Patents by Inventor Jhih-Bin CHEN

Jhih-Bin CHEN has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240136397
    Abstract: The present disclosure relates to an integrated chip. The integrated chip includes a source region disposed within a substrate, and a drain region disposed within the substrate and separated from the source region. A plurality of separate isolation structures are disposed within the substrate. The plurality of separate isolation structures have outermost sidewalls that face one another and that are separated from one another. A gate electrode is disposed within the substrate. The gate electrode includes a base region disposed between the source region and the plurality of separate isolation structures and a plurality of gate extensions extending outward from a sidewall of the base region to over the plurality of separate isolation structures.
    Type: Application
    Filed: January 3, 2024
    Publication date: April 25, 2024
    Inventors: Jhih-Bin Chen, Ming Chyi Liu
  • Publication number: 20240114810
    Abstract: A semiconductor structure includes: an etch-stop dielectric layer overlying a substrate and including a first opening therethrough; a silicon oxide plate overlying the etch-stop dielectric layer and including a second opening therethrough; a first conductive structure including a first electrode and extending through the second opening and the first opening; a memory film contacting a top surface of the first conductive structure and including a material that provides at least two resistive states having different electrical resistivity; and a second conductive structure including a second electrode and contacting a top surface of the memory film.
    Type: Application
    Filed: April 20, 2023
    Publication date: April 4, 2024
    Inventors: Fu-Ting Sung, Jhih-Bin Chen, Hung-Shu Huang, Hong Ming Liu, Hsia-Wei Chen, Yu-Wen Liao, Wen-Ting Chu
  • Publication number: 20240088154
    Abstract: The present disclosure relates to an integrated circuit (IC) that includes a boundary region defined between a low voltage region and a high voltage region, and a method of formation. In some embodiments, the integrated circuit comprises an isolation structure disposed in the boundary region of the substrate. A first polysilicon component is disposed directly on an upper surface of the substrate alongside the isolation structure. A boundary dielectric layer is disposed on the isolation structure. A second polysilicon component is disposed on the sacrifice dielectric layer.
    Type: Application
    Filed: November 21, 2023
    Publication date: March 14, 2024
    Inventors: Yi-Huan Chen, Chien-Chih Chou, Alexander Kalnitsky, Kong-Beng Thei, Ming Chyi Liu, Shih-Chung Hsiao, Jhih-Bin Chen
  • Patent number: 11908891
    Abstract: The present disclosure relates to a method of forming an integrated chip. The method includes forming a plurality of isolation structures within a substrate. The substrate is selectively etched to form a gate base recess within the substrate. The plurality of isolation structures are selectively etched to form a plurality of gate extension trenches extending outward from the gate base recess; forming a conductive material within the gate base recess and the plurality of gate extension trenches to form a gate electrode; and forming a source region and a drain region on opposing sides of the gate electrode.
    Type: Grant
    Filed: May 2, 2022
    Date of Patent: February 20, 2024
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Jhih-Bin Chen, Ming Chyi Liu
  • Publication number: 20240047542
    Abstract: A semiconductor device and a method of manufacturing a semiconductor device are provided. The semiconductor device includes a source region, a drain region, a gate region and a gate oxide. The gate region is disposed between the source region and the drain region. The gate oxide is disposed on the gate region. A bottom interface is between the gate region and the gate oxide, and an entire of the bottom interface is substantially flat.
    Type: Application
    Filed: August 3, 2022
    Publication date: February 8, 2024
    Inventors: JHIH-BIN CHEN, HUNG-SHU HUANG, JHU-MIN SONG, CHIEN-CHIH CHOU, YU-CHANG JONG, FEI-YUN CHEN
  • Patent number: 11855091
    Abstract: The present disclosure relates to an integrated circuit (IC) that includes a boundary region defined between a low voltage region and a high voltage region, and a method of formation. In some embodiments, the integrated circuit comprises an isolation structure disposed in the boundary region of the substrate. A first polysilicon component is disposed over the substrate alongside the isolation structure. A boundary dielectric layer is disposed on the isolation structure. A second polysilicon component is disposed on the sacrifice dielectric layer.
    Type: Grant
    Filed: July 19, 2022
    Date of Patent: December 26, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yi-Huan Chen, Chien-Chih Chou, Alexander Kalnitsky, Kong-Beng Thei, Ming Chyi Liu, Shih-Chung Hsiao, Jhih-Bin Chen
  • Publication number: 20230343850
    Abstract: A semiconductor structure and forming method thereof are provided. The semiconductor structure includes a substrate, a gate dielectric, a gate electrode and dielectric structures. The gate dielectric has a top surface aligned with a top surface of the substrate. The gate electrode is disposed over the substrate and overlaps the gate dielectric. The gate electrode has first segments extending in parallel along a direction. The dielectric structures are disposed over the substrate, overlap the gate dielectric and extend in parallel along the direction. The dielectric structures and the first segments are arranged in an alternating pattern.
    Type: Application
    Filed: April 20, 2022
    Publication date: October 26, 2023
    Inventors: JHIH-BIN CHEN, MING CHYI LIU
  • Patent number: 11784460
    Abstract: Various embodiments of the present disclosure are directed towards a method for forming a vertical cavity surface emitting laser (VCSEL) device. The method includes forming a bond bump and a bond ring over a substrate. A semiconductor die is bonded to the bond ring. A molding layer is formed around the semiconductor die. The molding layer is laterally offset from a cavity between the semiconductor die and the substrate. A VCSEL structure is formed over the bond bump.
    Type: Grant
    Filed: May 17, 2021
    Date of Patent: October 10, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Jhih-Bin Chen, Ming Chyi Liu
  • Publication number: 20230246030
    Abstract: A semiconductor structure and forming method thereof are provided. A substrate includes a first region, a second region, and a boundary region defined between the first region and the second region. An isolation structure is disposed in the boundary region. An upper surface of the isolation structure has a stepped profile. A first boundary dielectric layer and a second boundary dielectric layer are disposed over the isolation structure. The first boundary dielectric layer is substantially conformal with respect to the stepped profile of the isolation structure.
    Type: Application
    Filed: January 28, 2022
    Publication date: August 3, 2023
    Inventors: HUNG-SHU HUANG, JHIH-BIN CHEN, MING CHYI LIU, YU-CHANG JONG, CHIEN-CHIH CHOU, JHU-MIN SONG, YI-KAI CIOU, TSUNG-CHIEH TSAI, YU-LUN LU
  • Publication number: 20220352161
    Abstract: The present disclosure relates to an integrated circuit (IC) that includes a boundary region defined between a low voltage region and a high voltage region, and a method of formation. In some embodiments, the integrated circuit comprises an isolation structure disposed in the boundary region of the substrate. A first polysilicon component is disposed over the substrate alongside the isolation structure. A boundary dielectric layer is disposed on the isolation structure. A second polysilicon component is disposed on the sacrifice dielectric layer.
    Type: Application
    Filed: July 19, 2022
    Publication date: November 3, 2022
    Inventors: Yi-Huan Chen, Chien-Chih Chou, Alexander Kalnitsky, Kong-Beng Thei, Ming Chyi Liu, Shih-Chung Hsiao, Jhih-Bin Chen
  • Publication number: 20220311214
    Abstract: In some embodiments, the present disclosure relates to a method of making a microlens for a VCSEL device. The method includes forming a first lens layer over a second reflector layer. The first lens layer has a first average concentration of a first element. A first additional reflector layer is formed over the first lens layer. A second lens layer is formed over the first additional reflector layer. The second lens layer has a second average concentration of the first element greater than the first average concentration. A second additional reflector layer is formed over the second lens layer. An oxidation process is performed to oxidize peripheral portions of the first and second lens layers to form oxidized peripheral portions of the first and second lens layer. The oxidized peripheral portions of the second lens layer are wider than the oxidized peripheral portions of the first lens layer.
    Type: Application
    Filed: June 16, 2022
    Publication date: September 29, 2022
    Inventors: Jhih-Bin Chen, Ming Chyi Liu
  • Patent number: 11437785
    Abstract: A vertical cavity surface emitting laser (VCSEL) device includes a microlens arranged over a reflector stack. The reflector stack includes alternating reflector layers of a first material and a second material. The microlens stack includes a first lens layer, a second lens layer arranged over the first lens layer, and a third lens layer arranged over the second lens layer. The first lens layer includes a first average concentration of a first element and has a first width. The second lens layer includes a second average concentration of the first element greater than the first average concentration and has a second width smaller than the first width. The third lens layer includes a third average concentration of the first element greater than the second average concentration and has a third width smaller than the second width.
    Type: Grant
    Filed: September 23, 2019
    Date of Patent: September 6, 2022
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Jhih-Bin Chen, Ming Chyi Liu
  • Publication number: 20220262899
    Abstract: The present disclosure relates to a method of forming an integrated chip. The method includes forming a plurality of isolation structures within a substrate. The substrate is selectively etched to form a gate base recess within the substrate. The plurality of isolation structures are selectively etched to form a plurality of gate extension trenches extending outward from the gate base recess; forming a conductive material within the gate base recess and the plurality of gate extension trenches to form a gate electrode; and forming a source region and a drain region on opposing sides of the gate electrode.
    Type: Application
    Filed: May 2, 2022
    Publication date: August 18, 2022
    Inventors: Jhih-Bin Chen, Ming Chyi Liu
  • Patent number: 11410999
    Abstract: The present disclosure relates to an integrated circuit (IC) that includes a boundary region defined between a low voltage region and a high voltage region, and a method of formation. In some embodiments, the integrated circuit comprises an isolation structure disposed in the boundary region of the substrate. A first polysilicon component is disposed over the substrate alongside the isolation structure. A boundary dielectric layer is disposed on the isolation structure. A second polysilicon component is disposed on the sacrifice dielectric layer.
    Type: Grant
    Filed: February 21, 2020
    Date of Patent: August 9, 2022
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yi-Huan Chen, Chien-Chih Chou, Alexander Kalnitsky, Kong-Beng Thei, Ming Chyi Liu, Shih-Chung Hsiao, Jhih-Bin Chen
  • Publication number: 20220239067
    Abstract: Some embodiments relate to a method for forming a vertical cavity surface emitting laser (VCSEL) structure. The method includes forming an optically active layer over a lower reflective layer and forming an upper reflector over the optically active layer. A first spacer is formed along sidewalls of the upper reflector. An oxidation process is performed with the first spacer in place to oxidize a peripheral region of the optically active layer. A first etch process is performed on the lower reflective layer and the oxidized peripheral region, thereby forming a lower reflector and an optically active region.
    Type: Application
    Filed: April 12, 2022
    Publication date: July 28, 2022
    Inventors: Chen Yu Chen, Ming Chyi Liu, Jhih-Bin Chen
  • Patent number: 11329128
    Abstract: The present disclosure relates to an integrated chip. The integrated chip includes a source region disposed within a substrate and a drain region disposed within the substrate. The drain region is separated from the source region along a first direction. A drift region is disposed within the substrate between the source region and the drain region, and a plurality of isolation structures are disposed within the drift region. A gate electrode is disposed within the substrate. The gate electrode has a base region disposed between the source region and the drift region and a plurality of gate extensions extending outward from a sidewall of the base region to over the plurality of isolation structures.
    Type: Grant
    Filed: July 6, 2020
    Date of Patent: May 10, 2022
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Jhih-Bin Chen, Ming Chyi Liu
  • Patent number: 11309685
    Abstract: Some embodiments relate to a vertical cavity surface emitting laser (VCSEL) device including a VCSEL structure overlying a substrate. The VCSEL structure includes a first reflector, a second reflector, and an optically active region disposed between the first and second reflectors. A first spacer laterally encloses the second reflector. The first spacer comprises a first plurality of protrusions disposed along a sidewall of the second reflector.
    Type: Grant
    Filed: October 14, 2020
    Date of Patent: April 19, 2022
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chen Yu Chen, Ming Chyi Liu, Jhih-Bin Chen
  • Patent number: 11211469
    Abstract: A memory device and method of making the same are disclosed. The memory device includes a first split gate memory cell including a first memory stack located over a substrate. The first memory stack includes a first floating gate and a first control gate located above the first floating gate. The split gate memory cell also includes a first select gate located adjacent to the first floating gate and the first control gate and a contact etch stop located over a portion of a top surface of the first select gate. The contact etch stop enables a narrowing of the drain contact via during an etch process. By narrowing the drain contact via, the density of split gate memory cells may be increased.
    Type: Grant
    Filed: May 28, 2020
    Date of Patent: December 28, 2021
    Assignee: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: Jhih-Bin Chen, Ming Chyi Liu
  • Publication number: 20210376120
    Abstract: A memory device and method of making the same are disclosed. The memory device includes a first split gate memory cell including a first memory stack located over a substrate. The first memory stack includes a first floating gate and a first control gate located above the first floating gate. The split gate memory cell also includes a first select gate located adjacent to the first floating gate and the first control gate and a contact etch stop located over a portion of a top surface of the first select gate. The contact etch stop enables a narrowing of the drain contact via during an etch process. By narrowing the drain contact via, the density of split gate memory cells may be increased.
    Type: Application
    Filed: May 28, 2020
    Publication date: December 2, 2021
    Inventors: Jhih-Bin CHEN, Ming Chyi LIU
  • Patent number: 11158593
    Abstract: Various embodiments of the present application are directed towards a method for forming an integrated chip in which a group III-V device is bonded to a substrate, as well as the resulting integrated chip. In some embodiments, the method includes: forming a chip including an epitaxial stack, a metal structure on the epitaxial stack, and a diffusion layer between the metal structure and the epitaxial stack; bonding the chip to a substrate so the metal structure is between the substrate and the epitaxial stack; and performing an etch into the epitaxial stack to form a mesa structure with sidewalls spaced from sidewalls of the diffusion layer. The metal structure may, for example, be a metal bump patterned before the bonding or may, for example, be a metal layer that is on an etch stop layer and that protrudes through the etch stop layer to the diffusion layer.
    Type: Grant
    Filed: March 25, 2020
    Date of Patent: October 26, 2021
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Jhih-Bin Chen, Chia-Shiung Tsai, Ming Chyi Liu, Eugene Chen