Patents by Inventor Junichi HANAOKA

Junichi HANAOKA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10847348
    Abstract: A plasma processing apparatus includes a processing vessel, a lower electrode, an annular member, an inner upper electrode, an outer upper electrode, a processing gas supply, a first high frequency power supply and a first DC power supply. The lower electrode is configured to place a processing target substrate. The annular member is disposed on an outer peripheral portion of the lower electrode. The inner upper electrode is disposed to face the lower electrode. The outer upper electrode is disposed at an outside of the inner upper electrode. The first high frequency power supply applies a first high frequency power. The first DC power supply applies a first variable DC voltage to the outer upper electrode. At least a part of a surface of the outer upper electrode exposed to the processing space is located higher than a surface of the inner upper electrode exposed to the processing space.
    Type: Grant
    Filed: December 2, 2019
    Date of Patent: November 24, 2020
    Assignee: TOKYO ELECTRON LIMITED
    Inventors: Toshiya Tsukahara, Shuhei Yamabe, Kota Yachi, Tetsuji Sato, Yohei Uchida, Ayuta Suzuki, Yosuke Tamura, Hidetoshi Hanaoka, Junichi Sasaki
  • Publication number: 20200176226
    Abstract: A plasma processing apparatus includes a processing vessel, a lower electrode, an annular member, an inner upper electrode, an outer upper electrode, a processing gas supply, a first high frequency power supply and a first DC power supply. The lower electrode is configured to place a processing target substrate. The annular member is disposed on an outer peripheral portion of the lower electrode. The inner upper electrode is disposed to face the lower electrode. The outer upper electrode is disposed at an outside of the inner upper electrode. The first high frequency power supply applies a first high frequency power. The first DC power supply applies a first variable DC voltage to the outer upper electrode. At least a part of a surface of the outer upper electrode exposed to the processing space is located higher than a surface of the inner upper electrode exposed to the processing space.
    Type: Application
    Filed: December 2, 2019
    Publication date: June 4, 2020
    Inventors: Toshiya Tsukahara, Shuhei Yamabe, Kota Yachi, Tetsuji Sato, Yohei Uchida, Ayuta Suzuki, Yosuke Tamura, Hidetoshi Hanaoka, Junichi Sasaki
  • Patent number: 10533244
    Abstract: To contribute to an improvement in a dezincification resistance of a copper alloy, focusing attention on a relation between a dezincification resistance of a copper alloy and the crystal grain size of an ? phase, and the specific object is to provide a method of producing a hot forged product using a lead-free brass capable of ensuring corrosion resistances such as a prescribed dezincification resistance and the like even at sites of different thickness and shape, a hot forged product, and a wetted product such as a valve and a water faucet, molded using the same. A method of producing a hot forged product using a brass, comprising heat-treating a raw material to be subjected to forging work using a brass having a composition containing at least 59.2 to 63.0% by mass of Cu, 1.00 to 2.00% by mass of Sn and 0.05 to 0.25% by mass of Pb and containing the residue composed of Zn and inevitable impurities at a heating rate of 5.2° C./s or more from 350° C. until reaching the forging temperature.
    Type: Grant
    Filed: April 30, 2015
    Date of Patent: January 14, 2020
    Assignee: KITZ CORPORATION
    Inventors: Junichi Hanaoka, Kazuhito Kurose
  • Publication number: 20170211169
    Abstract: To contribute to an improvement in a dezincification resistance of a copper alloy, focusing attention on a relation between a dezincification resistance of a copper alloy and the crystal grain size of an ? phase, and the specific object is to provide a method of producing a hot forged product using a lead-free brass capable of ensuring corrosion resistances such as a prescribed dezincification resistance and the like even at sites of different thickness and shape, a hot forged product, and a wetted product such as a valve and a water faucet, molded using the same. A method of producing a hot forged product using a brass, comprising heat-treating a raw material to be subjected to forging work using a brass having a composition containing at least 59.2 to 63.0% by mass of Cu, 1.00 to 2.00% by mass of Sn and 0.05 to 0.25% by mass of Pb and containing the residue composed of Zn and inevitable impurities at a heating rate of 5.2° C./s or more from 350° C. until reaching the forging temperature.
    Type: Application
    Filed: April 30, 2015
    Publication date: July 27, 2017
    Applicant: KITZ CORPORATION
    Inventors: Junichi HANAOKA, Kazuhito KUROSE