Abstract: A valve control apparatus comprises: a generator configured to generate a first set pressure signal; and a valve opening controller configured to perform the first valve opening control on the basis of the target pressure and, after the first valve opening control, perform the second valve opening control performing feedback control on the basis of a difference between the first set pressure signal and the chamber pressure. The generator generates the first set pressure signal on the basis of a first set pressure locus converging from the chamber pressure at the time of switching from the first valve opening control to the second valve opening control to the target pressure with a predetermined time constant.

Abstract: A vacuum pump includes; a rotor, a stator, a motor, a heating section heating the pump base portion, a base temperature detection section detecting a temperature of the pump base portion, a rotor temperature detection section detecting a temperature equivalent as a physical amount equivalent to a temperature of the rotor, and a heating control section to control heating of the pump base portion by the heating section such that a detection value of the rotor temperature detection section falls within a predetermined target value range. A monitoring device comprises: an estimation section configured to estimate, based on multiple temperatures detected over time by the base temperature detection section, maintenance timing at which the temperature of the pump base portion reaches equal to or lower than a predetermined temperature; and an output section configured to output maintenance information based on the estimated maintenance timing.

Abstract: A target opening degree estimator estimates a target opening degree estimation value as an opening degree of a valve element of a pressure adjustment vacuum valve when a pressure of a vacuum chamber connected to the pressure adjustment vacuum valve reaches a pressure adjustment target pressure based on a correlation between the opening degree of the valve element and the pressure of the vacuum chamber, a current opening degree, and a current pressure.

Abstract: A vacuum valve for driving a valve body arranged facing a valve opening up and down relative to the valve opening to perform valve opening/closing operation, comprises: a first up-down driver configured to drive the valve body up and down with a first minimum drivable amount; and a second up-down driver configured to drive the valve body up and down with a second minimum drivable amount smaller than the first minimum drivable amount.

Abstract: A magnetic bearing device comprises a radial magnetic bearing configured to magnetically levitate and support a rotor shaft in a radial direction; an axial magnetic bearing configured to magnetically levitate and support, in an axial direction, a rotor disc rotatable together with the rotor shaft; and an axial displacement sensor disposed on a surface of an electromagnet core of the axial magnetic bearing facing the rotor disc and configured to detect axial displacement of the rotor disc.

Abstract: A vacuum valve connected to a vacuum pump, comprises: a valve plate to be openably/closably driven; a drive section configured to openably/closably drive the valve plate; a signal input section to which a pump information signal indicating an operation state of the vacuum pump is input; and a valve control section configured to control operation of the valve plate based on the input pump information signal.

Abstract: A magnetic bearing vacuum pump comprises: a first displacement signal generation section configured to amplify, by a resolution multiplying factor K of K>1, a displacement modulated wave signal modulated according to a displacement of the rotor from a predetermined position to generate a high-resolution displacement signal in a first displacement region including the predetermined position; a second displacement signal generation section configured to generate a low-resolution displacement signal in a larger second displacement region including the first displacement region; a selection section configured to select either one of the high-resolution displacement signal or the low-resolution displacement signal based on an unsteady-state response signal obtained by excluding a steady-state whirling displacement component from the high-resolution displacement signal or the low-resolution displacement signal; and a bearing control section configured to control the magnetic bearing based on the displacement sig

Abstract: A magnetic bearing control device is configured to detect, by a sensor, excitation current supplied from an excitation amplifier to a magnetic bearing configured to magnetically levitate a rotor, thereby generating a voltage equivalent signal for PWM control of the excitation amplifier based on a current setting signal based on a deviation of a rotor levitation position with respect to a target levitation position and an excitation current detection signal of the sensor. The voltage equivalent signal is generated based on the current setting signal and a current deviation signal as a difference between the current setting signal and the excitation current detection signal.

Abstract: An estimation device comprises: an oscillation section configured to superimpose an oscillation signal for oscillating a valve body of a vacuum valve provided between a vacuum pump configured to pump gas from a chamber and the chamber on an opening degree signal for driving the valve body; and an estimation section configured to estimate, based on a pressure response of a chamber internal pressure upon oscillation, a pumping characteristic regarding the gas pumped through the vacuum valve.

Abstract: A valve control device configured such that a pressure measurement value of a chamber, a target pressure value of the chamber, and an opening degree measurement value of the vacuum valve are input to the valve control device and configured to control an opening degree of the vacuum valve based on a deviation between the pressure measurement value and the target pressure value, comprises: a storage storing a correlation between the opening degree of the vacuum valve and a conductance of a system including the vacuum valve; and a correction gain setting section obtaining, based on the correlation, a change rate of the conductance in association with an opening degree change at the input opening degree measurement value, thereby setting an inverse of the change rate as a correction gain. The opening degree of the vacuum valve is controlled based on the deviation and the correction gain.

Abstract: A valve device comprises an opening degree detection section and a control section. The control section performs, according to the pressure value and the opening degree detected by the opening degree detection unit, either one of open control for performing rough adjustment of the opening degree of the valve body or close control for performing fine adjustment of the opening degree of the valve body, in the open control, a predictive pressure estimation value at a preset future prediction target time from a current point is estimated, and the rough adjustment is performed based on the predictive pressure estimation value and the target pressure value, and in the close control, the fine adjustment is performed based on the target pressure value and the pressure value.

Abstract: When a duration of current noise caused by a PWM control of each excitation amplifier is Td, a cycle of a PWM carrier signal is Tpwm, an on-duty upper limit of the PWM carrier signal under quiet environment without disturbance is Tonu, and an on-duty lower limit of the PWM carrier signal under the quiet environment without the disturbance is Tonl, the AD sampling period includes a first AD sampling period between a point after a lapse of the time Td after a start of the cycle Tpwm and a point after a lapse of a time (Tpwm?Tonu) from the start of the cycle Tpwm, and a second AD sampling period between a point after a lapse of a time (Tpwm?Tonl+Td) from the start of the cycle Tpwm and an end point of the cycle Tpwm.

Abstract: A rotor life estimation device of a vacuum pump including a rotor rotatably driven by a motor and a rotor temperature detection section configured to detect a temperature of the rotor, comprises: an arithmetic section configured to calculate a strain equivalent corresponding to creep strain of the rotor based on a correlation between a creep strain speed equivalent and the temperature of the rotor and the temperature detected by the rotor temperature detection section; an estimation section configured to estimate a rotor life based on the calculated strain equivalent; and a providing section configured to provide information on the estimated rotor life.

Abstract: A gas estimation device for estimating a flow rate and a gas type of gas to be vacuum-pumped by a vacuum pumping device including a vacuum pump and an automatic pressure control valve connected to a suction port of the vacuum pump, comprises: a correlation data storage section configured to store first correlation data containing correlation data regarding an opening degree control gain value of the automatic pressure control valve and correlation data regarding an effective exhaust velocity of the vacuum pumping device and second correlation data indicating a correlation among a flow rate, a gas type, and a motor current value in the vacuum pump; and a first estimation section configured to estimate the flow rate and the gas type of the gas to be vacuum-pumped by the vacuum pumping device based on at least the first correlation data and the second correlation data.

Abstract: A target opening degree estimator estimates a target opening degree estimation value as an opening degree of a valve element of a pressure adjustment vacuum valve when a pressure of a vacuum chamber connected to the pressure adjustment vacuum valve reaches a pressure adjustment target pressure based on a correlation between the opening degree of the valve element and the pressure of the vacuum chamber, a current opening degree, and a current pressure.

Abstract: A magnetic bearing device comprises: a magnetic bearing configured to magnetically levitate and support a rotor rotatably driven by a sensor-less motor; a detector configured to detect displacement from a levitation target position of the rotor to output a displacement signal; a signal processor configured to compensate, based on motor rotation information from a motor controller of the sensor-less motor, for the displacement signal to reduce a vibration component of electromagnetic force of the magnetic bearing; and a current controller configured to generate control current of the magnetic bearing based on the displacement signal having been processed in the signal processor.

Abstract: A vacuum valve attached to a vacuum pump configured to generate regenerative power to perform a stop operation upon blackout, comprises: a first power input section to which power is input from a commercial power source; a second power input section to which the regenerative power generated at the vacuum pump is input; and a valve source circuit to which the power input to each of the first and second power input sections is supplied. When the power from the commercial power source is supplied to the first power input section, the vacuum valve is operated by the supplied power, and when the power from the commercial power source is stopped, the vacuum valve is operated by the regenerative power.

Abstract: A magnetic levitation control device comprises: a control signal generation section configured to generate a first excitation current control signal based on current deviation information on the excitation current detection signal with respect to the current setting signal and a second excitation current control signal based on the current setting signal; and a selection section including a first switching section configured to select either one of the first excitation current control signal or the second excitation current control signal or a second switching section configured to select either one of a third excitation current control signal obtained by summation of the first excitation current control signal and the second excitation current control signal or the second excitation current control signal. The excitation amplifier is PWM-controlled based on the excitation current control signal selected by the selection section.

Abstract: A turbo-molecular pump includes a stator provided at a pump base portion, a rotor rotatably driven on the stator, a heating section configured to heat the pump base portion, abase temperature detection section configured to detect a temperature of the pump base portion, and a rotor temperature detection section configured to detect a temperature equivalent as a physical amount equivalent to a temperature of the rotor. A temperature control device of the turbo-molecular pump comprises: a heating control section configured to control heating of the pump base portion by the heating section based on a detection value of the rotor temperature detection section; and an informing section configured to inform a warning when a detection temperature of the base temperature detection section is equal to or lower than a predetermined threshold.

Abstract: A valve device comprises an opening degree detection section and a control section. The control section performs, according to the pressure value and the opening degree detected by the opening degree detection unit, either one of open control for performing rough adjustment of the opening degree of the valve body or close control for performing fine adjustment of the opening degree of the valve body, in the open control, a predictive pressure estimation value at a preset future prediction target time from a current point is estimated, and the rough adjustment is performed based on the predictive pressure estimation value and the target pressure value, and in the close control, the fine adjustment is performed based on the target pressure value and the pressure value.