Abstract: A jig for aligning a wafer-handling system in a calibration location, such as a wafer pickup-dismount location, with respect to a wafer-processing tool. The jig comprises an alignment fixture adapted to be repeatably mounted on the tool and having one or more edge stops. The jig may further comprise an edge-to-center locator adapted to be mounted on the alignment fixture. The edge-to-center locator has a peripheral edge and a center marker that identifies the precise center of the calibration location when the edge-to-center locator edge is positioned in contact with the edge stop or stops. An alignment method for use of the jig is also disclosed.

Abstract: A precision lens mounting assembly which includes a plurality of lens cells and a plurality of lenses which correspond to the plurality of lens cells. The lens cells have an annular shape. Flexure means are disposed within the inner diameter of the lens cell which hold the lens in a predetermined spatial relation at a datum temperature to the lens cell. The flexure means return the lenses to this predetermined spatial relation following temperature excursions away from, then back to, the datum temperature. The outer diameter of the lens cells in the assembly are all substantially equal and substantially concentric about the optical axis of the lenses they hold. The upper and lower surfaces of the lens cell each have three or more precision surfaces disposed on a plane. The plane are perpendicular to the optical axis of the lens and have a predetermined spatial relation to the apex of the lens.