Abstract: Implementations of the present disclosure provide apparatus and method for improving gas distribution during thermal processing. One implementation of the present disclosure provides an apparatus for processing a substrate comprising a chamber body defining a processing volume, a substrate support disposed in the processing volume, wherein the substrate support has a substrate supporting surface, a gas source assembly coupled to an inlet of the chamber body, an exhaust assembly coupled to an outlet of the chamber body, and a side gas assembly coupled to a sidewall of the chamber body, wherein the side gas assembly comprises a gas inlet pointed in a direction that is tangential to the edge of the substrate supporting surface, and wherein the gas inlet, the inlet of the chamber body, and the outlet of the chamber body are angularly offset at about 90° with respect to each other, and the gas inlet, the inlet of the chamber body, and the outlet of the chamber body are intersected by a common plane.

Abstract: Implementations of the present disclosure provide apparatus and method for improving gas distribution during thermal processing. One implementation of the present disclosure provides an apparatus for processing a substrate comprising a chamber body defining a processing volume, a substrate support disposed in the processing volume, wherein the substrate support has a substrate supporting surface, a gas source assembly coupled to an inlet of the chamber body, an exhaust assembly coupled to an outlet of the chamber body, and a side gas assembly coupled to a sidewall of the chamber body, wherein the side gas assembly comprises a gas inlet pointed in a direction that is tangential to the edge of the substrate supporting surface, and wherein the gas inlet, the inlet of the chamber body, and the outlet of the chamber body are angularly offset at about 90° with respect to each other, and the gas inlet, the inlet of the chamber body, and the outlet of the chamber body are intersected by a common plane.

Abstract: Implementations of the present disclosure provide apparatus and method for improving gas distribution during thermal processing. One implementation of the present disclosure provides an apparatus for processing a substrate comprising a chamber body defining a processing volume, a substrate support disposed in the processing volume, wherein the substrate support has a substrate supporting surface, a gas source assembly coupled to an inlet of the chamber body, an exhaust assembly coupled to an outlet of the chamber body, and a side gas assembly coupled to a sidewall of the chamber body, wherein the side gas assembly comprises a gas inlet pointed in a direction that is tangential to the edge of the substrate supporting surface, and wherein the gas inlet, the inlet of the chamber body, and the outlet of the chamber body are angularly offset at about 90° with respect to each other, and the gas inlet, the inlet of the chamber body, and the outlet of the chamber body are intersected by a common plane.

Abstract: Implementations of the present disclosure provide apparatus and method for improving gas distribution during thermal processing. One implementation of the present disclosure provides an apparatus for processing a substrate comprising a chamber body defining a processing volume, a substrate support disposed in the processing volume, wherein the substrate support has a substrate supporting surface, a gas source assembly coupled to an inlet of the chamber body, an exhaust assembly coupled to an outlet of the chamber body, and a side gas assembly coupled to a sidewall of the chamber body, wherein the side gas assembly comprises a gas inlet pointed in a direction that is tangential to the edge of the substrate supporting surface, and wherein the gas inlet, the inlet of the chamber body, and the outlet of the chamber body are angularly offset at about 90° with respect to each other, and the gas inlet, the inlet of the chamber body, and the outlet of the chamber body are intersected by a common plane.

Abstract: A method for selective oxidation of silicon containing materials in a semiconductor device is disclosed and claimed. In one aspect, a rapid thermal processing apparatus is used to selectively oxidize a substrate by in-situ steam generation at high pressure in a hydrogen rich atmosphere. Other materials, such as metals and barrier layers, in the substrate are not oxidized.

Abstract: A method for selective oxidation of silicon containing materials in a semiconductor device is disclosed and claimed. In one aspect, a rapid thermal processing apparatus is used to selectively oxidize a substrate by in-situ steam generation at high pressure in a hydrogen rich atmosphere. Other materials, such as metals and barrier layers, in the substrate are not oxidized.

Abstract: A method for selective oxidation of silicon containing materials in a semiconductor device is disclosed and claimed. In one aspect, a rapid thermal processing apparatus is used to selectively oxidize a substrate by in-situ steam generation at high pressure in a hydrogen rich atmosphere. Other materials, such as metals and barrier layers, in the substrate are not oxidized.

Abstract: A method for selective oxidation of silicon containing materials in a semiconductor device is disclosed and claimed. In one aspect, a rapid thermal processing apparatus is used to selectively oxidize a substrate by in-situ steam generation at high pressure in a hydrogen rich atmosphere. Other materials, such as metals and barrier layers, in the substrate are not oxidized.

Abstract: A method for selective oxidation of silicon containing materials in a semiconductor device is disclosed and claimed. In one aspect, a rapid thermal processing apparatus is used to selectively oxidize a substrate by in-situ steam generation at high pressure in a hydrogen rich atmosphere. Other materials, such as metals and barrier layers, in the substrate are not oxidized.

Abstract: An apparatus for photo-assisted or photo-induced processes is disclosed, comprising a process chamber having an integrated gas and radiation distribution plate. In one embodiment, the plate has one set of apertures for distributing one or more process gases, and another set of apertures for distributing radiation to a process region in the chamber.

Abstract: A method for selective oxidation of silicon containing materials in a semiconductor device is disclosed and claimed. In one aspect, a rapid thermal processing apparatus is used to selectively oxidize a substrate by in-situ steam generation at high pressure in a hydrogen rich atmosphere. Other materials, such as metals and barrier layers, in the substrate are not oxidized.

Abstract: An apparatus for photo-assisted or photo-induced processes is disclosed, comprising a process chamber having an integrated gas and radiation distribution plate. In one embodiment, the plate has one set of apertures for distributing one or more process gases, and another set of apertures for distributing radiation to a process region in the chamber.

Abstract: An advertising frame for use with a vehicle so as to render the advertising frame mobile is provided. The advertising frame includes a vehicle engagement that is configured for engaging a vehicle. A signage member is included and is configured for carrying advertising signage. The signage member is pivotable with respect to the vehicle engagement member so as to be configured for providing access to the rear of a vehicle. A tailgate, hatch, trunk, spare tire or other component or portion of the rear of the vehicle may be accessed by pivoting the signage member out of the way.

Abstract: This invention comprises a method for applying a polyurethane solution to the lens headlights of automobiles. The solution is contained within a customized cylindrical application container that includes a container for storing the polyurethane and an applicator head. The applicator head fastens to the base by depressing it over a curved outer lip of the base until it is secured. The cap itself is hollow and is topped by an angled base having a hole that allows the solution to be dispensed. To assure the smooth and controlled dispersal of the solution, a rectangular sponge is attached to the top of the angled base. This sponge regulates the application of the solution to the covers of headlights and taillights of automobiles and similar vehicles. Upon application, the solution actively restores the covers by binding and filing in scratches and other abrasions on the surface. This results in a smooth surface that ensures the clear filtration of light, thereby aiding the transmission of light through the lens.

Abstract: The invention provides a system and method for defining a schema and sending a query to a Similarity Search Engine to determine a quantitative assessment of the similarity of attributes between an anchor record and one or more target records. The Similarity Search Engine makes a similarity assessment in a single pass through the target records having multiple relationship characteristics. The Similarity Search Engine is a server configuration that comprises a Gateway for command and response routing, a Virtual Document Manager for document generation, a Search Manager for document scoring, and an Relational Database Management System for providing data persistence, data retrieval and access to User Defined Functions. The Similarity Search Engine uses a unique command syntax based on the Extensible Markup Language to implement functions necessary for similarity searching and scoring.

Abstract: A system for removing the lens from an eye of a mammal, including a lens-removal device having a probe for penetrating the lens capsule. The probe includes a sheath that shields a rotating impeller at all times, with the impeller being pneumatically actuated to advance to a lens removal position within the sheath. The impeller is pneumatically rotated using a turbine mechanism within a handle for the probe. Irrigation and aspiration are provided to facilitate removal of the lens tissue. The turbine is driven with pulsed air to prevent stiction. A purge/protection cap helps remove air bubbles from the system prior to use and protects the delicate impeller during transport. An operating system is also provided with a foot pedal actuator.

Abstract: A self-contained surgical tubing management system whereby all of the required surgical handpiece(s) and power and fluid tubings, cables and connections are incorporated in a single disposable package. The tubing management system includes a sterile sheet or substrate that may cover either all or only a portion of the patient's body. Pockets may be formed in either end of the sheet to hold, at one end, any number or variety of surgical instruments, such as vitreous probes, infusion cannulas, aspiration lines, coagulating probes, etc., and, at the end opposite the instruments, a small coils of power and fluid lines. The various power and fluid lines needed to operated these instruments may be permanently or temporarily connected to the respective instruments and extend down the length of the sheet. These lines are attached to the sheet either continuously or at various points by any number of methods.

Abstract: A method and apparatus for determining right heart ejection fraction by injecting a cold indicator into the right ventricle or locations in the heart upstream thereof during an injection period and allowing the indicator to be diluted with blood and flow to the pulmonary artery whereby the temperature of the fluid in the pulmonary artery falls and then rises, measuring the temperature of the fluid in the pulmonary artery at least during the time that the temperature in the pulmonary artery is rising, measuring a prebolus temperature of the blood in the pulmonary artery prior to the time that the cold indicator reaches the pulmonary artery, establishing a post bolus baseline temperature which is lower than said prebolus baseline temperature, comparing at least some of the measured temperatures during the time that the temperatures of the fluid in the pulmonary artery are rising to the post bolus baseline temperature to establish temperature differentials, and using at least some of the temperature differential

Abstract: Method and apparatus for arrhythmia analysis of Holter-type ECG recordings including a tape playback unit having an analog signal output of successive ECG complexes or heart beats, a converter for generating data composites representing each complex, a computer for making and storing data templates in bins corresponding to operator classification of complexes as normal, supraventricular ectopic (SVE), ventricular ectopic (VE), or unknown, for comparing successive composites with stored templates and conditions to determine a match condition, and for signaling a corresponding event to an event counter and display. In learn mode the computer signals the tape playback to stop and to display an unmatched complex for operator classification and possible subsequent generation of a new template, after which scanning is resumed.