Abstract: A water savings system and method for reducing the amount of water needed for adiabatic cooling including the use of a softener and a reverse osmosis device, in which tap water, softened if necessary, is delivered to a reverse osmosis device and softened water alone, reverse osmosis reject water, or softened water combined with reverse osmosis reject water is delivered to spray nozzles for cooling, and reverse osmosis pure water is stored and used periodically to flush the coils to inhibit and/or prevent corrosion from dissolved salts and other solids in the spray water.

Abstract: A water savings system and method for reducing the amount of water needed for adiabatic cooling including the use of a softener and a reverse osmosis device, in which tap water, softened if necessary, is delivered to a reverse osmosis device and softened water alone, reverse osmosis reject water, or softened water combined with reverse osmosis reject water is delivered to spray nozzles for cooling, and reverse osmosis pure water is stored and used periodically to flush the coils to inhibit and/or prevent corrosion from dissolved salts and other solids in the spray water.

Abstract: A water savings system and method for reducing the amount of water needed for adiabatic cooling including the use of a softener and a reverse osmosis device, in which tap water, softened if necessary, is delivered to a reverse osmosis device and softened water alone, reverse osmosis reject water, or softened water combined with reverse osmosis reject water is delivered to spray nozzles for cooling, and reverse osmosis pure water is stored and used periodically to flush the coils to inhibit and/or prevent corrosion from dissolved salts and other solids in the spray water.

Abstract: A water savings system and method for reducing the amount of water needed for adiabatic cooling including the use of a softener and a reverse osmosis device, in which tap water, softened if necessary, is delivered to a reverse osmosis device and softened water alone, reverse osmosis reject water, or softened water combined with reverse osmosis reject water is delivered to spray nozzles for cooling, and reverse osmosis pure water is stored and used periodically to flush the coils to inhibit and/or prevent corrosion from dissolved salts and other solids in the spray water.

Abstract: Methods and apparatus for in-situ calibration of a flow controller are provided herein. In some embodiments, a method of flowing a gas includes providing a flow controller configured to provide a first gas at a first value of a flow rate based on a calculated first relationship determined by using a standard gas; determining an actual first relationship between the flow rate and the setpoint for the first gas from a plurality of values of the flow rate of the first gas determined at a corresponding plurality of values of the setpoint of the flow controller, wherein each of the plurality of values of the flow rate is determined from flowing the first gas through the flow controller at corresponding ones of the plurality of values for the setpoint; and flowing the first gas at the first value of the flow rate based on the actual first relationship.

Abstract: A monitored release solid feed system having a solid chemical feed tank, a storage tank located below the solid chemical feed tank, and an automated valve. The solid chemical feed tank is loaded with a blend of inhibitors and an indicator-chemical in a solid form. A detector measures the amount of indicator in the recirculating water and periodically compares it to a setpoint. If the value is below the setpoint, the automated valve opens allowing water to pass through the storage tank and the solid chemical feed tank thus carrying inhibitors and a proportional amount of indicator-chemical into the recirculating system.

Abstract: Methods and apparatus for in-situ calibration of a flow controller are provided herein. In some embodiments, a method of flowing a gas includes providing a flow controller configured to provide a first gas at a first value of a flow rate based on a calculated first relationship determined by using a standard gas; determining an actual first relationship between the flow rate and the setpoint for the first gas from a plurality of values of the flow rate of the first gas determined at a corresponding plurality of values of the setpoint of the flow controller, wherein each of the plurality of values of the flow rate is determined from flowing the first gas through the flow controller at corresponding ones of the plurality of values for the setpoint; and flowing the first gas at the first value of the flow rate based on the actual first relationship.

Abstract: Cooling towers and cooling tower fill configured for the cooling of process water with air by indirect heat exchange, in which the fill is configured with a first set of channels and a second set of channels, said first and second set of channels interleaved with one-another so that heat exchange occurs across material separating said channels from one-another.

Abstract: A water savings system and method for reducing the amount of water needed for adiabatic cooling including the use of a softener and a reverse osmosis device, in which tap water, softened if necessary, is delivered to a reverse osmosis device and softened water alone, reverse osmosis reject water, or softened water combined with reverse osmosis reject water is delivered to spray nozzles for cooling, and reverse osmosis pure water is stored and used periodically to flush the coils to inhibit and/or prevent corrosion from dissolved salts and other solids in the spray water.

Abstract: Methods and apparatus for in-situ calibration of a flow controller are provided herein. In some embodiments, a method of flowing a gas includes providing a flow controller configured to provide a first gas at a first value of a flow rate based on a calculated first relationship determined by using a standard gas; determining an actual first relationship between the flow rate and the setpoint for the first gas from a plurality of values of the flow rate of the first gas determined at a corresponding plurality of values of the setpoint of the flow controller, wherein each of the plurality of values of the flow rate is determined from flowing the first gas through the flow controller at corresponding ones of the plurality of values for the setpoint; and flowing the first gas at the first value of the flow rate based on the actual first relationship.

Abstract: Cooling towers and cooling tower fill configured for the cooling of process water with air by indirect heat exchange, in which the fill is configured with a first set of channels and a second set of channels, said first and second set of channels interleaved with one-another so that heat exchange occurs across material separating said channels from one-another.

Abstract: Methods and apparatus for in-situ calibration of a flow controller are provided herein. In some embodiments, a method of flowing a gas includes providing a flow controller configured to provide a first gas at a first value of a flow rate based on a calculated first relationship determined by using a standard gas; determining an actual first relationship between the flow rate and the setpoint for the first gas from a plurality of values of the flow rate of the first gas determined at a corresponding plurality of values of the setpoint of the flow controller, wherein each of the plurality of values of the flow rate is determined from flowing the first gas through the flow controller at corresponding ones of the plurality of values for the setpoint; and flowing the first gas at the first value of the flow rate based on the actual first relationship.

Abstract: Cooling towers and cooling tower fill configured for the cooling of process water with air by indirect heat exchange, in which the fill is configured with a first set of channels and a second set of channels, said first and second set of channels interleaved with one-another so that heat exchange occurs across material separating said channels from one-another.

Abstract: Apparatus and system for mixing gas comprising a first valve coupled to a first conduit controlling flow of a first gas, a second valve coupled to a second conduit controlling flow of a second gas, a controller controlling the valves, a base block with a first gas input coupled to the first conduit, a second gas input coupled to the second conduit and an output opening, a mixing chamber formed within the base block, wherein the mixing chamber is coupled to the first gas input and the second gas input to receive input gases, an inner block disposed within the mixing chamber, the inner block including a body with an inner volume and one or more perimeter holes formed through the body coupling the mixing chamber to the inner volume of the inner block; and a gas outlet configured to flow gas through the output opening of the base block.

Abstract: Ice skateboards, ice skateboard conversion kits, and methods for converting a skateboard to an ice skateboard are presented. An ice skateboard or an ice skateboard conversion kit may include four blades. Each blade may include an elongate sharp lower edge and an opening for pivotally mounting the blade on one of four skateboard axle ends. Eight spacer bushings each may include a bore for pivotally mounting the spacer bushing on one of the axle ends. Lengths of two of the spacer bushings may be configured to dispose at least one of the blades along a middle third of one of the axle ends when the blade is pivotally mounted to the axle end between the two spacer bushings.

Abstract: Embodiments of the present invention generally relate to methods of controlling gas flow in etching chambers. The methods generally include splitting a single process gas supply source into multiple inputs of separate process chambers, such that each chamber processes substrates under uniform processing conditions. The method generally includes using a mass flow controller as a reference for calibrating a flow ratio controller. A span correction factor may be determined to account for the difference between the actual flow and the measured flow through the flow ratio controller. The span correction factors may be used to determine corrected set points for each channel of the flow controller using equations provided herein. Furthermore, the set points of the flow ratio controller may be made gas-independent using additional equations provided herein.

Abstract: Ice skateboards, ice skateboard conversion kits, and methods for converting a skateboard to an ice skateboard are presented. An ice skateboard or an ice skateboard conversion kit may include four blades. Each blade may include an elongate sharp lower edge and an opening for pivotally mounting the blade on one of four skateboard axle ends. Eight spacer bushings each may include a bore for pivotally mounting the spacer bushing on one of the axle ends. Lengths of two of the spacer bushings may be configured to dispose at least one of the blades along a middle third of one of the axle ends when the blade is pivotally mounted to the axle end between the two spacer bushings.

Abstract: A monitored release solid feed system having a solid chemical feed tank, a storage tank located below the solid chemical feed tank, and an automated valve. The solid chemical feed tank is loaded with a blend of inhibitors and an indicator-chemical in a solid form. A detector measures the amount of indicator in the recirculating water and periodically compares it to a setpoint. If the value is below the setpoint, the automated valve opens allowing water to pass through the storage tank and the solid chemical feed tank thus carrying inhibitors and a proportional amount of indicator-chemical into the recirculating system.

Abstract: The present invention provides methods and apparatus for controlling gas flow to a semiconductor-processing chamber. The invention includes deactivating ratio setpoint feedback control in a flow ratio controller; initiating gas flow through the flow ratio controller; moving valves of the flow ratio controller to a preset position based on a stored position when an upstream pressure reaches a stored upstream pressure value, wherein the stored position and the stored upstream pressure value were stored during a prior process run; determining that steady state flow ratio controller output flows have been reached; and activating ratio setpoint feedback control in the flow ratio controller. Numerous additional features are disclosed.

Abstract: Methods and apparatus for delivery of gas are provided herein. In some embodiments, a gas delivery system may include a premix tank having an inlet and an outlet; a plurality of gas supplies coupled to the inlet of the premix tank; a plurality of valves, each valve respectively disposed in line with a corresponding one of the plurality of gas supplies; and a conduit coupling the outlet of the premix tank to one or more gas delivery zones.