Patents by Inventor Hsien-Li CHEN

Hsien-Li CHEN has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20250033965
    Abstract: A hypochlorous acid preparation system is provided. The hypochlorous acid preparation system includes: a hypochlorous acid preparation apparatus comprising: a first inlet, wherein sulfuric acid collected from a clean room located in a semiconductor fabrication plant enters the hypochlorous acid preparation apparatus through the first inlet; a second inlet, wherein sodium hypochlorite solution enters the hypochlorous acid preparation apparatus through the second inlet; a third inlet, wherein deionized water enters the hypochlorous acid preparation apparatus through the third inlet; and an outlet, wherein hypochlorous acid is produced in situ by mixing the sulfuric acid, the sodium hypochlorite solution, and the deionized water and exits the hypochlorous acid preparation apparatus through the outlet.
    Type: Application
    Filed: July 28, 2023
    Publication date: January 30, 2025
    Inventors: Chun-Ming Wang, Hsien-Li He, Cheng-Chieh Chen, Po-Hsuan Huang, Wan-Yu Chao
  • Publication number: 20240047496
    Abstract: An image sensor includes a substrate, a grid, and a color filter. The grid is over the substrate. From a cross-sectional view, the grid includes a first grid and a second grid over the first grid, the first grid has lower portion that has a first sidewall and a second sidewall opposing the first sidewall, the second grid has a third sidewall and a fourth sidewall opposing the third sidewall, and a width between the third sidewall and the fourth sidewall is less than a width between the first sidewall and the second sidewall. The color filter extends through the grid structure.
    Type: Application
    Filed: October 17, 2023
    Publication date: February 8, 2024
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chin-Yu LIN, Keng-Ying LIAO, Su-Yu YEH, Po-Zen CHEN, Huai-Jen TUNG, Hsien-Li CHEN
  • Publication number: 20230120006
    Abstract: A method incudes forming a plurality of photodiodes in a substrate; forming an interconnect structure on a front-side of the substrate; forming a barrier layer on a back-side of the substrate; depositing a metal layer over the barrier layer; forming an adhesion enhancement layer over the metal layer; forming an oxide layer over the adhesion enhancement layer; etching the oxide layer, the adhesion enhancement layer, the metal layer, and the barrier layer to form an oxide grid, an adhesion enhancement grid, a metal grid, and a barrier grid, respectively, wherein the barrier grid and the adhesion enhancement grid have a same chemical element.
    Type: Application
    Filed: December 15, 2022
    Publication date: April 20, 2023
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chin-Yu LIN, Keng-Ying LIAO, Su-Yu YEH, Po-Zen CHEN, Huai-Jen TUNG, Hsien-Li CHEN
  • Patent number: 11532658
    Abstract: An image sensor structure includes a semiconductor device, a plurality of image sensing elements formed in the semiconductor substrate, an interconnect structure formed on the semiconductor substrate, and a composite grid structure over the semiconductor substrate. The composite grid structure includes a tungsten grid, an oxide grid over the tungsten grid, and an adhesion enhancement grid spacing the tungsten grid from the oxide grid.
    Type: Grant
    Filed: January 17, 2020
    Date of Patent: December 20, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chin-Yu Lin, Keng-Ying Liao, Su-Yu Yeh, Po-Zen Chen, Huai-Jen Tung, Hsien-Li Chen
  • Publication number: 20220359598
    Abstract: An image sensor structure includes a semiconductor device, a plurality of image sensing elements formed in the semiconductor substrate, an interconnect structure formed on the semiconductor substrate, and a composite grid structure over the semiconductor substrate. The composite grid structure includes a tungsten grid, an oxide grid over the tungsten grid, and an adhesion enhancement grid spacing the tungsten grid from the oxide grid.
    Type: Application
    Filed: July 22, 2022
    Publication date: November 10, 2022
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chin-Yu LIN, Keng-Ying LIAO, Su-Yu YEH, Po-Zen CHEN, Huai-Jen TUNG, Hsien-Li CHEN
  • Publication number: 20210225918
    Abstract: An image sensor structure includes a semiconductor device, a plurality of image sensing elements formed in the semiconductor substrate, an interconnect structure formed on the semiconductor substrate, and a composite grid structure over the semiconductor substrate. The composite grid structure includes a tungsten grid, an oxide grid over the tungsten grid, and an adhesion enhancement grid spacing the tungsten grid from the oxide grid.
    Type: Application
    Filed: January 17, 2020
    Publication date: July 22, 2021
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chin-Yu LIN, Keng-Ying LIAO, Su-Yu YEH, Po-Zen CHEN, Huai-Jen TUNG, Hsien-Li CHEN
  • Patent number: 7719782
    Abstract: Handling a magnetic tape cartridge comprises the steps of reading cartridge mount information from the cartridge memory; determining from the cartridge mount information whether the present mount is the first mount of the magnetic tape cartridge; and if so, fast forward and rewind the magnetic tape of the magnetic tape cartridge, e.g., the fast forward is to end of tape (EOT) and the rewind is to beginning of tape (BOT). Alternatively, if the cartridge mount information indicates the present mount is the first mount of the magnetic tape cartridge; monitoring input/output with respect to the magnetic tape cartridge for write errors during the mount; determining whether the number of monitored write errors meets a predetermined threshold; and if so, fast forward and rewind the magnetic tape of the magnetic tape cartridge.
    Type: Grant
    Filed: January 7, 2009
    Date of Patent: May 18, 2010
    Assignee: International Business Machines Corporation
    Inventors: Allen Keith Bates, Shawn Owen Brume, Nhan Xuan Bui, Joel Hsien-Li Chen, Eric Rolf Christensen, Roger Javier Justo, Daniel James Winarski