Abstract: A semiconductor device a first device located on a frontside of a semiconductor substrate. The semiconductor device further includes an inductor located on a backside of the semiconductor substrate and integrated with a first backside metal (BSM) stack. The semiconductor device further includes a first electrical contact located between the frontside and the backside of the semiconductor substrate. A first end of the first electrical contact is connected to the first BSM stack and a second end of the first electrical contact is connected to a first source/drain region of the first device.

Abstract: A semiconductor structure may include a first nanosheet field-effect transistor formed on a first portion of a substrate, a second nanosheet field-effect transistor formed on a second portion of the substrate, and one or more metal contacts. The first field-effect transistor formed on the first portion of a substrate may include a first source drain epitaxy. A top surface of the first source drain epitaxy may be above a top surface of a top-most nanosheet channel layer. The second nanosheet field-effect transistor formed on the second portion of the substrate may include a second source drain epitaxy and a third source drain epitaxy. The second source drain epitaxy may be below the third source drain epitaxy. The third source drain epitaxy may be u-shaped and may be connected to at least one nanosheet channel layer.

Abstract: A semiconductor structure is presented including a backside contact of a nanosheet transistor positioned on a silicon (Si) layer of a wafer and a dielectric liner disposed between the backside contact and the Si layer such that the dielectric liner is located below gate spacers of the nanosheet transistor. The backside contact is closer to a backside of the wafer than a frontside of the wafer. The dielectric liner is vertically aligned with the gate spacers and the dielectric liner is vertically aligned with inner spacers of a nanosheet stack of the nanosheet transistor.

Abstract: A semiconductor structure having a backside contact structure with increased contact area includes a plurality of source/drain regions within a field effect transistor, each of the plurality of source/drain regions includes a top portion having an inverted V-shaped area. A backside power rail is electrically connected to at least one source/drain region through a backside metal contact. The backside metal contact wraps around a top portion of the at least one source/drain region. A tip of the top portion of the plurality of source/drain regions points towards the backside power rail with the top portion of the at least one source/drain region being in electric contact with the backside metal contact. A first epitaxial layer is in contact with a top portion of at least another source/drain region adjacent to the at least one source/drain region for electrically isolating the at least another source/drain region from the backside power rail.

Abstract: A semiconductor structure comprises a first nanosheet stack comprising one or more first nanosheet channel layers and a first dielectric isolation layer over the one or more first nanosheet channel layers, a second nanosheet stack comprising one or more second nanosheet channel layers and a second dielectric isolation layer over the one or more second nanosheet channel layers, and a gate dielectric layer disposed over a top surface of one of the first dielectric isolation layer and the second dielectric isolation layer.

Abstract: The present invention provides semiconductor structures. The semiconductor structures may include a peripheral complimentary metal-oxide semiconductor (CMOS) substrate, a first vertical NAND cell on a first side of the CMOS substrate, and a second vertical NAND cell on a second side of the CMOS substrate opposite the first side.

Abstract: A semiconductor includes a first GAA FET and second GAA FET. The second GAA FET includes a first gate dielectric and second gate dielectric within its gate structure. The first GAA FET includes just the first gate dielectric within its gate structure. The gate dielectric structure of the first GAA FET provides for a nominal or a lesser effective gate dielectric or gate dielectric resistance relative to an effective gate dielectric structure of the second GAA FET. The first GAA FET further includes a first gate conductor within its gate structure and the second GAA FET further includes the first gate conductor and a second gate conductor within its gate structure. The first gate conductor and the second gate conductor are separated by the second gate dielectric.

Abstract: An integrated circuit structure includes a memory cell and multiple transistors therein. The multiple transistors are formed using channels including a stack having alternating layers of conductive semiconductor material and layers of other material that are insulative. Two or more of the multiple transistors have a same number of layers of the conductive semiconductor material in corresponding channel regions but have different numbers of active layers and inactive layers of the conductive semiconductor material. An active layer is a layer forming a channel in the channel region that is electrically coupled to S/D regions in a corresponding transistor, while a floating layer is a layer in the channel region electrically isolated from the S/D regions in the corresponding transistor. Methods for forming the integrated circuit structure are disclosed.

Abstract: A lower set of semiconductor channel layers, an upper set of semiconductor channel layers, a lower dielectric layer adjacent to the lower set of semiconductor channel layers, the lower dielectric layer includes a first polarity stress on the lower set of semiconductor channel layers, and an upper dielectric layer adjacent to the upper set of semiconductor channel layers, the lower dielectric layer includes a second polarity stress on the upper set of semiconductor channel layers with opposite polarity stress of the first polarity stress. Forming a lower stack of nanosheet layers and an upper stack of nanosheet layers, forming a lower dielectric layer adjacent to the lower stack of nanosheet layers, the lower dielectric layer includes a first polarity stress, and forming an upper dielectric layer adjacent to the upper stack of nanosheet layers, the upper dielectric layer includes a second polarity stress with opposite polarity.

Abstract: A CMOS apparatus includes a semiconductor substrate that has a frontside and a backside opposite the frontside; a source/drain structure, which is disposed at the frontside of the substrate and has a backside that is adjacent to the substrate and a frontside that is opposite the backside of the source/drain structure; a backside interconnect layer, which is disposed at the backside of the substrate; a backside contact, which penetrates the substrate and electrically connects the source/drain structure to the backside interconnect layer; and a sigma-profiled dielectric structure that insulates first and second sides of the backside contact from the substrate.

Abstract: A microelectronic structure including a first transistor including a plurality a first channel layers. A second transistor including a plurality of second channel layers, where the first transistor is located adjacent to the second transistors. A dielectric bar located between the first transistor and the second transistor. A first source/drain of the first transistor is located on a first side of the dielectric bar and a second source/drain of the second transistor is located on a second side of the dielectric bar, where the first side is opposite the second side. A first backside contact connected to the first source/drain, where the first backside contact is in contact with first side of the dielectric bar. A second backside contact connected to the second source/drain, where the second backside contact is in contact with the second side of dielectric bar.

Abstract: A nanosheet diode includes a bookend structure and a central structure. The bookend includes a first semiconductor that is doped as one of the anode and the cathode of the diode, and includes a left block, a right block, and a first stack of spaced-apart nanosheets that horizontally connect the left and right blocks. The central structure includes a second semiconductor that is doped as the other of the anode and the cathode of the diode, and includes a front block, a rear block, and a second stack of nanosheets that are interleaved crosswise into spaces between the first stack of spaced-apart nanosheets and that horizontally connect the front and rear blocks. The bookend structure directly contacts top, bottom, and end surfaces of the second stack of nanosheets of the central structure.

Abstract: A stacked device is provided. The stacked device includes a reduced height active device layer, and a plurality of lower source/drain regions in the reduced height active device layer. The stacked device further includes a lower interlayer dielectric (ILD) layer on the plurality of lower source/drain regions, and a conductive trench spacer in the lower interlayer dielectric (ILD) layer, wherein the conductive trench spacer is adjacent to one of the plurality of lower source/drain regions. The stacked device further includes a top active device layer adjacent to the lower interlayer dielectric (ILD) layer, and an upper source/drain section in the top active device layer. The stacked device further includes a shared contact in electrical connection with the upper source/drain section, the conductive trench spacer, and the one of the plurality of lower source/drain regions.

Abstract: Embodiments herein describe FETs with channels that form wrap-around contacts (a female portion of a female/male connection) with metal contacts (a male portion of the female/male connection) in order to connect the channels to the drain and source regions. In one embodiment, a first conductive contact is formed underneath a dummy channel. In addition an encapsulation material wraps around the first conductive contact. The dummy channel and the encapsulation material can then be removed and replaced by the material of the channel which, as a result, include a female portion that wraps around the first conductive contact.

Abstract: A semiconductor device, such as an integrated circuit, microprocessor, wafer, or the like, includes a first gate all around field effect transistor (GAA FET) and second GAA FET within the same region type (e.g., p-type region or n-type region, etc.) with relatively heterogenous channels within the same region. The first GAA FET includes a plurality of first channels of a first channel material (e.g., SiGex cladded channels). A second GAA FET includes a plurality of second channels of a second channel material (e.g., SiGey cladded channels, Si channels, or the like). The GAA FETs may have different channel structures, such as relatively different channel lengths. The heterogenous channels may provide improved GAA FET device performance by allowing an ability to tune or adjust channel mobility of GAA FETs in similar region types in different locations or when utilized in different applications.

Abstract: A semiconductor structure includes a first source/drain contact disposed between a first gate structure and a second gate structure, a dielectric cap disposed on the first source/drain contact, and a first gate contact disposed over the dielectric cap. The first gate contact connects the first gate structure with the second gate structure.

Abstract: A semiconductor device including a substrate having a dense array region and an isolation region. The semiconductor device includes plurality of first fin structures of stacked nanosheets is present in the dense array region separated by a single pitch, wherein each fin structure in the first plurality of fin structures has a same first nanosheet height as measured from an upper surface of the substrate in the dense array region. The semiconductor device further includes at least one second fin structure of stacked nanosheets is present in the isolation region, wherein a number of second fin structure in the isolation region is less than a number of first fin structures in the dense array region, the at least one fin structure having a second nano sheet height that is measured from the upper surface of the substrate in the isolation region that is the same as the first nanosheet height.

Abstract: A method of forming a backside power connection is provided. The method includes forming a plurality of sacrificial contact plugs and a plurality of sacrificial fill regions on a substrate, and forming a source/drain over a first sacrificial contact plug. The method further includes forming a replacement metal gate structure over a first sacrificial fill region, and forming an electrical contact to each of the replacement metal gate structure and the source/drain. The method further includes inverting the plurality of sacrificial contact plugs, source/drain, replacement metal gate structure, and substrate. The method further includes removing the first sacrificial contact plug and the first sacrificial fill region, and forming a first conductive contact to the source/drain and a second conductive contact to the replacement metal gate structure.

Abstract: Illustrative embodiments provide techniques for fabricating semiconductor structures having bottom isolation and enhanced carrier mobility for both nFET and pFET devices. For example, in one illustrative embodiment, a semiconductor structure includes a semiconductor substrate, a first dielectric layer disposed on the semiconductor substrate, a bottom source/drain region disposed on the first dielectric layer and isolated from the semiconductor substrate by the first dielectric layer, a second dielectric layer disposed on the bottom source/drain region and a top source/drain region disposed on the second dielectric layer and isolated from the bottom source/drain region by the second dielectric layer. The bottom source/drain region comprises a compressive pFET epitaxy and the top source/drain region comprises a tensile nFET epitaxy.

Abstract: A semiconductor structure includes a first stacked device structure. The first stacked device structure includes a first field-effect transistor disposed on a substrate having a front side and a back side. The first field-effect transistor has a first source/drain region. The first stacked device structure further includes a second field-effect transistor vertically stacked above the first field-effect transistor. The second field-effect transistor has a second source/drain region. The first stacked device structure further includes a first front side source/drain contact disposed on the first source/drain region and a first back side source/drain contact disposed on the second source/drain region. The first stacked device structure further includes a first isolation pillar structure located within the first field-effect transistor, the second field-effect transistor, the first front side source/drain contact and the first back side source/drain contact.