Patents by Inventor Johannes J. Schmitz

Johannes J. Schmitz has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 5447570
    Abstract: Apparatus including a support and purge gas supply prevents edge and backside coating on a wafer in manufacture of integrated circuits. Various enclosure elements and methods are disclosed for containing and directing purge gas, and a CVD system is provided incorporating the elements of the invention.
    Type: Grant
    Filed: June 23, 1992
    Date of Patent: September 5, 1995
    Assignee: Genus, Inc.
    Inventors: Johannes J. Schmitz, Frederick J. Scholz, Norman L. Turner, Raymond L. Chow, Frank O. Uher, Sien G. Kang, Steven C. Selbrede
  • Patent number: 5387289
    Abstract: A system for depositing a film on a substrate in a CVD process has a second-source injection sub-system for injecting a control gas. The deposition rate of the material deposited in the CVD process is a function of the concentration of the control gas at the point that material is deposited. The second source injection sub-system provides a concentration gradient of the control gas relative to the substrate surface coated, and alters the thickness uniformity of the film. By controlling the gradient one may control the thickness uniformity profile. In another embodiment, the invention applies to dry etching with reactive gas, and the etching rate is controlled by second source provision of a control gas.
    Type: Grant
    Filed: September 22, 1992
    Date of Patent: February 7, 1995
    Assignee: Genus, Inc.
    Inventors: Johannes J. Schmitz, Raymond L. Chow, Sien G. Kang, Edward J. Rode, Frank O. Uher
  • Patent number: 5272112
    Abstract: A chemical vapor deposition process performed at a temperature below 440 degrees C. for blanket tungsten deposition as a step in manufacturing integrated circuits deposits an integrated film suitable for voidless fill of vias as small as 0.5 microns in width and with aspect ratios of more than 2, while providing resistivity well below 100 micro-ohms per square, film stress generally in the mid 7E+09 dynes per square centimeter and below, and reflectivity of more than 40%, measured relative to silicon at 436 nanometer wavelength for 1 micron film thickness, while avoiding the use of nitrogen in the process.
    Type: Grant
    Filed: November 9, 1992
    Date of Patent: December 21, 1993
    Assignee: Genus, Inc.
    Inventors: Johannes J. Schmitz, Sien G. Kang, Edward J. Rode
  • Patent number: 4170754
    Abstract: The coupling and decoupling of one or more of a plurality of differential transformers comprising a digital position probe assembly develops a phase encoded signal indicative of the position or level of a magnetically permeable element such as liquid metal or a lead screw in a nuclear reactor assembly. The phase encoded signal, which is developed as a Gray code, is processed in a phase decoder and digitally converted into a binary coded decimal to provide a digital representation of the level or position of the magnetically permeable material.
    Type: Grant
    Filed: October 16, 1975
    Date of Patent: October 9, 1979
    Assignee: Westinghouse Electric Corp.
    Inventors: Johannes J. Schmitz, Theodore M. Heinrich
  • Patent number: 4052686
    Abstract: The combination of a plurality of tubular transducer sections, and a flexible supporting member extending through the tubular transducer sections forms a flexible elongated probe of a design suitable for monitoring the level of an element, such as a nuclear magnetically permeable control rod or liquid.
    Type: Grant
    Filed: October 16, 1975
    Date of Patent: October 4, 1977
    Assignee: Westinghouse Electric Corporation
    Inventor: Johannes J. Schmitz
  • Patent number: 3996479
    Abstract: In a comparator/bistable circuit, wherein the bistable circuit is tripped in response to a predetermined relationship between first and second inputs supplied to a comparator circuit, one of the inputs to the comparator circuit is supplied as an input to an adjustable reset circuit which develops the bistable reset level as a percentage function of one of the comparator input signals. This contrasts with the conventional technique of developing the bistable reset level as a feedback function of the output of the bistable circuit.
    Type: Grant
    Filed: July 3, 1975
    Date of Patent: December 7, 1976
    Assignee: Westinghouse Electric Corporation
    Inventor: Johannes J. Schmitz