Patents by Inventor J. Glen Palmer

J. Glen Palmer has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Rotating cylindrical magnetron structure with self supporting zinc alloy target
    Patent number: 5171411
    Abstract: Alloys useful for preparing self-supporting cylindrical targets are provided. The alloys comprise zinc and one or more other metals chosen from the following: aluminum, bismuth, cerium, gadolinium, hafnium, niobium, silicon, tantalum, titanium, vanadium, yttrium, and zirconium. In one preferred embodiment, a zinc alloy with approximately 2% aluminum forms self-supporting cylindrical targets from which metal oxide films are prepared by reactive sputtering. The alloy oxide films are clear, transparent, non-absorbing, and optically functional.
    Type: Grant
    Filed: May 21, 1991
    Date of Patent: December 15, 1992
    Assignee: The BOC Group, Inc.
    Inventors: James W. Hillendahl, J. Glen Palmer