Patents by Inventor Hyun-Pil Noh
Hyun-Pil Noh has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 10804304Abstract: Image sensors are provided. An image sensor includes a semiconductor substrate including a pixel region and an optical black region. The image sensor includes a plurality of photoelectric conversion regions in the pixel region. The image sensor includes a wiring structure on a first surface of the semiconductor substrate. The image sensor includes a light shielding layer on a second surface of the semiconductor substrate in the optical black region. Moreover, the image sensor includes a light shielding wall structure that is in the semiconductor substrate between the pixel region and the optical black region and that is connected to the light shielding layer.Type: GrantFiled: August 28, 2018Date of Patent: October 13, 2020Assignee: Samsung Electronics Co., Ltd.Inventors: Hyun-pil Noh, Chang-keun Lee, Je-won Yu, Kang-sun Lee
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Publication number: 20190221597Abstract: Image sensors are provided. An image sensor includes a semiconductor substrate including a pixel region and an optical black region. The image sensor includes a plurality of photoelectric conversion regions in the pixel region. The image sensor includes a wiring structure on a first surface of the semiconductor substrate. The image sensor includes a light shielding layer on a second surface of the semiconductor substrate in the optical black region. Moreover, the image sensor includes a light shielding wall structure that is in the semiconductor substrate between the pixel region and the optical black region and that is connected to the light shielding layer.Type: ApplicationFiled: August 28, 2018Publication date: July 18, 2019Inventors: Hyun-pil Noh, Chang-keun Lee, Je-won Yu, Kang-sun Lee
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Patent number: 9947714Abstract: In a method of manufacturing an image sensor, photodiodes may be formed on a semiconductor layer in an active pixel region and a peripheral region. A structure including insulating interlayers and wiring structures may be formed on a first surface of the semiconductor layer in the active pixel region, the peripheral region and an input/output (I/O) region. The semiconductor layer and a first insulating interlayer of the insulating interlayers on the I/O region may be partially etched to form a via hole exposing a first wiring structure of the wiring structures. A first metal layer and a second metal layer may be formed on a second surface of the semiconductor layer and the via hole. The second metal layer may be patterned to form a second pad pattern on the semiconductor layer in the I/O region. An anti-reflective layer may be formed on the first metal layer and the second pad pattern.Type: GrantFiled: June 26, 2017Date of Patent: April 17, 2018Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Jeong-Ho Lee, Hyun-Pil Noh
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Publication number: 20180019280Abstract: In a method of manufacturing an image sensor, photodiodes may be formed on a semiconductor layer in an active pixel region and a peripheral region. A structure including insulating interlayers and wiring structures may be formed on a first surface of the semiconductor layer in the active pixel region, the peripheral region and an input/output (I/O) region. The semiconductor layer and a first insulating interlayer of the insulating interlayers on the I/O region may be partially etched to form a via hole exposing a first wiring structure of the wiring structures. A first metal layer and a second metal layer may be formed on a second surface of the semiconductor layer and the via hole. The second metal layer may be patterned to form a second pad pattern on the semiconductor layer in the I/O region. An anti-reflective layer may be formed on the first metal layer and the second pad pattern.Type: ApplicationFiled: June 26, 2017Publication date: January 18, 2018Inventors: JEONG-HO LEE, HYUN-PIL NOH
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Patent number: 9620460Abstract: Provided are a semiconductor chip, a semiconductor package and a fabricating method thereof, which can reduce or prevent cracks from being generated or propagated due to an external pressure. The semiconductor chip includes a semiconductor substrate including a first region and a second region, a plurality of interlayer insulation layers formed on the semiconductor substrate, a first crack stopper formed in the plurality of interlayer insulation layers of the first region, an interconnector formed in the plurality of interlayer insulation layers of the second region, a pad wire formed on the plurality of interlayer insulation layers, electrically connected to the interconnector in the second region and extending to the first region, a bonding pad on the plurality of interlayer insulation layers of the first region, electrically connected to the pad wire, and a protection layer covering the pad wire and exposing the bonding pad.Type: GrantFiled: February 13, 2015Date of Patent: April 11, 2017Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Hyun-Pil Noh, Jeong-Woon Kim, Seok-Ha Lee
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Patent number: 9330981Abstract: Provided are a semiconductor device including a high voltage transistor and a low voltage transistor and a method of manufacturing the same. The semiconductor device includes a semiconductor substrate including a high voltage region and a low voltage region; a high voltage transistor formed in the high voltage region and including a first active region, a first source/drain region, a first gate insulating layer, and a first gate electrode; and a low voltage transistor formed in the low voltage region and including a second active region, a second source/drain region, a second gate insulating layer, and a second gate electrode. The second source/drain region has a smaller thickness than a thickness of the first source/drain region.Type: GrantFiled: August 14, 2014Date of Patent: May 3, 2016Assignee: Samsung Electronics Co., Ltd.Inventors: Shigenobu Maeda, Hyun-pil Noh, Choong-ho Lee, Seog-heon Ham
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Publication number: 20160027828Abstract: Image sensors are provided. The image sensors can include a photodiode in a substrate configured to generate signal charges based on incident light, a charge storage unit positioned at a side of the photodiode configured to temporarily store the signal charges generated by the photodiode, and a shield metal on the charge storage unit and on the substrate.Type: ApplicationFiled: July 14, 2015Publication date: January 28, 2016Inventors: Seok-ha Lee, Hyun-pil Noh
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Publication number: 20160005697Abstract: Provided are a semiconductor chip, a semiconductor package and a fabricating method thereof, which can reduce or prevent cracks from being generated or propagated due to an external pressure. The semiconductor chip includes a semiconductor substrate including a first region and a second region, a plurality of interlayer insulation layers formed on the semiconductor substrate, a first crack stopper formed in the plurality of interlayer insulation layers of the first region, an interconnector formed in the plurality of interlayer insulation layers of the second region, a pad wire formed on the plurality of interlayer insulation layers, electrically connected to the interconnector in the second region and extending to the first region, a bonding pad on the plurality of interlayer insulation layers of the first region, electrically connected to the pad wire, and a protection layer covering the pad wire and exposing the bonding pad.Type: ApplicationFiled: February 13, 2015Publication date: January 7, 2016Inventors: Hyun-Pil Noh, Jeong-Woon Kim, Seok-Ha Lee
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Publication number: 20150340445Abstract: A substrate structure include a lower substrate doped with n-type impurities having a first impurity concentration, an epitaxial layer on the lower substrate, and a metallic-contaminant collection area spaced apart from the epitaxial layer in the lower substrate, the metallic-contaminant collection area doped with impurities having a second impurity concentration higher than the first impurity concentration, the metallic-contaminant collection area having lattice defects, and an upper surface of the metallic-contaminant collection area being spaced apart from a top surface of the lower substrate at a distance in a range of about 0.1 ?m to about 3 ?m.Type: ApplicationFiled: March 12, 2015Publication date: November 26, 2015Inventors: Joon-Young CHOI, Tae-Gon KIM, Hyun-Pil NOH, Jae-Sik BAE, Sam-Jong CHOI
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Publication number: 20140357035Abstract: Provided are a semiconductor device including a high voltage transistor and a low voltage transistor and a method of manufacturing the same. The semiconductor device includes a semiconductor substrate including a high voltage region and a low voltage region; a high voltage transistor formed in the high voltage region and including a first active region, a first source/drain region, a first gate insulating layer, and a first gate electrode; and a low voltage transistor formed in the low voltage region and including a second active region, a second source/drain region, a second gate insulating layer, and a second gate electrode. The second source/drain region has a smaller thickness than a thickness of the first source/drain region.Type: ApplicationFiled: August 14, 2014Publication date: December 4, 2014Inventors: Shigenobu MAEDA, Hyun-pil NOH, Choong-ho LEE, Seog-heon HAM
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Patent number: 8809990Abstract: Provided are a semiconductor device including a high voltage transistor and a low voltage transistor and a method of manufacturing the same. The semiconductor device includes a semiconductor substrate including a high voltage region and a low voltage region; a high voltage transistor formed in the high voltage region and including a first active region, a first source/drain region, a first gate insulating layer, and a first gate electrode; and a low voltage transistor formed in the low voltage region and including a second active region, a second source/drain region, a second gate insulating layer, and a second gate electrode. The second source/drain region has a smaller thickness than a thickness of the first source/drain region.Type: GrantFiled: September 12, 2012Date of Patent: August 19, 2014Assignee: Samsung Electronics Co., Ltd.Inventors: Shigenobu Maeda, Hyun-pil Noh, Choong-ho Lee, Seog-heon Ham
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Publication number: 20130134520Abstract: Provided are a semiconductor device including a high voltage transistor and a low voltage transistor and a method of manufacturing the same. The semiconductor device includes a semiconductor substrate including a high voltage region and a low voltage region; a high voltage transistor formed in the high voltage region and including a first active region, a first source/drain region, a first gate insulating layer, and a first gate electrode; and a low voltage transistor formed in the low voltage region and including a second active region, a second source/drain region, a second gate insulating layer, and a second gate electrode. The second source/drain region has a smaller thickness than a thickness of the first source/drain region.Type: ApplicationFiled: September 12, 2012Publication date: May 30, 2013Applicant: SAMSUNG ELECTRONICS CO., LTD.Inventors: Shigenobu Maeda, Hyun-pil Noh, Choong-ho Lee, Seog-heon Ham
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Patent number: 8193600Abstract: A shared-pixel-type image sensor including a shared floating diffusion region formed in a semiconductor substrate; first and second adjacent photoelectric conversion regions sharing the floating diffusion region; two transmission elements that alternately transfer electric charges accumulated in the first and second photoelectric conversion regions to the shared floating diffusion region, respectively; a drive element for outputting the electric charges of the shared floating diffusion region; a first contact formed on the floating diffusion region; a second contact formed on the drive element; and a local wire that connects the first and second contacts to electrically connect the floating diffusion region and the drive element, wherein the local wire is formed at a level lower than respective top surfaces of the first and second contacts.Type: GrantFiled: April 1, 2009Date of Patent: June 5, 2012Assignee: Samsung Electronics Co., Ltd.Inventors: Hyun-Pil Noh, Duck-Hyung Lee, Doo-Cheol Park
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Patent number: 8154097Abstract: An image sensor and a method of manufacturing the same are provided. The image sensor includes a substrate having a sensor array area and a peripheral circuit area a first insulating film structure formed on the peripheral circuit area and including a plurality of first multi-layer wiring lines and a second insulating film structure formed on the sensor array area and including a plurality of second multi-layer wiring lines. The uppermost-layer wiring line of the plurality of first multi-layer wiring lines is higher than that of the uppermost-layer wiring line of the plurality of second multi-layer wiring lines. The first insulating film structure includes an isotropic etch-stop layer, and the second insulating film structure does not include the isotropic etch-stop layer.Type: GrantFiled: November 7, 2008Date of Patent: April 10, 2012Assignee: Samsung Electronics Co., Ltd.Inventors: Hong-Ki Kim, Duck-Hyung Lee, Hyun-Pil Noh
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Patent number: 8093089Abstract: Method of manufacturing image sensors having a plurality of gettering regions. In the method, a gate electrode may be formed on a semiconductor substrate. A source/drain region may be formed in the semiconductor substrate to be overlapped with the gate electrode. A gettering region may be formed in the semiconductor substrate to be adjacent to the source/drain region.Type: GrantFiled: April 19, 2010Date of Patent: January 10, 2012Assignee: Samsung Electronics Co., Ltd.Inventor: Hyun-Pil Noh
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Patent number: 7855149Abstract: Provided may be a treatment method to remove defects created on the surface of a substrate, a method of fabricating an image sensor by using the treatment method, and an image sensor fabricated by the same. The treatment method may include providing a semiconductor substrate including a surface defect, providing a chemical solution to a surface of the semiconductor substrate, and removing the surface defect by consuming the surface of the semiconductor substrate and forming a chemical oxide layer on the semiconductor substrate.Type: GrantFiled: January 16, 2009Date of Patent: December 21, 2010Assignee: Samsung Electronics Co., Ltd.Inventors: Gi-Bum Kim, Hyun-Pil Noh
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Publication number: 20100267184Abstract: Method of manufacturing image sensors having a plurality of gettering regions. In the method, a gate electrode may be formed on a semiconductor substrate. A source/drain region may be formed in the semiconductor substrate to be overlapped with the gate electrode. A gettering region may be formed in the semiconductor substrate to be adjacent to the source/drain region.Type: ApplicationFiled: April 19, 2010Publication date: October 21, 2010Inventor: Hyun-Pil Noh
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Publication number: 20090261443Abstract: A shared-pixel-type image sensor including a shared floating diffusion region formed in a semiconductor substrate; first and second adjacent photoelectric conversion regions sharing the floating diffusion region; two transmission elements that alternately transfer electric charges accumulated in the first and second photoelectric conversion regions to the shared floating diffusion region, respectively; a drive element for outputting the electric charges of the shared floating diffusion region; a first contact formed on the floating diffusion region; a second contact formed on the drive element; and a local wire that connects the first and second contacts to electrically connect the floating diffusion region and the drive element, wherein the local wire is formed at a level lower than respective top surfaces of the first and second contacts.Type: ApplicationFiled: April 1, 2009Publication date: October 22, 2009Inventors: Hyun-Pil Noh, Duck-Hyung Lee, Doo-Cheol Park
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Publication number: 20090206432Abstract: An image sensor and a method of manufacturing the same are provided. The image sensor includes a substrate having a sensor array area and a peripheral circuit area a first insulating film structure formed on the peripheral circuit area and including a plurality of first multi-layer wiring lines and a second insulating film structure formed on the sensor array area and including a plurality of second multi-layer wiring lines. The uppermost-layer wiring line of the plurality of first multi-layer wiring lines is higher than that of the uppermost-layer wiring line of the plurality of second multi-layer wiring lines. The first insulating film structure includes an isotropic etch-stop layer, and the second insulating film structure does not include the isotropic etch-stop layer.Type: ApplicationFiled: November 7, 2008Publication date: August 20, 2009Inventors: Hong-Ki KIM, Duck-Hyung LEE, Hyun-Pil NOH
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Publication number: 20090197365Abstract: Provided may be a treatment method to remove defects created on the surface of a substrate, a method of fabricating an image sensor by using the treatment method, and an image sensor fabricated by the same. The treatment method may include providing a semiconductor substrate including a surface defect, providing a chemical solution to a surface of the semiconductor substrate, and removing the surface defect by consuming the surface of the semiconductor substrate and forming a chemical oxide layer on the semiconductor substrate.Type: ApplicationFiled: January 16, 2009Publication date: August 6, 2009Inventors: Gi-Bum Kim, Hyun-Pil Noh