Patents by Inventor Jenny J. Sun

Jenny J. Sun has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Electrodeposition of metals in small recesses for manufacture of high density interconnects using reverse pulse plating
    Patent number: 6210555
    Abstract: A layer of a metal is electroplated onto an electrically conducting substrate having a generally smooth surface with a small recess therein, having a transverse dimension not greater than about 350 micrometers, typically from about 5 micrometers to about 350 micrometers, by immersing the substrate and a counterelectrode in an electroplating bath of the metal to be electroplated and passing a modulated reversing electric current between the electrodes. The current contains pulses that are cathodic with respect to said substrate and pulses that are anodic with respect to said substrate. The cathodic pulses have a duty cycle less than about 50% and said anodic pulses have a duty cycle greater than about 50%, the charge transfer ratio of the cathodic pulses to the anodic pulses is greater than one, and the frequency of said pulses ranges from about 10 Hertz to about 5000 Hertz.
    Type: Grant
    Filed: January 29, 1999
    Date of Patent: April 3, 2001
    Assignee: Faraday Technology Marketing Group, LLC
    Inventors: E. Jennings Taylor, Jenny J. Sun, Chengdong Zhou
  • Pulse reverse electrodeposition for metallization and planarization of a semiconductor substrates
    Patent number: 6203684
    Abstract: A smooth layer of a metal is electroplated onto a microrough electrically conducting substrate by immersing the substrate and a counterelectrode in an electroplating bath of the metal to be electroplated and passing a modulated reversing electric current between the electrodes. The current contains pulses that are cathodic with respect to said substrate and pulses that are anodic with respect to said substrate. The cathodic pulses have a duty cycle less than about 50% and said anodic pulses have a duty cycle greater than about 50%, the charge transfer ratio of the cathodic pulses to the anodic pulses is greater than one, and the frequency of said pulses ranges from about 10 Hertz to about 5000 Hertz.
    Type: Grant
    Filed: October 14, 1998
    Date of Patent: March 20, 2001
    Assignee: Faraday Technology Marketing Group, LLC
    Inventors: E. Jennings Taylor, Chengdong Zhou, Jenny J. Sun
  • Method of removing metal salts from solution by electrolysis an electrode closely associated with an ion exchange resin
    Patent number: 5804057
    Abstract: Metal salts are removed from solution in an electrolyte by subjecting the solution to electrolysis in a cell having an anode that has an anion exchange membrane closely associated therewith which sequesters the anion of the salt. The cathode may also be provided with a closely associated cation exchange membrane that sequesters, at least partially, the cation of the salt. A metal salt solution can be regenerated by reversing the polarity of the electrodes and conducting an electrolysis using fresh electrolyte.
    Type: Grant
    Filed: June 7, 1996
    Date of Patent: September 8, 1998
    Assignee: Faraday Technology, Inc.
    Inventors: Chengdong Zhou, E. Jennings Taylor, Robert P. Renz, Eric C. Stortz, Jenny J. Sun