Patents by Inventor John Mark Meldrim

John Mark Meldrim has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11818968
    Abstract: Some embodiments include an integrated assembly having an insulative mass over a conductive base structure. A conductive interconnect extends through the insulative mass to an upper surface of the conductive base structure. The conductive interconnect includes a conductive liner extending around an outer lateral periphery of the interconnect. The conductive liner includes nitrogen in combination with a first metal. A container-shaped conductive structure is laterally surrounded by the conductive liner. The container-shaped conductive structure includes a second metal. A conductive plug is within the container-shaped conductive structure. Some embodiments include methods of forming conductive interconnects within integrated assemblies.
    Type: Grant
    Filed: August 24, 2021
    Date of Patent: November 14, 2023
    Assignee: Micron Technology, Inc.
    Inventors: Jordan D. Greenlee, Tao D. Nguyen, John Mark Meldrim, Aaron K. Belsher
  • Publication number: 20230255030
    Abstract: A method used in forming integrated circuitry comprises forming a stack comprising vertically-alternating first tiers and second tiers. The stack comprises a cavity therein that comprises a stair-step structure. Sidewalls of the cavity and steps of the stair-step structure are lined with an insulator material. Insulative material is formed in the cavity radially inward of the insulator material. An upper portion of the insulative material is removed from the cavity to leave the insulative material in a bottom of the cavity over the stair-step structure. After the removing, insulating material is formed in the cavity above the insulative material. Other embodiments, including structure independent of method, are disclosed.
    Type: Application
    Filed: March 27, 2023
    Publication date: August 10, 2023
    Applicant: Micron Technology, Inc.
    Inventors: Jivaan Kishore Jhothiraman, John Mark Meldrim
  • Patent number: 11705500
    Abstract: Some embodiments include a memory array having a vertical stack of alternating insulative levels and control gate levels. Channel material extends vertically along the stack. The control gate levels comprising conductive regions. The conductive regions include at least three different materials. Charge-storage regions are adjacent the control gate levels. Charge-blocking regions are between the charge-storage regions and the conductive regions.
    Type: Grant
    Filed: February 19, 2021
    Date of Patent: July 18, 2023
    Assignee: Micron Technology, Inc.
    Inventors: David Ross Economy, Rita J. Klein, Jordan D. Greenlee, John Mark Meldrim, Brenda D. Kraus, Everett A. McTeer
  • Patent number: 11646206
    Abstract: Described are methods for forming a multilayer conductive structure for semiconductor devices. A seed layer is formed comprising a metal and an additional constituent that in combination with the metal inhibits nucleation of a fill layer of the metal formed over the seed layer. Tungsten may be doped or alloyed with silicon to form the seed layer, with a tungsten fill being formed over the seed layer.
    Type: Grant
    Filed: November 23, 2020
    Date of Patent: May 9, 2023
    Assignee: Micron Technology, Inc.
    Inventors: David Ross Economy, Brian Beatty, John Mark Meldrim, Yongjun Jeff Hu, Jordan D. Greenlee
  • Patent number: 11647633
    Abstract: A method used in forming integrated circuitry comprises forming a stack comprising vertically-alternating first tiers and second tiers. The stack comprises a cavity therein that comprises a stair-step structure. Sidewalls of the cavity and steps of the stair-step structure are lined with an insulator material. Insulative material is formed in the cavity radially inward of the insulator material. An upper portion of the insulative material is removed from the cavity to leave the insulative material in a bottom of the cavity over the stair-step structure. After the removing, insulating material is formed in the cavity above the insulative material. Other embodiments, including structure independent of method, are disclosed.
    Type: Grant
    Filed: July 13, 2020
    Date of Patent: May 9, 2023
    Assignee: Micron Technology, Inc.
    Inventors: Jivaan Kishore Jhothiraman, John Mark Meldrim
  • Publication number: 20230121315
    Abstract: Some embodiments include a memory array having a vertical stack of alternating insulative levels and control gate levels. Channel material extends vertically along the stack. The control gate levels comprising conductive regions. The conductive regions include at least three different materials. Charge-storage regions are adjacent the control gate levels. Charge-blocking regions are between the charge-storage regions and the conductive regions.
    Type: Application
    Filed: December 16, 2022
    Publication date: April 20, 2023
    Applicant: Micron Technology, Inc.
    Inventors: David Ross Economy, Rita J. Klein, Jordan D. Greenlee, John Mark Meldrim, Brenda D. Kraus, Everett A. McTeer
  • Publication number: 20220037358
    Abstract: Some embodiments include a conductive structure of an integrated circuit. The conductive structure includes an upper primary portion, with the upper primary portion having a first conductive constituent configured as a container. The container has a bottom, and a pair of sidewalls extending upwardly from the bottom. An interior region of the container is over the bottom and between the sidewalls. The upper primary portion includes a second conductive constituent configured as a mass filling the interior region of the container. The second conductive constituent is a different composition than the first conductive constituent. One or more conductive projections join to the upper primary portion and extend downwardly from the upper primary portion. Some embodiments include assemblies comprising memory cells over conductive structures. Some embodiments include methods of forming conductive structures.
    Type: Application
    Filed: October 15, 2021
    Publication date: February 3, 2022
    Applicant: Micron Technology, Inc.
    Inventors: Nancy M. Lomeli, Tom George, Jordan D. Greenlee, Scott M. Pook, John Mark Meldrim
  • Publication number: 20220028996
    Abstract: Some embodiments include a memory array having a vertical stack of alternating insulative levels and wordline levels. Channel material extends vertically along the stack. The wordline levels include conductive regions which have a first metal-containing material and a second metal-containing material. The first metal-containing material at least partially surrounds the second metal-containing material. The first metal-containing material has a different crystallinity than the second metal-containing material. In some embodiments the first metal-containing material is substantially amorphous, and the second metal-containing material has a mean grain size within a range of from greater than or equal to about 5 nm to less than or equal to about 200 nm. Charge-storage regions are adjacent the wordline levels. Charge-blocking regions are between the charge-storage regions and the conductive regions.
    Type: Application
    Filed: October 7, 2021
    Publication date: January 27, 2022
    Applicant: Micron Technology, Inc.
    Inventors: Jordan D. Greenlee, Rita J. Klein, Everett A. McTeer, John Mark Meldrim
  • Publication number: 20220013530
    Abstract: A method used in forming integrated circuitry comprises forming a stack comprising vertically-alternating first tiers and second tiers. The stack comprises a cavity therein that comprises a stair-step structure. Sidewalls of the cavity and steps of the stair-step structure are lined with an insulator material. Insulative material is formed in the cavity radially inward of the insulator material. An upper portion of the insulative material is removed from the cavity to leave the insulative material in a bottom of the cavity over the stair-step structure. After the removing, insulating material is formed in the cavity above the insulative material. Other embodiments, including structure independent of method, are disclosed.
    Type: Application
    Filed: July 13, 2020
    Publication date: January 13, 2022
    Applicant: Micron Technology, Inc.
    Inventors: Jivaan Kishore Jhothiraman, John Mark Meldrim
  • Publication number: 20210384422
    Abstract: Some embodiments include an integrated assembly having an insulative mass over a conductive base structure. A conductive interconnect extends through the insulative mass to an upper surface of the conductive base structure. The conductive interconnect includes a conductive liner extending around an outer lateral periphery of the interconnect. The conductive liner includes nitrogen in combination with a first metal. A container-shaped conductive structure is laterally surrounded by the conductive liner. The container-shaped conductive structure includes a second metal. A conductive plug is within the container-shaped conductive structure. Some embodiments include methods of forming conductive interconnects within integrated assemblies.
    Type: Application
    Filed: August 24, 2021
    Publication date: December 9, 2021
    Applicant: Micron Technology, Inc.
    Inventors: Jordan D. Greenlee, Tao D. Nguyen, John Mark Meldrim, Aaron K. Belsher
  • Patent number: 11177276
    Abstract: Some embodiments include a conductive structure of an integrated circuit. The conductive structure includes an upper primary portion, with the upper primary portion having a first conductive constituent configured as a container. The container has a bottom, and a pair of sidewalls extending upwardly from the bottom. An interior region of the container is over the bottom and between the sidewalls. The upper primary portion includes a second conductive constituent configured as a mass filling the interior region of the container. The second conductive constituent is a different composition than the first conductive constituent. One or more conductive projections join to the upper primary portion and extend downwardly from the upper primary portion. Some embodiments include assemblies comprising memory cells over conductive structures. Some embodiments include methods of forming conductive structures.
    Type: Grant
    Filed: August 16, 2019
    Date of Patent: November 16, 2021
    Assignee: Micron Technology, Inc.
    Inventors: Nancy M. Lomeli, Tom George, Jordan D. Greenlee, Scott M. Pook, John Mark Meldrim
  • Patent number: 11158718
    Abstract: Some embodiments include a memory array having a vertical stack of alternating insulative levels and wordline levels. Channel material extends vertically along the stack. The wordline levels include conductive regions which have a first metal-containing material and a second metal-containing material. The first metal-containing material at least partially surrounds the second metal-containing material. The first metal-containing material has a different crystallinity than the second metal-containing material. In some embodiments the first metal-containing material is substantially amorphous, and the second metal-containing material has a mean grain size within a range of from greater than or equal to about 5 nm to less than or equal to about 200 nm. Charge-storage regions are adjacent the wordline levels. Charge-blocking regions are between the charge-storage regions and the conductive regions.
    Type: Grant
    Filed: April 15, 2019
    Date of Patent: October 26, 2021
    Assignee: Micron Technology, Inc.
    Inventors: Jordan D. Greenlee, Rita J. Klein, Everett A. McTeer, John Mark Meldrim
  • Patent number: 11127899
    Abstract: Some embodiments include an integrated assembly having an insulative mass over a conductive base structure. A conductive interconnect extends through the insulative mass to an upper surface of the conductive base structure. The conductive interconnect includes a conductive liner extending around an outer lateral periphery of the interconnect. The conductive liner includes nitrogen in combination with a first metal. A container-shaped conductive structure is laterally surrounded by the conductive liner. The container-shaped conductive structure includes a second metal. A conductive plug is within the container-shaped conductive structure. Some embodiments include methods of forming conductive interconnects within integrated assemblies.
    Type: Grant
    Filed: April 11, 2019
    Date of Patent: September 21, 2021
    Assignee: Micron Technology, Inc.
    Inventors: Jordan D. Greenlee, Tao D. Nguyen, John Mark Meldrim, Aaron K. Belsher
  • Publication number: 20210257526
    Abstract: A composition and method for formation of ohmic contacts on a semiconductor structure are provided. The composition includes a TiAlxNy material at least partially contiguous with the semiconductor structure. The TiAlxNy material can be TiAl3. The composition can include an aluminum material, the aluminum material being contiguous to at least part of the TiAlxNy material, such that the TiAlxNy material is between the aluminum material and the semiconductor structure. The method includes annealing the composition to form an ohmic contact on the semiconductor structure.
    Type: Application
    Filed: April 6, 2021
    Publication date: August 19, 2021
    Inventors: Yongjun Jeff Hu, John Mark Meldrim, Shanming Mou, Everett Allen McTeer
  • Publication number: 20210202710
    Abstract: Some embodiments include a memory array having a vertical stack of alternating insulative levels and control gate levels. Channel material extends vertically along the stack. The control gate levels comprising conductive regions. The conductive regions include at least three different materials. Charge-storage regions are adjacent the control gate levels. Charge-blocking regions are between the charge-storage regions and the conductive regions.
    Type: Application
    Filed: February 19, 2021
    Publication date: July 1, 2021
    Applicant: Micron Technology, Inc.
    Inventors: David Ross Economy, Rita J. Klein, Jordan D. Greenlee, John Mark Meldrim, Brenda D. Kraus, Everett A. McTeer
  • Publication number: 20210183651
    Abstract: Described are methods for forming a multilayer conductive structure for semiconductor devices. A seed layer is formed comprising a metal and an additional constituent that in combination with the metal inhibits nucleation of a fill layer of the metal formed over the seed layer. Tungsten may be doped or alloyed with silicon to form the seed layer, with a tungsten fill being formed over the seed layer.
    Type: Application
    Filed: November 23, 2020
    Publication date: June 17, 2021
    Inventors: David Ross Economy, Brian Beatty, John Mark Meldrim, Yongjun Jeff Hu, Jordan D. Greenlee
  • Patent number: 11031417
    Abstract: A method used in forming an array of elevationally-extending transistors comprises forming vertically-alternating tiers of insulating material and void space. Such method includes forming (a) individual longitudinally-aligned channel openings extending elevationally through the insulating-material tiers, and (b) horizontally-elongated trenches extending elevationally through the insulating-material tiers. The void-space tiers are filled with conductive material by flowing the conductive material or one or more precursors thereof through at least one of (a) and (b) to into the void-space tiers. After the filling, transistor channel material is formed in the individual channel openings along the insulating-material tiers and along the conductive material in the filled void-space tiers.
    Type: Grant
    Filed: June 16, 2020
    Date of Patent: June 8, 2021
    Assignee: Micron Technology, Inc.
    Inventors: Jordan D. Greenlee, John Mark Meldrim, E. Allen McTeer
  • Patent number: 10998481
    Abstract: A composition and method for formation of ohmic contacts on a semiconductor structure are provided. The composition includes a TiAlxNy material at least partially contiguous with the semiconductor structure. The TiAlxNy material can be TiAl3. The composition can include an aluminum material, the aluminum material being contiguous to at least part of the TiAlxNy material, such that the TiAlxNy material is between the aluminum material and the semiconductor structure. The method includes annealing the composition to form an ohmic contact on the semiconductor structure.
    Type: Grant
    Filed: October 3, 2019
    Date of Patent: May 4, 2021
    Assignee: Micron Technology, Inc.
    Inventors: Yongjun Jeff Hu, John Mark Meldrim, Shanming Mou, Everett Allen McTeer
  • Publication number: 20210091009
    Abstract: Some embodiments include a memory device having a conductive structure which includes silicon-containing material. A stack is over the conductive structure and includes alternating insulative levels and conductive levels. Channel material pillars extend through the stack and are electrically coupled with the conductive structure. Memory cells are along the channel material pillars. A conductive barrier material is under the silicon-containing material. The conductive barrier material includes one or more metals in combination with one or more nonmetals. An electrical contact is under the conductive barrier material. The electrical contact includes a region reactive with silicon. Silicon is precluded from reaching said region at least in part due to the conductive barrier material. Control circuitry is under the electrical contact and is electrically coupled with the conductive structure through at least the electrical contact and the conductive barrier material.
    Type: Application
    Filed: September 23, 2019
    Publication date: March 25, 2021
    Applicant: Micron Technology, Inc.
    Inventors: Devesh Kumar Datta, David Daycock, Keen Wah Chow, Tom George, Justin B. Dorhout, Bingli Ma, Rita J. Klein, John Mark Meldrim
  • Patent number: 10957775
    Abstract: Some embodiments include a memory array having a vertical stack of alternating insulative levels and control gate levels. Channel material extends vertically along the stack. The control gate levels comprising conductive regions. The conductive regions include at least three different materials. Charge-storage regions are adjacent the control gate levels. Charge-blocking regions are between the charge-storage regions and the conductive regions.
    Type: Grant
    Filed: July 1, 2019
    Date of Patent: March 23, 2021
    Assignee: Micron Technology, Inc.
    Inventors: David Ross Economy, Rita J. Klein, Jordan D. Greenlee, John Mark Meldrim, Brenda D. Kraus, Everett A. McTeer