Abstract: A substrate is provided and a top interconnection metal layer and a primary winding layer are formed thereon. Then a passivation layer having a plurality of via exposed parts of the top interconnection metal layer is formed on the substrate. A secondary winding layer and at least a bonding pad are formed on the passivation layer. The bonding pad electrically connects to the top interconnection metal layer through the via.

Abstract: A structure of a capacitor set is described, including at least two capacitors that are disposed at the same position on a substrate and include a first capacitor and a second capacitor. The first capacitor includes multiple first capacitor units electrically connected with each other in parallel. The second capacitor includes multiple second capacitor units electrically connected with each other in parallel. The first and the second capacitor units are arranged spatially intermixing with each other to form an array.

Abstract: A varactor on a substrate is provided. The varactor comprises a bottom electrode, an upper electrode, a first dielectric layer and a conductive layer. The bottom electrode has several doped regions arranged in the substrate as an array with several rows and several columns, wherein the doped regions in adjacent columns are arranged alternatively. The upper electrode is located over the substrate and the upper electrode is composed of several electrode locations and has several openings, wherein each opening exposes the corresponding doped region. Furthermore, each electrode location is surrounded by three doped regions. The first dielectric layer is located between the substrate and the upper electrode. The conductive layer is located over the upper electrode, wherein the conductive layer and the upper electrode are isolated from each other and the conductive layer and the doped regions are electrically connected to each other.

Abstract: A substrate is provided and a top interconnection metal layer and a primary winding layer are formed thereon. Then a passivation layer having a plurality of via exposed parts of the top interconnection metal layer is formed on the substrate. A secondary winding layer and at least a bonding pad are formed on the passivation layer. The bonding pad electrically connects to the top interconnection metal layer through the via.

Abstract: A substrate is provided and a top interconnection metal layer and a primary winding layer are formed thereon. Then a passivation layer having a plurality of via exposed parts of the top interconnection metal layer is formed on the substrate. A secondary winding layer and at least a bonding pad are formed on the passivation layer. The bonding pad electrically connects to the top interconnection metal layer through the via.

Abstract: The invention provides a heterojunction bipolar transistor comprising a substrate having a collector therein, an intrinsic base region, a first extrinsic base region, a second extrinsic base region, an emitter on the intrinsic base layer and a spacer adjacent the emitter and on the first extrinsic base region. The first extrinsic base region is adjacent the intrinsic base region and the second extrinsic base region is adjacent the first extrinsic base region on the substrate, wherein a dopant concentration of the second extrinsic base region is higher than a dopant concentration of the first extrinsic base region.

Abstract: A varactor including a substrate, a P well disposed in the substrate, a gate structure disposed over the substrate, a p+ source disposed in the substrate at one side of the gate structure, a p+ drain disposed in the substrate at the other side of the gate structure, and a deep N well disposed in the substrate under the P well is provided. The gate oxide of the varactor is thicker so as to reduce the probability of the current leakage occurrence.

Abstract: A capacitor structure including a plurality of conductive layers, a dielectric layer and a plurality of contacts is disclosed. The conductive layers are stacked, and each conductive layer has a first conductive pattern and a second conductive pattern. The dielectric layer is disposed between the first conductive pattern and the second conductive pattern and between two adjacent conductive layers. The contacts are disposed in the dielectric layer, and electrically connected to the first conductive patterns in two adjacent conductive layers and electrically connected to the second conductive patterns in two adjacent conductive layers. Wherein, the contact electrically connecting to the first conductive patterns in two adjacent conducive layers is a first strip contact, which extends between the first conductive patterns in two adjacent conductive layers, and the boundary of the first strip contact is located within the boundary of the first conductive pattern.

Abstract: A structure of an electrostatic discharge protection circuit, in which a buried layer is formed in the substrate of the electrostatic discharge protection circuit, and a sinker layer electrically connected to the buried layer and a drain is also formed therein. Thereby, when the electrostatic discharge protection circuit is activated, the current flows from a source through the buried layer and the sinker layer to the drain. The current flow path is remote from the gate dielectric layer to avoid damaging the gate dielectric by a large current, so as to improve the dielectric strength of the electrostatic discharge protection circuit.

Abstract: An inductor formed on a substrate having a dielectric layer thereon is disclosed. The inductor includes a first inductor pattern, a second inductor pattern a third inductor pattern. The first inductor pattern is formed within the dielectric layer, the second inductor pattern is formed on the first inductor pattern and electrically connected thereto, and the third inductor pattern is formed on the second inductor pattern and electrically connected thereto, wherein the first inductor pattern, the second inductor pattern, and the third inductor pattern have similar pattern. Because the thickness of the inductor can be increased by forming a multi-layer inductor structure, the resistance of the inductor, therefore, is reduced.

Abstract: A method for forming a SiGe HBT, which combines a SEG and Non-SEG growth, is disclosed. The SiGe base layer is deposited by a Non-SEG method. Then, the first-emitter layer is developed directly upon the SiGe base layer that has a good interface quality between the base-emitter. Next, a second poly silicon layer, which has a dopant concentration range within 1E19 to 1E21 (atom/cc), is deposited by SEG method. It not only reduces the resistance of the SiGe base layer, but also avoids the annealing that may influence the performance of the device.

Abstract: An inductor formed on a substrate having a dielectric layer thereon is disclosed. The inductor includes a first inductor pattern, a second inductor pattern a third inductor pattern. The first inductor pattern is formed within the dielectric layer, the second inductor pattern is formed on the first inductor pattern and electrically connected thereto, and the third inductor pattern is formed on the second inductor pattern and electrically connected thereto, wherein the first inductor pattern, the second inductor pattern, and the third inductor pattern have similar pattern. Because the thickness of the inductor can be increased by forming a multi-layer inductor structure, the resistance of the inductor, therefore, is reduced.

Abstract: A fabrication method for heterojunction bipolar transistor is disclosed. The method uses ISSG oxide instead of conventional PECVD oxide so that the base/emitter interface damage can be reduced. Moreover, the invention replaces the conventional emitter-window/space mask with an emitter-window reverse-tone mask/line mask to minimize the critical dimension of emitter window. Furthermore, the invention also utilizes a two-steps extrinsic base implantation to form two extrinsic bases with different dopant concentrations so that the base resistance can be reduced.

Abstract: A method for forming a SiGe HBT, which combines a SEG and Non-SEG growth, is disclosed. The SiGe base layer is deposited by a Non-SEG method. Then, the first-emitter layer is developed directly upon the SiGe base layer that has a good interface quality between the base-emitter. Next, a second poly silicon layer, which has a dopant concentration range within 1E19 to 1E21 (atom/cc), is deposited by SEG method. It not only reduces the resistance of the SiGe base layer, but also avoids the annealing that may influence the performance of the device.

Abstract: A fabrication method for heterojunction bipolar transistor is disclosed. The method uses ISSG oxide instead of conventional PECVD oxide so that the base/emitter interface damage can be reduced. Moreover, the invention replaces the conventional emitter-window/space mask with an emitter-window reverse-tone mask/line mask to minimize the critical dimension of emitter window. Furthermore, the invention also utilizes a two-steps extrinsic base implantation to form two extrinsic bases with different dopant concentrations so that the base resistance can be reduced.

Abstract: A fabrication method for heterojunction bipolar transistor is disclosed. The method uses ISSG oxide instead of conventional PECVD oxide so that the base/emitter interface damage can be reduced. Moreover, the invention replaces the conventional emitter-window/space mask with an emitter-window reverse-tone mask/line mask to minimize the critical dimension of emitter window. Furthermore, the invention also utilizes a two-steps extrinsic base implantation to form two extrinsic bases with different dopant concentrations so that the base resistance can be reduced.

Abstract: A structure of an electrostatic discharge protection circuit, in which a buried layer is formed in the substrate of the electrostatic discharge protection circuit, and a sinker layer electrically connected to the buried layer and a drain is also formed therein. Thereby, when the electrostatic discharge protection circuit is activated, the current flows from a source through the buried layer and the sinker layer to the drain. The current flow path is remote from the gate dielectric layer to avoid damaging the gate dielectric by a large current, so as to improve the dielectric strength of the electrostatic discharge protection circuit.

Abstract: A fabrication method of an electrostatic discharge protection circuit is described, in which a buried layer is formed in the substrate of the electrostatic discharge protection circuit, and a sinker layer electrically connected to the buried layer and a drain is also formed therein. Thereby, when the electrostatic discharge protection circuit is activated, the current flows from a source through the buried layer and the sinker layer to the drain. The current flow path is remote from the gate dielectric layer to avoid damaging the gate dielectric by a large current, so as to improve the dielectric strength of the electrostatic discharge protection circuit.

Abstract: A method of manufacturing a low-leakage, high-performance device. A substrate having a gate electrode thereon is provided. A lightly doped, high-energy implantation is conducted to form a lightly doped source/drain terminal in the substrate. An offset spacer is formed on each sidewall of the gate electrode. A heavily doped implantation is conducted to form a heavily doped source/drain terminal in the substrate. The heavily doped source/drain terminal has a depth smaller than the lightly doped source/drain terminal. A protective spacer structure is formed on each sidewall of the gate electrode. A deep-penetration source/drain implantation is carried out to form a deep source/drain terminal in the substrate.

Abstract: A structure of an electrostatic discharge protection circuit, using a deep trench structure to replace the guard ring at a periphery of the electrostatic discharge protection circuit. Consequently, the device area is smaller compared to the device with the guard ring. Moreover, the device area is further reduced because the distance between the transistors of the electrostatic discharge protection circuit is shortened. At the same time, the functions of latch-up immunity and substrate noise immunity are more effective.