Patents by Inventor Hotaka Yamamoto

Hotaka Yamamoto has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 7863195
    Abstract: An apparatus for feeding slurry to an external device. The apparatus includes a preparation tank for preparing the slurry. A circulation pipe is connected to the preparation tank to circulate the slurry. A feeding pipe is connected between the preparation tank and the external device to feed the external device with the slurry. A pump sends the chemical solution in the preparation tank to the circulation pipe and the feeding pipe. A concentration detector is arranged downstream to the pump to detect the concentration of the slurry. A controller controls the concentration of the chemical solution in the preparation tank in accordance with the detection value of the concentration detector and controls the feeding of the chemical solution.
    Type: Grant
    Filed: March 14, 2008
    Date of Patent: January 4, 2011
    Assignee: Fujitsu Semiconductor Limited
    Inventors: Naoki Hiraoka, Hiroshi Osuda, Hotaka Yamamoto
  • Publication number: 20080214005
    Abstract: An apparatus for feeding slurry to an external device. The apparatus includes a preparation tank for preparing the slurry. A circulation pipe is connected to the preparation tank to circulate the slurry. A feeding pipe is connected between the preparation tank and the external device to feed the external device with the slurry. A pump sends the chemical solution in the preparation tank to the circulation pipe and the feeding pipe. A concentration detector is arranged downstream to the pump to detect the concentration of the slurry. A controller controls the concentration of the chemical solution in the preparation tank in accordance with the detection value of the concentration detector and controls the feeding of the chemical solution.
    Type: Application
    Filed: March 14, 2008
    Publication date: September 4, 2008
    Applicant: FUJITSU LIMITED
    Inventors: Naoki Hiraoka, Hiroshi Osuda, Hotaka Yamamoto
  • Patent number: 7419946
    Abstract: An apparatus for feeding slurry to an external device. The apparatus includes a preparation tank for preparing the slurry. A circulation pipe is connected to the preparation tank to circulate the slurry. A feeding pipe is connected between the preparation tank and the external device to feed the external device with the slurry. A pump sends the chemical solution in the preparation tank to the circulation pipe and the feeding pipe. A concentration detector is arranged downstream to the pump to detect the concentration of the slurry. A controller controls the concentration of the chemical solution in the preparation tank in accordance with the detection value of the concentration detector and controls the feeding of the chemical solution.
    Type: Grant
    Filed: September 16, 2003
    Date of Patent: September 2, 2008
    Assignee: Fujitsu Limited
    Inventors: Naoki Hiraoka, Hiroshi Osuda, Hotaka Yamamoto
  • Publication number: 20040052154
    Abstract: An apparatus for feeding slurry to an external device. The apparatus includes a preparation tank for preparing the slurry. A circulation pipe is connected to the preparation tank to circulate the slurry. A feeding pipe is connected between the preparation tank and the external device to feed the external device with the slurry. A pump sends the chemical solution in the preparation tank to the circulation pipe and the feeding pipe. A concentration detector is arranged downstream to the pump to detect the concentration of the slurry. A controller controls the concentration of the chemical solution in the preparation tank in accordance with the detection value of the concentration detector and controls the feeding of the chemical solution.
    Type: Application
    Filed: September 16, 2003
    Publication date: March 18, 2004
    Applicant: FUJITSU VLSI LIMITED
    Inventors: Naoki Hiraoka, Hiroshi Osuda, Hotaka Yamamoto
  • Patent number: 6659634
    Abstract: An apparatus for feeding slurry to an external device. The apparatus includes a preparation tank for preparing the slurry. A circulation pipe is connected to the preparation tank to circulate the slurry. A feeding pipe is connected between the preparation tank and the external device to feed the external device with the slurry. A pump sends the chemical solution in the preparation tank to the circulation pipe and the feeding pipe. A concentration detector is arranged downstream to the pump to detect the concentration of the slurry. A controller controls the concentration of the chemical solution in the preparation tank in accordance with the detection value of the concentration detector and controls the feeding of the chemical solution.
    Type: Grant
    Filed: October 29, 2002
    Date of Patent: December 9, 2003
    Assignee: Fujitsu VLSI Limited
    Inventors: Naoki Hiraoka, Hiroshi Osuda, Hotaka Yamamoto
  • Publication number: 20030104959
    Abstract: An apparatus for feeding slurry to an external device. The apparatus includes a preparation tank for preparing the slurry. A circulation pipe is connected to the preparation tank to circulate the slurry. A feeding pipe is connected between the preparation tank and the external device to feed the external device with the slurry. A pump sends the chemical solution in the preparation tank to the circulation pipe and the feeding pipe. A concentration detector is arranged downstream to the pump to detect the concentration of the slurry. A controller controls the concentration of the chemical solution in the preparation tank in accordance with the detection value of the concentration detector and controls the feeding of the chemical solution.
    Type: Application
    Filed: October 29, 2002
    Publication date: June 5, 2003
    Applicant: FUJITSU VLSI LIMITED
    Inventors: Naoki Hiraoka, Hiroshi Osuda, Hotaka Yamamoto