Patents by Inventor Huilong Zhu

Huilong Zhu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11440740
    Abstract: A frictional force monitoring system for middle troughs of a scraper conveyor, comprising a scraper conveyor system and a sensing detection system. The scraper conveyor system consists of a machine body, middle troughs, thrust lugs, scrapers, a double chain, a sprocket, a speed reducer, an electric motor and a frequency converter. The sensing monitoring system consists of force receiving modules, a three-dimensional force sensor, and a pre-embedded temperature sensor. The frictional force monitoring system is able to monitor impact loads, frictional forces, friction coefficients, temperature, etc. between an annular chain, coal bulk, and middle troughs of the scraper conveyor under complex and severe operating conditions, and to provide the technical means for the design, safety early-warning and health evaluation of the scraper conveyor, and can provide a data basis for studying friction wear and fatigue breaking mechanism of middle troughs of a scraper machine.
    Type: Grant
    Filed: November 26, 2019
    Date of Patent: September 13, 2022
    Assignee: China University of Mining and Technology
    Inventors: Dagang Wang, Ruixin Wang, Zhencai Zhu, Huilong Zhu, Gang Shen, Xiang Li, Yu Tang
  • Publication number: 20220285559
    Abstract: A vertical storage device, a method of manufacturing the same, and an electronic apparatus including the storage device are provided. The storage device includes: a first source/drain layer located at a first height with respect to a substrate and a second source/drain layer located at a second height different from the first height; a channel layer connecting the first source/drain layer and the second source/drain layer; and a gate stack including a storage function layer, the storage function layer extending on a sidewall of the channel layer and extending in-plane from the sidewall of the channel layer onto a sidewall of the first source/drain layer and a sidewall of the second source/drain layer.
    Type: Application
    Filed: March 7, 2022
    Publication date: September 8, 2022
    Inventor: Huilong ZHU
  • Publication number: 20220285506
    Abstract: A NOR-type storage device, a method of manufacturing the same, and an electronic apparatus including the same are provided. The NOR-type storage device includes: a gate stack extending vertically on a substrate; an active region surrounding a periphery of the gate stack, the active region including first and second source/drain regions, a first channel region between the first and second source/drain regions, third and fourth source/drain regions, and a second channel region between the third and fourth source/drain regions; first, second, third and fourth interconnection layers extending laterally from the first to fourth source/drain regions, respectively; and a source line contact part extending vertically with respect to the substrate to pass through the first to fourth interconnection layers and electrically connected to one of the first interconnection layer and the second interconnection layer, and to one of the third interconnection layer and the fourth interconnection layer.
    Type: Application
    Filed: March 7, 2022
    Publication date: September 8, 2022
    Inventor: Huilong Zhu
  • Patent number: 11424323
    Abstract: A semiconductor device with a C-shaped active area and an electronic apparatus including the same is disclosed. The semiconductor device may include a first device and a second device opposite to each other on a substrate, each of which includes: a channel portion extending vertically on the substrate; source/drain portions located at the upper and lower ends of the channel portion and along the channel portion, the source/drain portions and the channel portion constitute a C-shaped structure; and a gate stack overlapping the channel portion on an inner sidewall of C-shaped structure, the gate stack has a portion surrounded by the C-shaped structure. The openings of the C-shaped structures of the two devices are opposite to each other. At least a portion of the gate stack of the first device close to the channel portion and that of the second device close to the channel portion are substantially coplanar.
    Type: Grant
    Filed: December 4, 2020
    Date of Patent: August 23, 2022
    Assignee: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCES
    Inventor: Huilong Zhu
  • Publication number: 20220254702
    Abstract: A semiconductor apparatus with a heat dissipation conduit in a sidewall interconnection structure, a method of manufacturing the semiconductor apparatus, and an electronic device including the semiconductor apparatus. According to the embodiments, the semiconductor apparatus includes: a carrier substrate having a first region and a second region adjacent to each other; a semiconductor device on the first region; and an interconnection structure on the second region, wherein the interconnection structure includes: an electrical isolation layer; a conductive structure in the electrical isolation layer, wherein at least a part of components require to be electrically connected in the semiconductor device is in contact with and therefore electrically connected to the conductive structure in a lateral direction, wherein the conductive structure is located at a corresponding height in the interconnection structure; and a heat dissipation conduit in the electrical isolation layer.
    Type: Application
    Filed: February 8, 2022
    Publication date: August 11, 2022
    Inventors: Huilong ZHU, Tianchun YE
  • Publication number: 20220246520
    Abstract: An interconnection structure for semiconductor devices formed on a substrate may be arranged under the semiconductor devices. The interconnection structure includes at least one via layer and at least one interconnection layer alternately arranged in a direction from the semiconductor device to the substrate, wherein each via layer includes via holes respectively arranged under at least a part of the semiconductor devices, and each interconnection layer includes conductive nodes respectively arranged under at least a part of the semiconductor devices, and in a same interconnection layer, a conductive channel is provided between at least one conductive node and at least another node; and the via holes in each via layer and the conductive nodes in each interconnection layer corresponding to the via holes at least partially overlap with each other in the direction from the semiconductor device to the substrate.
    Type: Application
    Filed: May 30, 2019
    Publication date: August 4, 2022
    Inventor: Huilong Zhu
  • Patent number: 11404568
    Abstract: A semiconductor device, including: a substrate; a first source/drain layer, a channel layer, and a second source/drain layer sequentially stacked on the substrate and adjacent to each other, and a gate stack formed around an outer circumference of the channel layer; wherein at least one interface structure is formed in at least one of the first source/drain layer and the second source/drain layer, the conduction band energy levels at both sides of the interface structure are different and/or the valence band energy levels are different.
    Type: Grant
    Filed: November 30, 2018
    Date of Patent: August 2, 2022
    Assignee: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCES
    Inventors: Huilong Zhu, Zhenhua Wu
  • Patent number: 11380689
    Abstract: A semiconductor memory device, a method of manufacturing the same, and an electronic device including the semiconductor memory device are disclosed.
    Type: Grant
    Filed: September 21, 2018
    Date of Patent: July 5, 2022
    Assignee: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCES
    Inventor: Huilong Zhu
  • Publication number: 20220208258
    Abstract: A Static Random Access Memory (SRAM) cell that may include a first pull-up transistor, a second pull-up transistor, a first pull-down transistor, a second pull-down transistor, a first pass-gate transistor and a second pass-gate transistor provided at two levels on a substrate. The respective transistors may be vertical transistors. The first pull-up transistor and the second pull-up transistor may be provided at a first level, and the first pull-down transistor, the second pull-down transistor, the first pass-gate transistor and the second pass-gate transistor may be provided at a second level different from the first level. A region where the first pull-up transistor and the second pull-up transistor are located and a region where the first pull-down transistor, the second pull-down transistor, the first pass-gate transistor and the second pass-gate transistor are located may at least partially overlap in a vertical direction with respect to an upper surface of the substrate.
    Type: Application
    Filed: October 31, 2019
    Publication date: June 30, 2022
    Applicant: INSTITUTE OF MICROELECTRONICS CHINESE ACADEMY OF SCIENCES
    Inventor: Huilong ZHU
  • Patent number: 11373948
    Abstract: An interconnection structure and a method of manufacturing the same, and an electronic device including the interconnection structure are provided.
    Type: Grant
    Filed: April 13, 2018
    Date of Patent: June 28, 2022
    Assignee: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCES
    Inventor: Huilong Zhu
  • Publication number: 20220190169
    Abstract: A strained vertical channel semiconductor device, a method of manufacturing the same, and an electronic apparatus including the same are provided. The method includes: providing a vertical channel layer on a substrate, wherein the vertical channel layer is held by a first supporting layer on a first side in a lateral direction, and is held by a second supporting layer on a second side opposite to the first side; replacing the first supporting layer with a first gate stack while the vertical channel layer is held by the second supporting layer; and replacing the second supporting layer with a second gate stack while the vertical channel layer is held by the first gate stack.
    Type: Application
    Filed: December 7, 2021
    Publication date: June 16, 2022
    Inventor: Huilong Zhu
  • Publication number: 20220189925
    Abstract: A semiconductor device, a method of manufacturing the semiconductor device, and an electronic apparatus including the semiconductor device are provided. The semiconductor device may include: a plurality of element stacks, wherein each element stack includes a plurality of stacked layers of semiconductor elements, each semiconductor element includes a gate electrode and source/drain regions on opposite sides of the gate electrode; and an interconnection structure between the plurality of element stacks. The interconnection structure includes an electrical isolation layer, and a conductive structure in the electrical isolation layer. At least one of the gate electrode and the source/drain regions of each of at least a part of the semiconductor elements is in contact with and therefore electrically connected to the conductive structure of the interconnection structure at a corresponding height in a lateral direction.
    Type: Application
    Filed: December 10, 2021
    Publication date: June 16, 2022
    Inventor: Huilong ZHU
  • Publication number: 20220189926
    Abstract: A method of manufacturing a semiconductor device includes: providing an element stack on a carrier substrate; forming an interconnection structure connecting the element stack laterally in an area on the carrier substrate adjacent to the element stack, wherein the interconnection structure includes an electrical isolation layer and a conductive structure in the electrical isolation layer; and controlling a height of the conductive structure in the interconnection structure, so that at least a part of components to be electrically connected in the element stack are in contact and therefore electrically connected to the conductive structure at the corresponding height. Forming the conductive structure includes: forming a conductive material layer in the area; forming a mask layer covering the conductive material layer; patterning the mask layer into a pattern corresponding to the conductive structure; and using the mask layer as an etching mask to selectively etch the conductive material layer.
    Type: Application
    Filed: December 10, 2021
    Publication date: June 16, 2022
    Inventor: Huilong ZHU
  • Publication number: 20220189853
    Abstract: A semiconductor device with a sidewall interconnection structure and a method for manufacturing the same, and an electronic apparatus including the semiconductor device are provided. According to embodiments, the semiconductor device includes: a vertical stack including a plurality of element layers, wherein each element layer of the plurality of element layers includes a plurality of semiconductor elements and a metallization layer for the plurality of semiconductor elements; and an interconnection structure laterally adjoined the vertical stack. The interconnection structure includes: an electrical isolation layer; and a conductive structure in the electrical isolation layer, wherein at least a part of a conductive structure in the metallization layer of the each element layer is in contact with and electrically connected to the conductive structure at a corresponding height in the interconnection structure in a lateral direction.
    Type: Application
    Filed: December 8, 2021
    Publication date: June 16, 2022
    Inventor: Huilong ZHU
  • Patent number: 11361799
    Abstract: A semiconductor memory device including a substrate; an array of memory cells arranged in rows and columns on the substrate, each memory cell comprising a vertical pillar-shaped active region having upper and lower source/drain regions and a channel region, and a gate stack formed around the channel region; a plurality of bit lines on the substrate, each bit line located below a column of memory cells and electrically connected to the lower source/drain regions of the memory cells; and a plurality of word lines on the substrate, each word line extending in a row direction and connected to gate conductors of the memory cells in a row of memory cells, each word line comprising first portions extending along peripheries of the memory cells and second portions extending between the first portions, the first portions of the word line extending in a conformal manner with sidewalls of the upper source/drain regions.
    Type: Grant
    Filed: September 21, 2018
    Date of Patent: June 14, 2022
    Assignee: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCES
    Inventor: Huilong Zhu
  • Patent number: 11329149
    Abstract: There are provided a vertical semiconductor device, a method of manufacturing the same, and an electronic device including the same.
    Type: Grant
    Filed: October 31, 2018
    Date of Patent: May 10, 2022
    Assignee: Institute of Microelectronics, The Chinese Academy of Sciences
    Inventor: Huilong Zhu
  • Patent number: 11309432
    Abstract: There are provided a nanometer semiconductor device with a high-quality epitaxial layer and a method of manufacturing the same. According to an embodiment, the semiconductor device may include: a substrate; at least one nanowire spaced apart from the substrate; at least one semiconductor layer, each formed around a periphery of respective one of the at least one nanowire to at least partially surround the corresponding nanowire, wherein the semiconductor layer(s) formed around the respective nanowire(s) are separated from each other; an isolation layer formed on the substrate, exposing the at least one semiconductor layer; and a gate stack formed on the isolation layer and intersecting the at least one semiconductor layer, wherein the gate stack includes a gate dielectric layer at least partially surrounding a periphery of respective one of the at least one semiconductor layer and a gate conductor layer.
    Type: Grant
    Filed: September 27, 2019
    Date of Patent: April 19, 2022
    Assignee: Institute of Microelectronics, Chinese /Academy of Sciences
    Inventor: Huilong Zhu
  • Publication number: 20220102559
    Abstract: Disclosed are a semiconductor device, a method of manufacturing the semiconductor device, and an electronic apparatus including the semiconductor device. The semiconductor device may include: a substrate; an active region extending vertically on the substrate, wherein the active region includes a first source/drain layer, a channel layer and a second source/drain layer that are sequentially stacked; a gate stack formed around at least part of an outer peripheral sidewall of the channel layer. A sidewall of the gate stack close to the channel layer is aligned with the outer peripheral sidewall of the channel layer, so as to occupy substantially a same range in a vertical direction, and a part of the gate stack close to the channel layer has a shape that gradually tapers as getting close to the channel layer.
    Type: Application
    Filed: April 24, 2019
    Publication date: March 31, 2022
    Inventors: Huilong ZHU, Chen LI, Yongkui ZHANG
  • Patent number: 11289499
    Abstract: A memory device may include first and second pillar-shaped active regions formed on a substrate and extending upward. The first and second active regions are arranged in a first array and a second array, respectively. Each of the first active regions comprises alternatively stacked source/drain layers and channel layers, wherein the channel layers of the respective first active regions at a corresponding level are substantially coplanar with each other, and the source/drain layers of the respective first active regions at a corresponding level are substantially coplanar with each other. Each of the second active regions comprises an active semiconductor layer extending integrally. The memory device may include multiple layers of first storage gate stacks surrounding peripheries of and being substantially coplanar with the respective levels of the channel layers, and multiple layers of second storage gate stacks which surround peripheries of the respective second active regions.
    Type: Grant
    Filed: July 31, 2017
    Date of Patent: March 29, 2022
    Assignee: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCES
    Inventor: Huilong Zhu
  • Publication number: 20220085043
    Abstract: Disclosed are a semiconductor device, a method for manufacturing the same, an integrated circuit, and an electronic apparatus. The semiconductor device includes: a substrate; an active region on the substrate, the active region includes a first source and drain layer, a channel layer, and a second source and drain layer sequentially stacked on the substrate; a gate stack formed around an outer periphery of the channel layer; and an intermediate dielectric layer and a second conductive layer around an outer periphery of the gate stack and an outer periphery of the active region. The device and method provided by the present disclosure are used to solve the technical problem that the performances of the vertical device in the related art need to be improved. A semiconductor device with better performances is provided.
    Type: Application
    Filed: April 9, 2019
    Publication date: March 17, 2022
    Inventors: Huilong Zhu, Weixing Huang, Kunpeng Jia