Patents by Inventor Jacek Kazimierz Tyminski

Jacek Kazimierz Tyminski has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240157641
    Abstract: Directed energy beam deflections are compensated by mapping pixel coordinates of an image of a patterning field to patterning field spatial coordinates. For example, electron beam scanning is compensated by imaging calibration features defined on a reticle to produce a mapping between pixel and physical coordinates. An electron beam is scanned to produce cathodoluminescence at a plurality of scan locations in a patterning field. With the pixel coordinate mapping, an image of the cathodoluminescence is used to determine compensated scan drive values. Other directed energy beam deflections can be similarly compensated.
    Type: Application
    Filed: March 4, 2022
    Publication date: May 16, 2024
    Applicant: NIKON CORPORATION
    Inventors: Jacek Kazimierz TYMINSKI, Michael Birk BINNARD
  • Publication number: 20220293390
    Abstract: Electron beam position, size, or shape can be estimated by deflecting the beam to a plurality of apertures, either continuously or step-wise. Beam portions transmitted, absorbed, or scattered can be used to assess position, size, and shape. In other examples, a beam sensing aperture and the beam are oscillated with respect to each other by moving the aperture or varying the beam deflection or both. The beam can be directed to segmented detectors such as a quad detector, and currents in the segments used to assess beam position, shape, or size. The segments can be formed from a single conductive sheet on which the segments are defined but remain attached. After the conductive sheet is secured with an insulative adhesive, portions of the conductive sheet are broken away, leaving aligned segments.
    Type: Application
    Filed: March 14, 2022
    Publication date: September 15, 2022
    Inventors: Jacek Kazimierz Tyminski, Daniel Gene Smith, Steven Douglas Slonaker, Stephen Paul Renwick, Johnathan Agustin Marquez