface. The plurality of light sensing regions is formed in the semiconductor layer. The first pixel isolation layer is disposed between adjacent light sensing regions from among the plurality of light sensing regions. The first pixel isolation layer is buried in an isolation trench formed between the first surface and the second surface. The light shielding layer is formed on the second surface of the semiconductor layer and on some of the adjacent light sensing regions. The wiring layer is formed on the first surface of the semiconductor layer.

Abstract: The present invention relates to a vapor deposition compound which serves to deposit a thin film through vapor deposition. More particularly, the present invention relates to vapor deposition zirconium, titanium, and hafnium precursors which are applicable to atomic layer deposition (ALD) or chemical vapor deposition (CVD) and which have low viscosity, excellent thermal stability, and fast self-saturation, and a method of preparing the same.

Abstract: A biological tissue inspection apparatus is disclosed. The biological tissue inspection apparatus comprises a stage and a probe. The probe comprises an optical imaging device, an optical interference detector, and a light guide. The probe acquires data regarding optical images and optical interference, through the optical imaging device and the optical interference detector. The stage or the probe moves such that a selected area of the inspection object is positioned in the FOV of the optical imaging device and of the optical interference detector. The light guide is configured such that illumination light from the optical imaging device and measurement light from the optical interference detector are coaxially emitted to the inspection object.