Patents by Inventor Junnosuke Maki

Junnosuke Maki has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240385538
    Abstract: An information collection system is configured to acquire information on a substrate processing apparatus having a holder configured to hold a substrate and a functional member located on a rear surface side of the substrate when the substrate is held by the holder. The information collection system includes a main body having a bottom surface allowed to be held by the holder; a radiator fixed to the main body, and configured to radiate a measurement wave to the functional member from obliquely above; a detector fixed to the main body, and configured to detect a response resulting from a radiation of the measurement wave from the radiator; and a calculator configured to acquire information on a distance between the main body and the functional member based on the response detected by the detector.
    Type: Application
    Filed: May 13, 2024
    Publication date: November 21, 2024
    Inventors: Junnosuke Maki, Masato Hayashi, Nobuyuki Sata, Ryo Konishi
  • Publication number: 20240175131
    Abstract: A substrate processing apparatus configured to process a substrate includes a functional component constituting a part of the substrate processing apparatus; a nozzle, provided on a surface of the functional component, allowing a gas to pass therethrough; a nozzle flow path which is connected to the nozzle of the functional component and through which the gas flows; a flow rate sensor configured to measure a flow rate of the gas flowing through the nozzle flow path; and a controller configured to make a determination upon a state of a distance between an interfering object and the functional component based on a measurement result obtained by the flow rate sensor.
    Type: Application
    Filed: January 31, 2024
    Publication date: May 30, 2024
    Inventors: Ryo Araki, Junnosuke Maki, Mitsuteru Yano, Masato Hayashi
  • Patent number: 11920240
    Abstract: A substrate processing apparatus configured to process a substrate includes a functional component constituting a part of the substrate processing apparatus; a nozzle, provided on a surface of the functional component, allowing a gas to pass therethrough; a nozzle flow path which is connected to the nozzle of the functional component and through which the gas flows; a flow rate sensor configured to measure a flow rate of the gas flowing through the nozzle flow path; and a controller configured to make a determination upon a state of a distance between an interfering object and the functional component based on a measurement result obtained by the flow rate sensor.
    Type: Grant
    Filed: October 12, 2021
    Date of Patent: March 5, 2024
    Assignee: TOKYO ELECTRON LIMITED
    Inventors: Ryo Araki, Junnosuke Maki, Mitsuteru Yano, Masato Hayashi
  • Publication number: 20230187247
    Abstract: A detection system configured to detect a state of a structure within a processing space of a substrate processing apparatus, includes: a detection substrate including a state detector that detects the state of the structure; a transfer device that loads and unloads each of a substrate to be processed and the detection substrate into and from the processing space; and a control device, wherein the detection substrate further includes at least one acceleration detector that detects an acceleration in each of two directions intersecting each other in a surface of the substrate, and wherein the control device estimates an orientation of the state detector on the detection substrate within the processing space based on a detection result obtained by the at least one acceleration detector when the detection substrate is moved in a loading/unloading direction during loading or unloading of the detection substrate into or from the processing space.
    Type: Application
    Filed: December 8, 2022
    Publication date: June 15, 2023
    Inventor: Junnosuke MAKI
  • Publication number: 20220319893
    Abstract: An information acquisition system is for acquiring information about a substrate processing apparatus including a substrate holder configured to hold and rotate a substrate, a nozzle configured to supply a processing liquid to a surface of the substrate which is rotating, and a cup surrounding the substrate held by the substrate holder. The information acquisition system includes: an information acquisition body held in place of the substrate by the substrate holder and including an imaging part configured to image the cup and acquire image data; and an acquisition part configured to acquire information about a height of the cup based on the image data.
    Type: Application
    Filed: March 30, 2022
    Publication date: October 6, 2022
    Inventors: Junnosuke MAKI, Koudai HIGASHI, Ryo KONISHI, Hideki KAJIWARA, Hokuto SHIGEMOTO
  • Publication number: 20220319886
    Abstract: An information acquisition system configured to acquire information upon a substrate processing apparatus configured to process a substrate held by a substrate holder includes a base body, instead of the substrate, held by the substrate holder; and multiple position sensors provided at the base body such that detection directions thereof are different from each other, and each configured to detect a position of a common detection target object located outside the base body.
    Type: Application
    Filed: March 30, 2022
    Publication date: October 6, 2022
    Inventors: Junnosuke Maki, Koudai Higashi, Ryo Konishi
  • Publication number: 20220310438
    Abstract: An apparatus transfers a substrate. The apparatus includes: one substrate holder adsorbing and holding the substrate via an adsorption port; a nozzle being provided on a surface of the one substrate holder and allowing gas to pass therethrough; an adsorption flow path being connected to the adsorption port and allowing gas to flow therethrough; and a nozzle flow path being connected to the nozzle and allowing the gas to flow therethrough. The adsorption flow path of at least one of the one substrate holder and another substrate holder and the nozzle flow path are connected to a common gas suction mechanism. A pressure sensor and flow rate sensor are provided for the nozzle flow path. The flow rate of the nozzle flow path is varied according to a distance between an interferer and the one substrate holder and the pressure of the nozzle flow path.
    Type: Application
    Filed: March 22, 2022
    Publication date: September 29, 2022
    Inventors: Ryo ARAKI, Junnosuke MAKI, Mitsuteru YANO, Masato HAYASHI
  • Publication number: 20220223443
    Abstract: A state determination device determines the state of a drive mechanism configured to operate while holding a substrate in a substrate processing apparatus. The state determination part includes: an acquisition part configured to acquire operation data for the drive mechanism; a model generation part configured to generate a monitoring model for the drive mechanism by executing machine learning using an auto-encoder based on normal operation data that is derived from the operation data acquired by the acquisition part when the drive mechanism is operating normally; and a first determination part configured to determine the state of the drive mechanism based on first output data obtained by inputting, to the monitoring model, evaluation data that is derived from the operation data acquired by the acquisition part when the drive mechanism is being evaluated.
    Type: Application
    Filed: March 18, 2020
    Publication date: July 14, 2022
    Inventors: Junnosuke MAKI, Masaomi TOYONAGA, Atsushi OHTA, Motoi OKADA, Takuro TSUTSUI, Kei SANO, Mistsuteru YANO
  • Publication number: 20220112601
    Abstract: A substrate processing apparatus configured to process a substrate includes a functional component constituting a part of the substrate processing apparatus; a nozzle, provided on a surface of the functional component, allowing a gas to pass therethrough; a nozzle flow path which is connected to the nozzle of the functional component and through which the gas flows; a flow rate sensor configured to measure a flow rate of the gas flowing through the nozzle flow path; and a controller configured to make a determination upon a state of a distance between an interfering object and the functional component based on a measurement result obtained by the flow rate sensor.
    Type: Application
    Filed: October 12, 2021
    Publication date: April 14, 2022
    Inventors: Ryo Araki, Junnosuke Maki, Mitsuteru Yano, Masato Hayashi
  • Patent number: 11201068
    Abstract: A heat treatment apparatus of heating a substrate mounted on a mounting plate heated by a heating part includes: plural types of physical quantity detecting parts for detecting plural types of physical quantities, respectively; a state estimating part for estimating an occurrence probability occurring for each of abnormality modes by a neural network, and including an input layer to which a group of time-series detection values obtained for each of physical quantity detection values detected respectively by the physical quantity detecting parts is inputted; and a selecting part for selecting one of correspondence processes based on the occurrence probability of each of the abnormality modes estimated by the state estimating part. One of the physical quantity detection values is a temperature detection value detected by a temperature physical quantity detecting part for detecting a temperature of the mounting plate among the physical quantity detecting parts.
    Type: Grant
    Filed: June 26, 2018
    Date of Patent: December 14, 2021
    Assignee: TOKYO ELECTRON LIMITED
    Inventors: Junnosuke Maki, Shinichiro Misaka
  • Publication number: 20190006208
    Abstract: A heat treatment apparatus of heating a substrate mounted on a mounting plate heated by a heating part includes: plural types of physical quantity detecting parts for detecting plural types of physical quantities, respectively; a state estimating part for estimating an occurrence probability occurring for each of abnormality modes by a neural network, and including an input layer to which a group of time-series detection values obtained for each of physical quantity detection values detected respectively by the physical quantity detecting parts is inputted; and a selecting part for selecting one of correspondence processes based on the occurrence probability of each of the abnormality modes estimated by the state estimating part. One of the physical quantity detection values is a temperature detection value detected by a temperature physical quantity detecting part for detecting a temperature of the mounting plate among the physical quantity detecting parts.
    Type: Application
    Filed: June 26, 2018
    Publication date: January 3, 2019
    Inventors: Junnosuke MAKI, Shinichiro MISAKA
  • Patent number: 9030656
    Abstract: Disclosed is an inspection device for inspecting deformation of a substrate holding member of a substrate transport apparatus. The substrate holding member is moved in the forward-and-backward direction relative to the transport base to pass across a light path of the detection light formed by an optical detection unit. The position, with respect to a direction transverse to the forward-and-backward direction, of the substrate holding member is detected based on a detection signal of the optical detection unit. Based on a correlation data expressing the relationship between a first parameter indicative of a change of a position of the substrate holding member with respect to the forward-and-backward direction and a second parameter indicative of the change of the position of the substrate holding member with respect to the direction transverse to the forward-and-backward direction, whether or not deformation occurs in the substrate holding member is judged.
    Type: Grant
    Filed: October 21, 2011
    Date of Patent: May 12, 2015
    Assignee: Tokyo Electron Limited
    Inventors: Hideki Kajiwara, Junnosuke Maki, Suguru Enokida
  • Patent number: 8707805
    Abstract: A transfer apparatus for mounting and transferring a transferred component on a driven means, the transfer apparatus includes: a driving means for rotating a driving side pulley by a rotational driving force of a motor to move a belt wound around the driving side pulley, thereby moving the driven means coupled to the belt in a predetermined direction; and a transfer monitoring means for monitoring a transfer state of the driven means, wherein the transfer monitoring means detects a torque value of the motor required to move the driven means, calculates a torque differential value of the torque value with respect to time based on the detected torque value, and detects the transfer state using the calculated torque differential value.
    Type: Grant
    Filed: December 17, 2012
    Date of Patent: April 29, 2014
    Assignee: Tokyo Electron Limited
    Inventors: Junnosuke Maki, Mitsuteru Yano, Seiji Nakano, Tsuyoshi Watanabe, Yasunori Toyoda, Suguru Enokida, Naruaki Iida, Hiroki Harada
  • Publication number: 20120099951
    Abstract: Disclosed is an inspection device for inspecting deformation of a substrate holding -member of a substrate transport apparatus. The substrate holding member is moved in the forward-and-backward direction relative to the transport base to pass across a light path of the detection light formed by an optical detection unit. The position, with respect to a direction transverse to the forward-and-backward direction, of the substrate holding member is detected based on a detection signal of the optical detection unit. Based on a correlation data expressing the relationship between a first parameter indicative of a change of a position of the substrate holding member with respect to the forward-and-backward direction and a second parameter indicative of the change of the position of the substrate holding member with respect to the direction transverse to the forward-and-backward direction, whether or not deformation occurs in the substrate holding member is judged.
    Type: Application
    Filed: October 21, 2011
    Publication date: April 26, 2012
    Applicant: Tokyo Electron Limited
    Inventors: Hideki Kajiwara, Junnosuke Maki, Suguru Enokida