Patents by Inventor Jose Manuel Dieguez-Campo

Jose Manuel Dieguez-Campo has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20190148642
    Abstract: A method of operating a deposition apparatus is provided. The method comprises: Deposition of an evaporated source material on a substrate by guiding the evaporated source material from one or more outlets of an evaporation toward the substrate, wherein part of the evaporated source material is blocked by and attaches to a shielding device arranged between the one or more and the substrate, followed by a cleaning of the shielding device by at least locally heating the shielding device for releasing at least part of the attached source material from the shielding device. According to a further aspect, a deposition apparatus is provided that can be operated according to the described methods.
    Type: Application
    Filed: May 10, 2016
    Publication date: May 16, 2019
    Inventors: Jose Manuel DIEGUEZ-CAMPO, Stefan BANGERT, Andreas LOPP, Harald WURSTER, Dieter HAAS
  • Publication number: 20190112706
    Abstract: An apparatus for coating a thin film on a flexible substrate is described. The apparatus includes a coating drum having an outer surface for guiding the flexible substrate through a first vacuum processing region and at least one second vacuum processing region, a gas separation unit for separating the first vacuum processing region and at least one second vacuum processing region and adapted to form a slit through which the flexible substrate can pass between the outer surface of the coating drum and the gas separation unit, wherein the gas separation unit is adapted to control fluid communication between the first processing region and the second processing region by adjusting the position of the gas separation unit.
    Type: Application
    Filed: December 11, 2018
    Publication date: April 18, 2019
    Inventors: Hans-Georg LOTZ, Neil MORRISON, Jose Manuel DIEGUEZ-CAMPO, Heike LANDGRAF, Tobias STOLLEY, Stefan HEIN, Florian RIES, Wolfgang BUSCHBECK
  • Publication number: 20190071772
    Abstract: A depositing arrangement for evaporation of a material is disclosed herein. The depositing arrangement has an alkali metal or alkaline earth metal for deposition of the material on a substrate. The deposition arrangement has a first chamber configured for liquefying the material; a valve being in fluid communication with the first chamber, and being downstream of the first chamber, wherein the valve is configured for control of the flow rate of the liquefied material through the valve. The deposition arrangement has an evaporation zone being in fluid communication with the valve, and being downstream of the valve, wherein the evaporation zone is configured for vaporizing the liquefied material; a heating unit to heat the material to higher temperatures before providing the liquid material in the evaporation zone; and one or more outlets for directing the vaporized material towards the substrate.
    Type: Application
    Filed: November 5, 2018
    Publication date: March 7, 2019
    Inventors: Stefan KELLER, Uwe SCHÜSSLER, Jose Manuel DIEGUEZ-CAMPO, Stefan BANGERT, Byung-Sung KWAK
  • Publication number: 20190032194
    Abstract: A processing apparatus for processing devices, particularly devices including organic materials therein, is described. The processing apparatus includes a processing vacuum chamber; at least one evaporation source for organic material, wherein the at least one evaporation source includes at least one evaporation crucible, wherein the at least one evaporation crucible is configured to evaporate the organic material, and at least one distribution pipe with one or more outlets, wherein the at least one distribution pipe is in fluid communication with the at least one evaporation crucible; and a maintenance vacuum chamber connected with the processing vacuum chamber, wherein the at least one evaporation source can be transferred from the processing vacuum chamber to the maintenance vacuum chamber and from the maintenance vacuum chamber to the processing vacuum chamber.
    Type: Application
    Filed: August 19, 2014
    Publication date: January 31, 2019
    Applicant: Applied Materials, Inc.
    Inventors: Jose Manuel DIEGUEZ-CAMPO, Stefan BANGERT, Uwe SCHÜβLER, Dieter HAAS
  • Publication number: 20180351164
    Abstract: The present disclosure provides a masking device for use in a lithium deposition process in the manufacturing of thin film batteries. The masking device includes a mask portion made of a metal or metal alloy, and one or more openings in the mask portion, wherein the one or more openings are configured to allow particles of a deposition material to pass through the mask portion, and wherein a size of each opening of the one or more openings, is at least 0.5 cm2.
    Type: Application
    Filed: May 15, 2015
    Publication date: December 6, 2018
    Applicants: Applied Materials, Inc., Applied Materials, Inc.
    Inventors: Anke HELLMICH, Thomas Werner ZILBAUER, Jose Manuel DIEGUEZ-CAMPO, Stefan KELLER, Georg JOST
  • Publication number: 20180245206
    Abstract: An evaporation source for a metal or a metal alloy is described. The evaporation source includes an evaporation crucible, wherein the evaporation crucible is configured to evaporate the metal or metal alloy, a distribution pipe with one or more outlets provided along the length of the distribution pipe, wherein the distribution pipe is in fluid communication with the evaporation crucible, wherein the distribution pipe further comprises a first outer tube and a first inner tube, and wherein the distribution pipe and the evaporation crucible are provided as one single piece.
    Type: Application
    Filed: July 13, 2015
    Publication date: August 30, 2018
    Inventors: Stefan BANGERT, Jose Manuel DIEGUEZ-CAMPO, Stefan KELLER, Norbert SPATZ
  • Publication number: 20180187302
    Abstract: A measurement assembly for measuring a deposition rate of an evaporated material is described. The measurement assembly includes an oscillation crystal for measuring the deposition rate, a measurement outlet for providing evaporated material to the oscillation crystal, and a magnetic closing mechanism configured for opening and closing the measurement outlet by magnetic force.
    Type: Application
    Filed: September 21, 2015
    Publication date: July 5, 2018
    Inventors: Jose Manuel DIEGUEZ-CAMPO, Andreas LOPP, Uwe SCHÜSSLER, Stefan BANGERT
  • Publication number: 20180100236
    Abstract: An apparatus for depositing a thin film on a substrate is described. The apparatus includes a substrate support having an outer surface for guiding the substrate along a surface of the substrate support through a first vacuum processing region and at least one second vacuum processing region, a first deposition sources corresponding to the first processing region and at least one second deposition source corresponding to the at least one second vacuum processing region. The apparatus further includes one or more vacuum flanges providing at least a further gas outlet between the first deposition source and the at least one second deposition source.
    Type: Application
    Filed: December 11, 2017
    Publication date: April 12, 2018
    Inventors: Neil Morrison, Jose Manuel DIEGUEZ-CAMPO, Heike LANDGRAF, Tobias STOLLEY, Stefan HEIN, Florian RIES, Wolfgang BUSCHBECK
  • Patent number: 9899635
    Abstract: A system for depositing one or more layers, particularly layers including organic materials therein, is described. The system includes a load lock chamber for loading a substrate to be processed, a transfer chamber for transporting the substrate, a vacuum swing module provided between the load lock chamber and the transfer chamber, at least one deposition apparatus for depositing material in a vacuum chamber of the at least one deposition chamber, wherein the at least one deposition apparatus is connected to the transfer chamber; a further load lock chamber for unloading the substrate that has been processed, a further transfer chamber for transporting the substrate, a further vacuum swing module provided between the further load lock chamber and the further transfer chamber, and a carrier return track from the further vacuum swing module to the vacuum swing module, wherein the carrier return track is configured to transport the carrier under vacuum conditions and/or under a controlled inert atmosphere.
    Type: Grant
    Filed: February 4, 2014
    Date of Patent: February 20, 2018
    Assignee: Applied Materials, Inc.
    Inventors: Stefan Bangert, Uwe Schüβler, Jose Manuel Dieguez-Campo, Dieter Haas
  • Patent number: 9873945
    Abstract: An apparatus includes a substrate support having an outer surface for guiding the substrate through a first vacuum processing region and at least one second vacuum processing region. First and second deposition sources correspond to the first processing region and at least one second deposition source corresponds to the at least one second vacuum processing region, wherein at least the first deposition source includes an electrode having a surface that opposes the substrate support. A processing gas inlet and a processing gas outlet are arranged at opposing sides of the surface of the electrode. At least one separation gas inlet how one or more openings, wherein the one or more openings are at least provided at one of opposing sides of the electrode surface such that the processing gas inlet and/or the processing gas outlet are provided between the one or more openings and the surface of the electrode.
    Type: Grant
    Filed: April 26, 2013
    Date of Patent: January 23, 2018
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Neil Morrison, Jose Manuel Dieguez-Campo, Heike Landgraf, Tobias Stolley, Stefan Hein, Florian Ries, Wolfgang Buschbeck
  • Publication number: 20170346044
    Abstract: An evaporation source for organic material is described. The evaporation source includes an evaporation crucible, wherein the evaporation crucible is configured to evaporate the organic material; a distribution pipe with one or more outlets, wherein the distribution pipe is in fluid communication with the evaporation crucible and wherein the distribution pipe is rotatable around an axis during evaporation; and a support for the distribution pipe, wherein the support is connectable to a first drive or includes the first drive, wherein the first drive is configured for a translational movement of the support and the distribution pipe.
    Type: Application
    Filed: January 5, 2017
    Publication date: November 30, 2017
    Inventors: Stefan BANGERT, Uwe SCHÜßLER, Jose Manuel DIEGUEZ-CAMPO, Dieter HAAS
  • Publication number: 20170321318
    Abstract: A material source arrangement for depositing a material on a substrate in a vacuum deposition chamber is described. The material source arrangement includes a distribution pipe being configured to be in fluid communication with a material source providing the material to the distribution pipe; and at least one nozzle configured for guiding the material provided in the distribution pipe to the vacuum deposition chamber. The nozzle includes a thread for repeatedly connecting and disconnecting the nozzle to the distribution pipe. Further, a deposition apparatus for depositing material on a substrate including a material source arrangement, a nozzle for a material source arrangement, and a method for providing a distribution pipe and a nozzle for a material source arrangement are described.
    Type: Application
    Filed: November 7, 2014
    Publication date: November 9, 2017
    Inventors: Stefan BANGERT, Uwe SCHÜßLER, Jose Manuel DIEGUEZ-CAMPO
  • Publication number: 20170314120
    Abstract: A material deposition arrangement for depositing evaporated material on a substrate in a vacuum chamber is described. The material deposition arrangement includes a crucible for providing material to be evaporated; a linear distribution pipe in fluid communication with the crucible; and a plurality of nozzles in the distribution pipe for guiding the evaporated material into the vacuum chamber. Each nozzle may have a nozzle inlet for receiving the evaporated material, a nozzle outlet for releasing the evaporated material to the vacuum chamber, and a nozzle passage between the nozzle inlet and the nozzle outlet. The nozzle passage of at least one of the plurality of nozzles includes a first section having a first length and a first size, and a second having a second length and a second size. The ratio of the second size to the first size is between 2 and 10.
    Type: Application
    Filed: December 17, 2014
    Publication date: November 2, 2017
    Applicant: Applied Materials, Inc.
    Inventors: Thomas GEBELE, Uwe SCHÜßLER, Jose Manuel DIEGUEZ-CAMPO, Andreas LOPP
  • Publication number: 20170244070
    Abstract: A system for depositing one or more layers, particularly layers including organic materials therein, is described. The system includes a load lock chamber for loading a substrate to be processed, a transfer chamber for transporting the substrate, a vacuum swing module provided between the load lock chamber and the transfer chamber, at least one deposition apparatus for depositing material in a vacuum chamber of the at least one deposition chamber, wherein the at least one deposition apparatus is connected to the transfer chamber; a further load lock chamber for unloading the substrate that has been processed, a further transfer chamber for transporting the substrate, a further vacuum swing module provided between the further load lock chamber and the further transfer chamber, and a carrier return track from the further vacuum swing module to the vacuum swing module, wherein the carrier return track is configured to transport the carrier under vacuum conditions and/or under a controlled inert atmosphere.
    Type: Application
    Filed: February 4, 2014
    Publication date: August 24, 2017
    Applicant: Applied Materials, Inc.
    Inventors: Stefan BANGERT, Uwe Schüßler, Jose Manuel DIEGUEZ-CAMPO, Dieter HAAS
  • Patent number: 9627211
    Abstract: Methods for processing a substrate are described herein. A method for removing a layer from a substrate, can include positioning a substrate within a processing chamber, wherein the substrate can include an upper surface, and one or more metal features with a separation energy formed on the upper surface; forming a layer over the one or more metal features and the exposed portion of the upper surface; focusing a source of transmissive radiant energy at the layer; pulsing transmissive radiant energy at the upper surface of the substrate creating a separated portion and an attached portion of the layer; and removing the separated portion of the layer.
    Type: Grant
    Filed: September 13, 2013
    Date of Patent: April 18, 2017
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Fatih Mert Ozkeskin, Jose Manuel Dieguez-Campo
  • Publication number: 20170092899
    Abstract: An evaporation source for organic material is described. The evaporation source includes an evaporation crucible, wherein the evaporation crucible is configured to evaporate the organic material, a distribution pipe with one or more outlets provided along the length of the distribution pipe, wherein the distribution pipe is in fluid communication with the evaporation crucible, and wherein the distribution pipe has a cross-section perpendicular to the length of the distribution pipe, which is non-circular, and which includes: an outlet side at which the one or more outlets are provided, wherein the width of the outlet side of the cross-section is 30% or less of the maximum dimension of the cross-section.
    Type: Application
    Filed: March 21, 2014
    Publication date: March 30, 2017
    Inventors: Stefan BANGERT, Jose Manuel DIEGUEZ-CAMPO, Uwe SCHÜSSLER, Andreas LOPP
  • Publication number: 20170081755
    Abstract: An evaporation source array for depositing two or more organic materials on a substrate is described. The evaporation source array includes two or more evaporation crucibles, wherein the two or more evaporation crucibles are configured to evaporate the two or more organic materials, two or more distribution pipes with outlets provided along the length of the two or more distribution pipes, wherein a first distribution pipe of the two or more distribution pipes is in fluid communication with a first evaporation crucible of the two or more evaporation crucibles, two or more heat shields, which surround the first distribution pipe, a cooling shield arrangement provided at at least one side of the two or more distribution pipes, wherein the at least one side is the side at which the outlets are provided, and a cooling element provided at or in the cooling shield arrangement for active cooling of the cooling shield arrangement.
    Type: Application
    Filed: March 21, 2014
    Publication date: March 23, 2017
    Inventors: Jose Manuel DIEGUEZ-CAMPO, Stefan BANGERT, Andreas LOPP, Uwe SCHÜSSLER
  • Publication number: 20170058404
    Abstract: An apparatus for processing a flexible substrate is described.
    Type: Application
    Filed: November 14, 2016
    Publication date: March 2, 2017
    Inventors: Jose Manuel DIEGUEZ-CAMPO, Heike LANDGRAF, Tobias STOLLEY, Stefan HEIN, Florian RIES, Morrison NEIL
  • Publication number: 20170022601
    Abstract: A processing apparatus for processing devices, particularly devices including organic materials therein, is described. The processing apparatus includes a processing vacuum chamber; at least one evaporation source for organic material, wherein the at least one evaporation source includes at least one evaporation crucible, wherein the at least one evaporation crucible is configured to evaporate the organic material, and at least one distribution pipe with one or more outlets, wherein the at least one distribution pipe is in fluid communication with the at least one evaporation crucible; and a maintenance vacuum chamber connected with the processing vacuum chamber, wherein the at least one evaporation source can be transferred from the processing vacuum chamber to the maintenance vacuum chamber and from the maintenance vacuum chamber to the processing vacuum chamber.
    Type: Application
    Filed: August 19, 2014
    Publication date: January 26, 2017
    Inventors: Jose Manuel DIEGUEZ-CAMPO, Stefan BANGERT, Uwe SCHÜßLER, Dieter HAAS
  • Publication number: 20170022598
    Abstract: A depositing arrangement for evaporation of a material including an alkali metal or alkaline earth metal, and for deposition of the material on a substrate is described. The depositing arrangement includes a first chamber configured for liquefying the material, wherein the first chamber comprises a gas inlet configured for inlet of a gas in the first chamber, an evaporation zone configured for vaporizing the liquefied material, a line providing a fluid communication between the first chamber and the evaporation zone for the liquefied material, wherein the line includes a first portion defining a flow resistance of the line, a valve configured for controlling the flow rate of the gas in the first chamber for controlling a flow rate of the liquefied material through the line having said flow resistance, and one or more outlets for directing the vaporized material towards the substrate.
    Type: Application
    Filed: December 6, 2013
    Publication date: January 26, 2017
    Inventors: Uwe SCHÜßLER, Stefan BANGERT, Karl-Albert KEIM, Jose Manuel DIEGUEZ-CAMPO