Patents by Inventor Jun J. Yao

Jun J. Yao has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 5397904
    Abstract: A method for isolating transistors and a microstructure for providing isolation for transistors includes a beam located on a substrate. The beam is formed from the same material as the substrate, preferably single crystal silicon, and is released so as to be suspended in the cavity and spaced apart from the substrate. The beam is supported in the cavity by a cantilever structure or by spaced pedestals, or both. One or more transistors are fabricated in the beam, and are thus isolated from the substrate and may be isolated from each other if desired. Contact beams may also be provided to contact the transistor electrodes for interconnection of adjacent transistors or connection of the transistors to electrical circuitry on the substrate. The contact beams also provide mechanical support for the beams.Multiple beams in side-by-side arrays or stacked arrays may be provided.
    Type: Grant
    Filed: July 2, 1992
    Date of Patent: March 14, 1995
    Assignee: Cornell Research Foundation, Inc.
    Inventors: Susanne C. Arney, Noel C. MacDonald, Jun J. Yao
  • Patent number: 5287082
    Abstract: A submicron resistor having negligible parasitic capacitance includes an isolated released beam carried on a single crystal silicon wafer. The resistor is fabricated by defining a resistor region in the substrate, doping the region to produce the desired resistivity, and etching around the region to produce a resistive island. The island is then isolated from the substrate by oxidation, and is released by removing the oxide to produce an isolated, released resistor beam.
    Type: Grant
    Filed: July 2, 1992
    Date of Patent: February 15, 1994
    Assignee: Cornell Research Foundation, Inc.
    Inventors: Susanne C. Arney, Noel C. MacDonald, Jun J. Yao
  • Patent number: 5235187
    Abstract: Self-aligned, opposed, nanometer dimension tips are fabricated in pairs, one of each pair being located on a movable, single crystal beam, with the beam being movable in three dimensions with respect to a substrate carrying the other tip of a pair. Motion of one tip with respect to the other is controlled or sensed by transducers formed on the supporting beams. Spring means in each beam allow axial motion of the beam. The tips and beams are fabricated from single crystal silicon substrate, and the tips may be electrically isolated from the substrate by fabricating insulating segments in the beam structure.
    Type: Grant
    Filed: April 14, 1992
    Date of Patent: August 10, 1993
    Assignee: Cornell Research Foundation
    Inventors: Susanne C. Arney, Noel C. MacDonald, Jun J. Yao
  • Patent number: 5179499
    Abstract: Mechanically movable microstructure fabricated from a single crystal such as silicon and actuator structures for providing a high degree of controlled, precision motion of nanometer-scale.
    Type: Grant
    Filed: April 14, 1992
    Date of Patent: January 12, 1993
    Assignee: Cornell Research Foundation, Inc.
    Inventors: Noel C. MacDonald, Jun J. Yao