Patents by Inventor Kanichi Kadotani

Kanichi Kadotani has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 6815814
    Abstract: An objective of the present invention is to provide a thermoelectric module which can achieve high heat release and heat absorption efficiencies and which can obviate any thermal stress-caused damages. A thermoelectric module (1) in an embodiment has a predetermined number of thermoelectric semiconductor elements P and N which are arranged in a flat plate configuration. Each of the thermoelectric semiconductor elements P and N has on one face thereof a one-side electrode (2) and has on the other face thereof an other-side electrode (3), thereby allowing all of the thermoelectric semiconductor elements P and N to be connected in series. The one-side electrodes (2, 2 . . . ) have heat release/heat absorption fins (heat transfer fins) (2F, 2F . . . ) and the other-side electrodes (3, 3 . . . ) have heat release/heat absorption fins (heat transfer fins) (3F, 3F . . . ).
    Type: Grant
    Filed: October 8, 2002
    Date of Patent: November 9, 2004
    Assignee: Komatsu Ltd.
    Inventors: Rencai Chu, Kanichi Kadotani, Toshinobu Tanimura
  • Patent number: 6693790
    Abstract: Insulative viscous fluid or gel material having low hardness is used for at least a first electricity insulating layer as an insulating layer of a static electricity chuck. Since a holding surface of the first electricity insulating layer is deformed in accordance with a back surface shape of a wafer, a substantially entire surface of the holding surface comes into intimate contact with the wafer uniformly. An exposing surface of the electricity insulating layer may be coated with a second electricity insulating layer having corrosion resistance. With this structure, adhesion between the back surface of the wafer and the static electricity chuck apparatus is enhanced, which reduces the contact thermal resistance, and it is possible to obtain a static electricity chuck apparatus which is capable of controlling temperature of a surface of the wafer with high precision and has high plasma resistance and durability.
    Type: Grant
    Filed: April 12, 2002
    Date of Patent: February 17, 2004
    Assignee: Komatsu, Ltd.
    Inventors: Teruyuki Matsuki, Motohide Sugihara, Kanichi Kadotani
  • Publication number: 20030102554
    Abstract: An objective of the present invention is to provide a thermoelectric module which can achieve high heat release and heat absorption efficiencies and which can obviate any thermal stress-caused damages. A thermoelectric module (1) in an embodiment has a predetermined number of thermoelectric semiconductor elements P and N which are arranged in a flat plate configuration. Each of the thermoelectric semiconductor elements P and N has on one face thereof a one-side electrode (2) and has on the other face thereof an other-side electrode (3), thereby allowing all of the thermoelectric semiconductor elements P and N to be connected in series. The one-side electrodes (2, 2 . . . ) have heat release/heat absorption fins (heat transfer fins) (2F, 2F . . . ) and the other-side electrodes (3, 3 . . . ) have heat release/heat absorption fins (heat transfer fins) (3F, 3F . . . ).
    Type: Application
    Filed: October 8, 2002
    Publication date: June 5, 2003
    Inventors: Rencai Chu, Kanichi Kadotani, Toshinobu Tanimura
  • Publication number: 20030094265
    Abstract: In a thermoelectric power generation module (7) serving as a heat exchanger, a large number of protrusions (5a) at least the surface of which is made of a material with low wettability are formed with a height and width of less than 0.01 mm and arranged with a pitch of less than 0.01 mm on the heat transfer surface (5s) of a heat transfer plate 5, thereby to increase in heat exchange efficiency.
    Type: Application
    Filed: November 15, 2002
    Publication date: May 22, 2003
    Inventors: Rencai Chu, Kanichi Kadotani, Toshinobu Tanimura
  • Publication number: 20020167781
    Abstract: Insulative viscous fluid or gel material having low hardness is used for at least a first electricity insulating layer as an insulating layer of a static electricity chuck. Since a holding surface of the first electricity insulating layer is deformed in accordance with a back surface shape of a wafer, a substantially entire surface of the holding surface comes into intimate contact with the wafer uniformly. An exposing surface of the electricity insulating layer may be coated with a second electricity insulating layer having corrosion resistance. With this structure, adhesion between the back surface of the wafer and the static electricity chuck apparatus is enhanced, which reduces the contact thermal resistance, and it is possible to obtain a static electricity chuck apparatus which is capable of controlling temperature of a surface of the wafer with high precision and has high plasma resistance and durability.
    Type: Application
    Filed: April 12, 2002
    Publication date: November 14, 2002
    Inventors: Teruyuki Matsuki, Motohide Sugihara, Kanichi Kadotani
  • Publication number: 20020048296
    Abstract: A laser module capable of improving the heat exchange properties between a thermoelectric module and a semiconductor laser than previously possible. The laser module has a thermoelectric module including a plurality of thermoelectric elements and first and second substrates for sandwiching the plurality of thermoelectric elements therebetween, at least the first substrate being made of silicon; and a semiconductor laser formed on the first substrate of the thermoelectric module.
    Type: Application
    Filed: October 17, 2001
    Publication date: April 25, 2002
    Inventors: Kazuya Kuriyama, Kanichi Kadotani
  • Patent number: 6347521
    Abstract: The invention provides a temperature control device with excellent temperature uniformity and thermal response, which can be manufactured easily, and a manufacturing method for the same. A thermoelectric device 21 is arranged between a substrate mounting plate 1 and a cooling plate 3. Copper foil electrodes 5, 5, . . . on the upper side of the thermoelectric device 21 are adhered to a lower surface of the substrate mounting plate 1 with an adhesive sheet 17 covering substantially the entire lower surface of the substrate mounting plate 1, and copper foil electrodes 7, 7, . . . on the lower side of the thermoelectric device 21 are adhered to an upper surface of the cooling plate 3 with an adhesive sheet 19 covering substantially the entire upper surface of the substrate mounting plate 1.
    Type: Grant
    Filed: October 11, 2000
    Date of Patent: February 19, 2002
    Assignee: Komatsu LTD
    Inventors: Kanichi Kadotani, Makio Tsubota, Hironori Akiba, Tadayuki Hanamoto
  • Publication number: 20010018828
    Abstract: A fluid temperature control device, which has a high cooling capacity, wide controllable temperature range and an excellent temperature control accuracy. A transparent cylinder (3) is inserted in a cylindrical-shaped vessel (1), and a columnar-shaped heating lamp (5) is inserted in the transparent cylinder (3). A fluid desired to be temperature controlled is made to flow in a passage (25) between the vessel (1) and the transparent cylinder (3). Joined to an outer peripheral surface of the vessel (1) is a thermoelectric conversion element (7), to an outer surface of which is joined a cooling pipe (9). A cooling liquid is made to flow in the cooling pipe (9). Fluid heating is effected by the heating lamp (5). Fluid cooling is effected by the cooling liquid and the thermoelectric conversion element (7) forcedly absorbs heat from the fluid and discharges heat to the cooling liquid to thereby cool the fluid rapidly and cool the fluid to a temperature lower than that of the cooling liquid.
    Type: Application
    Filed: March 30, 2001
    Publication date: September 6, 2001
    Inventor: Kanichi Kadotani
  • Patent number: 6236810
    Abstract: A fluid temperature control device, which has a high cooling capacity, wide controllable temperature range and an excellent temperature control accuracy. A transparent cylinder (3) is inserted in a cylindrical-shaped vessel (1), and a columnar-shaped heating lamp (5) is inserted in the transparent cylinder (3). A fluid desired to be temperature controlled is made to flow in a passage (25) between the vessel (1) and the transparent cylinder (3). Joined to an outer peripheral al surface of the vessel (1) is a thermoelectric conversion element (7) , to an outer surface of which is joined a cooling pipe (9). A cooling liquid is made to flow in the cooling pipe (9) . Fluid heating is effected by the heating lamp (5). Fluid cooling is effected by the cooling liquid and the thermoelectric conversion element (7) forcibly absorbs heat from the fluid and discharges heat to the cooling liquid to thereby cool the fluid rapidly and cool the fluid to a temperature lower than that of the cooling liquid.
    Type: Grant
    Filed: June 3, 1999
    Date of Patent: May 22, 2001
    Assignee: Komatsu, Ltd.
    Inventor: Kanichi Kadotani
  • Patent number: 6175687
    Abstract: A humidifier (5) includes upper and lower water tanks (7) and (8) supported by a support frame (6). In a space between the upper and lower water tank, a plurality of hollow yarn bodies (1) are arranged in communication with upper and lower water tanks. The hollow yarn body is constructed of a parens yarn (2) of the hollow and a thin metal wire (3) connected to the power source thereof and wound around the hollow yarn body.
    Type: Grant
    Filed: October 13, 1994
    Date of Patent: January 16, 2001
    Assignee: Kabushiki Kaisha Komatsu Seisakusho
    Inventors: Toshihide Imamura, Kanichi Kadotani
  • Patent number: 6157778
    Abstract: A fluid temperature control device is improved to be simpler in structure, less in fluid temperature non-uniformity, and able to heat a fluid having a small light absorbability. The fluid temperature control device has a cylindrical inner vessel (20), a cylindrical outer vessel (22) surrounding the inner vessel (20), and a heating lamp (25) inserted into the inner vessel (20). Metal fins (28a) and (28b) are provided on the inner and outer circumferential surfaces of the inner vessel (20). A working fluid is passed through the inner space (21) between the inner vessel (20) and the heating lamp (25), and a cooling liquid is passed through the outer space (23) between the inner vessel (20) and the outer vessel (22). Infrared rays from the heating lamp (25) heat the working fluid, and the cooling liquid cools the working fluid. This device is applicable to, for instance, temperature control of plural process chambers of semiconductor processing apparatus.
    Type: Grant
    Filed: January 3, 1997
    Date of Patent: December 5, 2000
    Assignee: Komatsu Ltd.
    Inventor: Kanichi Kadotani
  • Patent number: 6148145
    Abstract: A fluid temperature control device is improved to be simpler in structure, less in fluid temperature non-uniformity, and able to heat a fluid having a small light absorbability. The fluid temperature control device has a cylindrical inner vessel (20), a cylindrical outer vessel (22) surrounding the inner vessel (20), and a heating lamp (25) inserted into the inner vessel (20). Metal fins (28a) and (28b) are provided on the inner and outer circumferential surfaces of the inner vessel (20). A working fluid is passed through the inner space (21) between the inner vessel (20) and the heating lamp (25) and a cooling liquid is passed through the outer space (23) between the inner vessel (20) and the outer vessel (22). Infrared rays from the heating lamp (25) heat the working fluid, and the cooling liquid cools the working fluid. This device is applicable to, for instance, temperature control of plural process chambers of semiconductor processing apparatus.
    Type: Grant
    Filed: September 2, 1999
    Date of Patent: November 14, 2000
    Assignee: Komatsu Ltd.
    Inventor: Kanichi Kadotani
  • Patent number: 5921088
    Abstract: There is provided an air conditioning apparatus including an air duct and provided therein with a blower, a heater, a humidifier and an air cooling dehumidifier comprised of an air-fluid heat exchanger,characterized in that:the said air cooling dehumidifier is disposed at a site that is shifted transversely from an air blowing outlet of the said air duct.
    Type: Grant
    Filed: December 18, 1996
    Date of Patent: July 13, 1999
    Assignee: Komatsu Ltd.
    Inventors: Hisaakira Imaizumi, Kanichi Kadotani, Bunji Hayakashi, Tetsuo Syakushi, Toshihiko Matsumoto, Genichiro Watanabe, Toshihide Imamura
  • Patent number: 5701950
    Abstract: There is provided a water feed device for humidification, comprising: an outflow reservoir that is disposed above a humidifier for feeding water into the humidifier by way of a permeation and that is provided with an overflow dam for maintaining a level of the water in the outflow reservoir substantially constant; an inflow reservoir that is disposed upwards of the outflow reservoir and that is provided with a flow inlet; a partition plate that is disposed between the inflow reservoir and the outflow reservoir; and a plurality of drip feed members which are provided in the partition plate for allowing the water in the inflow reservoir to drop by gravity in a form of droplets into the outflow reservoir.
    Type: Grant
    Filed: December 17, 1996
    Date of Patent: December 30, 1997
    Assignee: Komatsu Ltd.
    Inventors: Toshihide Imamura, Kanichi Kadotani, Bunji Hayakashi, Hisaakira Imaizumi, Tetsuo Shakushi, Toshihiko Matsumoto, Genichiro Watanabe
  • Patent number: 5632333
    Abstract: A temperature and humidity adjusting apparatus has an air cooling and dehumidifying device, an air heater and a humidifier arranged in order. The air cooling and dehumidifying device includes thermoelements that use the Peltier effect. The humidifier includes hollow yarn bodies, each of which are formed by winding metal wire that serves as a heater on the outer periphery of a hollow yarn that is formed into hollow construction from heat resistant fiber. The humidifier also includes means for supplying water to each of the hollow yarn bodies and a power supply that supplies power to the metal wire.
    Type: Grant
    Filed: October 28, 1994
    Date of Patent: May 27, 1997
    Assignee: Kabushiki Kaisha Komatsu Seisakusho
    Inventors: Toshihide Imamura, Kanichi Kadotani, Katsuyoshi Ito
  • Patent number: 5609296
    Abstract: There is provided a water feed device for humidification, comprising: an outflow reservoir that is disposed above a humidifier for feeding water into the humidifier by way of a permeation and that is provided with an overflow dam for maintaining a level of the water in the outflow reservoir substantially constant; an inflow reservoir that is disposed upwards of the outflow reservoir and that is provided with a flow inlet; a partition plate that is disposed between the inflow reservoir and the outflow reservoir; and a plurality of drip feed members which are provided in the partition plate for allowing the water in the inflow reservoir to drop by gravity in a form of droplets into the outflow reservoir.
    Type: Grant
    Filed: January 22, 1996
    Date of Patent: March 11, 1997
    Assignee: Komatsu, Ltd.
    Inventors: Toshihide Imamura, Kanichi Kadotani, Bunji Hayakashi, Hisaakira Imaizumi, Tetsuo Shakushi, Toshihiko Matsumoto, Genichiro Watanabe
  • Patent number: 5559924
    Abstract: A fluid heater, capable of having a high energy density structure with an increased radiation receiving area, facilitating maintenance services and preventing intrusion of contamination substances, comprises a transparent internal pipe (11) which is open-ended at both ends and is positioned within an external pipe (12) of a fluid heating pipe unit (1). The fluid heating pipe unit (1) is provided with a fluid inlet (31) and a fluid outlet (32). The adjacent ends of the external pipe (12) and internal pipe (11) are connected to each other and sealed, and an electrical radiant heater (2) is arranged within the internal pipe (11) with a space (7) left therebetween. The ends of the electric heater (2) are removably supported by positioning members (91, 92). An inwardly directed radiation reflecting surface (12b) and/or a radiation absorbing material (12c) can be provided as part of the external tube (12).
    Type: Grant
    Filed: August 5, 1993
    Date of Patent: September 24, 1996
    Assignee: Kabushiki Kaisha Komatsu Seisakusho
    Inventors: Kanichi Kadotani, Kazuhiko Kubota, Mitsuru Ohaku
  • Patent number: 5510195
    Abstract: A porous hollow fiber membrane is dipped into either a high concentration alkali solution or a high concentration solution of chromic acid and sulfuric acid, etched and then dipped into a palladium ion solution. The membrane is then dipped into a solution containing reducing and complexing agents as well as metallic ions, and subjected to an electroless treatment. In this way, a porous hollow fiber membrane, to which a metallic layer is chemically bonded, can be obtained. The porous hollow fiber membrane is provided in which the bond strength between the membrane and the metallic layer and the amount of metal to be coated are increased. Because of a large amount of metal, it is possible to render the membrane sufficiently electrically conductive.
    Type: Grant
    Filed: February 27, 1992
    Date of Patent: April 23, 1996
    Assignees: Nikko Kogyo Kabushiki Kaisha, Komatsu Ltd.
    Inventors: Masakatsu Sano, Nobuo Katsuura, Osamu Igarashi, Atsushi Nakayama, Toshihide Imamura, Kanichi Kadotani
  • Patent number: 5351884
    Abstract: A cabin heating apparatus in accordance with the present invention is provided with a central duct (3) extended to one side of an operator's seat through a front-to-rear changeover damper (2) connected to an air conditioner unit (1), a rear duct (4) extended to the rear of the operator's seat through the front-to-rear changeover damper 2 and outlets (9) formed at an extreme end part of the rear duct (4). The cabin heating apparatus is further provided with a lower outlet (6) for supplying an air flow along a floor through an above-to-below changeover damper (5) connected to an extreme end part of the central duct (3), a front duct (7) rising from the above-to-below changeover damper 6 and a front outlet (8) provided at an extreme end part of the front duct (7). An appropriate air flow distribution ratio is set by these changeover dampers (2, 5).
    Type: Grant
    Filed: March 24, 1993
    Date of Patent: October 4, 1994
    Assignee: Kabushiki Kaisha Komatsu Seisakusho
    Inventors: Kanichi Kadotani, Teruyuki Matsuki, Hiroki Nakanishi
  • Patent number: 5074116
    Abstract: A partition type radiation local air conditioning unit is used in the field of air conditioning equipment and of office furniture. The unit is intended to make it possible to provide a better feeling of coolness by combining radiation cooling with convection cooling and to diminish the size of the air conditioning unit, which is in the form of a partition unit (1). This partition unit (1) includes a crossflow fan (4h) for blowing out breeze, an air inlet (4ha), and a breeze outlet (4hb), which are so arranged that the breeze (41) from the breeze outlet (4hb) is blown against the face of a person sitting in front of the unit. A baffle plate (9) can be provided in the air passage (7) between the crossflow fan (3) for heat-dissipating-air blowing and the radiation fins (2b) of thermoelectric elements (2a), the baffle plate (9) dividing this air passage (7) into a heat-dissipating-air passage (71) and a breeze air passage (72).
    Type: Grant
    Filed: February 5, 1990
    Date of Patent: December 24, 1991
    Assignee: Kabushiki Kaisha Komatsu Seisakusho
    Inventors: Kanichi Kadotani, Tetsuo Onishi, Takashi Ishihara