Patents by Inventor Jennifer Y. Sun

Jennifer Y. Sun has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20190330742
    Abstract: Methods for forming a porous coating with a controlled porosity and pore size are described. The methods include mixing a first powder comprising a first material with a second powder comprising a second material to form a mixed powder comprising 30-99 vol. % of the first powder and 1-70 vol. % of the second powder. The methods further include performing cold spray coating to deposit a coating comprising the first material and the second material onto an article, wherein the coating comprises approximately 30-99 vol. % of the first material and 1-70 vol. % of the second material. The methods further include performing a post-coating process to remove the second material from the coating, wherein after the post-coating process the coating consists essentially of the first material and has a porosity that is approximately equivalent to a volume occupied by the second material prior to the post-coating process.
    Type: Application
    Filed: April 27, 2018
    Publication date: October 31, 2019
    Inventors: Xiaowei Wu, Jennifer Y. Sun
  • Patent number: 10443125
    Abstract: An article comprises a body having a coating. The coating comprises a Y—O—F coating or other yttrium-based oxy-fluoride coating generated either by performing a fluorination process on a yttrium-based oxide coating or an oxidation process on a yttrium-based fluorine coating.
    Type: Grant
    Filed: April 27, 2018
    Date of Patent: October 15, 2019
    Assignee: Applied Materials, Inc.
    Inventors: Xiaowei Wu, David Fenwick, Guodong Zhan, Jennifer Y. Sun, Michael R. Rice
  • Patent number: 10443126
    Abstract: Disclosed herein is a rare-earth oxide coating on a surface of an article with one or more interruption layers to control crystal growth and methods of its formation. The coating may be deposited by atomic layer deposition and/or by chemical vapor deposition. The rare-earth oxides in the coatings disclosed herein may have an atomic crystalline phase that is different from the atomic crystalline phase or the amorphous phase of the one or more interruption layers.
    Type: Grant
    Filed: April 6, 2018
    Date of Patent: October 15, 2019
    Assignee: Applied Materials, Inc.
    Inventors: Xiaowei Wu, Jennifer Y. Sun, Michael R. Rice
  • Publication number: 20190309413
    Abstract: Disclosed herein is a rare-earth oxide coating on a surface of an article with one or more interruption layers to control crystal growth and methods of its formation. The coating may be deposited by atomic layer deposition and/or by chemical vapor deposition. The rare-earth oxides in the coatings disclosed herein may have an atomic crystalline phase that is different from the atomic crystalline phase or the amorphous phase of the one or more interruption layers.
    Type: Application
    Filed: April 6, 2018
    Publication date: October 10, 2019
    Inventors: Xiaowei Wu, Jennifer Y. Sun, Michael R. Rice
  • Patent number: 10418229
    Abstract: An component of a processing chamber comprises an aerosol deposited coating on the component, the aerosol deposited coating comprising a first type of metal oxide nanoparticle and a second type of metal oxide nanoparticle.
    Type: Grant
    Filed: June 12, 2017
    Date of Patent: September 17, 2019
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Jennifer Y. Sun, Biraja Kanungo, Tom Cho, Ying Zhang
  • Publication number: 20190276366
    Abstract: A chamber component for a processing chamber comprises a ceramic body consisting of a sintered ceramic material consisting essentially of one or more phase of Y2O3—ZrO2. The ceramic material consists essentially of 55-65 mol % Y2O3 and 35-45 mol % ZrO2.
    Type: Application
    Filed: February 19, 2019
    Publication date: September 12, 2019
    Inventors: Jennifer Y. Sun, David Fenwick
  • Patent number: 10409295
    Abstract: An electronic device manufacturing system includes a mass flow controller (MFC) that has a thermal flow sensor. The thermal flow sensor may measure a mass flow rate and may include a sensor tube having an inner surface coated with a material to form an inner barrier layer. The inner barrier layer may prevent or substantially reduce the likelihood of a corrosive reaction from occurring on the inner surface, which may prevent or reduce the likelihood of the MFC drifting beyond the MFC's mass flow rate accuracy specifications. This may improve the repeatability of flow detection by the MFC. Methods of measuring and controlling a mass flow rate in an electronic device manufacturing system are also provided, as are other aspects.
    Type: Grant
    Filed: December 31, 2016
    Date of Patent: September 10, 2019
    Assignee: Applied Materials, Inc.
    Inventors: Ming Xu, Sushant S. Koshti, Michael R. Rice, Steven E. Babayan, Jennifer Y. Sun
  • Publication number: 20190271076
    Abstract: A multi-component coating composition for a surface of a semiconductor process chamber component comprising at least one first film layer of a yttrium oxide or a yttrium fluoride coated onto the surface of the semiconductor process chamber component using an atomic layer deposition process and at least one second film layer of an additional oxide or an additional fluoride coated onto the surface of the semiconductor process chamber component using an atomic layer deposition process, wherein the multi-component coating composition is selected from the group consisting of YOxFy, YxAlyO, YxZryO and YxZryAlzO.
    Type: Application
    Filed: May 14, 2019
    Publication date: September 5, 2019
    Inventors: David Fenwick, Jennifer Y. Sun
  • Publication number: 20190263722
    Abstract: An article comprises a plasma resistant ceramic material comprising Y2O3 at a concentration of approximately 30 molar % to approximately 60 molar %, Er2O3 at a concentration of above 30 molar % to approximately 60 molar %, and at least one of ZrO2, Gd2O3 or SiO2 at a concentration of over 0 molar % to approximately 30 molar %.
    Type: Application
    Filed: May 7, 2019
    Publication date: August 29, 2019
    Inventors: Jennifer Y. Sun, Biraja P. Kanungo
  • Patent number: 10385459
    Abstract: Disclosed herein are methods for fabricating layered ceramic materials via field assisted sintering technology. A method includes forming a ceramic green body on a surface of a substrate, and sintering the ceramic green body using a field-assisted sintering process to form a ceramic layer joined to the substrate.
    Type: Grant
    Filed: May 14, 2015
    Date of Patent: August 20, 2019
    Assignee: Applied Materials, Inc.
    Inventors: Jennifer Y. Sun, Yikai Chen, Biraja Prasad Kanungo
  • Publication number: 20190233343
    Abstract: A heat treated ceramic article includes a ceramic substrate and a ceramic coating on the ceramic substrate. The ceramic coating is a non-sintered ceramic coating that has a different composition than the ceramic substrate. The heat treated ceramic article further includes a transition layer between the ceramic substrate and the ceramic coating, the transition layer comprising first elements from the ceramic coating that have reacted with second elements from the ceramic substrate, wherein the transition layer has a thickness of about 0.1 microns to about 5 microns.
    Type: Application
    Filed: April 8, 2019
    Publication date: August 1, 2019
    Inventors: Jennifer Y. Sun, Ren-Guan Duan, Biraja P. Kanungo, Dmitry Lubomirsky
  • Patent number: 10364197
    Abstract: A heat treated ceramic article includes a ceramic substrate and a ceramic coating on the ceramic substrate. The ceramic coating is a non-sintered ceramic coating that has a different composition than the ceramic substrate. The heat treated ceramic article further includes a transition layer between the ceramic substrate and the ceramic coating, the transition layer comprising first elements from the ceramic coating that have reacted with second elements from the ceramic substrate, wherein the transition layer has a thickness of about 0.1 microns to about 5 microns.
    Type: Grant
    Filed: November 11, 2015
    Date of Patent: July 30, 2019
    Assignee: Applied Materials, Inc.
    Inventors: Jennifer Y. Sun, Ren-Guan Duan, Biraja P. Kanungo, Dmitry Lubomirsky
  • Patent number: 10336656
    Abstract: A machined ceramic article having an initial surface defect density and an initial surface roughness is provided. The machined ceramic article is heated to a temperature range between about 1000° C. and about 1800° C. at a ramping rate of about 0.1° C. per minute to about 20° C. per minute. The machined ceramic article is heat-treated in air atmosphere. The machined ceramic article is heat treated at one or more temperatures within the temperature range for a duration of up to about 24 hours. The machined ceramic article is then cooled at the ramping rate, wherein after the heat treatment the machined ceramic article has a reduced surface defect density and a reduced surface roughness.
    Type: Grant
    Filed: April 15, 2015
    Date of Patent: July 2, 2019
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Ren-Guan Duan, Thorsten Lill, Jennifer Y. Sun, Benjamin Schwarz
  • Publication number: 20190194817
    Abstract: An article comprises a component for a manufacturing chamber, a coating on the component, and an anodization layer formed on the coating. The anodization layer has a thickness of about 2-10 mil, comprises a low porosity layer portion having a density of greater than 99% and a porous columnar layer portion having a higher porosity than the low porosity layer portion. The porous columnar layer portion comprises a plurality of columnar nanopores having a diameter of about 10-50 nm.
    Type: Application
    Filed: March 5, 2019
    Publication date: June 27, 2019
    Inventors: Jennifer Y. Sun, Vahid Firouzdor
  • Publication number: 20190157113
    Abstract: Disclosed herein is a ceramic article or coating useful in semiconductor processing, which is resistant to erosion by halogen-containing plasmas. The ceramic article or coating is formed from a combination of yttrium oxide and zirconium oxide.
    Type: Application
    Filed: January 18, 2019
    Publication date: May 23, 2019
    Inventors: Jennifer Y. Sun, Ren-Guan Duan, Jie Yuan, Li Xu, Kenneth S. Collins
  • Publication number: 20190157114
    Abstract: Disclosed herein is a ceramic article or coating useful in semiconductor processing, which is resistant to erosion by halogen-containing plasmas. The ceramic article or coating is formed from a combination of yttrium oxide and zirconium oxide.
    Type: Application
    Filed: January 18, 2019
    Publication date: May 23, 2019
    Inventors: Jennifer Y. Sun, Ren-Guan Duan, Jie Yuan, Li Xu, Kenneth S. Collins
  • Publication number: 20190157115
    Abstract: Disclosed herein is a ceramic article or coating useful in semiconductor processing, which is resistant to erosion by halogen-containing plasmas. The ceramic article or coating is formed from a combination of yttrium oxide and zirconium oxide.
    Type: Application
    Filed: January 18, 2019
    Publication date: May 23, 2019
    Inventors: Jennifer Y. Sun, Ren-Guan Duan, Jie Yuan, Li Xu, Kenneth S. Collins
  • Publication number: 20190136360
    Abstract: A ceramic coating is coated on a body of an article, wherein the ceramic coating includes Y2O3, Y4Al2O9, Y3Al5O12, or a solid-solution of Y2O3 mixed with at least one of ZrO2, Al2O3, HfO2, Er2O3, Nd2O3, Nb2O5, CeO2, Sm2O3 or Yb2O3. The ceramic coating is applied to the body by a method including providing a plasma spraying system having a plasma current in the range of between about 100 A to about 1000 A, positioning a torch standoff of the plasma spraying system a distance from the body between about 60 mm and about 250 mm, flowing a first gas through the plasma spraying system at a rate of between about 30 L/min and about 400 L/min, and plasma spray coating the body to form a ceramic coating, wherein splats of the coating are amorphous and have a pancake shape.
    Type: Application
    Filed: December 21, 2018
    Publication date: May 9, 2019
    Inventors: Jennifer Y. Sun, Yikai Chen, Biraja Prasad Kanungo
  • Publication number: 20190135704
    Abstract: Methods comprise performing two or more thermal cycles on an article comprising a body and a ceramic coating. Each thermal cycle of the two or more thermal cycles comprise heating the ceramic article to a target temperature at a first ramping rate. Each thermal cycle further comprises maintaining the article at the target temperature for a first duration of time and then cooling the article to a second target temperature at a second ramping rate. The method further comprises submerging the article in a bath for a second duration of time to remove the particles from the ceramic coating.
    Type: Application
    Filed: November 8, 2017
    Publication date: May 9, 2019
    Inventors: Kaushal GANGAKHEDKAR, Jennifer Y. SUN, Xiao-Ming HE
  • Publication number: 20190136372
    Abstract: Embodiments of the disclosure relate to articles, coated chamber components and methods of coating chamber components with a low volatile coating. The low volatile coating can include a rare earth metal-containing layer that coats all surfaces of a component (e.g., a high temperature heater).
    Type: Application
    Filed: August 10, 2018
    Publication date: May 9, 2019
    Inventors: Guodong Zhan, David Fenwick, Jennifer Y. Sun