Patents by Inventor John B. Pethica

John B. Pethica has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10996152
    Abstract: A two-dimensional nanoindentation measurement apparatus includes a first actuator that imparts a first force in a first direction, and a second actuator that imparts a second force in a second direction orthogonal to the first direction. A first elongate member has a first end attached to the first actuator and a second end attached to an indenter tip that engages the surface of the sample. A second elongate member includes a first end attached to the second actuator and a second end connected to the second end of the first elongate member. The first elongate member is rigid in the first direction and compliant in the second direction, and the second elongate member is rigid in the second direction and compliant in the first direction. The first force is imparted to the indenter tip in the first direction through the first elongate member, and the second force is imparted to the indenter tip in the second direction through the second elongate member.
    Type: Grant
    Filed: January 14, 2019
    Date of Patent: May 4, 2021
    Assignee: KLA-Tencor Corporation
    Inventors: Warren C. Oliver, Kermit H. Parks, Kurt Johanns, P. Sudharshan Phani, John B. Pethica
  • Publication number: 20190226960
    Abstract: A two-dimensional nanoindentation measurement apparatus includes a first actuator that imparts a first force in a first direction, and a second actuator that imparts a second force in a second direction orthogonal to the first direction. A first elongate member has a first end attached to the first actuator and a second end attached to an indenter tip that engages the surface of the sample. A second elongate member includes a first end attached to the second actuator and a second end connected to the second end of the first elongate member. The first elongate member is rigid in the first direction and compliant in the second direction, and the second elongate member is rigid in the second direction and compliant in the first direction. The first force is imparted to the indenter tip in the first direction through the first elongate member, and the second force is imparted to the indenter tip in the second direction through the second elongate member.
    Type: Application
    Filed: January 14, 2019
    Publication date: July 25, 2019
    Applicant: KLA-Tencor Corporation
    Inventors: Warren C. Oliver, Kermit H. Parks, Kurt Johanns, P. Sudharshan Phani, John B. Pethica
  • Patent number: 8524100
    Abstract: The invention provides a system and process of patterning structures on a carbon based surface comprising exposing part of the surface to an ion flux, such that material properties of the exposed surface are modified to provide a hard mask effect on the surface. A further step of etching unexposed parts of the surface forms the structures on the surface. The inventors have discovered that by controlling the ion exposure, alteration of the surface structure at the top surface provides a mask pattern, without substantially removing any material from the exposed surface. The mask allows for subsequent ion etching of unexposed areas of the surface leaving the exposed areas raised relative to the unexposed areas thus manufacturing patterns onto the surface. For example, a Ga+ focussed ion beam exposes a pattern onto a diamond surface which produces such a pattern after its exposure to a plasma etch.
    Type: Grant
    Filed: July 3, 2009
    Date of Patent: September 3, 2013
    Assignee: The Provost Fellows and Scholars of the College of the Holy and Undivided Trinity of Queen Elizabeth, near Dublin
    Inventors: Graham L. W. Cross, Warren McKenzie, John B. Pethica
  • Publication number: 20110189446
    Abstract: The invention provides a system and process of patterning structures on a carbon based surface comprising exposing part of the surface to an ion flux, such that material properties of the exposed surface are modified to provide a hard mask effect on the surface. A further step of etching unexposed parts of the surface forms the structures on the surface. The inventors have discovered that by controlling the ion exposure, alteration of the surface structure at the top surface provides a mask pattern, without substantially removing any material from the exposed surface. The mask allows for subsequent ion etching of unexposed areas of the surface leaving the exposed areas raised relative to the unexposed areas thus manufacturing patterns onto the surface. For example, a Ga+ focussed ion beam exposes a pattern onto a diamond surface which produces such a pattern after its exposure to a plasma etch.
    Type: Application
    Filed: July 3, 2009
    Publication date: August 4, 2011
    Applicant: THE PROVOST, FELLOWS AND SCHOLARS OF THE COLLEGE O F THE HOLY AND UNDIVIDED TRINITY OF QUEEN ELIZABE
    Inventors: Graham L. W. Cross, Warren McKenzie, John B. Pethica
  • Patent number: 7632088
    Abstract: Systems and methods for forming patterns and structures in target materials are described. The method produces a pattern or structure in a target material by contacting a stamp including one or more features with a target material using a normal load sufficient for keeping the one or more features in contact with the target material, and providing a cyclic shear force in an amount sufficient to extrude the target material and form a negative relief of the one more features in the target material. The systems and methods can be used to produce a variety of articles including, but not limited to, semiconductor integrated electrical circuits, integrated optical, magnetic, mechanical circuits and microdevices.
    Type: Grant
    Filed: October 19, 2007
    Date of Patent: December 15, 2009
    Assignee: Provost Fellows and Scholars of the College of the Holy and Undivided Trinity of Queen Elizabeth near Dublin
    Inventors: John B. Pethica, Graham Lawrence William Cross, Hakan Ozgur Ozer, Barry S. O'Connell
  • Publication number: 20080145617
    Abstract: Systems and methods for forming patterns and structures in target materials are described. The method produces a pattern or structure in a target material by contacting a stamp including one or more features with a target material using a normal load sufficient for keeping the one or more features in contact with the target material, and providing a cyclic shear force in an amount sufficient to extrude the target material and form a negative relief of the one more features in the target material. The systems and methods can be used to produce a variety of articles including, but not limited to, semiconductor integrated electrical circuits, integrated optical, magnetic, mechanical circuits and microdevices.
    Type: Application
    Filed: October 19, 2007
    Publication date: June 19, 2008
    Applicant: The Provost Fellows and Scholars of the College of the Holy and Undivided Trinity of Queen Elizabeth
    Inventors: John B. Pethica, Graham Lawrence William Cross, Hakan Ozgur Ozer, Barry S. O'Connell
  • Patent number: 4848141
    Abstract: A method for continuously measuring the stiffness and area of contact between two bodies is provided. Elastic stiffness of a junction is measured by introducing a relatively small oscillatory mechanical force at a known frequency to the junction and measuring the subsequent displacement response using AC signal-handling techniques to provide a continuous measurement proportional to the stiffness and the area of contact between the bodies, even as the area of contact changes.
    Type: Grant
    Filed: April 6, 1988
    Date of Patent: July 18, 1989
    Inventors: Warren C. Oliver, John B. Pethica