Abstract: Provided is a binder resin for color toners which comprises at least a carboxyl group-containing vinyl resin (C), a glycidyl group-containing vinyl resin (E) and a reaction product thereof, wherein the storage modulus G? at 160 degrees centigrade is not less than 20 and less than 800 Pa measured at a frequency of 6.28 rad/sec, the tetrahydrofuran (THF) soluble portion in the binder resin has a main peak in the molecular weight region of not less than 20,000 and less than 40,000 in the molecular weight distribution measured by gel permeation chromatography (GPC), and the binder resin contains at least one of releasing agents having a melting point of not lower than 60 and not higher than 120 degrees centigrade in an amount of not less than 3.5 and not more than 12 mass % based on 100 mass % of the total amount of the carboxyl group-containing vinyl resin (C), the glycidyl group-containing vinyl resin (E) and a reaction product thereof.

Abstract: Provided is a binder resin for color toners which comprises at least a carboxyl group-containing vinyl resin (C), a glycidyl group-containing vinyl resin (E) and a reaction product thereof, and contains both a tetrahydrofuran (THF) soluble portion and a THF insoluble gel portion, wherein the THF soluble portion has a main peak in the molecular weight region of not less than 10,000 and less than 15,000 in the chromatogram obtained by gel permeation chromatography (GPC), the content of the THF insoluble gel portion is less than 1 mass %, and the softening point is not more than 130 degrees centigrade.

Abstract: An object of the present invention is to provide a resin microparticle for a toner raw material that has a small particle diameter and a narrow particle diameter distribution and has a low odor. There are provided a resin microparticle for a toner raw material characterized in that all of the following requirements (i) to (iii) are satisfied: Requirement (i): A particle diameter of 50% volume (D50) satisfies the relationship 0.05 ?m?D50?1 ?m; Requirement (ii): A particle diameter of 10% volume (D10) and a particle diameter of 90% volume (D90) satisfy the relationship D90/D10?7; and Requirement (iii): The content of an organic solvent is not more than 70 ppm.

Abstract: Provided is a binder resin for color toners which comprises at least a carboxyl group-containing vinyl resin (C), a glycidyl group-containing vinyl resin (E) and a reaction product thereof, and contains both a tetrahydrofuran (THF) soluble portion and a THF insoluble gel portion, wherein the THF soluble portion has a main peak in the molecular weight region of not less than 10,000 and less than 15,000 in the chromatogram obtained by gel permeation chromatography (GPC), the content of the THF insoluble gel portion is less than 1 mass %, and the softening point is not more than 130 degrees centigrade.

Abstract: Provided is a binder resin for color toners which comprises at least a carboxyl group-containing vinyl resin (C), a glycidyl group-containing vinyl resin (E) and a reaction product thereof, wherein the storage modulus G? at 160 degrees centigrade is not less than 20 and less than 800 Pa measured at a frequency of 6.28 rad/sec, the tetrahydrofuran (THF) soluble portion in the binder resin has a main peak in the molecular weight region of not less than 20,000 and less than 40,000 in the molecular weight distribution measured by gel permeation chromatography (GPC), and the binder resin contains at least one of releasing agents having a melting point of not lower than 60 and not higher than 120 degrees centigrade in an amount of not less than 3.5 and not more than 12 mass % based on 100 mass % of the total amount of the carboxyl group-containing vinyl resin (C), the glycidyl group-containing vinyl resin (E) and a reaction product thereof.

Abstract: An object of the present invention is to provide a resin microparticle for a toner raw material that has a small particle diameter and a narrow particle diameter distribution and has a low odor. There are provided a resin microparticle for a toner raw material characterized in that all of the following requirements (i) to (iii) are satisfied: Requirement (i): A particle diameter of 50% volume (D50) satisfies the relationship 0.05 ?m?D50?1 ?m; Requirement (ii): A particle diameter of 10% volume (D10) and a particle diameter of 90% volume (D90) satisfy the relationship D90/D10?7; and Requirement (iii): The content of an organic solvent is not more than 70 ppm.

Abstract: A resin microparticle for a toner raw material that has a small particle diameter and a narrow particle diameter distribution and has a low odor is provided. The resin microparticle for a toner raw material has the following requirements (i) to (iii) satisfied: Requirement (i): A particle diameter of 50% volume (D50) satisfies the relationship 0.05 ?m?D50?1 ?m; Requirement (ii): A particle diameter of 10% volume (D10) and a particle diameter of 90% volume (D90) satisfy the relationship D90/D10?7; and Requirement (iii): The content of an organic solvent is not more than 70 ppm.

Abstract: A plasma processing apparatus includes a plasma processing chamber having a stage for placing a substrate to be plasma processed, an exhaust port and a gas introduction nozzle for plasma processing coupled therewith, and a cavity resonator for closing the plasma processing chamber in vacuum manner and coupled through a microwave introducing window through which microwaves are introduced and having slots for radiating microwaves to the plasma processing chamber. Microwaves having increased intensity of an electromagnetic field is supplied to the processing chamber to produce plasma to effect processing of the substrate. An area in which diffusion of plasma is suppressed to reduce loss is formed only in the vicinity of an inner wall of the processing chamber.

Abstract: A method of and apparatus removes foreign particles in a vacuum or in a dry atmosphere before and in continuation to performing a dry process, such as a dry etching or a sputtering process. For this purpose, the foreign particles are separated from a substrate by subjecting the foreign particles to a force for separating the foreign particles from the substrate and a vibrating force for vibrating the foreign particles at the same time, and then the frequency of vibration is changed to match the resonant frequency of a vibration system formed by each of the foreign particles and the substrate, thereby applying a vibration energy to the foreign particles due to resonance. The separated foreign particles floating in a plasma are drawn to an electrode having a potential which is controlled such that a flowing-in of electrons is reduced, and the particles are discharged from the inside of the plasma.

Abstract: A plasma processing apparatus includes a plasma processing chamber having a stage for placing a substrate to be plasma processed, an exhaust port and a gas introduction nozzle for plasma processing coupled therewith, and a cavity resonator for closing the plasma processing chamber in vacuum manner and coupled through a microwave introducing window through which microwaves are introduced and having slots for radiating microwaves to the plasma processing chamber. Microwaves having increased intensity of an electromagnetic field is supplied to the processing chamber to produce plasma to effect processing of the substrate. An area in which diffusion of plasma is suppressed to reduce loss is formed only in the vicinity of an inner wall of the processing chamber.

Abstract: Disclosed is a plasma CVD apparatus and a method therefor, the apparatus comprising: a microwave generating portion; a coaxial cavity resonator for making a microwave supplied from the microwave generating portion resonate; a plurality of gas leading inlets provided in under portions of an axis of the cavity resonator and in peripheral wall portions of the cavity resonator for leading-in a supplied CVD gas; and a plasma generating chamber in which the CVD gas lead into the plasma generating chamber through the gas leading inlets and made to flow uniformly onto a surface of a substrate is subject to the microwave made intensive through resonance in the cavity resonator and radiated through a coupling plate so that uniform plasma is generated to thereby form a thin film on the surface of the substrate.

Abstract: A plasma processing apparatus including a microwave generator, a waveguide for supplying microwaves generated by the microwave generator, a cavity resonator for resonating the microwaves supplied by the waveguide, and a plasma processing chamber. The plasma processing chamber is coupled to the cavity resonator for receiving resonated microwaves therefrom and for generating a plasma therein. The plasma processing chamber is provided with a stage for holding a substrate for plasma processing, and apparatus for introducing a plasma processing gas to the plasma processing chamber for exhausting gas therefrom. A separation plate separates the cavity resonator and the plasma processing chamber and enables resonated microwaves to be transmitted therethrough from the cavity resonator means to the plasma processing chamber.