Abstract: A gauge block holder that greatly reduces measurement error in calibrating wafer thickness test equipment is described. In a preferred embodiment of the invention, the gauge block holder is compatible with present thickness measurement equipment and provides a central region specially configured for holding a prior art gauge block in a manner that ensures precise, parallel alignment thereof with the equipment and thus precise perpendicular alignment with the equipment's opposing contact pins. Preferably a gauge block-sized and shaped recess and aperture are provided centrally in the holder such that the gauge block rests immobile on and parallel with the precision-machined, planar upper surface of a metal plate of the thickness tester while the thickness tester is being calibrated for a given wafer thickness measurement. The recess and aperture in accordance with their preferred embodiment are rectangular, and the invented gauge block preferably is securely fastened to the metal plate, e.g.

Abstract: A combination wafer carrier and basket-like storage device that includes insertable and removable plates for adjustment of capacity, as well as insertable and removable basket-like sleeves for adaptation to various-sized wafers.