Patents by Inventor Jin Kawakita
Jin Kawakita has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11913892Abstract: A condensation detection element comprises a condensation detection unit, the condensation detection unit being formed on a first substrate unit, and a peripheral circuit unit, the peripheral circuit unit being formed on a second substrate unit. The condensation detection unit comprises a thin wire electrode of a first metal and a thin wire electrode of a second metal. The condensation detection unit is configured to detect the presence or absence of water droplet that comes into contact with the thin wire electrode of the first metal and the thin wire electrode of the second metal by a current flowing between the thin wire electrode of the first metal and the thin wire electrode of the second metal. The first substrate unit has a higher thermal conductivity and a lower heat capacity than the second substrate unit.Type: GrantFiled: November 11, 2019Date of Patent: February 27, 2024Assignee: NATIONAL INSTITUTE FOR MATERIALS SCIENCEInventor: Jin Kawakita
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Patent number: 11856664Abstract: The present invention is to provide a prevention method and a prevention system for preventing dew condensation and light scattering due to the dew condensation. According to one embodiment of the present invention, a fine liquid droplet capable of causing dew condensation is detected by a detection means for detecting a fine liquid droplet, and then the fine liquid droplet is removed on the basis of the detection. The detection means comprises a first thin wire made of a first metal, and a second thin wire made of a second metal or a semiconductor, the second metal is different from the first metal, the first thin wire and the second thin wire are disposed in juxtaposition with each other on an insulating substrate, and a spacing between the first thin wire and the second thin wire is in a range of 20 nm or more and 10000 nm or less.Type: GrantFiled: February 2, 2018Date of Patent: December 26, 2023Assignee: NATIONAL INSTITUTE FOR MATERIALS SCIENCEInventors: Jin Kawakita, Toyohiro Chikyo
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Patent number: 11486843Abstract: The present invention is to provide a small-sized dryness/wetness responsive sensor that detects a galvanic current with a high sensitivity as a principle of operation. According to one embodiment of the present invention, a dryness/wetness responsive sensor comprises a thin wire made of a first metal and a thin wire made of a second metal, the second metal is different from the first metal, the thin wire of the first metal and the thin wire of the second metal are disposed in juxtaposition with each other on an insulating substrate, and a surface state of a part between the thin wire of the first metal and the thin wire of the second metal is hydrophilic or hydrophobic.Type: GrantFiled: August 23, 2018Date of Patent: November 1, 2022Assignee: NATIONAL INSTITUTE FOR MATERIALS SCIENCEInventors: Jin Kawakita, Akihiko Ohi, Tomoko Ohki, Naoki Ikeda, Toshihide Nabatame, Toyohiro Chikyo
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Patent number: 11454603Abstract: The purpose of the present invention is to realize a dew point measurement in which the generation of dew condensation is directly detected and the detection can be performed without using any optical system. In particular, the purpose of the present invention is to realize a dew point measuring device that is compact and has a high sensitivity. According to one embodiment of the present invention, a sudden change in current values before and after the dew point is detected by detecting the dew condensation to detect a galvanic current that flows due to a water droplet attached onto a surface of an insulating substrate on which thin wires of dissimilar metals are juxtaposed, and by controlling the temperature on the surface of the substrate. In this way, the dew point measurement in which the dew point can be directly measured and a measurement with simple configuration and high accuracy can be performed can be realized.Type: GrantFiled: June 6, 2017Date of Patent: September 27, 2022Assignee: NATIONAL INSTITUTE FOR MATERIALS SCIENCEInventors: Jin Kawakita, Toyohiro Chikyo
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Publication number: 20220003701Abstract: A condensation detection element comprises a condensation detection unit, the condensation detection unit being formed on a first substrate unit, and a peripheral circuit unit, the peripheral circuit unit being formed on a second substrate unit. The condensation detection unit comprises a thin wire electrode of a first metal and a thin wire electrode of a second metal. The condensation detection unit is configured to detect the presence or absence of water droplet that comes into contact with the thin wire electrode of the first metal and the thin wire electrode of the second metal by a current flowing between the thin wire electrode of the first metal and the thin wire electrode of the second metal. The first substrate unit has a higher thermal conductivity and a lower heat capacity than the second substrate unit.Type: ApplicationFiled: November 11, 2019Publication date: January 6, 2022Inventor: Jin KAWAKITA
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Patent number: 10830573Abstract: The purpose of the present invention is to measure a size of a liquid droplet easily and in a short period of time by combining outputs of multiple types of liquid droplet detectors having different size dependencies of a liquid droplet of detection signals. In one embodiment of the present invention, in the detector having a narrow gap width shown in FIG. 5(a), the electrodes are electrically conducted by the attachment of a small liquid droplet. On the other hand, in the detectors with a wide gap width shown in FIGS. 5(b) and 5(c), the electrodes are not electrically conducted unless a liquid droplet having a larger size is attached. By utilizing this, the size of a liquid droplet is determined. In a case where the liquid droplet is water, as a liquid droplet detector, for example, a detector of a type that detects a galvanic current by a cell formed by the attachment of water between the electrodes made of different kinds of metals may be used.Type: GrantFiled: May 11, 2017Date of Patent: November 10, 2020Assignee: NATIONAL INSTITUTE FOR MATERIALS SCIENCEInventors: Jin Kawakita, Toyohiro Chikyo
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Publication number: 20200249185Abstract: The present invention is to provide a small-sized dryness/wetness responsive sensor that detects a galvanic current with a high sensitivity as a principle of operation. According to one embodiment of the present invention, a dryness/wetness responsive sensor comprises a thin wire made of a first metal and a thin wire made of a second metal, the second metal is different from the first metal, the thin wire of the first metal and the thin wire of the second metal are disposed in juxtaposition with each other on an insulating substrate, and a surface state of a part between the thin wire of the first metal and the thin wire of the second metal is hydrophilic or hydrophobic.Type: ApplicationFiled: August 23, 2018Publication date: August 6, 2020Applicant: NATIONAL INSTITUTE FOR MATERIALS SCIENCEInventors: Jin KAWAKITA, Akihiko OHI, Tomoko OHKI, Naoki IKEDA, Toshihide NABATAME, Toyohiro CHIKYO
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Publication number: 20200053837Abstract: The present invention is to provide a prevention method and a prevention system for preventing dew condensation and light scattering due to the dew condensation. According to one embodiment of the present invention, a fine liquid droplet capable of causing dew condensation is detected by a detection means for detecting a fine liquid droplet, and then the fine liquid droplet is removed on the basis of the detection. The detection means comprises a first thin wire made of a first metal, and a second thin wire made of a second metal or a semiconductor, the second metal is different from the first metal, the first thin wire and the second thin wire are dispose d in juxtaposition with each other on an insulating substrate, and a spacing between the first thin wire and the second thin wire is in a range of 20 nm or more and 10000 nm or less.Type: ApplicationFiled: February 2, 2018Publication date: February 13, 2020Applicant: NATIONAL INSTITUTE FOR MATERIALS SCIENCEInventors: Jin KAWAKITA, Toyohiro CHIKYO
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Publication number: 20190310213Abstract: The purpose of the present invention is to realize a dew point measurement in which the generation of dew condensation is directly detected and the detection can be performed without using any optical system. In particular, the purpose of the present invention is to realize a dew point measuring device that is compact and has a high sensitivity. According to one embodiment of the present invention, a sudden change in current values before and after the dew point is detected by detecting the dew condensation to detect a galvanic current that flows due to a water droplet attached onto a surface of an insulating substrate on which thin wires of dissimilar metals are juxtaposed, and by controlling the temperature on the surface of the substrate. In this way, the dew point measurement in which the dew point can be directly measured and a measurement with simple configuration and high accuracy can be performed can be realized.Type: ApplicationFiled: June 6, 2017Publication date: October 10, 2019Applicant: NATIONAL INSTITUTE FOR MATERIALS SCIENCEInventors: Jin KAWAKITA, Toyohiro CHIKYO
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Publication number: 20190178621Abstract: The purpose of the present invention is to measure a size of a liquid droplet easily and in a short period of time by combining outputs of multiple types of liquid droplet detectors having different size dependencies of a liquid droplet of detection signals. In one embodiment of the present invention, in the detector having a narrow gap width shown in FIG. 5(a), the electrodes are electrically conducted by the attachment of a small liquid droplet. On the other hand, in the detectors with a wide gap width shown in FIGS. 5(b) and 5(c), the electrodes are not electrically conducted unless a liquid droplet having a larger size is attached. By utilizing this, the size of a liquid droplet is determined. In a case where the liquid droplet is water, as a liquid droplet detector, for example, a detector of a type that detects a galvanic current by a cell formed by the attachment of water between the electrodes made of different kinds of metals may be used.Type: ApplicationFiled: May 11, 2017Publication date: June 13, 2019Applicant: NATIONAL INSTITUTE FOR MATERIALS SCIENCEInventors: Jin KAWAKITA, Toyohiro CHIKYO
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DRYNESS/WETNESS RESPONSIVE SENSOR HAVING FIRST AND SECOND WIRES SPACED 5 nm TO LESS THAN 20 um APART
Publication number: 20190145920Abstract: The present invention improves the sensitivity and the responsiveness of a dryness/wetness responsive sensor utilizing a galvanic current, allowing for downsizing of the dryness/wetness responsive sensor. Instead of the conventional structure in which an anode electrode and a cathode electrode are stacked with an intervening insulator, the present invention employs a structure in which both electrodes run in juxtaposition with each other on an insulating substrate in the form of, for example, a comb-shaped electrode as shown in the drawing. By utilizing a semiconductor manufacturing process or any other micro/nano-fabrication technology, an inter-electrode distance can be extremely shortened as compared with the conventional sensors, allowing enhancing the sensitivity per unit footprint of the electrodes. Accordingly, a decrease in the size of the dryness/wetness responsive sensor can be easily achieved.Type: ApplicationFiled: December 19, 2018Publication date: May 16, 2019Applicant: NATIONAL INSTITUTE FOR MATERIALS SCIENCEInventors: Jin KAWAKITA, Tadashi SHINOHARA, Toyohiro CHIKYO, Toshihide NABATAME, Akihiko OHI, Tomoko OHKI -
Dryness/wetness responsive sensor having first and second wires spaced 5 nm to less than 20 ?m apart
Patent number: 10267756Abstract: A dryness/wetness responsive sensor having decreased size, and improved sensitivity and responsiveness. The present invention comprises a thin wire of a first metal and a thin wire of a second metal, which is different from the first metal, wherein the thin wires run in juxtaposition with each other on an insulating substrate, and wherein the spacing between the first thin wire and the second thin wire is in the range of 5 nm or more and less than 20 ?m.Type: GrantFiled: July 21, 2015Date of Patent: April 23, 2019Assignee: NATIONAL INSTITUTE FOR MATERIALS SCIENCEInventors: Jin Kawakita, Tadashi Shinohara, Toyohiro Chikyo, Toshihide Nabatame, Akihiko Ohi, Tomoko Ohki -
Patent number: 10043598Abstract: A process of producing a conducting material suitable for being filled in TSVs for LSI chip 3D package, etc. includes that a solution containing a monomer that provides a conducting polymer, anions, and metal ions such as Ag+ or Cu2+ is irradiated with ultraviolet radiation or light having the energy necessary for exciting electrons up to an energy level capable of reducing the metal ions to precipitate a conducting polymer/metal composite. This enables an electrical conductor of high electrical conductivity to be precipitated faster than could be achieved by conventional processes.Type: GrantFiled: July 27, 2012Date of Patent: August 7, 2018Assignee: NATIONAL INSTITUTE FOR MATERIALS SCIENCEInventors: Jin Kawakita, Toyohiro Chikyo
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Patent number: 9703197Abstract: A resist film structure is provided, which allows a resist layer to have improved photosensitivity to EUV or electron beams without changing the photosensitivity of the resist material itself. A metal layer 1 with a thickness as small as a nanometer level is provided on a resist polymer layer 2 formed on a substrate 3. When the resist layer in this structure is exposed to light, the metal layer 1 produces a surface plasmon effect to enhance the irradiation to the resist film, so that the photosensitivity of the resist film is improved.Type: GrantFiled: September 25, 2014Date of Patent: July 11, 2017Assignee: NATIONAL INSTITUTE FOR MATERIALS SCIENCEInventors: Jin Kawakita, Toyohiro Chikyo, Takayuki Nakane
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Publication number: 20170167995Abstract: The present invention improves the sensitivity and the responsiveness of a dryness/wetness responsive sensor utilizing a galvanic current, allowing for downsizing of the dryness/wetness responsive sensor. Instead of the conventional structure in which an anode electrode and a cathode electrode are stacked with an intervening insulator, the present invention employs a structure in which both electrodes run in juxtaposition with each other on an insulating substrate in the form of, for example, a comb-shaped electrode as shown in the drawing. By utilizing a semiconductor manufacturing process or any other micro/nano-fabrication technology, an inter-electrode distance can be extremely shortened as compared with the conventional sensors, allowing enhancing the sensitivity per unit footprint of the electrodes. Accordingly, a decrease in the size of the dryness/wetness responsive sensor can be easily achieved.Type: ApplicationFiled: July 21, 2015Publication date: June 15, 2017Applicant: NATIONAL INSTITUTE FOR MATERIALS SCIENCEInventors: Jin KAWAKITA, Tadashi SHINOHARA, Toyohiro CHIKYO, Toshihide NABATAME, Akihiko OHI, Tomoko OHKI
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Patent number: 9622346Abstract: A conductive polymer-metal complex becomes to be adhered simply and strongly on the surface of a substrate such as PTFE. By subjecting a solution containing a monomer which provides a conductive polymer, an anion, and a metal ions such as Ag+, Cu2+, Cu+ and the like to an irradiation with light having an energy required for exciting an electron to an energy level capable of reducing the metal ion, such as ultraviolet light, under an appropriated condition, thereby precipitating the conductive polymer-metal complex as being dispersed in the reaction liquid. By supplying this dispersion liquid onto various substrates, the complex microparticles in the dispersion liquid enter into and mate with the narrow holes on the surface of the substrate. As a result, the complex precipitate formed on the surface of the substrate and the substrate can be adhered strongly to each other.Type: GrantFiled: October 21, 2013Date of Patent: April 11, 2017Assignee: NATIONAL INSTITUTE FOR MATERIALS SCIENCEInventors: Jin Kawakita, Toyohiro Chikyo, Yasuo Hashimoto, Barbara Horvath
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SILVER DIFFUSION BARRIER MATERIAL, SILVER DIFFUSION BARRIER, AND SEMICONDUCTOR DEVICE USING THE SAME
Publication number: 20170084538Abstract: By using silicon oxynitride with an oxygen content of 4.2 to 37.5 at % as a material for a barrier layer, adhesiveness similar to that of silicon oxide and an Ag diffusion prevention property similar to that of silicon nitride can be realized. In particular, in a semiconductor device in which a plurality of silicon chips is vertically stacked by through-silicon vias, Ag is prevented from being diffused into Si and adhesiveness to Si becomes favorable when an Ag/polypyrrole complex is used as a conductive filling material used for the formation of a barrier layer provided on the inner surface of the via.Type: ApplicationFiled: May 14, 2015Publication date: March 23, 2017Applicant: NATIONAL INSTITUTE FOR MATERIALS SCIENCEInventors: Jin KAWAKITA, Barbara HORVATH, Toyohiro CHIKYO -
Publication number: 20160238937Abstract: A resist film structure is provided, which allows a resist layer to have improved photosensitivity to EUV or electron beams without changing the photosensitivity of the resist material itself. A metal layer 1 with a thickness as small as a nanometer level is provided on a resist polymer layer 2 formed on a substrate 3. When the resist layer in this structure is exposed to light, the metal layer 1 produces a surface plasmon effect to enhance the irradiation to the resist film, so that the photosensitivity of the resist film is improved.Type: ApplicationFiled: September 25, 2014Publication date: August 18, 2016Applicant: NATIONAL INSTITUTE FOR MATERIALS SCIENCEInventors: Jin KAWAKITA, Toyohiro CHIKYO, Takayuki NAKANE
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Publication number: 20150282310Abstract: A conductive polymer-metal complex becomes to be adhered simply and strongly on the surface of a substrate such as PTFE. By subjecting a solution containing a monomer which provides a conductive polymer, an anion, and a metal ions such as Ag+, Cu2+, Cu+ and the like to an irradiation with light having an energy required for exciting an electron to an energy level capable of reducing the metal ion, such as ultraviolet light, under an appropriated condition, thereby precipitating the conductive polymer-metal complex as being dispersed in the reaction liquid. By supplying this dispersion liquid onto various substrates, the complex microparticles in the dispersion liquid enter into and mate with the narrow holes on the surface of the substrate. As a result, the complex precipitate formed on the surface of the substrate and the substrate can be adhered strongly to each other.Type: ApplicationFiled: October 21, 2013Publication date: October 1, 2015Inventors: Jin Kawakita, Toyohiro Chikyo, Yasuo Hashimoto, Barbara Horvath
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Patent number: 8802192Abstract: A coating method of the invention is characterized by using particles each being an aggregate comprising particles far smaller than that, and heating them at a temperature lower than the melting point and blowing and depositing the same to an object to be treated at a supersonic velocity. The warm spray of the invention is characterized in that standard particles and addition particles with a particle diameter larger than that are mixed so that the K-value determined by the following relation is 1 or more and 2 or less: K=A×(B/C)×D, A: mass % of the content of additive particles, B: center particle diameter of standard particle (?m), C: center particle diameter of additive particle (?m), D: (maximum particle diameter?minimum particle diameter) of additive particle/10 (?m). The invention intends to deposit micro oxide crystals without using an adhesive or the like, with no alteration to the function thereof, and also attain a dense layer with no substantial voids.Type: GrantFiled: September 14, 2007Date of Patent: August 12, 2014Assignee: National Institute for Materials ScienceInventors: Jin Kawakita, Seiji Kuroda