Patents by Inventor Je Kwan YEON

Je Kwan YEON has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • METHOD FOR CONTROLLING SYNCHRONIZATION OF PULSED PLASMA BY APPLYING DC POWER
    Publication number: 20130049592
    Abstract: A method for controlling synchronization of pulsed plasma by applying a DC power is provided. The method includes repeatedly generating and extinguishing the plasma by adjusting an ON-period and an OFF-period of a pulsed RF power being applied to a source electrode part. And the method also includes alternately applying a DC power to a bias electrode part in accordance with the ON-period and the OFF-period.
    Type: Application
    Filed: August 24, 2012
    Publication date: February 28, 2013
    Applicant: RESEARCH & BUSINESS FOUNDATION SUNGKYUNKWAN UNIVERSITY
    Inventors: Geun Young YEOM, Se Koo KANG, Min Hwan JEON, Jong Yun PARK, Byoung Jae PARK, Je Kwan YEON
  • ATOMIC LAYER ETCHING APPARATUS AND ETCHING METHOD USING THE SAME
    Publication number: 20110192820
    Abstract: An atomic layer etching apparatus using reactive radicals and neutral beams and an etching method using the same are provided.
    Type: Application
    Filed: February 25, 2010
    Publication date: August 11, 2011
    Applicant: SUNGKYUNKWAN UNIVERSITY Foundation for Corporate Collaboration
    Inventors: Geun-Young Yeom, Woong-Sun Lim, Sang-Duk Park, Yi-Yeon Kim, Byoung-Jae Park, Je-Kwan Yeon