Patents by Inventor Jairo Moura

Jairo Moura has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20210305076
    Abstract: Substrate processing apparatus including a wafer transport apparatus with a transport arm including an end effector, an arm pose deterministic feature integral to the substrate transport apparatus and disposed so that a static detection sensor of the substrate processing apparatus detects at least one edge of the at least one arm pose deterministic feature on the fly with radial motion of the transport arm, and a controller configured so that detection of the edge effects a determination of a proportion factor identifying at least a thermal expansion variance of the transport arm on the fly and includes a kinematic effects resolver configured to determine, from the detection of the edge on the fly, a discrete relation between the determined proportion factor and each different discrete variance respective to each different link of the transport arm determining at least the thermal expansion variance of the transport arm on the fly.
    Type: Application
    Filed: April 13, 2021
    Publication date: September 30, 2021
    Inventors: Bing YIN, Jairo MOURA, Vincent TSANG, Aaron GAWLIK, Nathan SPIKER
  • Publication number: 20210225685
    Abstract: A semiconductor process transport apparatus including a drive section with at least one motor, an articulated arm coupled to the drive section for driving articulation motion, a machine controller coupled to the drive section to control the at least one motor moving the articulated arm from one location to a different location, and an adapter pendant having a machine controller interface coupling the adapter pendant for input/output with the machine controller, the adapter pendant having another interface, configured for connecting a fungible smart mobile device having predetermined resident user operable device functionality characteristics, wherein the other interface has a connectivity configuration so mating of the fungible smart mobile device with the other interface automatically enables configuration of at least one of the resident user operable device functionality characteristics to define an input/output to the machine controller effecting input commands and output signals for motion control of the
    Type: Application
    Filed: January 26, 2021
    Publication date: July 22, 2021
    Inventors: Dana L. ATWOOD, Jairo MOURA
  • Patent number: 11002566
    Abstract: A sensing mechanism includes a magnetic source, a magnetic flux sensor, a sensor backing on which the magnetic source and flux sensor are mounted, and a ferromagnetic target, where the magnetic source, magnetic flux sensor, and ferromagnetic target are positioned to form a magnetic circuit from the magnetic source to the target, from the target to the sensor, and returning to the magnetic source through the sensor backing.
    Type: Grant
    Filed: October 8, 2010
    Date of Patent: May 11, 2021
    Assignee: Brooks Automation, Inc.
    Inventors: Martin Hosek, Jairo Moura, Jay Krishnasamy, Jeff Paranay
  • Patent number: 10903107
    Abstract: A semiconductor process transport apparatus including a drive section with at least one motor, an articulated arm coupled to the drive section for driving articulation motion, a machine controller coupled to the drive section to control the at least one motor moving the articulated arm from one location to a different location, and an adapter pendant having a machine controller interface coupling the adapter pendant for input/output with the machine controller, the adapter pendant having another interface, configured for connecting a fungible smart mobile device having predetermined resident user operable device functionality characteristics, wherein the other interface has a connectivity configuration so mating of the fungible smart mobile device with the other interface automatically enables configuration of at least one of the resident user operable device functionality characteristics to define an input/output to the machine controller effecting input commands and output signals for motion control of the
    Type: Grant
    Filed: July 6, 2018
    Date of Patent: January 26, 2021
    Assignee: Brooks Automation, Inc.
    Inventors: Dana L. Atwood, Jairo Moura
  • Publication number: 20200321232
    Abstract: A substrate processing apparatus including a frame, a first SCARA arm connected to the frame, including an end effector, configured to extend and retract along a first radial axis; a second SCARA arm connected to the frame, including an end effector, configured to extend and retract along a second radial axis, the SCARA arms having a common shoulder axis of rotation; and a drive section coupled to the SCARA arms is configured to independently extend each SCARA arm along a respective radial axis and rotate each SCARA arm about the common shoulder axis of rotation where the first radial axis is angled relative to the second radial axis and the end effector of a respective arm is aligned with a respective radial axis, wherein each end effector is configured to hold at least one substrate and the end effectors are located on a common transfer plane.
    Type: Application
    Filed: March 20, 2020
    Publication date: October 8, 2020
    Inventors: Robert T. CAVENEY, Jayaraman KRISHNASAMY, Ulysses GILCHRIST, Mitchell DREW, Jairo MOURA
  • Publication number: 20200166913
    Abstract: A control system includes a clustered architecture having a master controller, a central control section including one or more first remote controllers under direct control of the master controller, and a distributed control section including a cluster controller controlled by the master controller. The cluster controller controls the activities of one or more second remote controllers. Each of the first and second remote controllers are utilized to drive one or more axes.
    Type: Application
    Filed: November 26, 2019
    Publication date: May 28, 2020
    Inventors: Martin Hosek, Stuart Beale, Roumen Botev, Matthew Coady, Christopher Hofmeister, Mark Ives, Jairo Moura, Robert Caveney
  • Patent number: 10488851
    Abstract: A control system includes a clustered architecture having a master controller, a central control section including one or more first remote controllers under direct control of the master controller, and a distributed control section including a cluster controller controlled by the master controller. The cluster controller controls the activities of one or more second remote controllers. Each of the first and second remote controllers are utilized to drive one or more axes.
    Type: Grant
    Filed: April 28, 2015
    Date of Patent: November 26, 2019
    Assignee: BROOKS AUTOMATION, INC.
    Inventors: Martin Hosek, Stuart Beale, Roumen Botev, Matthew Coady, Christopher Hofmeister, Mark Ives, Jairo Moura, Robert Caveney
  • Publication number: 20190019719
    Abstract: A semiconductor process transport apparatus including a drive section with at least one motor, an articulated arm coupled to the drive section for driving articulation motion, a machine controller coupled to the drive section to control the at least one motor moving the articulated arm from one location to a different location, and an adapter pendant having a machine controller interface coupling the adapter pendant for input/output with the machine controller, the adapter pendant having another interface, configured for connecting a fungible smart mobile device having predetermined resident user operable device functionality characteristics, wherein the other interface has a connectivity configuration so mating of the fungible smart mobile device with the other interface automatically enables configuration of at least one of the resident user operable device functionality characteristics to define an input/output to the machine controller effecting input commands and output signals for motion control of the
    Type: Application
    Filed: July 6, 2018
    Publication date: January 17, 2019
    Inventors: Dana L ATWOOD, Jairo MOURA
  • Publication number: 20160018816
    Abstract: A control system includes a clustered architecture having a master controller, a central control section including one or more first remote controllers under direct control of the master controller, and a distributed control section including a cluster controller controlled by the master controller. The cluster controller controls the activities of one or more second remote controllers. Each of the first and second remote controllers are utilized to drive one or more axes.
    Type: Application
    Filed: April 28, 2015
    Publication date: January 21, 2016
    Inventors: Martin Hosek, Stuart Beale, Roumen Botev, Matthew Coady, Christopher Hofmeister, Mark Ives, Jairo Moura, Robert Caveney
  • Patent number: 9020617
    Abstract: A control system includes a clustered architecture having a master controller, a central control section including one or more first remote controllers under direct control of the master controller, and a distributed control section including a cluster controller controlled by the master controller. The cluster controller controls the activities of one or more second remote controllers. Each of the first and second remote controllers are utilized to drive one or more axes.
    Type: Grant
    Filed: January 24, 2011
    Date of Patent: April 28, 2015
    Assignee: Brooks Automation, Inc.
    Inventors: Martin Hosek, Stuart Beale, Roumen Botev, Matthew Coady, Christopher Hofmeister, Mark Ives, Jairo Moura, Robert Caveney
  • Patent number: 8659205
    Abstract: A motor includes a stator and a rotor, equipped to be movable in at least a first direction relative to the stator, the rotor operably interfacing the stator so that a motor force is generated in a first direction, where the stator comprises an anti-cogging element configured to generate anti-cogging forces on the rotor in at least the first direction and a second direction at an angle to the first direction.
    Type: Grant
    Filed: June 27, 2008
    Date of Patent: February 25, 2014
    Assignee: Brooks Automation, Inc.
    Inventors: Jairo Moura, Jay Krishnasamy, Martin Hosek
  • Publication number: 20110118855
    Abstract: A control system includes a clustered architecture having a master controller, a central control section including one or more first remote controllers under direct control of the master controller, and a distributed control section including a cluster controller controlled by the master controller. The cluster controller controls the activities of one or more second remote controllers. Each of the first and second remote controllers are utilized to drive one or more axes.
    Type: Application
    Filed: January 24, 2011
    Publication date: May 19, 2011
    Applicant: BROOKS AUTOMATION, INC.
    Inventors: Martin Hosek, Stuart Beale, Roumen Botev, Matthew Coady, Christopher Hofmeister, Mark Ives, Jairo Moura, Robert Caveney
  • Patent number: 7904182
    Abstract: A control system includes a clustered architecture having a master controller, a central control section including one or more first remote controllers under direct control of the master controller, and a distributed control section including a cluster controller controlled by the master controller. The cluster controller controls the activities of one or more second remote controllers. Each of the first and second remote controllers are utilized to drive one or more axes.
    Type: Grant
    Filed: July 11, 2005
    Date of Patent: March 8, 2011
    Assignee: Brooks Automation, Inc.
    Inventors: Martin Hosek, Stuart Beale, Roumen Botev, Matthew Coady, Christopher Hofmeister, Mark Ives, Jairo Moura, Robert Caveney
  • Publication number: 20110025310
    Abstract: A sensing mechanism includes a magnetic source, a magnetic flux sensor, a sensor backing on which the magnetic source and flux sensor are mounted, and a ferromagnetic target, where the magnetic source, magnetic flux sensor, and ferromagnetic target are positioned to form a magnetic circuit from the magnetic source to the target, from the target to the sensor, and returning to the magnetic source through the sensor backing.
    Type: Application
    Filed: October 8, 2010
    Publication date: February 3, 2011
    Applicant: BROOKS AUTOMATION, INC.
    Inventors: Jairo Moura, Martin Hosek, Jay Krishnasamy, Jeff Paranay
  • Patent number: 7834618
    Abstract: A sensing mechanism includes a magnetic source, a magnetic flux sensor, a sensor backing on which the magnetic source and flux sensor are mounted, and a ferromagnetic target, where the magnetic source, magnetic flux sensor, and ferromagnetic target are positioned to form a magnetic circuit from the magnetic source to the target, from the target to the sensor, and returning to the magnetic source through the sensor backing.
    Type: Grant
    Filed: June 27, 2008
    Date of Patent: November 16, 2010
    Assignee: Brooks Automation, Inc.
    Inventors: Jairo Moura, Martin Hosek, Jay Krishnasamy, Jeff Paranay
  • Publication number: 20090033173
    Abstract: A motor includes a stator and a rotor, equipped to be movable in at least a first direction relative to the stator, the rotor operably interfacing the stator so that a motor force is generated in a first direction, where the stator comprises an anti-cogging element configured to generate anti-cogging forces on the rotor in at least the first direction and a second direction at an angle to the first direction.
    Type: Application
    Filed: June 27, 2008
    Publication date: February 5, 2009
    Applicant: Brooks Automation, Inc.
    Inventors: Jairo Moura, Jay Krishnasamy, Martin Hosek
  • Publication number: 20090015248
    Abstract: A sensing mechanism includes a magnetic source, a magnetic flux sensor, a sensor backing on which the magnetic source and flux sensor are mounted, and a ferromagnetic target, where the magnetic source, magnetic flux sensor, and ferromagnetic target are positioned to form a magnetic circuit from the magnetic source to the target, from the target to the sensor, and returning to the magnetic source through the sensor backing.
    Type: Application
    Filed: June 27, 2008
    Publication date: January 15, 2009
    Applicant: Brooks Automation, Inc.
    Inventors: Jairo Moura, Martin Hosek, Jay Krishnasamy, Jeff Paranay
  • Publication number: 20070010898
    Abstract: A control system includes a clustered architecture having a master controller, a central control section including one or more first remote controllers under direct control of the master controller, and a distributed control section including a cluster controller controlled by the master controller. The cluster controller controls the activities of one or more second remote controllers. Each of the first and second remote controllers are utilized to drive one or more axes.
    Type: Application
    Filed: July 11, 2005
    Publication date: January 11, 2007
    Inventors: Martin Hosek, Stuart Beale, Roumen Botev, Matthew Coady, Christopher Hofmeister, Mark Ives, Jairo Moura, Robert Caveney
  • Publication number: 20060245846
    Abstract: A substrate aligner providing minimal substrate transporter extend and retract motions to quickly align substrate without back side damage while increasing the throughput of substrate processing. In one embodiment, the aligner having an inverted chuck connected to a frame with a substrate transfer system capable of transferring substrate from chuck to transporter without rotationally repositioning substrate. The inverted chuck eliminates aligner obstruction of substrate fiducials and along with the transfer system, allows transporter to remain within the frame during alignment. In another embodiment, the aligner has a rotatable sensor head connected to a frame and a substrate support with transparent rest pads for supporting the substrate during alignment so transporter can remain within the frame during alignment. Substrate alignment is performed independent of fiducial placement on support pads.
    Type: Application
    Filed: March 30, 2005
    Publication date: November 2, 2006
    Inventors: Jairo Moura, Martin Hosek, Todd Bottomley, Ulysses Gilchrist
  • Publication number: 20060222477
    Abstract: A substrate aligner providing minimal substrate transporter extend and retract motions to quickly align substrate without back side damage while increasing the throughput of substrate processing. In one embodiment, the aligner having an inverted chuck connected to a frame with a substrate transfer system capable of transferring substrate from chuck to transporter without rotationally repositioning substrate. The inverted chuck eliminates aligner obstruction of substrate fiducials and along with the transfer system, allows transporter to remain within the frame during alignment. In another embodiment, the aligner has a rotatable sensor head connected to a frame and a substrate support with transparent rest pads for supporting the substrate during alignment so transporter can remain within the frame during alignment. Substrate alignment is performed independent of fiducial placement on support pads.
    Type: Application
    Filed: July 11, 2005
    Publication date: October 5, 2006
    Inventors: Jairo Moura, Martin Hosek, Todd Bottomley, Ulysses Gilchrist