Patents by Inventor Jinchun Hu

Jinchun Hu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20210262834
    Abstract: A five-degree-of-freedom heterodyne grating interferometry system comprises: a single-frequency laser for emitting single-frequency laser light, the single-frequency laser light can be split into a reference light beam and a measurement light beam; an interferometer lens set and a measurement grating for converting the reference light and the measurement light into a reference interference signal and a measurement interference signal; and multiple optical fiber bundles, respectively receiving the measurement interference signal and the reference interference signal, wherein each optical fiber bundle has multiple multi-mode optical fibers respectively receiving interference signals at different positions on the same plane. The measurement system is not over-sensitive to the environment, is small and light, and is easy to arrange.
    Type: Application
    Filed: June 26, 2019
    Publication date: August 26, 2021
    Inventors: Ming ZHANG, Yu ZHU, Fuzhong YANG, Leijie WANG, Rong CHENG, Xin LI, Weinan YE, Jinchun HU
  • Publication number: 20210164772
    Abstract: A two-degree-of-freedom heterodyne grating interferometry measurement system, comprising: a single-frequency laser device for emitting a single-frequency laser, and the single-frequency laser can be split into a beam of reference light and a beam of measurement light; an interferometer mirror group and a measurement grating for forming a reference interference signal and a measurement interference signal from the reference light and the measurement light; and a receiving optical fiber for receiving the reference interference signal and the measurement interference signal, wherein a core diameter of the receiving optical fiber is smaller than a width of an interference fringe of the reference interference signal and the measurement interference signal, so that the receiving optical fiber receives a part of the reference interference signal and the measurement interference signal.
    Type: Application
    Filed: June 26, 2019
    Publication date: June 3, 2021
    Inventors: Yu ZHU, Ming ZHANG, Leijie WANG, Fuzhong YANG, Rong CHENG, Xin LI, Weinan YE, Jinchun HU
  • Patent number: 11022423
    Abstract: Provided is a method for calibrating an error of installation of an interferometer in a multi-axis laser displacement measurement system, including: adding one or more redundant interferometers in a laser interferometer displacement measurement system; then establishing displacement calculating equations containing installation error of the laser interferometer and obtaining redundant measurement information by continuously measuring displacement information of multiple points, wherein the number of the combined displacement calculating equations is equal to the number of unknown quantities; and further solving the equation set to obtain the installation error of the interferometer. With a redundant arrangement of the laser interferometer, self-calibration of the installation error thereof can be achieved.
    Type: Grant
    Filed: October 25, 2018
    Date of Patent: June 1, 2021
    Assignee: TSINGHUA UNIVERSITY
    Inventors: Yu Zhu, Jinchun Hu, Shengwu Du, Enyao Shang, Ming Zhang, Wensheng Yin, Kaiming Yang, Rong Cheng
  • Publication number: 20210033383
    Abstract: Provided is a method for calibrating an error of installation of an interferometer in a multi-axis laser displacement measurement system, including: adding one or more redundant interferometers in a laser interferometer displacement measurement system; then establishing displacement calculating equations containing installation error of the laser interferometer and obtaining redundant measurement information by continuously measuring displacement information of multiple points, wherein the number of the combined displacement calculating equations is equal to the number of unknown quantities; and further solving the equation set to obtain the installation error of the interferometer. With a redundant arrangement of the laser interferometer, self-calibration of the installation error thereof can be achieved.
    Type: Application
    Filed: October 25, 2018
    Publication date: February 4, 2021
    Inventors: Yu ZHU, Jinchun HU, Shengwu DU, Enyao SHANG, Ming ZHANG, Wensheng YIN, Kaiming YANG, Rong CHENG
  • Patent number: 10532832
    Abstract: A magnetic levitation reaction sphere includes a spherical-housing-shaped rotor and three groups of stators. Each group includes two stators using the sphere center of the rotor as a symcenter. Axes of the three groups are mutually orthogonal. Each stator comprises a stator core and a coil array. An air gap is reserved between an inner surface of each stator core and the outer surface of the rotor. Through grooves are radially formed in the stator cores. The coil arrays are disc-type motor stator windings. Two effective sides of each coil in each coil array are respectively placed in two through grooves of the corresponding stator core. The magnetic levitation reaction sphere has low cost; levitation and rotation driving are integrated; the magnetic levitation reaction sphere has a simple and compact structure, a small size and a low mass, and relates to inherent stable levitation; and the levitation control is simple.
    Type: Grant
    Filed: March 15, 2016
    Date of Patent: January 14, 2020
    Assignees: TSINGHUA UNIVERSITY, BEIJING U-PRECISION TECH CO., LTD.
    Inventors: Ming Zhang, Yu Zhu, Anlin Chen, Kaiming Yang, Rong Cheng, Feng Liu, Jinchun Hu, Chuxiong Hu, Dengfeng Xu, Haihua Mu
  • Publication number: 20180170581
    Abstract: A magnetic levitation reaction sphere includes a spherical-housing-shaped rotor and three groups of stators. Each group includes two stators using the sphere center of the rotor as a symcenter. Axes of the three groups are mutually orthogonal. Each stator comprises a stator core and a coil array. An air gap is reserved between an inner surface of each stator core and the outer surface of the rotor. Through grooves are radially formed in the stator cores. The coil arrays are disc-type motor stator windings. Two effective sides of each coil in each coil array are respectively placed in two through grooves of the corresponding stator core. The magnetic levitation reaction sphere has low cost; levitation and rotation driving are integrated; the magnetic levitation reaction sphere has a simple and compact structure, a small size and a low mass, and relates to inherent stable levitation; and the levitation control is simple.
    Type: Application
    Filed: March 15, 2016
    Publication date: June 21, 2018
    Inventors: Ming ZHANG, Yu ZHU, Anlin CHEN, Kaiming YANG, Rong CHENG, Feng LIU, Jinchun HU, Chuxiong HU, Dengfeng XU, Haihua MU
  • Patent number: 9995569
    Abstract: A six-degree-of-freedom displacement measurement method for an exposure region on a wafer stage, the wafer stage comprises a coil array and a movable platform. A planar grating is fixed below a permanent magnet array of the movable platform. A reading head is fixed in a gap of the coil array. A measurement region is formed on the planar grating by an incident measurement light beam of the reading head. The reading head measures the six-degree-of-freedom displacement of the measurement region, so that the six-degree-of-freedom displacement of the exposure region is obtained through calculation. In the method, the six-degree-of-freedom displacement of the exposure region at any time is measured; the measurement complexity is reduced and the measurement precision is improved, and especially, the six-degree-of-freedom displacement of the exposure region can be precisely measured at any time even if the movable platform has high flexibility.
    Type: Grant
    Filed: March 15, 2016
    Date of Patent: June 12, 2018
    Assignees: TSINGHUA UNIVERSITY, BEIJING U-PRECISION TECH CO., LTD.
    Inventors: Yu Zhu, Ming Zhang, Anlin Chen, Rong Cheng, Kaiming Yang, Feng Liu, Yujing Song, Fan Zhi, Jinchun Hu, Dengfeng Xu, Haihua Mu, Chuxiong Hu
  • Publication number: 20180080757
    Abstract: A six-degree-of-freedom displacement measurement method for an exposure region on a wafer stage, the wafer stage comprises a coil array and a movable platform. A planar grating is fixed below a permanent magnet array of the movable platform. A reading head is fixed in a gap of the coil array. A measurement region is formed on the planar grating by an incident measurement light beam of the reading head. The reading head measures the six-degree-of-freedom displacement of the measurement region, so that the six-degree-of-freedom displacement of the exposure region is obtained through calculation. In the method, the six-degree-of-freedom displacement of the exposure region at any time is measured; the measurement complexity is reduced and the measurement precision is improved, and especially, the six-degree-of-freedom displacement of the exposure region can be precisely measured at any time even if the movable platform has high flexibility.
    Type: Application
    Filed: March 15, 2016
    Publication date: March 22, 2018
    Inventors: Yu Zhu, Ming Zhang, Anlin Chen, Rong Cheng, Kaiming Yang, Feng Liu, Yujing Song, Fan Zhi, Jinchun Hu, Dengfeng Xu, Haihua Mu, Chuxiong Hu
  • Patent number: 9903704
    Abstract: A three-DOF (Degree of Freedom) heterodyne grating interferometer displacement measurement system comprises a dual-frequency laser, a grating interferometer, a measurement grating, receivers and an electronic signal processing component; the grating interferometer comprises a polarizing beam splitter, a reference grating and dioptric elements; the measurement system realizes displacement measurement on the basis of grating diffraction, the optical Doppler Effect and the optical beat frequency principle. Three linear displacements can be output by the system when the grating interferometer and the measurement grating perform a three-DOF linear relative motion. The measurement system can reach sub-nanometer and higher resolution and precision, and can simultaneously measure three linear displacements.
    Type: Grant
    Filed: June 5, 2014
    Date of Patent: February 27, 2018
    Assignee: TSINGHUA UNIVERSITY
    Inventors: Yu Zhu, Leijie Wang, Ming Zhang, Zhao Liu, Rong Cheng, Kaiming Yang, Dengfeng Xu, Weinan Ye, Li Zhang, Yanpo Zhao, Huichao Qin, Li Tian, Jin Zhang, Wensheng Yin, Haihua Mu, Jinchun Hu
  • Patent number: 9904183
    Abstract: A coarse motion and fine motion integrated reticle stage driven by a planar motor comprises a movable platform (100) of the reticle stage, a balance mass (200), a drive motor, a mask plate (101, 102), a base (001), a vibration isolation system (500), and a measuring system, wherein, the vibration isolation system is located between the balance mass and the base, and the mask plate is mounted on the movable platform. The drive motor of the movable platform is a moving-iron type planar motor (300). The reticle stage can lower the design complexity of the drive motor of the movable platform. Compared with a linear motor, the planar motor can provide push forces in more directions, the number of motors is reduced, the structure of the movable platform is more compact, the inherent frequency and the control bandwidth of the movable platform are improved, and thus control precision is improved.
    Type: Grant
    Filed: April 17, 2015
    Date of Patent: February 27, 2018
    Assignees: TSINGHUA UNIVERSITY, BEIJING U-PRECISION TECH CO., LTD.
    Inventors: Yu Zhu, Ming Zhang, Fan Zhi, Zhao Liu, Rong Cheng, Kaiming Yang, Li Zhang, Huichao Qin, Yanpo Zhao, Li Tian, Weinan Ye, Jin Zhang, Wensheng Yin, Haihua Mu, Jinchun Hu
  • Patent number: 9885556
    Abstract: A dual-frequency grating interferometer displacement measurement system, comprises a dual-frequency laser, an interferometer, a measurement grating and an electronic signal processing component. The measurement system realizes displacement measurement based on grating diffraction, optical Doppler effect and optical beat frequency theory. Dual-frequency laser light is emitted from the dual-frequency laser and split into reference light and measurement light via a polarization spectroscope. The measurement light is incident to the measurement grating to generate positive and negative first-order diffraction. The diffraction light and the reference light form a beat frequency signal containing displacement information about two directions at a photo-detection unit, and linear displacement output is realized after signal processing.
    Type: Grant
    Filed: October 28, 2013
    Date of Patent: February 6, 2018
    Assignee: TSINGHUA UNIVERSITY
    Inventors: Yu Zhu, Ming Zhang, Leijie Wang, Jinchun Hu, Longmin Chen, Kaiming Yang, Dengfeng Xu, Wensheng Yin, Haihua Mu
  • Patent number: 9879979
    Abstract: A displacement measurement system of heterodyne grating interferometer, comprises a reading head, a measurement grating and an electronic signal processing component. Laser light emitted from the laser tube is collimated, passes through the first polarization spectroscope, and then emits two light beams with an orthogonal polarization direction and an orthogonal propagation direction; the two light beams pass through two acousto-optic modulators and respectively generate two first-order diffraction light beams with different frequencies, which are later divided into reference light and measurement light; two parallel reference light beams form a beat frequency electric signal with positive and negative first-order diffraction measurement light respectively after passing through a measurement signal photo-electric conversion unit; the beat frequency signals are transmitted to the electronic signal processing component for signal processing, thus the output of linear displacement in two directions is realized.
    Type: Grant
    Filed: October 28, 2013
    Date of Patent: January 30, 2018
    Assignee: TSINGHUA UNIVERSITY
    Inventors: Ming Zhang, Yu Zhu, Leijie Wang, Jinchun Hu, Longmin Chen, Kaiming Yang, Dengfeng Xu, Wensheng Yin, Haihua Mu
  • Patent number: 9869857
    Abstract: An optical grating phase modulator for a laser interference photoetching system is composed of a substrate, an optical grating, an electric motor and an optical grating positioner. The optical grating, the electric motor and the optical grating positioner are all mounted on the substrate. The optical grating is circular or rectangular, and adopt transmission or reflection type optical grating. A light beam is incident on the optical grating and generates diffraction, and when the electric motor drives the optical grating to continuously move relative to the incident light beam, diffracted light will generate a frequency shift, thereby realizing the phase modulation of the light beam. The optical grating phase modulator has the advantages of high phase modulation speed, high regulation precision and wide regulation range, thereby improving the whole performance of an interference photoetching system.
    Type: Grant
    Filed: January 13, 2014
    Date of Patent: January 16, 2018
    Assignee: Tsinghua University
    Inventors: Yu Zhu, Ming Zhang, Leijie Wang, Rong Cheng, Kaiming Yang, Zhao Liu, Jinchun Hu, Wensheng Yin, Haihua Mu, Chuxiong Hu, Dengfeng Xu
  • Patent number: 9791789
    Abstract: A magnetically suspended coarse motion and fine motion integrated reticle stage driven by a planar motor comprises a movable platform (100), a balance mass (200), a drive motor, a mask plate (101), a base (001), a vibration isolation system (500), and a measuring system, wherein, the vibration isolation system is located between the balance mass and the base, and the mask plate is mounted on the movable platform. The drive motor of the movable platform is a moving-iron type planar motor (300). The reticle stage can lower the design complexity of the drive motor of the movable platform. Compared with a linear motor, the planar motor can provide push forces in more directions, the number of motors is reduced, the structure of the movable platform is more compact, the inherent frequency and the control bandwidth of the movable platform are improved, and thus control precision is improved.
    Type: Grant
    Filed: April 17, 2015
    Date of Patent: October 17, 2017
    Assignees: TSINGHUA UNIVERSITY, BEIJING U-PRECISION TECH CO., LTD.
    Inventors: Ming Zhang, Yu Zhu, Fan Zhi, Rong Cheng, Kaiming Yang, Zhao Liu, Li Zhang, Huichao Qin, Yanpo Zhao, Li Tian, Weinan Ye, Jin Zhang, Wensheng Yin, Haihua Mu, Jinchun Hu
  • Patent number: 9766054
    Abstract: A planar motor rotor displacement measuring device and its measuring method are provided. The motor is a moving-coil type planar motor. The device comprises probes, two sets of sine sensors, two sets of cosine sensors, a signal lead wire and a signal processing circuit. The method is arranging two sets of magnetic flux density sensors within a magnetic field pitch ? along two vertical movement directions in the rotor located in the sine magnetic field area. Sampled signals of the four sets of sensors are respectively processed with a frequency multiplication operation, four subdivision signals are obtained, the zero-crossing points of the four subdivision signals are detected, and then two sets of orthogonal pulse signals are generated. The pulse number of the orthogonal pulse signals is counted, and phase difference of the two sets of orthogonal pulse signals is respectively detected.
    Type: Grant
    Filed: February 8, 2013
    Date of Patent: September 19, 2017
    Assignees: SHANGHAI MICRO ELECTRONICS EQUIPMENT CO., LTD., TSINGHUA UNIVERSITY
    Inventors: Jinchun Hu, Yu Zhu, Wensheng Yin, Longmin Chen, Kaiming Yang, Ming Zhang, Dengfeng Xu, Haihua Mu, Chuxiong Hu, Zhao Liu
  • Patent number: 9752643
    Abstract: A negative stiffness system for gravity compensation of a micropositioner of wafer table in lithography machine, characterized in that, the negative stiffness system includes at least three sets of quasi-zero stiffness units, each of the sets of quasi-zero stiffness units comprises a pair of negative stiffness springs and a positive stiffness spring, the positive stiffness spring is vertically positioned, the pair of negative stiffness springs are obliquely and symmetrically positioned at two sides of the positive stiffness spring, upper ends of the negative stiffness springs and the positive stiffness spring are connected together and fixed to the bottom surface of a rotor of the micropositioner, and lower ends of the negative stiffness springs and the positive stiffness spring are connected to a base, respectively. The system reduces the stiffness in vertical direction and prevents the influence of permanent magnet on its surroundings, while improving the bearing capacity.
    Type: Grant
    Filed: December 6, 2013
    Date of Patent: September 5, 2017
    Assignees: SHANGHAI MICRO ELECTRONICS EQUIPMENT CO., LTD., TSINGHUA UNIVERSITY
    Inventors: Yu Zhu, Ming Zhang, Zhao Liu, Rong Cheng, Jing Wang, Li Tian, Dengfeng Xu, Kaiming Yang, Jinchun Hu, Wensheng Yin, Haihua Mu, Hao Liu, Chuxiong Hu
  • Publication number: 20170115580
    Abstract: A coarse motion and fine motion integrated reticle stage driven by a planar motor comprises a movable platform (100) of the reticle stage, a balance mass (200), a drive motor, a mask plate (101, 102), a base (001), a vibration isolation system (500), and a measuring system, wherein, the vibration isolation system is located between the balance mass and the base, and the mask plate is mounted on the movable platform. The drive motor of the movable platform is a moving-iron type planar motor (300). The reticle stage can lower the design complexity of the drive motor of the movable platform. Compared with a linear motor, the planar motor can provide push forces in more directions, the number of motors is reduced, the structure of the movable platform is more compact, the inherent frequency and the control bandwidth of the movable platform are improved, and thus control precision is improved.
    Type: Application
    Filed: April 17, 2015
    Publication date: April 27, 2017
    Inventors: Yu ZHU, Ming ZHANG, Fan ZHI, Zhao LIU, Rong CHENG, Kaiming YANG, Li ZHANG, Huichao QIN, Yanpo ZHAO, Li TIAN, Weinan YE, Jin ZHANG, Wensheng YIN, Haihua MU, Jinchun HU
  • Publication number: 20170052461
    Abstract: A magnetically suspended coarse motion and fine motion integrated reticle stage driven by a planar motor comprises a movable platform (100), a balance mass (200), a drive motor, a mask plate (101), a base (001), a vibration isolation system (500), and a measuring system, wherein, the vibration isolation system is located between the balance mass and the base, and the mask plate is mounted on the movable platform. The drive motor of the movable platform is a moving-iron type planar motor (300). The reticle stage can lower the design complexity of the drive motor of the movable platform. Compared with a linear motor, the planar motor can provide push forces in more directions, the number of motors is reduced, the structure of the movable platform is more compact, the inherent frequency and the control bandwidth of the movable platform are improved, and thus control precision is improved.
    Type: Application
    Filed: April 17, 2015
    Publication date: February 23, 2017
    Inventors: Ming ZHANG, Yu ZHU, Fan ZHI, Rong CHENG, Kaiming YANG, Zhao LIU, Li ZHANG, Huichao QIN, Yanpo ZHAO, Li TIAN, Weinan YE, Jin ZHANG, Wensheng YIN, Haihua MU, Jinchun HU
  • Patent number: 9455650
    Abstract: A two-dimensional locating method of a motion platform based on a magnetic steel array involves the following steps: placing more than four linear Hall sensors at any different positions within one or more polar distances of the magnetic steel array on the surface of the motion platform in a motion system; determining a magnetic flux density distribution model according to the magnetic steel array; determining the mounting positions of the above-mentioned linear Hall sensors, which are converted into phases with respect to the mass center of the motion platform; recording the magnetic flux density measured values of the linear Hall sensors as the motion proceeds; solving the phases of the mass center of the motion platform in a plane, with the measured values being served as observed quantities and the magnetic flux density distribution model being served as a computation model; and determining the position of the mass center of the motion platform with respect to an initial phase according to the phase, so a
    Type: Grant
    Filed: January 18, 2011
    Date of Patent: September 27, 2016
    Assignee: TSINGHUA UNIVERSITY
    Inventors: Jinchun Hu, Yu Zhu, Jinsong Wang, Ming Zhang, Kai Liao, Kaiming Yang, Dengfeng Xu, Wensheng Yin, Guanghong Duan
  • Publication number: 20160153764
    Abstract: A three-DOF (Degree of Freedom) heterodyne grating interferometer displacement measurement system comprises a dual-frequency laser, a grating interferometer, a measurement grating, receivers and an electronic signal processing component; the grating interferometer comprises a polarizing spectroscope, a reference grating and dioptric elements; the measurement system realizes displacement measurement on the basis of grating diffraction, the optical Doppler Effect and the optical beat frequency principle. Three linear displacements can be output by the system when the grating interferometer and the measurement grating perform a three-DOF linear relative motion. The measurement system can reach sub-nanometer and even higher resolution and precision, and can simultaneously measure three linear displacements. The measurement system has the advantages of being environmentally insensitive, high in measurement precision, small in size, light in weight, etc.
    Type: Application
    Filed: June 5, 2014
    Publication date: June 2, 2016
    Inventors: Yu ZHU, Leijie WANG, Ming ZHANG, Zhao LIU, Rong CHENG, Kaiming YANG, Dengfeng XU, Weinan YE, Li ZHANG, Yanpo ZHAO, Huichao QIN, Li TIAN, Jin ZHANG, Wensheng YIN, Haihua MU, Jinchun HU