Abstract: Systems and methods of monitoring a cleaning process for a deposition chamber are provided. A chamber cleaning source is activated to supply a cleaning agent to a deposition chamber and a foreline cleaning source disposed downstream of the deposition is activated to supply the cleaning agent to a foreline. The transmission recovery of an optical sensor disposed in the foreline is monitored. The optical sensor is disposed in the foreline at a location downstream of the foreline cleaning source. At least one of a foreline clean endpoint and a chamber clean endpoint is detected based on the monitored transmission recovery.

Abstract: Presented herein are systems and methods for quantifying trace and/or ultra-trace levels of a species—for example, H2S or H2O—in a natural gas line. The systems and methods employ a tunable laser, such as a tunable diode laser, vertical-cavity surface-emitting laser (VCSEL), external cavity diode laser or a vertical external-cavity surface-emitting laser (VECSEL) or a tunable quantum cascade laser (QCL). The laser produces an output beam over a set of one or more relatively narrow, high resolution wavelength bands at a scan rate from about 0.1 Hz to about 1000 Hz. A natural gas sample comprising a trace level of a species of interest passes through a flow cell into which the output beam from the laser is guided. An optical detector receives light from the flow cell, producing a signal indicative of the absorption attenuation from which the concentration of the trace species is determined.

Abstract: A system and method are disclosed for gas sensing over a wide tunable wavelength range provided by one or more quantum cascade lasers. A laser beam is generated within the wide tunable wavelength range, which is given by the sum of the wavelength ranges from the individual lasers. Gas sensing or detection is achieved by obtaining an infrared absorption spectrum for a sample contained in one or more cells having different path lengths for the laser beam.

Abstract: A system and method are disclosed for gas sensing over a wide tunable wavelength range provided by one or more quantum cascade lasers. A laser beam is generated within the wide tunable wavelength range, which is given by the sum of the wavelength ranges from the individual lasers. Gas sensing or detection is achieved by obtaining an infrared absorption spectrum for a sample contained in one or more cells having different path lengths for the laser beam.

Abstract: Presented herein are systems and methods for quantifying trace and/or ultra-trace levels of a species—for example, H2S or H2O—in a natural gas line. The systems and methods employ a tunable laser, such as a tunable diode laser, vertical-cavity surface-emitting laser (VCSEL), external cavity diode laser or a vertical external-cavity surface-emitting laser (VECSEL) or a tunable quantum cascade laser (QCL). The laser produces an output beam over a set of one or more relatively narrow, high resolution wavelength bands at a scan rate from about 0.1 Hz to about 1000 Hz. A natural gas sample comprising a trace level of a species of interest passes through a flow cell into which the output beam from the laser is guided. An optical detector receives light from the flow cell, producing a signal indicative of the absorption attenuation from which the concentration of the trace species is determined.

Abstract: A system and method are disclosed for gas sensing over a wide tunable wavelength range provided by one or more quantum cascade lasers. A laser beam is generated within the wide tunable wavelength range, which is given by the sum of the wavelength ranges from the individual lasers. Gas sensing or detection is achieved by obtaining an infrared absorption spectrum for a sample contained in one or more cells having different path lengths for the laser beam.

Abstract: The present invention relates to a nanoscale or microscale particle for encapsulation and delivery of materials or substances, including, but not limited to, cells, drugs, tissue, gels and polymers contained within the particle, with subsequent release of the therapeutic materials in situ, methods of fabricating the particle by folding a 2D precursor into the 3D particle, and the use of the particle in in-vivo or in-vitro applications. The particle can be in any polyhedral shape and its surfaces can have either no perforations or nano/microscale perforations. The particle is coated with a biocompatible metal, e g gold, or polymer e g parvlene, layer and the surfaces and hinges of the particle are made of any metal or polymer combinations.

Abstract: The present invention relates to a nanoscale or microscale particle for encapsulation and delivery of materials or substances, including, but not limited to, cells, drugs, tissue, gels and polymers contained within the particle, with subsequent release of the therapeutic materials in situ, methods of fabricating the particle by folding a 2D precursor into the 3D particle, and the use of the particle in in-vivo or in-vitro applications. The particle can be in any polyhedral shape and its surfaces can have either no perforations or nano/microscale perforations. The particle is coated with a biocompatible metal, e g gold, or polymer e g parvlene, layer and the surfaces and hinges of the particle are made of any metal or polymer combinations.

Abstract: The present invention relates to a nanoscale or microscale particle for encapsulation and delivery of materials or substances, including, but not limited to, cells, drugs, tissue, gels and polymers contained within the particle, with subsequent release of the therapeutic materials in situ, methods of fabricating the particle by folding a 2D precursor into the 3D particle, and the use of the particle in in-vivo or in-vitro applications The particle can be in any polyhedral shape and its surfaces can have either no perforations or nano/microscale perforations The particle is coated with a biocompatible metal, e g gold, or polymer e g parvlene, layer and the surfaces and hinges of the particle are made of any metal or polymer combinations.

Abstract: An apparatus for producing light includes a chamber and an ignition source that ionizes a gas within the chamber. The apparatus also includes at least one laser that provides energy to the ionized gas within the chamber to produce a high brightness light. The laser can provide a substantially continuous amount of energy to the ionized gas to generate a substantially continuous high brightness light.

Abstract: The present invention relates to a nanoscale or microscale particle for encapsulation and delivery of materials or substances, including, but not limited to, cells, drugs, tissue, gels and polymers contained within the particle, with subsequent release of the therapeutic materials in situ, methods of fabricating the particle by folding a 2D precursor into the 3D particle, and the use of the particle in in-vivo or in-vitro applications The particle can be in any polyhedral shape and its surfaces can have either no perforations or nano/microscale perforations The particle is coated with a biocompatible metal, e g gold, or polymer e g parvlene, layer and the surfaces and hinges of the particle are made of any metal or polymer combinations.

Abstract: The present invention relates to a nanoscale or microscale particle for encapsulation and delivery of materials or substances, including, but not limited to, cells, drugs, tissue, gels and polymers contained within the particle, with subsequent release of the therapeutic materials in situ, methods of fabricating the particle by folding a 2D precursor into the 3D particle, and the use of the particle in in-vivo or in-vitro applications The particle can be in any polyhedral shape and its surfaces can have either no perforations or nano/microscale perforations The particle is coated with a biocompatible metal, e g gold, or polymer e g parvlene, layer and the surfaces and hinges of the particle are made of any metal or polymer combinations.

Abstract: An apparatus for producing light includes a chamber and an ignition source that ionizes a gas within the chamber. The apparatus also includes at least one laser that provides energy to the ionized gas within the chamber to produce a high brightness light. The laser can provide a substantially continuous amount of energy to the ionized gas to generate a substantially continuous high brightness light.

Abstract: The present invention relates to a nanoscale or microscale particle for encapsulation and delivery of materials or substances, including, but not limited to, cells, drugs, tissue, gels and polymers contained within the particle, with subsequent release of the therapeutic materials in situ, methods of fabricating the particle by folding a 2D precursor into the 3D particle, and the use of the particle in in-vivo or in-vitro applications The particle can be in any polyhedral shape and its surfaces can have either no perforations or nano/microscale perforations The particle is coated with a biocompatible metal, e g gold, or polymer e g parvlene, layer and the surfaces and hinges of the particle are made of any metal or polymer combinations.

Abstract: This invention relates to optical detection of vapors, in particular devices and methods for detection of vapor concentration and changes in vapor concentration using dynamic holography. The devices and methods employ a transducer which absorbs the vapor to be tested, thereby leading to a change in the transducer. The changes in the transducer cause a change in the optical path length of an image beam which is interacted with the transducer. Dynamic holography allows determination of the change in the dimensions and index of refraction of the transducer, and thus the change in the concentration of the vapor to be tested. The devices and methods of the invention are capable of testing a plurality of vapors by using a transducer array.